Processes for integrating an electronic processing unit with a micromechanical structure not provided for in B81C1/0023 - B81C1/00246

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B81C1/00253

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00253Processes for integrating an electronic processing unit with a micromechanical structure not provided for in B81C1/0023 - B81C1/00246

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Composite structures
- Patent number 11,814,284
- Issue date Nov 14, 2023
- Cirrus Logic Inc.
- Roberto Brioschi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Component part having a MECS component on a mounting carrier
- Patent number 10,466,197
- Issue date Nov 5, 2019
- Robert Bosch GmbH
- Roland Guenschel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone device
- Patent number 10,277,969
- Issue date Apr 30, 2019
- Fortemedia, Inc.
- Tsung-Lung Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Two-port SRAM connection structure
- Patent number 10,163,495
- Issue date Dec 25, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jhon Jhy Liaw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component having a diaphragm
- Patent number 9,850,120
- Issue date Dec 26, 2017
- Robert Bosch GmbH
- Uwe Schiller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone system with integrated passive device die
- Patent number 9,695,040
- Issue date Jul 4, 2017
- Invensense, Inc.
- David Bolognia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, electronic apparatus, and moving object
- Patent number 9,676,610
- Issue date Jun 13, 2017
- Seiko Epson Corporation
- Yutaka Takada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Two-port SRAM connection structure
- Patent number 9,672,903
- Issue date Jun 6, 2017
- Taiwan Semicondutor Manufacturing Co., Ltd.
- Jhon Jhy Liaw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus comprising and a method for manufacturing an embedded MEM...
- Patent number 9,593,009
- Issue date Mar 14, 2017
- Infineon Technologies AG
- Edward Fuergut
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a capping substrate
- Patent number 9,511,997
- Issue date Dec 6, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS fabrication process with two cavities operating at different p...
- Patent number 9,463,976
- Issue date Oct 11, 2016
- FREESCALE SEMICONDUCTOR, INC.
- Robert F. Steimle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, electronic apparatus, and moving object
- Patent number 9,434,603
- Issue date Sep 6, 2016
- Seiko Epson Corporation
- Yutaka Takada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic device, integrated circuit, electronic apparatus, and mo...
- Patent number 9,221,673
- Issue date Dec 29, 2015
- Seiko Epson Corporation
- Norihito Matsukawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of manufacturing microdevices in laminates, lead frames, pa...
- Patent number 8,877,074
- Issue date Nov 4, 2014
- The Regents of the University of California
- Mark Bachman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus comprising and a method for manufacturing an embedded MEM...
- Patent number 8,872,288
- Issue date Oct 28, 2014
- Infineon Technologies AG
- Edward Fuergut
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-microphone
- Patent number 8,611,566
- Issue date Dec 17, 2013
- EPCOS AG
- Wolfgang Pahl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integration of vacuum microelectronic device with integrated circuit
- Patent number 8,188,431
- Issue date May 29, 2012
- Jonathan Gorrell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Forming a micro electro mechanical system
- Patent number 8,084,285
- Issue date Dec 27, 2011
- Hewlett-Packard Development Company, L.P.
- Sriram Ramamoorthi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated circuit on high performance chip
- Patent number 8,048,766
- Issue date Nov 1, 2011
- Commissariat a l'Energie Atomique
- Jean-Pierre Joly
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device having an adhesive portion with a stacked stru...
- Patent number 7,893,525
- Issue date Feb 22, 2011
- Kabushiki Kaisha Toshiba
- Atsuko Iida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro electro mechanical system
- Patent number 7,851,876
- Issue date Dec 14, 2010
- Hewlett-Packard Development Company, L.P.
- Sriram Ramamoorthi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic device and method of manufacturing same
- Patent number 7,847,375
- Issue date Dec 7, 2010
- Infineon Technologies AG
- Joachim Mahler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated quartz oscillator on an active electronic substrate
- Patent number 7,830,074
- Issue date Nov 9, 2010
- HRL Laboratories, LLC
- Randall L. Kubena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated sensor and circuitry
- Patent number 7,810,394
- Issue date Oct 12, 2010
- Evigia Systems Inc.
- Navid Yazdi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated sensor and circuitry and process therefor
- Patent number 7,732,302
- Issue date Jun 8, 2010
- Evigia Systems, Inc.
- Navid Yazdi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming and sealing a cavity for an integrated MEMS device
- Patent number 7,666,698
- Issue date Feb 23, 2010
- FREESCALE SEMICONDUCTOR, INC.
- Peter Zurcher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated passive device and method of fabrication
- Patent number 7,663,196
- Issue date Feb 16, 2010
- FREESCALE SEMICONDUCTOR, INC.
- Lianjun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated sensor and circuitry and process therefor
- Patent number 7,562,573
- Issue date Jul 21, 2009
- Evigia Systems, Inc.
- Navid Yazdi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
LTCC-based modular MEMS phased array
- Patent number 7,289,063
- Issue date Oct 30, 2007
- Comsat Corporation
- Amir I. Zaghloul
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Module and method of making same
- Patent number 6,667,558
- Issue date Dec 23, 2003
