Passivation

Industry

CPC
B81C2201/016

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/016Passivation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,258,266
- Issue date Mar 25, 2025
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,180,069
- Issue date Dec 31, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for producing a base of an analysis cell for analyzing a bi...
- Patent number 12,157,665
- Issue date Dec 3, 2024
- Robert Bosch GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor with high stability
- Patent number 12,139,398
- Issue date Nov 12, 2024
- Invensense, Inc.
- Weng Shen Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator with colocated temperature sensor
- Patent number 12,095,447
- Issue date Sep 17, 2024
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator system
- Patent number 11,987,495
- Issue date May 21, 2024
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bipolar transistor type MEMS pressure sensor and preparation method...
- Patent number 11,965,797
- Issue date Apr 23, 2024
- Wuxi Sencoch Semiconductor Co., Ltd.
- Tongqing Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Modification to rough polysilicon using ion implantation and silicide
- Patent number 11,952,267
- Issue date Apr 9, 2024
- Invensense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method for producing a micromechanica...
- Patent number 11,940,618
- Issue date Mar 26, 2024
- Robert Bosch GmbH
- Alexander Eberspaecher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Production method for a micromechanical component
- Patent number 11,905,166
- Issue date Feb 20, 2024
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone device with single crystal piezoelectric film and method...
- Patent number 11,785,852
- Issue date Oct 10, 2023
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,708,262
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stacked-die MEMS resonator
- Patent number 11,708,264
- Issue date Jul 25, 2023
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for coating microstructured components
- Patent number 11,701,478
- Issue date Jul 18, 2023
- Boehringer Ingelheim International GmbH
- Daniel Frache
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a tiltable suspended structure controlled by ele...
- Patent number 11,681,141
- Issue date Jun 20, 2023
- STMicroelectronics S.r.l.
- Roberto Carminati
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for sensors on glass
- Patent number 11,608,265
- Issue date Mar 21, 2023
- Infineon Technologies AG
- Stephan Pindl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micro structure
- Patent number 11,548,779
- Issue date Jan 10, 2023
- Teknologian tutkimuskeskus VTT Oy
- Hannu Kattelus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure and manufacturing method thereof
- Patent number 11,505,454
- Issue date Nov 22, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kang-Che Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing MEMS microphone
- Patent number 11,405,737
- Issue date Aug 2, 2022
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhenkui Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stacked-die MEMS resonator
- Patent number 11,370,656
- Issue date Jun 28, 2022
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Addressable vertical nanowire probe arrays and fabrication methods
- Patent number 11,363,979
- Issue date Jun 21, 2022
- The Regents of the University of California
- Shadi A. Dayeh
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,267,693
- Issue date Mar 8, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Modification to rough polysilicon using ion implantation and silicide
- Patent number 11,267,699
- Issue date Mar 8, 2022
- Invensense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,174,160
- Issue date Nov 16, 2021
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method of producing a semiconductor device
- Patent number 11,167,981
- Issue date Nov 9, 2021
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Sabine Trupp
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity mems and related structures, methods of manufacture a...
- Patent number 11,111,138
- Issue date Sep 7, 2021
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,111,139
- Issue date Sep 7, 2021
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,104,572
- Issue date Aug 31, 2021
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,021,364
- Issue date Jun 1, 2021
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250145456
- Publication date May 8, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTEC...
- Publication number 20250145453
- Publication date May 8, 2025
- STMicroelectronics International N.V.
- Lorenzo CORSO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250074766
- Publication date Mar 6, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STACKED-DIE MEMS RESONATOR
- Publication number 20250019229
- Publication date Jan 16, 2025
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20250011157
- Publication date Jan 9, 2025
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank Senger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
- Publication number 20240425365
- Publication date Dec 26, 2024
- SENSONICS TRANSDUCERS PRIVATE LIMITED
- Brishbhan Singh PANWAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS
- Publication number 20240391760
- Publication date Nov 28, 2024
- STMicroelectronics International N.V.
- Silvia NICOLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230382714
- Publication date Nov 30, 2023
- DB HITEK CO., LTD.
- Min Hyun JUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...
- Publication number 20230348258
- Publication date Nov 2, 2023
- STMicroelectronics S.r.l.
- Mikel AZPEITIA URQUIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH INTEGRATED CMOS CIRCUIT
- Publication number 20230312337
- Publication date Oct 5, 2023
- 3C PROJECT MANAGEMENT LIMITED
- Gregory John MCAVOY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANICALLY COUPLED PIEZOELECTRIC MEMS MICROPHONE
- Publication number 20230303387
- Publication date Sep 28, 2023
- Skyworks Solutions, Inc.
- Siarhei Dmitrievich Barsukou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR STRUCTURE, PRESSURE SENSOR DEVICE, AND METHOD OF MA...
- Publication number 20230146158
- Publication date May 11, 2023
- Murata Manufacturing Co., Ltd.
- Kaoru KISHIGUI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR ELECTRONIC DEVICE PACKAGING
- Publication number 20230126914
- Publication date Apr 27, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Jane Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MEMS MICROPHONE WITH SPRING REGION
- Publication number 20230105699
- Publication date Apr 6, 2023
- Skyworks Solutions, Inc.
- Guofeng Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR WITH HIGH STABILITY
- Publication number 20230089813
- Publication date Mar 23, 2023
- InvenSense, Inc.
- Weng Shen Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20230045257
- Publication date Feb 9, 2023
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY
- Publication number 20220324698
- Publication date Oct 13, 2022
- Sergio Fabien Almeida Loya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
- Publication number 20220185656
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-HSIEN CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
- Publication number 20220144628
- Publication date May 12, 2022
- InvenSense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT
- Publication number 20220081285
- Publication date Mar 17, 2022
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for Sensors on Glass
- Publication number 20220009771
- Publication date Jan 13, 2022
- INFINEON TECHNOLOGIES AG
- Stephan Pindl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Fabricating a Microfluidic Device
- Publication number 20210300752
- Publication date Sep 30, 2021
- IMEC vzw
- Giuseppe Fiorentino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICA...
- Publication number 20210271073
- Publication date Sep 2, 2021
- ROBERT BOSCH GmbH
- Alexander Eberspaecher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STICTION-AIDED FABRICATION OF FLAT NANOMEMBRANES FOR MICROELECTRONI...
- Publication number 20210147220
- Publication date May 20, 2021
- WISYS TECHNOLOGY FOUNDATION, INC.
- Gokul Gopalakrishnan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20210087056
- Publication date Mar 25, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- KANG-CHE HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
- Publication number 20200270123
- Publication date Aug 27, 2020
- InvenSense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing MEMS Microphone
- Publication number 20200213797
- Publication date Jul 2, 2020
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Zhenkui Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING A TILTABLE SUSPENDED STRUCTURE CONTROLLED BY ELE...
- Publication number 20200192081
- Publication date Jun 18, 2020
- STMicroelectronics S.r.l
- Roberto CARMINATI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICRO STRUCTURE
- Publication number 20200180943
- Publication date Jun 11, 2020
- Teknologian Tutkimuskeskus VTT Oy
- Hannu KATTELUS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING A SEMICONDUCTOR DEVICE
- Publication number 20200062586
- Publication date Feb 27, 2020
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Sabine TRUPP
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Passivation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for fabricating a MEMS device

