Protection against shocks or vibrations

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CPC
B81B7/0016

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B7/00Micro-structural systems; Auxiliary parts of micro-structural devices or systems

Current Industry

B81B7/0016Protection against shocks or vibrations

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Piezoelectric micromachined ultrasonic transducer having a polymeri...
- Patent number 12,195,327
- Issue date Jan 14, 2025
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical arm array in micro-electromechanical system (MEMS)...
- Patent number 12,176,829
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mems device, electronic apparatus, and vehicle
- Patent number 12,130,303
- Issue date Oct 29, 2024
- Seiko Epson Corporation
- Fumiya Ito
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for vibration immunity to suppress bias errors in sensor de...
- Patent number 12,012,327
- Issue date Jun 18, 2024
- Honeywell International Inc.
- Daniel Endean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing damper structures on a micromechanical wafer
- Patent number 11,873,216
- Issue date Jan 16, 2024
- Robert Bosch GmbH
- Michael Stumber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrasonic MEMS acoustic transducer with reduced stress sensitivity...
- Patent number 11,865,581
- Issue date Jan 9, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, electronic apparatus, and vehicle
- Patent number 11,867,716
- Issue date Jan 9, 2024
- Seiko Epson Corporation
- Fumiya Ito
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration sensor
- Patent number 11,856,360
- Issue date Dec 26, 2023
- Sonion Nederland B.V.
- Peter Christian Post
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration damping in MEMS acceleration sensors
- Patent number 11,820,648
- Issue date Nov 21, 2023
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical membrane transducer with active damper
- Patent number 11,807,519
- Issue date Nov 7, 2023
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical arm array in micro-electromechanical system (MEMS)...
- Patent number 11,757,378
- Issue date Sep 12, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fused quartz dual shell resonator and method of fabrication
- Patent number 11,703,330
- Issue date Jul 18, 2023
- The Regents of the University of California
- Andrei M. Shkel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor and inertial measurement unit
- Patent number 11,693,023
- Issue date Jul 4, 2023
- Seiko Epson Corporation
- Teruo Takizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS vibrator and MEMS oscillator
- Patent number 11,655,145
- Issue date May 23, 2023
- Kaneka Corporation
- Junji Sone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, electronic apparatus, and vehicle
- Patent number 11,604,208
- Issue date Mar 14, 2023
- Seiko Epson Corporation
- Fumiya Ito
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integration of stress decoupling and particle filter on a single wa...
- Patent number 11,505,450
- Issue date Nov 22, 2022
- Infineon Technologies AG
- Florian Brandl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a micromechanical device having a damper struc...
- Patent number 11,505,455
- Issue date Nov 22, 2022
- Robert Bosch GmbH
- Holger Hoefer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device and method for manufacturing a micromechanic...
- Patent number 11,486,782
- Issue date Nov 1, 2022
- Robert Bosch GmbH
- Friedjof Heuck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing damper structures on a micromechanical wafer
- Patent number 11,472,698
- Issue date Oct 18, 2022
- Robert Bosch GmbH
- Michael Stumber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal airflow sensor
- Patent number 11,391,611
- Issue date Jul 19, 2022
- Hitachi Astemo, Ltd.
- Ryosuke Doi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low-noise multi axis MEMS accelerometer
- Patent number 11,377,346
- Issue date Jul 5, 2022
- Murata Manufacturing Co., Ltd.
- Hannu Vesterinen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device having two buried cavities and manu...
- Patent number 11,358,862
- Issue date Jun 14, 2022
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration sensor
- Patent number 11,350,208
- Issue date May 31, 2022
- Sonion Nederland B.V.
- Peter Christiaan Post
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration isolator platform with electronic acceleration compensation
- Patent number 11,332,362
- Issue date May 17, 2022
- BLILEY TECHNOLOGIES, INC.
- Jay Mitchell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of manufacture of microisolators and devices for mechanical...
- Patent number 11,312,619
- Issue date Apr 26, 2022
- ENGENIUSMICRO, LLC
- Brian A. English
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure for offset minimization of out-of-plane sensing acce...
- Patent number 11,231,441
- Issue date Jan 25, 2022
- Invensense, Inc.
- Giacomo Laghi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator structures resistant to shock
- Patent number 11,124,411
- Issue date Sep 21, 2021
- MEMS DRIVE (NANJING) CO., LTD
- Gerardo Morabito
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoresistive detection resonant device in particular with large v...
- Patent number 11,125,632
- Issue date Sep 21, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Patrice Rey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structure-borne noise decoupling on sensors working with transmitte...
- Patent number 11,118,908
- Issue date Sep 14, 2021
- Continental Teves AG & Co. oHG
- Thomas Fischer
