Optical MEMS

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B81B2201/04

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/04Optical MEMS

Industries

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Patents Grantslast 30 patents

Information Patent Grant
LIDAR module and methods thereof
- Patent number 12,313,785
- Issue date May 27, 2025
- Intel Corporation
- Yuval P. Shapira
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 12,304,806
- Issue date May 20, 2025
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Scanning mirror and manufacturing method for scanning mirror
- Patent number 12,298,494
- Issue date May 13, 2025
- TOHOKU UNIVERSITY
- Kazuhiro Hane
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 12,298,132
- Issue date May 13, 2025
- Hamamatsu Photonics K.K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Batch fabrication of MEMS scanning mirror
- Patent number 12,298,492
- Issue date May 13, 2025
- The Texas A&M University System
- Jun Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS display device with an etch-stop-layer
- Patent number 12,298,493
- Issue date May 13, 2025
- IGNITE, Inc.
- Fusao Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Laser systems and optical devices for laser beam shaping
- Patent number 12,292,566
- Issue date May 6, 2025
- IDEX Health & Science LLC
- David E. Hargis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical mirror device with compensation of planarity...
- Patent number 12,292,567
- Issue date May 6, 2025
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stiffening structures for micro-electro-mechanical system (MEMS) mi...
- Patent number 12,270,989
- Issue date Apr 8, 2025
- Meta Platforms Technologies, LLC
- Kenneth Alexander Diest
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror arrays
- Patent number 12,259,546
- Issue date Mar 25, 2025
- ASML Netherlands B.V.
- Alexandre Halbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Circuits and methods to calibrate mirror displacement
- Patent number 12,253,356
- Issue date Mar 18, 2025
- Texas Instruments Incorporated
- Robert Floyd Payne
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS mirror system with slow light beam deflection using fast reson...
- Patent number 12,235,439
- Issue date Feb 25, 2025
- Infineon Technologies AG
- Boris Kirillov
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Movable apparatus
- Patent number 12,235,440
- Issue date Feb 25, 2025
- Ricoh Company, Ltd.
- Mizuki Shinkawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device having a structure tiltable by piezoe...
- Patent number 12,222,492
- Issue date Feb 11, 2025
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device and method for manufacturing actuator device
- Patent number 12,221,338
- Issue date Feb 11, 2025
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with damping fluid vertically sandwiched between moving...
- Patent number 12,215,020
- Issue date Feb 4, 2025
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method of manufacturing the same
- Patent number 12,209,010
- Issue date Jan 28, 2025
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Shanshan Gu-Stoppel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hybrid driving for large aperture tilting mirrors
- Patent number 12,209,011
- Issue date Jan 28, 2025
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Qin Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Detector array detection with hadamard pattern scanning
- Patent number 12,204,051
- Issue date Jan 21, 2025
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Yue Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spatial light modulator (SLM) comprising integrated digital-to-anal...
- Patent number 12,195,328
- Issue date Jan 14, 2025
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 12,196,949
- Issue date Jan 14, 2025
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of MEMS device with automated dispensing of damping flu...
- Patent number 12,195,326
- Issue date Jan 14, 2025
- Mirrocle Technologies Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reduction of ringing and intermodulation distortion in a MEMS device
- Patent number 12,187,599
- Issue date Jan 7, 2025
- Texas Instruments Incorporated
- Adam Joseph Fruehling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor substrate, method for manufa...
- Patent number 12,187,607
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Nao Inoue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 12,187,598
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 12,189,114
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device and method for manufacturing same
- Patent number 12,180,063
- Issue date Dec 31, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Lidar projection apparatus
- Patent number 12,164,033
- Issue date Dec 10, 2024
- Artilux, Inc.
- Tim K. Shia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS optical device comprising a lens and an actuator for controlli...
- Patent number 12,164,101
- Issue date Dec 10, 2024
- poLight ASA
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuators having a physical gap filled with fluid
- Patent number 12,162,746
- Issue date Dec 10, 2024
- Mirrorcle Technologies, Inc.
- Veljko Milanovic
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS MICROMIRROR FOR ALLEVIATING OPTICAL PATH BLOCKAGE, AND PREPARA...
- Publication number 20250180889
- Publication date Jun 5, 2025
