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G01B9/02052
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Parent Industries
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PHYSICS
G01
Measuring instruments
G01B
MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
G01B9/00
Instruments as specified in the subgroups and characterised by the use of optical measuring means
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G01B9/02052
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Patents Grants
last 30 patents
Information
Patent Grant
Chamber for vibrational and environmental isolation of thin wafers
Patent number
11,555,791
Issue date
Jan 17, 2023
Corning Incorporated
John Weston Frankovich
G01 - MEASURING TESTING
Information
Patent Grant
Retro-reflective interferometer
Patent number
11,092,478
Issue date
Aug 17, 2021
X-BEAMER TECHNOLOGIES LTD.
Igal Zlochin
G01 - MEASURING TESTING
Information
Patent Grant
Pressure insensitive interferometer
Patent number
10,352,685
Issue date
Jul 16, 2019
Geospace Technologies Corporation
Willard Womack
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus to reduce pressure and thermal sensitivity of high precis...
Patent number
10,209,057
Issue date
Feb 19, 2019
Baker Hughes, a GE company, LLC
Carl M. Edwards
E21 - EARTH DRILLING MINING
Information
Patent Grant
Durable single mode fiber probe with optimized reference reflectivity
Patent number
9,175,944
Issue date
Nov 3, 2015
The Johns Hopkins University
Jin U. Kang
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Method and apparatus for improving the temperature stability and mi...
Patent number
8,621,945
Issue date
Jan 7, 2014
KLA Tencor
An Andrew Zeng
G05 - CONTROLLING REGULATING
Information
Patent Grant
System and method for effective isolation of an interferometer
Patent number
8,474,782
Issue date
Jul 2, 2013
Baker Hughes Incorporated
David Dixon
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
System and method for determining positions of structures on a subs...
Patent number
7,978,340
Issue date
Jul 12, 2011
Vistec Semiconductor Systems GmbH
Hans-Artur Boesser
G01 - MEASURING TESTING
Information
Patent Grant
Coordinate measuring machine for measuring structures on a substrate
Patent number
7,961,334
Issue date
Jun 14, 2011
Vistec Semiconductor Systems GmbH
Hans-Artur Boesser
G01 - MEASURING TESTING
Information
Patent Grant
Method for determining positions of structures on a substrate
Patent number
7,948,635
Issue date
May 24, 2011
Vistec Semiconductor Systems GmbH
Katrin Pietsch
G01 - MEASURING TESTING
Information
Patent Grant
Precision length standard for coherent laser radar
Patent number
7,925,134
Issue date
Apr 12, 2011
Nikon Metrology NV
Anthony Slotwinski
G01 - MEASURING TESTING
Information
Patent Grant
Interferometry system chamber viewing window
Patent number
7,719,693
Issue date
May 18, 2010
The Aerospace Corporation
Jon V. Osborn
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and device for measuring wall thickness of a pipe in a pipe-...
Patent number
7,116,428
Issue date
Oct 3, 2006
SMS Meer GmbH
Martin Sauerland
G01 - MEASURING TESTING
Information
Patent Grant
Compensating for effects of non-isotropic gas mixtures in interfero...
Patent number
7,042,574
Issue date
May 9, 2006
Zygo Corporation
Henry A. Hill
G01 - MEASURING TESTING
Information
Patent Grant
Compensating for effects of variations in gas refractivity in inter...
Patent number
6,842,256
Issue date
Jan 11, 2005
Zygo Corporation
Henry A. Hill
G01 - MEASURING TESTING
Information
Patent Grant
Optical interferometric measuring instrument and laser interference...
Patent number
6,697,162
Issue date
Feb 24, 2004
Mitutoyo Corporation
Hisayoshi Sakai
G01 - MEASURING TESTING
Information
Patent Grant
Method of supporting reference plate for lightwave interferometer
Patent number
6,556,304
Issue date
Apr 29, 2003
Fuji Photo Optical Co., Ltd.