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Shock caging features for MEMS actuator structures
- Patent number 11,104,570
- Issue date Aug 31, 2021
- MEMS DRIVE (NANJING) CO., LTD
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS ACOUSTIC ELEMENT
- Publication number 20250039611
- Publication date Jan 30, 2025
- Murata Manufacturing Co., Ltd.
- Ryosuke NIWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device, Electronic Apparatus, And Vehicle
- Publication number 20250012829
- Publication date Jan 9, 2025
- SEIKO EPSON CORPORATION
- Fumiya ITO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION
- Publication number 20240400380
- Publication date Dec 5, 2024
- STMicroelectronics International N.V.
- Patrick FEDELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
- Publication number 20240383005
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kang-Yi Lien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STOPPER BUMP STRUCTURES FOR MEMS DEVICE
- Publication number 20240375939
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Jhih Mao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMIRROR CHIP PACKAGE STRUCTURE, LASER DEVICE, AND VEHICLE
- Publication number 20240208803
- Publication date Jun 27, 2024
- Huawei Technologies Co., Ltd
- Jiahao WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STOPPER BUMP ON ROTOR
- Publication number 20240190698
- Publication date Jun 13, 2024
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device, Electronic Apparatus, And Vehicle
- Publication number 20240094239
- Publication date Mar 21, 2024
- SEIKO EPSON CORPORATION
- Fumiya ITO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER
- Publication number 20240034618
- Publication date Feb 1, 2024
- STMicroelectronics S.r.l.
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL ARM ARRAY IN MICRO-ELECTROMECHANICAL SYSTEM (MEMS)...
- Publication number 20230396189
- Publication date Dec 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SENSOR STRUCTURE WITH DAMPING STRUCTURE
- Publication number 20230331544
- Publication date Oct 19, 2023
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND SYSTEMS FOR FABRICATION OF ULTRASOUND TRANSDUCER DEVICES
- Publication number 20230303389
- Publication date Sep 28, 2023
- eXo Imaging, Inc.
- Liang WANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STOPPER BUMP STRUCTURES FOR MEMS DEVICE
- Publication number 20230257256
- Publication date Aug 17, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Jhih Mao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device, Electronic Apparatus, And Vehicle
- Publication number 20230176086
- Publication date Jun 8, 2023
- SEIKO EPSON CORPORATION
- Fumiya ITO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
- Publication number 20230036136
- Publication date Feb 2, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Kang-Yi Lien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION ISOLATOR PLATFORM WITH ELECTRONIC ACCELERATION COMPENSATION
- Publication number 20220234884
- Publication date Jul 28, 2022
- Bliley Technologies, Inc.
- Jay MITCHELL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION SENSOR
- Publication number 20220182753
- Publication date Jun 9, 2022
- Sonion Nederland BV
- Peter Christiaan Post
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM
- Publication number 20220171341
- Publication date Jun 2, 2022
- TIMEX GROUP USA, INC.
- Wolfgang Burkhardt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER HAVING REDUCED FR...
- Publication number 20220119246
- Publication date Apr 21, 2022
- STMicroelectronics S.r.l.
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER
- Publication number 20220118480
- Publication date Apr 21, 2022
- STMicroelectronics S.r.l.
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING DAMPER STRUCTURES ON A MICROMECHANICAL WAFER
- Publication number 20220024757
- Publication date Jan 27, 2022
- ROBERT BOSCH GmbH
- Michael Stumber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertial Sensor And Inertial Measurement Unit
- Publication number 20220011339
- Publication date Jan 13, 2022
- SEIKO EPSON CORPORATION
- Teruo TAKIZAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER
- Publication number 20210395075
- Publication date Dec 23, 2021
- STMicroelectronics S.r.l.
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING DAMPER STRUCTURES ON A MICROMECHANICAL WAFER
- Publication number 20210323810
- Publication date Oct 21, 2021
- ROBERT BOSCH GmbH
- Michael Stumber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR VIBRATION IMMUNITY TO SUPPRESS BIAS ERRORS IN SENSOR DE...
- Publication number 20210284527
- Publication date Sep 16, 2021
- Honeywell International Inc.
- Daniel Endean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, ELECTRONIC APPARATUS, AND VEHICLE
- Publication number 20210255214
- Publication date Aug 19, 2021
- SEIKO EPSON CORPORATION
- Fumiya ITO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL DEVICE HAVING A DAMPER STRUC...
- Publication number 20210179422
- Publication date Jun 17, 2021
- ROBERT BOSCH GmbH
- Holger Hoefer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION DAMPING IN MEMS ACCELERATION SENSORS
- Publication number 20210171337
- Publication date Jun 10, 2021
- MURATA MANUFACTURING CO., LTD.
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING A MICROMECHANIC...
- Publication number 20210131897
- Publication date May 6, 2021
- ROBERT BOSCH GmbH
- Friedjof Heuck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW-NOISE MULTI AXIS MEMS ACCELEROMETER
- Publication number 20210070609
- Publication date Mar 11, 2021
- Murata Manufacturing Co., Ltd.
- Hannu VESTERINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Protection against shocks or vibrations

