Physical Vapour Deposition [PVD]

Industry

CPC
B81C2201/0181

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0181Physical Vapour Deposition [PVD]

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 12,134,555
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system device using a metallic movable part...
- Patent number 12,122,665
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Damascene interconnect structure, actuator device, and method of ma...
- Patent number 11,987,493
- Issue date May 21, 2024
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,961,722
- Issue date Apr 16, 2024
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabrication of omni-view peripheral scanning system
- Patent number 11,926,523
- Issue date Mar 12, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro mechanical system and manufacturing method thereof
- Patent number 11,851,321
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Li Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
- Patent number 11,851,320
- Issue date Dec 26, 2023
- The Johns Hopkins University
- Gi-Dong Sim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of fabricating micro electro-mechanical systems structures
- Patent number 11,845,654
- Issue date Dec 19, 2023
- The University of British Columbia
- Edmond Cretu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure and method for manufacturing same
- Patent number 11,673,797
- Issue date Jun 13, 2023
- SHANGHAI INDUSTRIAL UTECHNOLOGY RESEARCH INSTITUTE
- Shinan Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 11,667,517
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vertical nanopore coupled with a pair of transverse electrodes havi...
- Patent number 11,644,435
- Issue date May 9, 2023
- Seagate Technology LLC
- ShuaiGang Xiao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Attachment method for microfluidic device
- Patent number 11,571,692
- Issue date Feb 7, 2023
- PhysioLogic Devices, Inc.
- Peter C. Lord
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,521,840
- Issue date Dec 6, 2022
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonding pad layer system, gas sensor and method for manufacturing a...
- Patent number 11,407,635
- Issue date Aug 9, 2022
- Robert Bosch GmbH
- Andreas Scheurle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing an electromigration-resistant crystalline tran...
- Patent number 11,191,128
- Issue date Nov 30, 2021
- Robert Bosch GmbH
- Radoslav Rusanov
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 11,167,980
- Issue date Nov 9, 2021
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical component and method for producing same
- Patent number 11,148,940
- Issue date Oct 19, 2021
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Dirk Rudloff
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-device having a metal-semiconductor compound layer protected...
- Patent number 11,027,969
- Issue date Jun 8, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Stephanus Louwers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for sealing an access opening to a cavity and MEMS component...
- Patent number 10,913,656
- Issue date Feb 9, 2021
- Infineon Technologies AG
- Gerhard Metzger-Brueckl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MOx-based gas sensor and manufacturing method thereof
- Patent number 10,871,462
- Issue date Dec 22, 2020
- STMicroelectronics S.r.l.
- Alessandra Alberti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensors with selectively adjusted damping of suspension
- Patent number 10,822,225
- Issue date Nov 3, 2020
- Honeywell International Inc.
- Mikulas Jandak
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator manufacturing method
- Patent number 10,727,807
- Issue date Jul 28, 2020
- MURATA MANUFACTURING CO., LTD.
- Keiichi Umeda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 10,689,247
- Issue date Jun 23, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS manufacturing method and MEMS manufacturing apparatus
- Patent number 10,605,824
- Issue date Mar 31, 2020
- Hitachi, Ltd.
- Shuntaro Machida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,589,991
- Issue date Mar 17, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,589,992
- Issue date Mar 17, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
- Patent number 10,549,987
- Issue date Feb 4, 2020
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin film metal silicides and methods for formation
- Patent number 10,535,526
- Issue date Jan 14, 2020
- The Trustees of the University of Pennsylvania
- Robert W. Carpick
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low friction coating formed of boron-doped zinc oxide thin film and...
- Patent number 10,343,893
- Issue date Jul 9, 2019
- National Institute for Materials Science
- Michiko Sasaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Waterproof member, manufacturing method of waterproof member, press...
- Patent number 10,337,939
- Issue date Jul 2, 2019
- Seiko Epson Corporation
- Nobuyuki Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...
- Publication number 20240359969
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240280513
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Jae Hong LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...
- Publication number 20240279051
- Publication date Aug 22, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20240083742
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Li YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Attachment Method for Microfluidic Device
- Publication number 20230364604
- Publication date Nov 16, 2023
- PhysioLogic Devices, Inc.
- Peter C. Lord
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...
- Publication number 20230294980
- Publication date Sep 21, 2023
- Vanguard International Semiconductor Corporation
- RAKESH CHAND
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
- Publication number 20230278856
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING...
- Publication number 20230271825
- Publication date Aug 31, 2023
- RESEARCH INSTITUTE OF TSINGHUA UNIVERSITY IN SHENZHEN
- Quanshui ZHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE WITH AN ANCHOR
- Publication number 20230234837
- Publication date Jul 27, 2023
- SKYWORKS GLOBAL PTE. LTD.
- Guofeng Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...
- Publication number 20230127477
- Publication date Apr 27, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Christopher Murray BEARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC SINGLE-CRYSTAL ELEMENT, MEMS DEVICE USING SAME, AND M...
- Publication number 20230120240
- Publication date Apr 20, 2023
- IBULE PHOTONICS
- Sang Goo LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Controlling Stress Variation in a Material...
- Publication number 20230094699
- Publication date Mar 30, 2023
- SPTS Technologies Ltd.
- Anthony WILBY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATION OF OMNI-VIEW PERIPHERAL SCANNING SYSTEM
- Publication number 20230072948
- Publication date Mar 9, 2023
- Beijing Voyager Technology Co., Ltd.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...
- Publication number 20230066841
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PUMP
- Publication number 20220397110
- Publication date Dec 15, 2022
- Microjet Technology Co., Ltd.
- Hao-Jan MOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20220274827
- Publication date Sep 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ting-Li YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GAS SENSOR AND MANUFACTURING METHOD THEREOF
- Publication number 20220128498
- Publication date Apr 28, 2022
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Seungeon MOON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES
- Publication number 20210395081
- Publication date Dec 23, 2021
- The University of British Columbia
- Edmond Cretu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...
- Publication number 20210387852
- Publication date Dec 16, 2021
- Hamamatsu Photonics K.K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSTRUCTURE AND METHOD FOR MANUFACTURING SAME
- Publication number 20210284528
- Publication date Sep 16, 2021
- Shanghai Industrial ?Technology Research Institute
- SHINAN WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A METHOD FOR PRODUCING AN ELECTROMIGRATION-RESISTANT CRYSTALLINE TR...
- Publication number 20200323041
- Publication date Oct 8, 2020
- ROBERT BOSCH GmbH
- Radoslav Rusanov
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
- Publication number 20200317506
- Publication date Oct 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20200239303
- Publication date Jul 30, 2020
- Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
- Dirk RUDLOFF
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BONDING PAD LAYER SYSTEM, GAS SENSOR AND METHOD FOR MANUFACTURING A...
- Publication number 20200140261
- Publication date May 7, 2020
- ROBERT BOSCH GmbH
- Andreas Scheurle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF DEPOSITING NANOTWINNED NICKEL-MOLYBDENUM-TUNGSTEN ALLOYS
- Publication number 20200055725
- Publication date Feb 20, 2020
- The Johns Hopkins University
- Gi-Dong Sim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOX-BASED GAS SENSOR AND MANUFACTURING METHOD THEREOF
- Publication number 20190128830
- Publication date May 2, 2019
- STMicroelectronics S.r.l.
- Alessandra ALBERTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AMORPHOUS THIN METAL FILM
- Publication number 20190119101
- Publication date Apr 25, 2019
- Hewlett-Packard Development Company, L.P.
- James Elmer Abbott
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-DEVICE INCLUDING AN ELEMENT PROTECTED AGAINST HF ETCHING AND...
- Publication number 20190092632
- Publication date Mar 28, 2019
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Stephanus LOUWERS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATTACHMENT METHOD FOR MICROFLUIDIC DEVICE
- Publication number 20190030529
- Publication date Jan 31, 2019
- PhysioLogic Devices, Inc.
- Peter C. Lord
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
- Publication number 20180201503
- Publication date Jul 19, 2018
- International Business Machines Corporation
- Michael T. Brigham
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Physical Vapour Deposition [PVD]

