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B81C2201/0128
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
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B81C2201/0128
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Patents Grants
last 30 patents
Information
Patent Grant
Manufacturing method of semiconductor structure
Patent number
11,708,262
Issue date
Jul 25, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Yi-Hsien Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Plasma assisted method of accurate alignment and pre-bonding for mi...
Patent number
9,842,749
Issue date
Dec 12, 2017
Beijing University of Technology
Guangsheng Guo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for producing air gaps in microstructures, especially of th...
Patent number
8,026,165
Issue date
Sep 27, 2011
Commissariat a l'Energie Atomique
Aziz Zenasni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stamper-forming electrode material, stamper-forming thin film, and...
Patent number
6,849,390
Issue date
Feb 1, 2005
Pioneer Corporation
Masahiro Katsumura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Formation of microstructures using a preformed photoresist sheet
Patent number
5,576,147
Issue date
Nov 19, 1996
Wisconsin Alumni Research Foundation
Henry Guckel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Formation of microstructures using a preformed photoresist sheet
Patent number
5,496,668
Issue date
Mar 5, 1996
Wisconsin Alumni Research Foundation
Henry Guckel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Formation of microstructures using a preformed photoresist sheet
Patent number
5,378,583
Issue date
Jan 3, 1995
Wisconsin Alumni Research Foundation
Henry Guckel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a plurality of plate shaped microstructured me...
Patent number
4,661,212
Issue date
Apr 28, 1987
Kernforschungszentrum Kalrsruhe GmbH
Wolfgang Ehrfeld
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS AND METHODS FOR FABRICATING METALLIC MICROCHANNELS
Publication number
20230042108
Publication date
Feb 9, 2023
Brigham Young University
Henry Davis
B22 - CASTING POWDER METALLURGY
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
Publication number
20220185656
Publication date
Jun 16, 2022
Taiwan Semiconductor Manufacturing company Ltd.
YI-HSIEN CHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Plasma assisted method of accurate alignment and pre-bonding for mi...
Publication number
20170301564
Publication date
Oct 19, 2017
BEIJING UNIVERSITY OF TECHNOLOGY
Guangsheng Guo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Process for Producing Air Gaps in Microstructures, Especially of th...
Publication number
20090280638
Publication date
Nov 12, 2009
COMMISSARIAT A L'ENERGIE ATOMIQUE
Aziz ZENASNI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Process for Producing Air Gaps in Microstructures, Especially of th...
Publication number
20090280644
Publication date
Nov 12, 2009
COMMISSARIAT A L'ENERGIE ATOMIQUE
Aziz ZENASNI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Stamper-forming electrode material, stamper-forming thin film, and...
Publication number
20020153625
Publication date
Oct 24, 2002
PIONEER CORPORATION
Masahiro Katsumura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Stamper-forming electrode material, stamper-forming thin film, and...
Publication number
20020150840
Publication date
Oct 17, 2002
PIONEER CORPORATION
Masahiro Katsumura
B81 - MICRO-STRUCTURAL TECHNOLOGY