Optical MEMS

Industry

CPC
B81B2201/04

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/04Optical MEMS

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
MEMS and method of manufacturing the same
- Patent number 12,209,010
- Issue date Jan 28, 2025
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Shanshan Gu-Stoppel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hybrid driving for large aperture tilting mirrors
- Patent number 12,209,011
- Issue date Jan 28, 2025
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Qin Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Detector array detection with hadamard pattern scanning
- Patent number 12,204,051
- Issue date Jan 21, 2025
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Yue Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spatial light modulator (SLM) comprising integrated digital-to-anal...
- Patent number 12,195,328
- Issue date Jan 14, 2025
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 12,196,949
- Issue date Jan 14, 2025
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of MEMS device with automated dispensing of damping flu...
- Patent number 12,195,326
- Issue date Jan 14, 2025
- Mirrocle Technologies Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reduction of ringing and intermodulation distortion in a MEMS device
- Patent number 12,187,599
- Issue date Jan 7, 2025
- Texas Instruments Incorporated
- Adam Joseph Fruehling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor substrate, method for manufa...
- Patent number 12,187,607
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Nao Inoue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 12,189,114
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 12,187,598
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device and method for manufacturing same
- Patent number 12,180,063
- Issue date Dec 31, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Lidar projection apparatus
- Patent number 12,164,033
- Issue date Dec 10, 2024
- Artilux, Inc.
- Tim K. Shia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS optical device comprising a lens and an actuator for controlli...
- Patent number 12,164,101
- Issue date Dec 10, 2024
- poLight ASA
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuators having a physical gap filled with fluid
- Patent number 12,162,746
- Issue date Dec 10, 2024
- Mirrorcle Technologies, Inc.
- Veljko Milanovic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror unit and optical module
- Patent number 12,152,878
- Issue date Nov 26, 2024
- Hamamatsu Photonics K.K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure, micromechanical system and method of pro...
- Patent number 12,151,935
- Issue date Nov 26, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light deflector, deflecting device, distance measurement device, im...
- Patent number 12,140,698
- Issue date Nov 12, 2024
- Ricoh Company, Ltd.
- Goichi Akanuma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple layer electrode transducers
- Patent number 12,139,394
- Issue date Nov 12, 2024
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal control of MEMS mirrors to limit resonant frequency shift
- Patent number 12,140,752
- Issue date Nov 12, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and apparatus for micromirror designs with electrode contact
- Patent number 12,130,425
- Issue date Oct 29, 2024
- Texas Instruments Incorporated
- William Craig McDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator package architecture
- Patent number 12,132,420
- Issue date Oct 29, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for sensing a motion of a deflective surface
- Patent number 12,133,050
- Issue date Oct 29, 2024
- Infineon Technologies AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with improved dynamic mechanical performance through da...
- Patent number 12,116,268
- Issue date Oct 15, 2024
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMs phased-array for LiDAR applications
- Patent number 12,117,606
- Issue date Oct 15, 2024
- SCREEN Holdings Co., Ltd.
- Yuki Ashida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultra-thin planar lens-less camera
- Patent number 12,114,057
- Issue date Oct 8, 2024
- California Institute of Technology
- Seyed Ali Hajimiri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS mirror arrays with reduced crosstalk
- Patent number 12,103,843
- Issue date Oct 1, 2024
- CALIENT.AI INC.
- Scott A. Miller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Movable device, distance measurement device, image projection appar...
- Patent number 12,091,309
- Issue date Sep 17, 2024
- Ricoh Company, Ltd.
- Masayuki Fujishima
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 12,085,710
- Issue date Sep 10, 2024
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hermetically sealed MEMS mirror and method of manufacture
- Patent number 12,078,799
- Issue date Sep 3, 2024
- STMicroelectron S.r.l.
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS display device with a vertical hinge
- Patent number 12,077,427
- Issue date Sep 3, 2024
- IGNITE, Inc.
- Fusao Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Dual-Layer Micro-ribbon MEMS Light Modulator
- Publication number 20250026633