Hiroshi Shibamoto
G01 - MEASURING TESTING
Information
Patent Grant
Stage control method using a temperature
Patent number
6,407,799
Issue date
Jun 18, 2002
Nikon Corporation
Hideaki Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Displaceable X/Y coordinate measurement table
Patent number
6,347,458
Issue date
Feb 19, 2002
Leica Microsystems Wetzlar GmbH
Ulrich Kaczynski
G01 - MEASURING TESTING
Information
Patent Grant
Length measuring machine and method using laser beams
Patent number
6,034,773
Issue date
Mar 7, 2000
Mitutoyo Corporation
Kunitoshi Nishimura
G01 - MEASURING TESTING
Information
Patent Grant
Stage apparatus and a stage control method
Patent number
5,959,732
Issue date
Sep 28, 1999
Nikon Corporation
Hideaki Hara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Distance measuring device based on laser interference with a baffle...
Patent number
5,875,031
Issue date
Feb 23, 1999
Nikon Corporation
Soichi Owa
G01 - MEASURING TESTING
Information
Patent Grant
Laser interferometer having a sheath for the laser beam
Patent number
5,708,505
Issue date
Jan 13, 1998
Nikon Corporation
Michael Reid Sogard
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser interferometer for measuring object displacement over large d...
Patent number
5,638,177
Issue date
Jun 10, 1997
Renishaw plc
Raymond J. Chaney
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus for measuring position of an X-Y stage
Patent number
5,552,888
Issue date
Sep 3, 1996
Nikon Precision, Inc.
Michael R. Sogard
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stage-position measuring apparatus
Patent number
5,469,260
Issue date
Nov 21, 1995
Nikon Corporation
Shinichi Takagi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser referencing system for refractively scanning interferometer
Patent number
5,155,551
Issue date
Oct 13, 1992
Research Cottrell Technologies, Inc.
D. Warren Vidrine
G01 - MEASURING TESTING
Information
Patent Grant
Laser interferometer for inspecting the surface of a specimen
Patent number
5,127,734
Issue date
Jul 7, 1992
Fuji Photo Optical Co., Ltd.
Shigenori Ohi
G01 - MEASURING TESTING
Information
Patent Grant
Ruggedized compact interferometer requiring minimum isolation from...
Patent number
4,693,603
Issue date
Sep 15, 1987
Midac Corporation
Gerald L. Auth
G01 - MEASURING TESTING
Information
Patent Grant
Precision measuring apparatus having a measuring interval sealed fr...
Patent number
4,377,036
Issue date
Mar 22, 1983
Dr. Johannes Heidenhain GmbH
Holmer Dangschat
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
OPTICAL SAFETY DEVICE
Publication number
20240245298
Publication date
Jul 25, 2024
Canon U.S.A., Inc.
Badr Elmaanaoui
G01 - MEASURING TESTING
Information
Patent Application
PRESSURE INSENSITIVE INTERFEROMETER
Publication number
20170363412
Publication date
Dec 21, 2017
PGS GEOPHYSICAL AS
Willard Womack
G02 - OPTICS
Information
Patent Application
APPARATUS TO REDUCE PRESSURE AND THERMAL SENSITIVITY OF HIGH PRECIS...
Publication number
20170082422
Publication date
Mar 23, 2017
BAKER HUGHES INCORPORATED
CARL M. EDWARDS
G01 - MEASURING TESTING
Information
Patent Application
DURABLE SINGLE MODE FIBER PROBE WITH OPTIMIZED REFERENCE REFLECTIVITY
Publication number
20140160485
Publication date
Jun 12, 2014
The Johns Hopkins University
Jin U. Kang
G02 - OPTICS
Information
Patent Application
OPTICAL MODULE
Publication number
20140078508
Publication date
Mar 20, 2014
FUJITSU OPTICAL COMPONENTS LIMITED
Hirofumi AOTA
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL INTERFEROMETER SYSTEM WITH DAMPED VIBRATION AND NOISE EFFEC...
