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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2207/00
Micro-structural systems or auxiliary parts thereof
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B81B2207/09
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Patents Grants
last 30 patents
Information
Patent Grant
Resonance device with substrate having oxide film containing throug...
Patent number
12,365,583
Issue date
Jul 22, 2025
Murata Manufacturing Co., Ltd.
Masakazu Fukumitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and apparatus for electronic device packaging
Patent number
12,365,584
Issue date
Jul 22, 2025
Texas Instruments Incorporated
Jane Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS resonator integrated cicruit fabrication
Patent number
12,365,582
Issue date
Jul 22, 2025
SiTime Corporation
Pavan Gupta
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device mounted on a system board
Patent number
12,360,357
Issue date
Jul 15, 2025
Texas Instruments Incorporated
Paul Lawrence Rancuret
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor package with metal column mold barrier
Patent number
12,319,563
Issue date
Jun 3, 2025
Texas Instruments Incorporated
Rafael Jose Lizares Guevara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and method of forming microelectromechanical s...
Patent number
12,319,564
Issue date
Jun 3, 2025
STATS ChipPAC Pte. Ltd.
Yaojian Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pressure sensor
Patent number
12,304,805
Issue date
May 20, 2025
United Automotive Electronic Systems Co., Ltd.
Xibin Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated ultrasonic transducers
Patent number
12,295,790
Issue date
May 13, 2025
EXO IMAGING, INC.
Janusz Bryzek
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Substrate and microphone unit
Patent number
12,258,262
Issue date
Mar 25, 2025
Hosiden Corporation
Shingo Okano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Resonance device and resonance device manufacturing method
Patent number
12,252,393
Issue date
Mar 18, 2025
Murata Manufacturing Co., Ltd.
Masakazu Fukumitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and method for forming the same
Patent number
12,227,410
Issue date
Feb 18, 2025
Taiwan Semiconductor Manufacturing Company Ltd.
Po Chen Yeh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing package structure
Patent number
12,215,018
Issue date
Feb 4, 2025
Winbond Electronics Corp.
Jin-Neng Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical microphone with reduced overall size
Patent number
12,215,022
Issue date
Feb 4, 2025
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Samer Dagher
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level package for device
Patent number
12,209,012
Issue date
Jan 28, 2025
Teknologian tutkimuskeskus VTT Oy
Jae-Wung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Cover member for electronic device, package, electronic device, and...
Patent number
12,187,602
Issue date
Jan 7, 2025
Kyocera Corporation
Sho Yamasaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Undercut-free patterned aluminum nitride structure and methods for...
Patent number
12,134,824
Issue date
Nov 5, 2024
Taiwan Semiconductor Manufacturing Company Limited
Yuan-Chih Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectronics package with vertically stacked MEMS device and co...
Patent number
12,129,168
Issue date
Oct 29, 2024
Qorvo US, Inc.
Julio C. Costa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor devices with gas-permeable cover and associated production m...
Patent number
12,122,667
Issue date
Oct 22, 2024
Infineon Technologies AG
Rainer Markus Schaller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectronics H-frame device
Patent number
12,122,666
Issue date
Oct 22, 2024
Northrop Grumman Systems Corporation
Dah-Weih Duan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device for supporting MEMS and/or ASIC components
Patent number
12,116,270
Issue date
Oct 15, 2024
TE CONNECTIVITY SOLUTIONS GmbH
Ismael Brunner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor and package assembly thereof
Patent number
12,091,312
Issue date
Sep 17, 2024
Robert Bosch GmbH
Ken Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Silicon MEMS gyroscopes with upper and lower sense plates
Patent number
12,092,460
Issue date
Sep 17, 2024
The Charles Stark Draper Laboratory, Inc.
Eugene H. Cook
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level packaging of MEMS
Patent number
12,091,311
Issue date
Sep 17, 2024
Texas Instruments Incorporated
Stuart M. Jacobsen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric MEMS microphone
Patent number
12,058,939
Issue date
Aug 6, 2024
The Regents of the University of Michigan
Karl Grosh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone and MEMS accelerometer on a single substrate
Patent number
12,054,383
Issue date
Aug 6, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing monolithic integration of piezoelectric microm...
Patent number
12,037,239
Issue date
Jul 16, 2024
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a sensor device and moulding support structure
Patent number
12,024,418
Issue date
Jul 2, 2024
Melexis Technologies NV
Appolonius Jacobus Van Der Wiel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensing device and method for manufacturing sensing device
Patent number
12,024,420
Issue date
Jul 2, 2024
Mitsumi Electric Co., Ltd.
Etsuji Hayakawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS resonator system
Patent number
11,987,495
Issue date
May 21, 2024
SiTime Corporation
Pavan Gupta
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS package with shock and vibration protection
Patent number
11,975,961
Issue date
May 7, 2024
BEIJING VOYAGER TECHNOLOGY CO., LTD.
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICROPHONE STRUCTURE, PACKAGING STRUCTURE, AND ELECTRONIC APPARATUS
Publication number
20250230035
Publication date
Jul 17, 2025
MEMSENSING MICROSYSTEMS (SUZHOU, CHINA) CO., LTD.
Hao LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL COMPONENT WITH A METAL STANDOFF
Publication number
20250178887
Publication date
Jun 5, 2025
Murata Manufacturing Co., Ltd.