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Piezoelectric micromachined ultrasonic transducer having a polymeri...

Micromechanical arm array in micro-electromechanical system (MEMS)...

Mems device, electronic apparatus, and vehicle

Methods for vibration immunity to suppress bias errors in sensor de...

Method for producing damper structures on a micromechanical wafer

Ultrasonic MEMS acoustic transducer with reduced stress sensitivity...

MEMS device, electronic apparatus, and vehicle

Vibration sensor

Vibration damping in MEMS acceleration sensors

Microelectromechanical membrane transducer with active damper

Micromechanical arm array in micro-electromechanical system (MEMS)...

Fused quartz dual shell resonator and method of fabrication

Inertial sensor and inertial measurement unit

MEMS vibrator and MEMS oscillator

MEMS device, electronic apparatus, and vehicle

Integration of stress decoupling and particle filter on a single wa...

Method for producing a micromechanical device having a damper struc...

Micromechanical device and method for manufacturing a micromechanic...

Method for producing damper structures on a micromechanical wafer

Thermal airflow sensor

Low-noise multi axis MEMS accelerometer

Micro-electro-mechanical device having two buried cavities and manu...

Vibration sensor

Vibration isolator platform with electronic acceleration compensation

Methods of manufacture of microisolators and devices for mechanical...

MEMS structure for offset minimization of out-of-plane sensing acce...

MEMS actuator structures resistant to shock

Piezoresistive detection resonant device in particular with large v...

Structure-borne noise decoupling on sensors working with transmitte...

Shock caging features for MEMS actuator structures

Patents Applicationslast 30 patents

MEMS ACOUSTIC ELEMENT

MEMS Device, Electronic Apparatus, And Vehicle

MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME

STOPPER BUMP STRUCTURES FOR MEMS DEVICE

MICROMIRROR CHIP PACKAGE STRUCTURE, LASER DEVICE, AND VEHICLE

STOPPER BUMP ON ROTOR

MEMS Device, Electronic Apparatus, And Vehicle

MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER

MICROMECHANICAL ARM ARRAY IN MICRO-ELECTROMECHANICAL SYSTEM (MEMS)...

MICROMECHANICAL SENSOR STRUCTURE WITH DAMPING STRUCTURE

METHODS AND SYSTEMS FOR FABRICATION OF ULTRASOUND TRANSDUCER DEVICES

STOPPER BUMP STRUCTURES FOR MEMS DEVICE

MEMS Device, Electronic Apparatus, And Vehicle

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME

VIBRATION ISOLATOR PLATFORM WITH ELECTRONIC ACCELERATION COMPENSATION

VIBRATION SENSOR

BIDIRECTIONAL MEMS DRIVING ARRANGEMENTS WITH A FORCE ABSORBING SYSTEM

PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER HAVING REDUCED FR...

PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER

METHOD FOR PRODUCING DAMPER STRUCTURES ON A MICROMECHANICAL WAFER

Inertial Sensor And Inertial Measurement Unit

MICROELECTROMECHANICAL MEMBRANE TRANSDUCER WITH ACTIVE DAMPER

METHOD FOR PRODUCING DAMPER STRUCTURES ON A MICROMECHANICAL WAFER

METHODS FOR VIBRATION IMMUNITY TO SUPPRESS BIAS ERRORS IN SENSOR DE...

MEMS DEVICE, ELECTRONIC APPARATUS, AND VEHICLE

METHOD FOR PRODUCING A MICROMECHANICAL DEVICE HAVING A DAMPER STRUC...

VIBRATION DAMPING IN MEMS ACCELERATION SENSORS

MICROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING A MICROMECHANIC...

LOW-NOISE MULTI AXIS MEMS ACCELEROMETER