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Processes for creating layers of materials not provided for in groups B81C1/00357 - B81C1/00373
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
Current Industry
B81C1/0038
Processes for creating layers of materials not provided for in groups B81C1/00357 - B81C1/00373
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Patents Grants
last 30 patents
Information
Patent Grant
Imprinted substrates
Patent number
11,878,299
Issue date
Jan 23, 2024
Illumina, Inc.
Hui Han
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for coating microstructured components
Patent number
11,701,478
Issue date
Jul 18, 2023
Boehringer Ingelheim International GmbH
Daniel Frache
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for preparing micro-cavity array surface product with inclin...
Patent number
11,655,144
Issue date
May 23, 2023
JIANGSU UNIVERSITY
Jian Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing three-dimensionally structured member, met...
Patent number
11,584,641
Issue date
Feb 21, 2023
TOKYO KEIKl INC.
Kazuaki Tani
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Post-processing techniques on mems foundry fabricated devices for l...
Patent number
11,535,511
Issue date
Dec 27, 2022
United States of America as represented by the Secretary of the Air Force
LaVern A Starman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing electroplated cobalt-platinum films on subs...
Patent number
11,532,433
Issue date
Dec 20, 2022
University of Florida Research Foundation, Inc.
David P. Arnold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of treating a solid layer bonded to a carrier substrate
Patent number
11,518,066
Issue date
Dec 6, 2022
Siltectra GmbH
Franz Schilling
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Selective step coverage for micro-fabricated structures
Patent number
11,499,218
Issue date
Nov 15, 2022
Si-Ware Systems
Mostafa Medhat
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stacked structure and method for manufacturing the same
Patent number
11,332,363
Issue date
May 17, 2022
Advanced Semiconductor Engineering, Inc.
Chieh-An Yeh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming nano-patterns on a substrate
Patent number
11,287,551
Issue date
Mar 29, 2022
Agency for Science, Technology and Research
Kwang Wei Joel Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Localized functionalization of nanotextured surfaces
Patent number
11,247,896
Issue date
Feb 15, 2022
UChicago Argonne, LLC
Martyna Michalska
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for a mems transducer
Patent number
11,225,408
Issue date
Jan 18, 2022
Infineon Technologies AG
Andreas Wiesbauer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS electrothermal actuator for large angle beamsteering
Patent number
11,163,152
Issue date
Nov 2, 2021
United States of America as represented by the Secretary of the Air Force
LaVern A Starman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Laminate
Patent number
11,027,532
Issue date
Jun 8, 2021
LG Chem, Ltd.
Eun Young Choi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Imprinted substrates
Patent number
11,020,739
Issue date
Jun 1, 2021
Illumina, Inc.
Hui Han
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Flexible electronics for wearable healthcare sensors
Patent number
11,015,913
Issue date
May 25, 2021
International Business Machines Corporation
Huan Hu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with reduced electric charge, cavity volume and stiction
Patent number
10,988,372
Issue date
Apr 27, 2021
Invensense, Inc.
Dongyang Kang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator layer patterning with topography
Patent number
10,906,802
Issue date
Feb 2, 2021
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Deposition of protective material at wafer level in front end for e...
Patent number
10,858,245
Issue date
Dec 8, 2020
Infineon Technologies AG
Florian Brandl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enhanced control of shuttle mass motion in MEMS devices
Patent number
10,858,241
Issue date
Dec 8, 2020
Rensselaer Polytechnic Institute
Diana-Andra Borca-Tasciuc
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for the material-saving production of wafers and processing...
Patent number
10,843,380
Issue date
Nov 24, 2020
Siltectra GmbH
Franz Schilling
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
MEMS sensors with selectively adjusted damping of suspension
Patent number
10,822,225
Issue date
Nov 3, 2020
Honeywell International Inc.
Mikulas Jandak
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming a functionalised assembly guide
Patent number
10,784,108
Issue date
Sep 22, 2020
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Guillaume Claveau
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator layer patterning with topography
Patent number
10,745,270
Issue date
Aug 18, 2020
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mitigation of contamination of electroplated cobalt-platinum films...
Patent number
10,614,953
Issue date
Apr 7, 2020
University of Florida Research Foundation, Inc.
David P. Arnold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for a MEMS transducer
Patent number
10,589,987
Issue date
Mar 17, 2020
Infineon Technologies AG
Andreas Wiesbauer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Infrared sensor design using an epoxy film as an infrared absorptio...
Patent number
10,570,006
Issue date
Feb 25, 2020
Texas Instruments Incorporated
Ricky Alan Jackson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a micromechanical timepiece part and said...
Patent number
10,558,169
Issue date
Feb 11, 2020
Nivarox-Far S.A.
Philippe Dubois
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Coating method using particle alignment and particle coated substra...
Patent number
10,549,314
Issue date
Feb 4, 2020
AJOU UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION
Jae Ho Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Infrared sensor design using an epoxy film as an infrared absorptio...
Patent number
10,526,198
Issue date
Jan 7, 2020
Texas Instruments Incorporated
Ricky Alan Jackson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MITIGATION OF CONTAMINATION OF ELECTROPLATED COBALT-PLATINUM FILMS...
Publication number
20220277896
Publication date
Sep 1, 2022
University of Florida Research Foundation, Inc.
David P. Arnold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...