- Publication date Jan 23, 2025
- SILICON LIGHT MACHINES CORPORATION
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATORS HAVING A VISCOUS LIQUID OR GEL LOCATED BETWEEN A MOV...
- Publication number 20250011161
- Publication date Jan 9, 2025
- Mirrorcle Technologies, Inc.
- Veljko Milanovic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR SENSING A MOTION OF A DEFLECTIVE SURFACE
- Publication number 20250016509
- Publication date Jan 9, 2025
- INFINEON TECHNOLOGIES AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20250011157
- Publication date Jan 9, 2025
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank Senger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20250002334
- Publication date Jan 2, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK
- Publication number 20240417242
- Publication date Dec 19, 2024
- Calient.AI Inc.
- Scott A. MILLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL CIRCUIT SWITCH
- Publication number 20240409393
- Publication date Dec 12, 2024
- nEYE Systems, Inc.
- Xiaosheng ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AUTOSTEREOSCOPIC CAMPFIRE DISPLAY
- Publication number 20240402483
- Publication date Dec 5, 2024
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Thomas A. Seder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Enhanced microelectromechanical system mirror apparatus
- Publication number 20240369826
- Publication date Nov 7, 2024
- Teknologian Tutkimuskeskus VTT Oy
- Dmitry Morits
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND SCANNING DEVICE
- Publication number 20240343556
- Publication date Oct 17, 2024
- ROBERT BOSCH GmbH
- Helmut Grutzeck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIDAR SYSTEMS AND METHODS
- Publication number 20240337732
- Publication date Oct 10, 2024
- Innoviz Technologies Ltd.
- Amir DAY
- B60 - VEHICLES IN GENERAL
Information Patent Application
MEMS DIES EMBEDDED IN GLASS CORES
- Publication number 20240327201
- Publication date Oct 3, 2024
- Intel Corporation
- Numair Ahmed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOCKING MECHANISMS FOR PRECISION OFFSET/DEPLOYMENT OF MEMS STRUCTURES
- Publication number 20240327200
- Publication date Oct 3, 2024
- Omnitron Sensors
- Trent Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL REFLECTIVE DEVICE
- Publication number 20240317576
- Publication date Sep 26, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- Kensuke MIHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE
- Publication number 20240317577
- Publication date Sep 26, 2024
- Mitsubishi Electric Corporation
- Yusuke SHIRAYANAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR FOR COUPLING AND COMPENSATING LASER DEVICE TO PHOTONIC...
- Publication number 20240288679
- Publication date Aug 29, 2024
- Cisco Technology, Inc.
- Jaleel MOIDU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE
- Publication number 20240288681
- Publication date Aug 29, 2024
- STANLEY ELECTRIC CO., LTD
- Susumu NAKAMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION
- Publication number 20240288683
- Publication date Aug 29, 2024
- OQMENTED GMBH
- Ulrich HOFMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...
- Publication number 20240279051
- Publication date Aug 22, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...
- Publication number 20240270568
- Publication date Aug 15, 2024
- XI'AN CHISHINE OPTOELECTRONICS TECHNOLOGY CO., LTD
- Tao YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE AND METHOD FOR MANUFACTURING ACTUATOR DEVICE
- Publication number 20240246810
- Publication date Jul 25, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR SEMICONDUCTOR PACKAGES WITH WINDOW ASSEMB...
- Publication number 20240228265
- Publication date Jul 11, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Jane Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-MIRROR FRINGE FIELD ELECTRODE DESIGN WITH MISALIGNMENT COMPEN...
- Publication number 20240231078
- Publication date Jul 11, 2024
- TEXAS INSTRUMENTS INCORPORATED
- William McDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE
- Publication number 20240190695
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE
- Publication number 20240190699
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Sadaharu TAKIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE PRODUCTION METHOD
- Publication number 20240192483
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION OF MEMS DEVICE WITH AUTOMATED DISPENSING OF DAMPING FLU...
- Publication number 20240174510
- Publication date May 30, 2024
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH DAMPING FLUID VERTICALLY SANDWICHED BETWEEN MOVING...
- Publication number 20240174509
- Publication date May 30, 2024
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE WITH A STRESS DECOUPLING STRUCTURE
- Publication number 20240166495
- Publication date May 23, 2024
- INFINEON TECHNOLOGIES AG
- Mohammadamir Ghaderi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...
- Publication number 20240158223
- Publication date May 16, 2024
- Government of the United States, as represented by the Secretary of the Air F...
- John PK Walton
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Optical MEMS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS and method of manufacturing the same