- Xi'an Zhisensor Technologies Co.,Ltd.
- Xiumin SONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCOMMODATING VARIOUS LASER DIODE EMITTER AND IMAGING SPOT SIZES FO...
- Publication number 20250167510
- Publication date May 22, 2025
- Prysm Systems, Inc.
- Roger A. HAJJAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR SYSTEM WITH SLOW LIGHT BEAM DEFLECTION USING FAST RESON...
- Publication number 20250147301
- Publication date May 8, 2025
- INFINEON TECHNOLOGIES AG
- Boris KIRILLOV
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE
- Publication number 20250091857
- Publication date Mar 20, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Adam Joseph Fruehling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS
- Publication number 20250091858
- Publication date Mar 20, 2025
- INFINEON TECHNOLOGIES AG
- Theresa LUTZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MIRROR UNIT AND OPTICAL MODULE
- Publication number 20250044074
- Publication date Feb 6, 2025
- HAMAMATSU PHOTONICS K. K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED MEMS OPTICAL SWITCH WITH PIEZOELECTRIC MEMS ACTUATORS
- Publication number 20250042720
- Publication date Feb 6, 2025
- nEYE Systems, Inc.
- Tae Joon SEOK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual-Layer Micro-ribbon MEMS Light Modulator
- Publication number 20250026633
- Publication date Jan 23, 2025
- SILICON LIGHT MACHINES CORPORATION
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATORS HAVING A VISCOUS LIQUID OR GEL LOCATED BETWEEN A MOV...
- Publication number 20250011161
- Publication date Jan 9, 2025
- Mirrorcle Technologies, Inc.
- Veljko Milanovic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20250011157
- Publication date Jan 9, 2025
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank Senger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR SENSING A MOTION OF A DEFLECTIVE SURFACE
- Publication number 20250016509
- Publication date Jan 9, 2025
- INFINEON TECHNOLOGIES AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20250002334
- Publication date Jan 2, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK
- Publication number 20240417242
- Publication date Dec 19, 2024
- Calient.AI Inc.
- Scott A. MILLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL CIRCUIT SWITCH
- Publication number 20240409393
- Publication date Dec 12, 2024
- nEYE Systems, Inc.
- Xiaosheng ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AUTOSTEREOSCOPIC CAMPFIRE DISPLAY
- Publication number 20240402483
- Publication date Dec 5, 2024
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Thomas A. Seder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Enhanced microelectromechanical system mirror apparatus
- Publication number 20240369826
- Publication date Nov 7, 2024
- Teknologian Tutkimuskeskus VTT Oy
- Dmitry Morits
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND SCANNING DEVICE
- Publication number 20240343556
- Publication date Oct 17, 2024
- ROBERT BOSCH GmbH
- Helmut Grutzeck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIDAR SYSTEMS AND METHODS
- Publication number 20240337732
- Publication date Oct 10, 2024
- Innoviz Technologies Ltd.
- Amir DAY
- B60 - VEHICLES IN GENERAL
Information Patent Application
MEMS DIES EMBEDDED IN GLASS CORES
- Publication number 20240327201
- Publication date Oct 3, 2024
- Intel Corporation
- Numair Ahmed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOCKING MECHANISMS FOR PRECISION OFFSET/DEPLOYMENT OF MEMS STRUCTURES
- Publication number 20240327200
- Publication date Oct 3, 2024
- Omnitron Sensors
- Trent Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL REFLECTIVE DEVICE
- Publication number 20240317576
- Publication date Sep 26, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- Kensuke MIHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE
- Publication number 20240317577
- Publication date Sep 26, 2024
- Mitsubishi Electric Corporation
- Yusuke SHIRAYANAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR FOR COUPLING AND COMPENSATING LASER DEVICE TO PHOTONIC...
- Publication number 20240288679
- Publication date Aug 29, 2024
- Cisco Technology, Inc.
- Jaleel MOIDU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE
- Publication number 20240288681
- Publication date Aug 29, 2024
- STANLEY ELECTRIC CO., LTD
- Susumu NAKAMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION
- Publication number 20240288683
- Publication date Aug 29, 2024
- OQMENTED GMBH
- Ulrich HOFMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...
- Publication number 20240279051
- Publication date Aug 22, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...
- Publication number 20240270568
- Publication date Aug 15, 2024
- XI'AN CHISHINE OPTOELECTRONICS TECHNOLOGY CO., LTD
- Tao YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE AND METHOD FOR MANUFACTURING ACTUATOR DEVICE
- Publication number 20240246810
- Publication date Jul 25, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR SEMICONDUCTOR PACKAGES WITH WINDOW ASSEMB...
- Publication number 20240228265
- Publication date Jul 11, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Jane Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-MIRROR FRINGE FIELD ELECTRODE DESIGN WITH MISALIGNMENT COMPEN...
- Publication number 20240231078
- Publication date Jul 11, 2024
- TEXAS INSTRUMENTS INCORPORATED
- William McDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Optical MEMS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