- The Regents of the University of Michigan
- Ark-Chew Wong
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SENSOR AND METHOD FOR REDUCING AN INTERFERENCE SIGNAL COMPONENT IN...
- Publication number 20220381583
- Publication date Dec 1, 2022
- ROBERT BOSCH GmbH
- Andrea Visconti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOSITE STRUCTURES
- Publication number 20200299127
- Publication date Sep 24, 2020
- Cirrus Logic International Semiconductor Ltd.
- Roberto BRIOSCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROPHONE DEVICE
- Publication number 20180359551
- Publication date Dec 13, 2018
- Fortemedia, Inc.
- Tsung-Lung YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Two-Port SRAM Connection Structure
- Publication number 20180061487
- Publication date Mar 1, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Jhon Jhy Liaw
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT
- Publication number 20160340177
- Publication date Nov 24, 2016
- SEIKO EPSON CORPORATION
- Yutaka TAKADA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE, INTEGRATED CIRCUIT, ELECTRONIC APPARATUS, AND MO...
- Publication number 20140312437
- Publication date Oct 23, 2014
- SEIKO EPSON CORPORATION
- Norihito MATSUKAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT
- Publication number 20140312438
- Publication date Oct 23, 2014
- SEIKO EPSON CORPORATION
- Yutaka TAKADA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device with a Capping Substrate
- Publication number 20140252508
- Publication date Sep 11, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microphone System with Integrated Passive Device Die
- Publication number 20140103464
- Publication date Apr 17, 2014
- Analog Devices, Inc.
- David Bolognia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus Comprising and a Method for Manufacturing an Embedded MEM...
- Publication number 20140042565
- Publication date Feb 13, 2014
- INFINEON TECHNOLOGIES AG
- Edward Fuergut
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT HAVING A DIAPHRAGM
- Publication number 20130234140
- Publication date Sep 12, 2013
- ROBERT BOSCH GmbH
- Uwe SCHILLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS-MICROPHONE
- Publication number 20120224726
- Publication date Sep 6, 2012
- EPCOS AG
- Wolfgang Pahl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Forming a Micro Electro Mechanical System
- Publication number 20110059566
- Publication date Mar 10, 2011
- Sriram Ramamoorthi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATION OF VACUUM MICROELECTRONIC DEVICE WITH INTEGRATED CIRCUIT
- Publication number 20100289099
- Publication date Nov 18, 2010
- Virgin Islands Microsystems, Inc.
- Jonathan Gorrell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electronic Device and Method of Manufacturing Same
- Publication number 20100032816
- Publication date Feb 11, 2010
- INFINEON TECHNOLOGIES AG
- Joachim MAHLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Bonded Microfluidics System Comprising CMOS-Controllable Microfluid...
- Publication number 20090314367
- Publication date Dec 24, 2009
- SILVERBROOK RESEARCH PTY LTD
- Gregory John McAvoy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20090179317
- Publication date Jul 16, 2009
- Kabushiki Kaisha Toshiba
- Atsuko Iida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED SENSOR AND CIRCUITRY AND PROCESS THEREFOR
- Publication number 20090140356
- Publication date Jun 4, 2009
- Evigia Systems, Inc.
- Navid Yazdi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF MANUFACTURING MICRODEVICES IN LAMINATES, LEAD FRAMES, PA...
- Publication number 20080283180
- Publication date Nov 20, 2008
- Mark Bachman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated quartz oscillator on an active electronic susbtrate
- Publication number 20080258829
- Publication date Oct 23, 2008
- HRL Laboratories, LLC
- Randall L. Kubena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED PASSIVE DEVICE AND METHOD OF FABRICATION
- Publication number 20080191293
- Publication date Aug 14, 2008
- FREESCALE SEMICONDUCTOR, INC.
- Lianjun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED SENSOR AND CIRCUITRY AND PROCESS THEREFOR
- Publication number 20080188059
- Publication date Aug 7, 2008
- Evigia Systems, Inc.
- Navid Yazdi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro electro mechanical system
- Publication number 20080096301
- Publication date Apr 24, 2008
- Sriram Ramamoorthi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integration of vacuum microelectronic device with integrated circuit
- Publication number 20070259465
- Publication date Nov 8, 2007
- Virgin Islands Microsystems, Inc.
- Jonathan Gorrell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for forming and sealing a cavity for an integrated MEMS device
- Publication number 20070224832
- Publication date Sep 27, 2007
- Peter Zurcher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED SENSOR AND CIRCUITRY AND PROCESS THEREFOR
- Publication number 20070029629
- Publication date Feb 8, 2007
- Evigia Systems, Inc.
- Navid Yazdi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated circuit on high performance chip
- Publication number 20060252229
- Publication date Nov 9, 2006
- Jean-Pierre Joly
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for preventing metal/silicon spiking in MEMS d...
- Publication number 20060110842
- Publication date May 25, 2006
- Yuh-Hwa Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Ltcc-based modular mems phased array
- Publication number 20050040988
- Publication date Feb 24, 2005
- Amir I. Zaghloul
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Module and method of making same
- Publication number 20030190776
- Publication date Oct 9, 2003
- The Regents of the University of Michigan
- Ark-Chew Wong
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Processes for integrating an electronic processing unit with a micromechanical structure not provided for in B81C1/0023 - B81C1/00246