Publication number
20120307255
Publication date
Dec 6, 2012
Chang Seok KIM
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPAATUS FOR IMPROVING THE TEMPERATURE STABILITY AND MIN...
Publication number
20120118061
Publication date
May 17, 2012
KLA-Tencor Corporation
An Andrew Zeng
G05 - CONTROLLING REGULATING
Information
Patent Application
System and Method for Effective Isolation of an Interferometer
Publication number
20110261361
Publication date
Oct 27, 2011
BAKER HUGHES INCORPORATED
David Dixon
G01 - MEASURING TESTING
Information
Patent Application
PRECISION LENGTH STANDARD FOR COHERENT LASER RADAR
Publication number
20090323077
Publication date
Dec 31, 2009
METRIS USA, INC.
Anthony Slotwinski
G01 - MEASURING TESTING
Information
Patent Application
Method for determining positions of structures on a substrate
Publication number
20090109443
Publication date
Apr 30, 2009
Vistec Semiconductor Systems GmbH
Katrin Pietsch
G01 - MEASURING TESTING
Information
Patent Application
Coordinate measuring machine for measuring structures on a substrate
Publication number
20090031572
Publication date
Feb 5, 2009
Vistec Semiconductor Systems GmbH
Hans-Artur Boesser
G01 - MEASURING TESTING
Information
Patent Application
System and method for determining positions of structures on a subs...
Publication number
20090033508
Publication date
Feb 5, 2009
Vistec Semiconductor Systems GmbH
Hans-Artur Boesser
G01 - MEASURING TESTING
Information
Patent Application
Interferometry system chamber viewing window
Publication number
20080259344
Publication date
Oct 23, 2008
Jon V. Osborn
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR REDUCING CONVECTION CURRENT EFFECTS IN THE OP...
Publication number
20080236306
Publication date
Oct 2, 2008
Michael J. Mater
G01 - MEASURING TESTING
Information
Patent Application
APPARATUS FOR MEASURING THE POSITION OF AN OBJECT WITH A LASER INTE...
Publication number
20070103696
Publication date
May 10, 2007
Vistec Semiconductor Systems GmbH
Harald Pohlmann
G01 - MEASURING TESTING
Information
Patent Application
Precision length standard for coherent laser radar
Publication number
20060280415
Publication date
Dec 14, 2006
Anthony Slotwinski
G01 - MEASURING TESTING
Information
Patent Application
Interferometry measurement in disturbed environments
Publication number
20060256345
Publication date
Nov 16, 2006
KLA-Tencor Technologies Corp.
Romain Sappey
G01 - MEASURING TESTING
Information
Patent Application
Method and device for measuring wall thickness of a pipe in a pipe-...
Publication number
20050162662
Publication date
Jul 28, 2005
SMS Meer GmbH
Martin Sauerland
G01 - MEASURING TESTING
Information
Patent Application
Coherent beam device for observing and measuring sample
Publication number
20050146730
Publication date
Jul 7, 2005
Junji Endo
G01 - MEASURING TESTING
Information
Patent Application
Compensating for effects of variations in gas refractivity in inter...
Publication number
20030151750
Publication date
Aug 14, 2003
Henry A. Hill
G01 - MEASURING TESTING
Information
Patent Application
Compensating for effects of non-isotropic gas mixtures in interfero...
Publication number
20030128369
Publication date
Jul 10, 2003
Henry A. Hill
G01 - MEASURING TESTING
Information
Patent Application
Interferometric measuring arrangement for superimposing at least tw...
Publication number
20020122181
Publication date
Sep 5, 2002
Medizinisches Laserzentrum Lubeck GmbH
Peter Koch
G01 - MEASURING TESTING
Information
Patent Application
A STAGE CONTROL METHOD USING A TEMPERATURE
Publication number
20020015139
Publication date
Feb 7, 2002
HIDEAKI HARA
G01 - MEASURING TESTING