Optical MEMS

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B81B2201/04

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/04Optical MEMS

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Lidar projection apparatus
- Patent number 12,164,033
- Issue date Dec 10, 2024
- Artilux, Inc.
- Tim K. Shia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS optical device comprising a lens and an actuator for controlli...
- Patent number 12,164,101
- Issue date Dec 10, 2024
- poLight ASA
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuators having a physical gap filled with fluid
- Patent number 12,162,746
- Issue date Dec 10, 2024
- Mirrorcle Technologies, Inc.
- Veljko Milanovic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror unit and optical module
- Patent number 12,152,878
- Issue date Nov 26, 2024
- Hamamatsu Photonics K.K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure, micromechanical system and method of pro...
- Patent number 12,151,935
- Issue date Nov 26, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light deflector, deflecting device, distance measurement device, im...
- Patent number 12,140,698
- Issue date Nov 12, 2024
- Ricoh Company, Ltd.
- Goichi Akanuma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple layer electrode transducers
- Patent number 12,139,394
- Issue date Nov 12, 2024
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal control of MEMS mirrors to limit resonant frequency shift
- Patent number 12,140,752
- Issue date Nov 12, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and apparatus for micromirror designs with electrode contact
- Patent number 12,130,425
- Issue date Oct 29, 2024
- Texas Instruments Incorporated
- William Craig McDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator package architecture
- Patent number 12,132,420
- Issue date Oct 29, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for sensing a motion of a deflective surface
- Patent number 12,133,050
- Issue date Oct 29, 2024
- Infineon Technologies AG
- Darragh Francis Corrigan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with improved dynamic mechanical performance through da...
- Patent number 12,116,268
- Issue date Oct 15, 2024
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMs phased-array for LiDAR applications
- Patent number 12,117,606
- Issue date Oct 15, 2024
- SCREEN Holdings Co., Ltd.
- Yuki Ashida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultra-thin planar lens-less camera
- Patent number 12,114,057
- Issue date Oct 8, 2024
- California Institute of Technology
- Seyed Ali Hajimiri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS mirror arrays with reduced crosstalk
- Patent number 12,103,843
- Issue date Oct 1, 2024
- CALIENT.AI INC.
- Scott A. Miller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Movable device, distance measurement device, image projection appar...
- Patent number 12,091,309
- Issue date Sep 17, 2024
- Ricoh Company, Ltd.
- Masayuki Fujishima
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 12,085,710
- Issue date Sep 10, 2024
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hermetically sealed MEMS mirror and method of manufacture
- Patent number 12,078,799
- Issue date Sep 3, 2024
- STMicroelectron S.r.l.
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS display device with a vertical hinge
- Patent number 12,077,427
- Issue date Sep 3, 2024
- IGNITE, Inc.
- Fusao Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive angle sensing of electrostatic MEMS mirrors
- Patent number 12,072,485
- Issue date Aug 27, 2024
- Google LLC
- Sangtak Park
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and method of providing the same
- Patent number 12,071,338
- Issue date Aug 27, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure and method of producing a microstructure
- Patent number 12,071,341
- Issue date Aug 27, 2024
- ams International AG
- Peter Heeb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Active matrix programmable mirror
- Patent number 12,061,331
- Issue date Aug 13, 2024
- OBSIDIAN SENSORS, INC.
- John Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical scanning system using micro-electro-mechanical system (mems...
- Patent number 12,061,334
- Issue date Aug 13, 2024
- Raytheon Company
- David J. Knapp
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS comprising a movable structural element, and MEMS array
- Patent number 12,054,384
- Issue date Aug 6, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically driven comb structure of MEMS, micro-mirror using...
- Patent number 12,054,387
- Issue date Aug 6, 2024
- Tao Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for controlling a drive apparatus of a micro-oscillation mir...
- Patent number 12,055,705
- Issue date Aug 6, 2024
- Valeo Schalter und Sensoren GmbH
- Jochen Schenk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device with a shock-protected tiltable str...
- Patent number 12,043,540
- Issue date Jul 23, 2024
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Image projection device
- Patent number 12,038,680
- Issue date Jul 16, 2024
- Sony Group Corporation
- Yusuke Ogawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low-height optoelectronic modules and packages
- Patent number 12,037,238
- Issue date Jul 16, 2024
- ams Sensors Singapore Pte. Ltd.
- Javier Miguel Sànchez
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK
- Publication number 20240417242
- Publication date Dec 19, 2024
- Calient.AI Inc.
- Scott A. MILLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL CIRCUIT SWITCH
- Publication number 20240409393
- Publication date Dec 12, 2024
- nEYE Systems, Inc.
- Xiaosheng ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AUTOSTEREOSCOPIC CAMPFIRE DISPLAY
- Publication number 20240402483
- Publication date Dec 5, 2024
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Thomas A. Seder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Enhanced microelectromechanical system mirror apparatus
- Publication number 20240369826
- Publication date Nov 7, 2024
- Teknologian Tutkimuskeskus VTT Oy
- Dmitry Morits
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND SCANNING DEVICE
- Publication number 20240343556
- Publication date Oct 17, 2024
- ROBERT BOSCH GmbH
- Helmut Grutzeck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIDAR SYSTEMS AND METHODS
- Publication number 20240337732
- Publication date Oct 10, 2024
- Innoviz Technologies Ltd.
- Amir DAY
- B60 - VEHICLES IN GENERAL
Information Patent Application
MEMS DIES EMBEDDED IN GLASS CORES
- Publication number 20240327201
- Publication date Oct 3, 2024
- Intel Corporation
- Numair Ahmed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOCKING MECHANISMS FOR PRECISION OFFSET/DEPLOYMENT OF MEMS STRUCTURES
- Publication number 20240327200
- Publication date Oct 3, 2024
- Omnitron Sensors
- Trent Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL REFLECTIVE DEVICE
- Publication number 20240317576
- Publication date Sep 26, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- Kensuke MIHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE
- Publication number 20240317577
- Publication date Sep 26, 2024
- Mitsubishi Electric Corporation
- Yusuke SHIRAYANAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR FOR COUPLING AND COMPENSATING LASER DEVICE TO PHOTONIC...
- Publication number 20240288679
- Publication date Aug 29, 2024
- Cisco Technology, Inc.
- Jaleel MOIDU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE
- Publication number 20240288681
- Publication date Aug 29, 2024
- STANLEY ELECTRIC CO., LTD
- Susumu NAKAMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION
- Publication number 20240288683
- Publication date Aug 29, 2024
- OQMENTED GMBH
- Ulrich HOFMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...
- Publication number 20240279051
- Publication date Aug 22, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...
- Publication number 20240270568
- Publication date Aug 15, 2024
- XI'AN CHISHINE OPTOELECTRONICS TECHNOLOGY CO., LTD
- Tao YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE AND METHOD FOR MANUFACTURING ACTUATOR DEVICE
- Publication number 20240246810
- Publication date Jul 25, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR SEMICONDUCTOR PACKAGES WITH WINDOW ASSEMB...
- Publication number 20240228265
- Publication date Jul 11, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Jane Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-MIRROR FRINGE FIELD ELECTRODE DESIGN WITH MISALIGNMENT COMPEN...
- Publication number 20240231078
- Publication date Jul 11, 2024
- TEXAS INSTRUMENTS INCORPORATED
- William McDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE
- Publication number 20240190695
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE
- Publication number 20240190699
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Sadaharu TAKIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE PRODUCTION METHOD
- Publication number 20240192483
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION OF MEMS DEVICE WITH AUTOMATED DISPENSING OF DAMPING FLU...
- Publication number 20240174510
- Publication date May 30, 2024
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH DAMPING FLUID VERTICALLY SANDWICHED BETWEEN MOVING...
- Publication number 20240174509
- Publication date May 30, 2024
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE WITH A STRESS DECOUPLING STRUCTURE
- Publication number 20240166495
- Publication date May 23, 2024
- INFINEON TECHNOLOGIES AG
- Mohammadamir Ghaderi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...
- Publication number 20240158223
- Publication date May 16, 2024
- Government of the United States, as represented by the Secretary of the Air F...
- John PK Walton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR DEVICE AND DISTANCE MEASURING APPARATUS
- Publication number 20240142770
- Publication date May 2, 2024
- Mitsubishi Electric Corporation
- Yoshiaki HIRATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE
- Publication number 20240126070
- Publication date Apr 18, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTO-MECHANICAL STRUCTURE AND ASSOCIATED MANUFACTURING METHODS
- Publication number 20240118533
- Publication date Apr 11, 2024
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Thomas FURCATTE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MIRROR UNIT AND OPTICAL MODULE
- Publication number 20240110779
- Publication date Apr 4, 2024
- HAMAMATSU PHOTONICS K. K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS
- Publication number 20240111148
- Publication date Apr 4, 2024
- Preciseley Microtechnology Corp.
- Tiansheng ZHOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Optical MEMS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Lidar projection apparatus