Hybrid driving for large aperture tilting mirrors

Detector array detection with hadamard pattern scanning

Spatial light modulator (SLM) comprising integrated digital-to-anal...

Optical device

Fabrication of MEMS device with automated dispensing of damping flu...

Reduction of ringing and intermodulation distortion in a MEMS device

Method for manufacturing semiconductor substrate, method for manufa...

Optical device production method

Actuator device

Optical device and method for manufacturing same

Lidar projection apparatus

MEMS optical device comprising a lens and an actuator for controlli...

MEMS actuators having a physical gap filled with fluid

Mirror unit and optical module

Micromechanical structure, micromechanical system and method of pro...

Light deflector, deflecting device, distance measurement device, im...

Multiple layer electrode transducers

Thermal control of MEMS mirrors to limit resonant frequency shift

Systems and apparatus for micromirror designs with electrode contact

MEMS actuator package architecture

Device for sensing a motion of a deflective surface

MEMS device with improved dynamic mechanical performance through da...

MEMs phased-array for LiDAR applications

Ultra-thin planar lens-less camera

MEMS mirror arrays with reduced crosstalk

Movable device, distance measurement device, image projection appar...

Actuator device

Hermetically sealed MEMS mirror and method of manufacture

MEMS display device with a vertical hinge

Patents Applicationslast 30 patents

Dual-Layer Micro-ribbon MEMS Light Modulator

MEMS ACTUATORS HAVING A VISCOUS LIQUID OR GEL LOCATED BETWEEN A MOV...

DEVICE FOR SENSING A MOTION OF A DEFLECTIVE SURFACE

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

FORMING A PASSIVATION COATING FOR MEMS DEVICES

METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK

MEMS OPTICAL CIRCUIT SWITCH

AUTOSTEREOSCOPIC CAMPFIRE DISPLAY

Enhanced microelectromechanical system mirror apparatus

MICROMECHANICAL COMPONENT AND SCANNING DEVICE

LIDAR SYSTEMS AND METHODS

MEMS DIES EMBEDDED IN GLASS CORES

LOCKING MECHANISMS FOR PRECISION OFFSET/DEPLOYMENT OF MEMS STRUCTURES

OPTICAL REFLECTIVE DEVICE

MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE

MEMS MIRROR FOR COUPLING AND COMPENSATING LASER DEVICE TO PHOTONIC...

MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE

MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION

DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...

ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...

ACTUATOR DEVICE AND METHOD FOR MANUFACTURING ACTUATOR DEVICE

METHODS AND APPARATUS FOR SEMICONDUCTOR PACKAGES WITH WINDOW ASSEMB...

MICRO-MIRROR FRINGE FIELD ELECTRODE DESIGN WITH MISALIGNMENT COMPEN...

ACTUATOR DEVICE

ACTUATOR DEVICE

OPTICAL DEVICE PRODUCTION METHOD

FABRICATION OF MEMS DEVICE WITH AUTOMATED DISPENSING OF DAMPING FLU...

MEMS DEVICE WITH DAMPING FLUID VERTICALLY SANDWICHED BETWEEN MOVING...

DEVICE WITH A STRESS DECOUPLING STRUCTURE

Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...