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and structure for CMOS-MEMS thin film encapsulation

Micro-electromechanical system device using a metallic movable part...

Damascene interconnect structure, actuator device, and method of ma...

Method and apparatus for controlling stress variation in a material...

Microfabrication of omni-view peripheral scanning system

Micro-electro mechanical system and manufacturing method thereof

Method of depositing nanotwinned nickel-molybdenum-tungsten alloys

Methods of fabricating micro electro-mechanical systems structures

Microstructure and method for manufacturing same

Method and structure for CMOS-MEMS thin film encapsulation

Vertical nanopore coupled with a pair of transverse electrodes havi...

Attachment method for microfluidic device

Method and apparatus for controlling stress variation in a material...

Bonding pad layer system, gas sensor and method for manufacturing a...

Method for producing an electromigration-resistant crystalline tran...

Micro-electro-mechanical system (MEMS) structures and design struct...

Microelectromechanical component and method for producing same

Micro-device having a metal-semiconductor compound layer protected...

Method for sealing an access opening to a cavity and MEMS component...

MOx-based gas sensor and manufacturing method thereof

MEMS sensors with selectively adjusted damping of suspension

Resonator manufacturing method

Method and structure for CMOS-MEMS thin film encapsulation

MEMS manufacturing method and MEMS manufacturing apparatus

Micro-electro-mechanical system (MEMS) structures and design struct...

Micro-electro-mechanical system (MEMS) structures and design struct...

Micro-electro-mechanical system (MEMS) structures and design struct...

Thin film metal silicides and methods for formation

Low friction coating formed of boron-doped zinc oxide thin film and...

Waterproof member, manufacturing method of waterproof member, press...

Patents Applicationslast 30 patents

MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...

BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME

DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...

MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

Attachment Method for Microfluidic Device

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...

Method and Structure for CMOS-MEMS Thin Film Encapsulation

ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING...

MEMS MICROPHONE WITH AN ANCHOR

MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...

PIEZOELECTRIC SINGLE-CRYSTAL ELEMENT, MEMS DEVICE USING SAME, AND M...

Method and Apparatus for Controlling Stress Variation in a Material...

MICROFABRICATION OF OMNI-VIEW PERIPHERAL SCANNING SYSTEM

MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...

MICRO-ELECTROMECHANICAL SYSTEM PUMP

MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

GAS SENSOR AND MANUFACTURING METHOD THEREOF

METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES

DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...

MICROSTRUCTURE AND METHOD FOR MANUFACTURING SAME

A METHOD FOR PRODUCING AN ELECTROMIGRATION-RESISTANT CRYSTALLINE TR...

Method and Structure for CMOS-MEMS Thin Film Encapsulation

MICROELECTROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

BONDING PAD LAYER SYSTEM, GAS SENSOR AND METHOD FOR MANUFACTURING A...

METHOD OF DEPOSITING NANOTWINNED NICKEL-MOLYBDENUM-TUNGSTEN ALLOYS

MOX-BASED GAS SENSOR AND MANUFACTURING METHOD THEREOF

AMORPHOUS THIN METAL FILM

MICRO-DEVICE INCLUDING AN ELEMENT PROTECTED AGAINST HF ETCHING AND...

ATTACHMENT METHOD FOR MICROFLUIDIC DEVICE

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...