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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/3343
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Patents Grants
last 30 patents
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Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,972,925
Issue date
Apr 30, 2024
Tokyo Electron Limited
Bong seong Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,961,718
Issue date
Apr 16, 2024
Tokyo Electron Limited
Shojiro Yahata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,862,436
Issue date
Jan 2, 2024
Tokyo Electron Limited
Toru Fujii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Real-time control of temperature in a plasma chamber
Patent number
11,823,875
Issue date
Nov 21, 2023
Lam Research Corporation
Changyou Jing
G05 - CONTROLLING REGULATING
Information
Patent Grant
Devices and methods for controlling wafer uniformity in plasma-base...
Patent number
11,769,652
Issue date
Sep 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Jr-Sheng Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Workpiece processing method
Patent number
11,735,423
Issue date
Aug 22, 2023
Tokyo Electron Limited
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process kit with adjustable tuning ring for edge uniformity control
Patent number
11,728,143
Issue date
Aug 15, 2023
Applied Materials, Inc.
Yogananda Sarode Vishwanath
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reaction chamber and plasma apparatus
Patent number
11,715,627
Issue date
Aug 1, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Wei Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for delivering a plurality of waveform signals...
Patent number
11,694,876
Issue date
Jul 4, 2023
Applied Materials, Inc.
James Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,557,485
Issue date
Jan 17, 2023
Tokyo Electron Limited
Yoshihide Kihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method, plasma processing apparatus and method of...
Patent number
11,521,866
Issue date
Dec 6, 2022
Samsung Electronics Co., Ltd.
Seung-Yoon Song
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and systems for focus ring thickness determinations and fee...
Patent number
11,393,663
Issue date
Jul 19, 2022
Tokyo Electron Limited
Merritt Funk
G05 - CONTROLLING REGULATING
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,387,110
Issue date
Jul 12, 2022
HITACHI HIGH-TECH CORPORATION
Yasushi Sonoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece processing method
Patent number
11,322,354
Issue date
May 3, 2022
Tokyo Electron Limited
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
11,322,336
Issue date
May 3, 2022
Semes Co., Ltd.
Jae-Bak Shim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method for measuring thickness of r...
Patent number
11,315,766
Issue date
Apr 26, 2022
Tokyo Electron Limited
Atsushi Ogata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process kit with adjustable tuning ring for edge uniformity control
Patent number
11,201,037
Issue date
Dec 14, 2021
Applied Materials, Inc.
Yogananda Sarode Vishwanath
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,183,371
Issue date
Nov 23, 2021
Tokyo Electron Limited
Toru Fujii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual-level pulse tuning
Patent number
11,177,115
Issue date
Nov 16, 2021
Applied Materials, Inc.
Gary Leray
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,094,551
Issue date
Aug 17, 2021
Tokyo Electron Limited
Yoshihide Kihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Real-time control of temperature in a plasma chamber
Patent number
11,087,962
Issue date
Aug 10, 2021
Lam Research Corporation
Changyou Jing
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing method, plasma processing apparatus and method of...
Patent number
11,037,806
Issue date
Jun 15, 2021
Samsung Electronics Co., Ltd.
Seung-Yoon Song
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
10,950,458
Issue date
Mar 16, 2021
Tokyo Electron Limited
Yasutaka Hama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Endpoint sensor based control including adjustment of an edge ring...
Patent number
10,903,050
Issue date
Jan 26, 2021
Lam Research Corporation
Luc Albarede
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for fabricating a semiconductor device
Patent number
10,892,142
Issue date
Jan 12, 2021
Samsung Electronics Co., Ltd.
Sangjean Jeon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,872,774
Issue date
Dec 22, 2020
HITACHI HIGH-TECH CORPORATION
Hao Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma spreading apparatus and method of spreading plasma in proces...
Patent number
10,840,068
Issue date
Nov 17, 2020
Yield Engineering Systems, Inc.
William Moffat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for driving member and processing apparatus
Patent number
10,825,662
Issue date
Nov 3, 2020
Tokyo Electron Limited
Rumiko Moriya
G01 - MEASURING TESTING
Information
Patent Grant
Process kit with adjustable tuning ring for edge uniformity control
Patent number
10,790,123
Issue date
Sep 29, 2020
Applied Materials, Inc.
Yogananda Sarode Vishwanath
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Power supply system
Patent number
10,755,894
Issue date
Aug 25, 2020
Tokyo Electron Limited
Taichi Hirano
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE SUPPORTING UNIT, APPARATUS FOR TREATING SUBSTRATE INCLUDI...
Publication number
20240153747
Publication date
May 9, 2024
SEMES CO., LTD.
Jae-Won SHIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metallic Shield For Stable Tape-Frame Substrate Processing
Publication number
20240136159
Publication date
Apr 25, 2024
Harish Varma PENMETHSA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND CLEANING METHOD
Publication number
20240120185
Publication date
Apr 11, 2024
TOKYO ELECTRON LIMITED
Kazuki TSUCHIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUS RING AND PLASMA ETCHING APPARATUS COMPRISING THE SAME
Publication number
20240055238
Publication date
Feb 15, 2024
SK enpulse Co., Ltd.