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Composite structures

Component part having a MECS component on a mounting carrier

Microphone device

Two-port SRAM connection structure

Micromechanical component having a diaphragm

Microphone system with integrated passive device die

Physical quantity sensor, electronic apparatus, and moving object

Two-port SRAM connection structure

Apparatus comprising and a method for manufacturing an embedded MEM...

MEMS device with a capping substrate

MEMS fabrication process with two cavities operating at different p...

Physical quantity sensor, electronic apparatus, and moving object

Electronic device, integrated circuit, electronic apparatus, and mo...

Methods of manufacturing microdevices in laminates, lead frames, pa...

Apparatus comprising and a method for manufacturing an embedded MEM...

MEMS-microphone

Integration of vacuum microelectronic device with integrated circuit

Forming a micro electro mechanical system

Integrated circuit on high performance chip

Semiconductor device having an adhesive portion with a stacked stru...

Micro electro mechanical system

Electronic device and method of manufacturing same

Integrated quartz oscillator on an active electronic substrate

Integrated sensor and circuitry

Integrated sensor and circuitry and process therefor

Method for forming and sealing a cavity for an integrated MEMS device

Integrated passive device and method of fabrication

Integrated sensor and circuitry and process therefor

LTCC-based modular MEMS phased array

Module and method of making same

Patents Applicationslast 30 patents

SENSOR AND METHOD FOR REDUCING AN INTERFERENCE SIGNAL COMPONENT IN...

COMPOSITE STRUCTURES

MICROPHONE DEVICE

Two-Port SRAM Connection Structure

PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

ELECTRONIC DEVICE, INTEGRATED CIRCUIT, ELECTRONIC APPARATUS, AND MO...

PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

MEMS Device with a Capping Substrate

Microphone System with Integrated Passive Device Die

Apparatus Comprising and a Method for Manufacturing an Embedded MEM...

MICROMECHANICAL COMPONENT HAVING A DIAPHRAGM

MEMS-MICROPHONE

Forming a Micro Electro Mechanical System

INTEGRATION OF VACUUM MICROELECTRONIC DEVICE WITH INTEGRATED CIRCUIT

Electronic Device and Method of Manufacturing Same

Bonded Microfluidics System Comprising CMOS-Controllable Microfluid...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

INTEGRATED SENSOR AND CIRCUITRY AND PROCESS THEREFOR

METHODS OF MANUFACTURING MICRODEVICES IN LAMINATES, LEAD FRAMES, PA...

Integrated quartz oscillator on an active electronic susbtrate

INTEGRATED PASSIVE DEVICE AND METHOD OF FABRICATION

INTEGRATED SENSOR AND CIRCUITRY AND PROCESS THEREFOR

Micro electro mechanical system

Integration of vacuum microelectronic device with integrated circuit

Method for forming and sealing a cavity for an integrated MEMS device

INTEGRATED SENSOR AND CIRCUITRY AND PROCESS THEREFOR

Integrated circuit on high performance chip

Method and apparatus for preventing metal/silicon spiking in MEMS d...

Ltcc-based modular mems phased array

Module and method of making same