LIDAR module and methods thereof

Actuator device

Scanning mirror and manufacturing method for scanning mirror

Optical device

Batch fabrication of MEMS scanning mirror

MEMS display device with an etch-stop-layer

Laser systems and optical devices for laser beam shaping

Microelectromechanical mirror device with compensation of planarity...

Stiffening structures for micro-electro-mechanical system (MEMS) mi...

Micromirror arrays

Circuits and methods to calibrate mirror displacement

MEMS mirror system with slow light beam deflection using fast reson...

Movable apparatus

Microelectromechanical device having a structure tiltable by piezoe...

Actuator device and method for manufacturing actuator device

MEMS device with damping fluid vertically sandwiched between moving...

MEMS and method of manufacturing the same

Hybrid driving for large aperture tilting mirrors

Detector array detection with hadamard pattern scanning

Spatial light modulator (SLM) comprising integrated digital-to-anal...

Optical device

Fabrication of MEMS device with automated dispensing of damping flu...

Reduction of ringing and intermodulation distortion in a MEMS device

Method for manufacturing semiconductor substrate, method for manufa...

Actuator device

Optical device production method

Optical device and method for manufacturing same

Lidar projection apparatus

MEMS optical device comprising a lens and an actuator for controlli...

MEMS actuators having a physical gap filled with fluid

Patents Applicationslast 30 patents

MEMS MICROMIRROR FOR ALLEVIATING OPTICAL PATH BLOCKAGE, AND PREPARA...

ACCOMMODATING VARIOUS LASER DIODE EMITTER AND IMAGING SPOT SIZES FO...

MEMS MIRROR SYSTEM WITH SLOW LIGHT BEAM DEFLECTION USING FAST RESON...

REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE

SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS

MIRROR UNIT AND OPTICAL MODULE

INTEGRATED MEMS OPTICAL SWITCH WITH PIEZOELECTRIC MEMS ACTUATORS

Dual-Layer Micro-ribbon MEMS Light Modulator

MEMS ACTUATORS HAVING A VISCOUS LIQUID OR GEL LOCATED BETWEEN A MOV...

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

DEVICE FOR SENSING A MOTION OF A DEFLECTIVE SURFACE

FORMING A PASSIVATION COATING FOR MEMS DEVICES

METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK

MEMS OPTICAL CIRCUIT SWITCH

AUTOSTEREOSCOPIC CAMPFIRE DISPLAY

Enhanced microelectromechanical system mirror apparatus

MICROMECHANICAL COMPONENT AND SCANNING DEVICE

LIDAR SYSTEMS AND METHODS

MEMS DIES EMBEDDED IN GLASS CORES

LOCKING MECHANISMS FOR PRECISION OFFSET/DEPLOYMENT OF MEMS STRUCTURES

OPTICAL REFLECTIVE DEVICE

MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE

MEMS MIRROR FOR COUPLING AND COMPENSATING LASER DEVICE TO PHOTONIC...

MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE

MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION

DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...

ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...

ACTUATOR DEVICE AND METHOD FOR MANUFACTURING ACTUATOR DEVICE

METHODS AND APPARATUS FOR SEMICONDUCTOR PACKAGES WITH WINDOW ASSEMB...

MICRO-MIRROR FRINGE FIELD ELECTRODE DESIGN WITH MISALIGNMENT COMPEN...