Kyungyeol MIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REAL-TIME CONTROL OF TEMPERATURE IN A PLASMA CHAMBER
Publication number
20240047183
Publication date
Feb 8, 2024
LAM RESEARCH CORPORATION
Changyou Jing
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240021412
Publication date
Jan 18, 2024
SEMES CO., LTD.
Seong Pyo AHN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240014007
Publication date
Jan 11, 2024
Hitachi High-Tech Corporation
Norihiko Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240014010
Publication date
Jan 11, 2024
Hitachi High-Tech Corporation
Tetsuo KAWANABE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR DRY ETCHING
Publication number
20240006157
Publication date
Jan 4, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Chien-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUS RING FOR A PLASMA-BASED SEMICONDUCTOR PROCESSING TOOL
Publication number
20230386799
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Sheng-Chieh HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Uniformity Control
Publication number
20230377849
Publication date
Nov 23, 2023
TOKYO ELECTRON LIMITED
Shyam Sridhar
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING APPARATUS AND METHOD OF MANUFACTURE
Publication number
20230326705
Publication date
Oct 12, 2023
Taiwan Semiconductor Manufacturing Company Limited
Chansyun David YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230317436
Publication date
Oct 5, 2023
SEMES CO., LTD.
Dukhyun Son
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230317418
Publication date
Oct 5, 2023
Samsung Electronics Co., Ltd.
Jungmin KO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING SYSTEM
Publication number
20230317466
Publication date
Oct 5, 2023
TOKYO ELECTRON LIMITED
Satoshi OHUCHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ETCHING LITHIUM NIOBATE AND METHOD FOR FORMING LITHIUM N...
Publication number
20230307214
Publication date
Sep 28, 2023
Korea Institute of Science and Technology
Ho Joong JUNG
B08 - CLEANING
Information
Patent Application
OPERATION METHOD OF ETCHING APPARATUS AND METHOD OF MANUFACTURING S...
Publication number
20230307217
Publication date
Sep 28, 2023
Samsung Electronics Co., Ltd.
Dooyoung Gwak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PREDICTION METHOD AND INFORMATION PROCESSING APPARATUS
Publication number
20230298867
Publication date
Sep 21, 2023
TOKYO ELECTRON LIMITED
Keita YAEGASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR DELIVERING A PLURALITY OF WAVEFORM SIGNALS...
Publication number
20230298856
Publication date
Sep 21, 2023
Applied Materials, Inc.
James ROGERS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA UNIFORMITY CONTROL USING A STATIC MAGNETIC FIELD
Publication number
20230298866
Publication date
Sep 21, 2023
LAM RESEARCH CORPORATION
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADJUSTABLE GEOMETRY TRIM COIL
Publication number
20230274911
Publication date
Aug 31, 2023
LAM RESEARCH CORPORATION
Andrew D. Bailey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COIL STRUCTURE AND PLASMA PROCESSING APPARATUS
Publication number
20230260751
Publication date
Aug 17, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Jinrong ZHAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UNIFORMITY CONTROL CIRCUIT FOR IMPEDANCE MATCH
Publication number
20230253184
Publication date
Aug 10, 2023
LAM RESEARCH CORPORATION
Alexei M. Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MOVABLE DISK WITH APERTURE FOR ETCH CONTROL
Publication number
20230245865
Publication date
Aug 3, 2023
LAM RESEARCH CORPORATION
Chih-Min LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS CONTROL FOR ION ENERGY DELIVERY USING MULTIPLE GENERATORS A...
Publication number
20230230804
Publication date
Jul 20, 2023
LAM RESEARCH CORPORATION
Ranadeep Bhowmick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSING REMOTE PLASMA FOR ION DAMAGE REDUCTION AND ETCH UNIFORMITY...
Publication number
20230223237
Publication date
Jul 13, 2023
LAM RESEARCH CORPORATION
Wei Yi LUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA UNIFORMITY CONTROL USING A PULSED MAGNETIC FIELD
Publication number
20230223242
Publication date
Jul 13, 2023
LAM RESEARCH CORPORATION
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DUTY CYCLE CONTROL TO ACHIEVE UNIFORMITY
Publication number
20230215694
Publication date
Jul 6, 2023
LAM RESEARCH CORPORATION
Alexei M. Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF OPERATING A PVD APPARATUS
Publication number
20230212736
Publication date
Jul 6, 2023
SPTS TECHNOLOGIES LIMITED
Scott HAYMORE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IMPEDANCE MATCHING CIRCUIT, POWER SUPPLY APPARATUS, AND PLASMA PROC...
Publication number
20230197411
Publication date
Jun 22, 2023
SEMES CO., LTD.
Hyun Jin KIM
H01 - BASIC ELECTRIC ELEMENTS