Publication number
20220267144
Publication date
Aug 25, 2022
JIANGSU UNIVERSITY
Jian LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING NANOPARTICLE ARRAY, SURFACE PLASMON RESONA...
Publication number
20220018768
Publication date
Jan 20, 2022
Plexense, Inc.
Gibum Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES
Publication number
20210198096
Publication date
Jul 1, 2021
Rensselaer Polytechnic Institute
Diana-Andra Borca-Tasciuc
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
IMPRINTED SUBSTRATES
Publication number
20210170400
Publication date
Jun 10, 2021
Illumina, Inc.
Hui Han
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
STACKED STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20210130166
Publication date
May 6, 2021
Advanced Semiconductor Engineering, Inc.
Chieh-An YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of Treating a Solid Layer Bonded to a Carrier Substrate
Publication number
20210039279
Publication date
Feb 11, 2021
Franz Schilling
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Post-Processing Techniques on MEMS Foundry Fabricated Devices for L...
Publication number
20200283289
Publication date
Sep 10, 2020
Government of the United States, as represented by the Secretary of the Air F...
LaVern A Starman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MITIGATION OF CONTAMINATION OF ELECTROPLATED COBALT-PLATINUM FILMS...
Publication number
20200194173
Publication date
Jun 18, 2020
University of Florida Research Foundation, Inc.
David P. Arnold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR A MEMS TRANSDUCER
Publication number
20200148531
Publication date
May 14, 2020
INFINEON TECHNOLOGIES AG
Andreas Wiesbauer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
Publication number
20200131031
Publication date
Apr 30, 2020
InvenSense, Inc.
Daesung LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Electrothermal Actuator for Large Angle Beamsteering
Publication number
20200096761
Publication date
Mar 26, 2020
Government of the United States, as represented by the Secretary of the Air F...
LaVern A Starman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Interfacial Convective Assembly for High Aspect Ratio Structures Wi...
Publication number
20190389720
Publication date
Dec 26, 2019
Northeastern University
Nam-Goo Cha
B22 - CASTING POWDER METALLURGY
Information
Patent Application
METHOD FOR MANUFACTURING NANOPARTICLE ARRAY, SURFACE PLASMON RESONA...
Publication number
20190339200
Publication date
Nov 7, 2019
PLEXENSE, INC.
Gibum Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...
Publication number
20190300362
Publication date
Oct 3, 2019
INFINEON TECHNOLOGIES AG
Florian BRANDL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FLEXIBLE ELECTRONICS FOR WEARABLE HEALTHCARE SENSORS
Publication number
20190242690
Publication date
Aug 8, 2019
International Business Machines Corporation
HUAN HU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A METHOD OF FORMING NANO-PATTERNS ON A SUBSTRATE
Publication number
20190187337
Publication date
Jun 20, 2019
AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCHY
Kwang Wei Joel YANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...
Publication number
20190161345
Publication date
May 30, 2019
INFINEON TECHNOLOGIES AG
Florian BRANDL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING A MULTILAYER MEMS COMPONENT, AND CORRESPONDING...
Publication number
20190016590
Publication date
Jan 17, 2019
ROBERT BOSCH GmbH
Arnd Kaelberer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
IMPACT ELEMENT FOR A SENSOR DEVICE AND A MANUFACTURING METHOD
Publication number
20190002276
Publication date
Jan 3, 2019
Murata Manufacturing Co., Ltd.
Risto MUTIKAINEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES
Publication number
20180354780
Publication date
Dec 13, 2018
Rensselaer Polytechnic Institute
Diana-Andra Borca-Tasciuc
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FLEXIBLE ELECTRONICS FOR WEARABLE HEALTHCARE SENSORS
Publication number
20180257926
Publication date
Sep 13, 2018
International Business Machines Corporation
Paul S. ANDRY
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COATING METHOD USING PARTICLE ALIGNMENT AND PARTICLE COATED SUBSTRA...
Publication number
20180200754
Publication date
Jul 19, 2018
Ajou University Industry-Academic Cooperation Foundation
Jae Ho KIM
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIELECTRIC CLADDING OF MICROELECTROMECHANICAL SYSTEMS (MEMS) ELEMEN...
Publication number
20180186625
Publication date
Jul 5, 2018
TEXAS INSTRUMENTS INCORPORATED
Simon Joshua JACOBS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSORS WITH SELECTIVELY ADJUSTED DAMPING OF SUSPENSION
Publication number
20180179049
Publication date
Jun 28, 2018
HONEYWELL INTERNATIONAL INC.
Mikulas Jandak
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LAMINATE
Publication number
20180170024
Publication date
Jun 21, 2018
LG CHEM, LTD.
Eun Young Choi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME
Publication number
20180136382
Publication date
May 17, 2018
SAMSUNG DISPLAY CO., LTD.
Eun Ae KWAK
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Electrical Contact Systems And Methods
Publication number
20170329098
Publication date
Nov 16, 2017
DigitalOptics Corporation
Roman C. Gutierrez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Atomic Layer Deposition Layer for a Microelectromechanical system (...
Publication number
20170275154
Publication date
Sep 28, 2017
ROBERT BOSCH GmbH
Seow Yuen Yee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRICALLY CONDUCTIVE PATTERNS WITH WIDE LINE-WIDTH AND METHODS F...
Publication number
20170217768
Publication date
Aug 3, 2017
3M Innovative Properties Company
Chi-fan CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY