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PiRL: Polyimide Release Layer, brochure from Brewer Science, Inc. |
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J. Mohr, et al., "Fabrication of Microsensor and Microactuator Elements by the LIGA-Process," Proceedings of Transducers '91, San Francisco, CA, Jun. 24-27, 1991, pp. 607-609. |
H. Guckel, et al., "Fabrication and Testing of the Planar Magnetic Micromotor Journal of Micromechanics and Microengineering", IOP Publishing, England, vol. 1, No. 3, Dec. 1991. |
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H. Guckel, "On the Application of Deep X-Ray Lithography and Metal Plating to Micromechanics and Micromagnetics," The Second Int'l. Symp. on MicroMachine and Human Science, Nagoya, Japan, Oct. 8 and 9, 1991. |
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