Method and system for fabricating a MEMS device

Process for producing a base of an analysis cell for analyzing a bi...

Pressure sensor with high stability

MEMS resonator with colocated temperature sensor

MEMS resonator system

Bipolar transistor type MEMS pressure sensor and preparation method...

Modification to rough polysilicon using ion implantation and silicide

Micromechanical component and method for producing a micromechanica...

Production method for a micromechanical component

Microphone device with single crystal piezoelectric film and method...

Manufacturing method of semiconductor structure

Stacked-die MEMS resonator

Method for coating microstructured components

MEMS device having a tiltable suspended structure controlled by ele...

Method and structure for sensors on glass

Capacitive micro structure

MEMS structure and manufacturing method thereof

Method for manufacturing MEMS microphone

Stacked-die MEMS resonator

Addressable vertical nanowire probe arrays and fabrication methods

Manufacturing method of semiconductor structure

Modification to rough polysilicon using ion implantation and silicide

Fence structure to prevent stiction in a MEMS motion sensor

Planar cavity MEMS and related structures, methods of manufacture a...

Semiconductor device and method of producing a semiconductor device

Planar cavity mems and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTEC...

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

STACKED-DIE MEMS RESONATOR

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...

CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...

MEMS DEVICE WITH INTEGRATED CMOS CIRCUIT

MECHANICALLY COUPLED PIEZOELECTRIC MEMS MICROPHONE

PRESSURE SENSOR STRUCTURE, PRESSURE SENSOR DEVICE, AND METHOD OF MA...

METHODS AND APPARATUS FOR ELECTRONIC DEVICE PACKAGING

PIEZOELECTRIC MEMS MICROPHONE WITH SPRING REGION

PRESSURE SENSOR WITH HIGH STABILITY

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE

MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE

PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT

Method and Structure for Sensors on Glass

Method for Fabricating a Microfluidic Device

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICA...

STICTION-AIDED FABRICATION OF FLAT NANOMEMBRANES FOR MICROELECTRONI...

MEMS STRUCTURE AND MANUFACTURING METHOD THEREOF

MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE

Method for Manufacturing MEMS Microphone

MEMS DEVICE HAVING A TILTABLE SUSPENDED STRUCTURE CONTROLLED BY ELE...

CAPACITIVE MICRO STRUCTURE

SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING A SEMICONDUCTOR DEVICE