Marcus RINKIÖ
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING A COMPOSITE CAP ELEMENT, AND COMPOSITE CAP ELE...
Publication number
20250178888
Publication date
Jun 5, 2025
SCHOTT AG
Jonas DIMROTH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
Publication number
20250145454
Publication date
May 8, 2025
Taiwan Semiconductor Manufacturing company Ltd.
PO CHEN YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SWITCH WITH PLANAR THROUGH GLASS VIAS (TGV)
Publication number
20250136436
Publication date
May 1, 2025
Menlo Microsystems, Inc.
Aric Shorey
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PACKAGING ENABLING VERTICAL DISPLACEMENT OF SENSOR AND ACTUATO...
Publication number
20250128936
Publication date
Apr 24, 2025
Connaught Electronics Ltd.
Maurice DORE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIFFERENTIAL DIRECTIONAL ACOUSTIC SENSOR DEVICE
Publication number
20250122072
Publication date
Apr 17, 2025
Soundskrit Inc.
Benjamin Evans
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL COMPONENT WITH GAP-CONTROL STRUCTURE AND A M...
Publication number
20250109015
Publication date
Apr 3, 2025
Murata Manufacturing Co., Ltd.
Jeanette LINDROOS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR PACKAGE AND SENSING MODULE THEREOF
Publication number
20250109972
Publication date
Apr 3, 2025
LITE-ON SINGAPORE PTE. LTD.
GUANG-LI SONG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
3D Heterogeneously Integrated Power Electronic Building Blocks
Publication number
20250033954
Publication date
Jan 30, 2025
TELEDYNE SCIENTIFIC & IMAGING, LLC
Vivek Mehrotra
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Dual-Layer Micro-ribbon MEMS Light Modulator
Publication number
20250026633
Publication date
Jan 23, 2025
SILICON LIGHT MACHINES CORPORATION
Olav Solgaard
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STACKED-DIE MEMS RESONATOR
Publication number
20250019229
Publication date
Jan 16, 2025
SiTime Corporation
Pavan Gupta
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR DEVICE
Publication number
20250011164
Publication date
Jan 9, 2025
INFINEON TECHNOLOGIES AG
Klaus ELIAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR FABRICATING A MICROELECTRONICS H-FRAME DEVICE
Publication number
20250011160
Publication date
Jan 9, 2025
Northrop Grumman Systems Corporation
Dah-Weih Duan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
Publication number
20250011165
Publication date
Jan 9, 2025
Vanguard International Semiconductor Corporation
JIA JIE XIA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Ovenized MEMS
Publication number
20250007455
Publication date
Jan 2, 2025
SiTime Corporation
Carl Arft
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTRONICS PACKAGE WITH VERTICALLY STACKED MEMS DEVICE AND CO...
Publication number
20250002330
Publication date
Jan 2, 2025
Qorvo US, Inc.
Julio C. Costa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WAFER LEVEL PROXIMITY SENSOR AND METHOD OF MAKING SAME
Publication number
20250002333
Publication date
Jan 2, 2025
STMicroelectronics International N.V.
Eric SAUGIER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT WITH EXTERNAL CONTACTING
Publication number
20240425362
Publication date
Dec 26, 2024
ROBERT BOSCH GmbH
Benjamin Biasi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMBINED SOUND TRANSDUCER AND PRESSURE SENSOR PACKAGE
Publication number
20240425363
Publication date
Dec 26, 2024
INFINEON TECHNOLOGIES AG
Bernhard Rieder
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PACKAGING WITH ACTUATOR STATOR PROVIDING ELECTRICAL CONNECTION...
Publication number
20240417241
Publication date
Dec 19, 2024
Connaught Electronics Ltd.
Gerard Conway
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SWITCH UTILIZING CONDUCTIVE BARRIER LAYER
Publication number
20240409397
Publication date
Dec 12, 2024
Menlo Microsystems, Inc.
Christopher F. Keimel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE
Publication number
20240400374
Publication date
Dec 5, 2024
Rohm Co., Ltd.
Toma FUJITA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS COMPONENT WITH UPSIDE-DOWN CHIP
Publication number
20240391759
Publication date
Nov 28, 2024
Murata Manufacturing Co., Ltd.
Sami NURMI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...
Publication number
20240368746
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company Limited
Yuan-Chih Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGE STRUCTURE AND METHOD FOR PREPARING SAME, AND SENSOR
Publication number
20240359972
Publication date
Oct 31, 2024
BEIJING BOE SENSOR TECHNOLOGY CO., LTD.
Lihui WANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
Publication number
20240343558
Publication date
Oct 17, 2024
Murata Manufacturing Co., Ltd.
Petteri KILPINEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DIES EMBEDDED IN GLASS CORES
Publication number
20240327201
Publication date
Oct 3, 2024
Intel Corporation
Numair Ahmed
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A MEMS TRANSDUCER DEVICE WITH THIN MEMBRAN...
Publication number
20240327203
Publication date
Oct 3, 2024
STMicroelectronics International N.V.
Mark Andrew SHAW
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE
Publication number
20240317577
Publication date
Sep 26, 2024
Mitsubishi Electric Corporation
Yusuke SHIRAYANAGI
B81 - MICRO-STRUCTURAL TECHNOLOGY