MEMS optical device comprising a lens and an actuator for controlli...

MEMS actuators having a physical gap filled with fluid

Mirror unit and optical module

Micromechanical structure, micromechanical system and method of pro...

Light deflector, deflecting device, distance measurement device, im...

Multiple layer electrode transducers

Thermal control of MEMS mirrors to limit resonant frequency shift

Systems and apparatus for micromirror designs with electrode contact

MEMS actuator package architecture

Device for sensing a motion of a deflective surface

MEMS device with improved dynamic mechanical performance through da...

MEMs phased-array for LiDAR applications

Ultra-thin planar lens-less camera

MEMS mirror arrays with reduced crosstalk

Movable device, distance measurement device, image projection appar...

Actuator device

Hermetically sealed MEMS mirror and method of manufacture

MEMS display device with a vertical hinge

Capacitive angle sensing of electrostatic MEMS mirrors

Micromechanical structure and method of providing the same

Microstructure and method of producing a microstructure

Active matrix programmable mirror

Optical scanning system using micro-electro-mechanical system (mems...

MEMS comprising a movable structural element, and MEMS array

Electrostatically driven comb structure of MEMS, micro-mirror using...

Method for controlling a drive apparatus of a micro-oscillation mir...

Micro-electro-mechanical device with a shock-protected tiltable str...

Image projection device

Low-height optoelectronic modules and packages

Patents Applicationslast 30 patents

METHODS OF MANUFACTURE OF MEMS MIRROR ARRAYS WITH REDUCED CROSSTALK

MEMS OPTICAL CIRCUIT SWITCH

AUTOSTEREOSCOPIC CAMPFIRE DISPLAY

Enhanced microelectromechanical system mirror apparatus

MICROMECHANICAL COMPONENT AND SCANNING DEVICE

LIDAR SYSTEMS AND METHODS

MEMS DIES EMBEDDED IN GLASS CORES

LOCKING MECHANISMS FOR PRECISION OFFSET/DEPLOYMENT OF MEMS STRUCTURES

OPTICAL REFLECTIVE DEVICE

MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE

MEMS MIRROR FOR COUPLING AND COMPENSATING LASER DEVICE TO PHOTONIC...

MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE

MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION

DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...

ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...

ACTUATOR DEVICE AND METHOD FOR MANUFACTURING ACTUATOR DEVICE

METHODS AND APPARATUS FOR SEMICONDUCTOR PACKAGES WITH WINDOW ASSEMB...

MICRO-MIRROR FRINGE FIELD ELECTRODE DESIGN WITH MISALIGNMENT COMPEN...

ACTUATOR DEVICE

ACTUATOR DEVICE

OPTICAL DEVICE PRODUCTION METHOD

FABRICATION OF MEMS DEVICE WITH AUTOMATED DISPENSING OF DAMPING FLU...

MEMS DEVICE WITH DAMPING FLUID VERTICALLY SANDWICHED BETWEEN MOVING...

DEVICE WITH A STRESS DECOUPLING STRUCTURE

Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...

MEMS MIRROR DEVICE AND DISTANCE MEASURING APPARATUS

OPTICAL DEVICE

OPTO-MECHANICAL STRUCTURE AND ASSOCIATED MANUFACTURING METHODS

MIRROR UNIT AND OPTICAL MODULE

MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS