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Providing protection of elements to be released by etching of sacrificial element; Avoiding stiction problems
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H01H2001/0089
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ELECTRICITY
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Electric elements
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ELECTRIC SWITCHES RELAYS SELECTORS EMERGENCY PROTECTIVE DEVICES
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H01H2001/0089
Providing protection of elements to be released by etching of sacrificial element; Avoiding stiction problems
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Patents Grants
last 30 patents
Information
Patent Grant
Microelectromechanical switch with metamaterial contacts
Patent number
10,784,066
Issue date
Sep 22, 2020
Synergy Microwave Corporation
Shiban K. Koul
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Elimination of silicon residues from MEMS cavity floor
Patent number
8,921,165
Issue date
Dec 30, 2014
Cavendish Kinetics, Inc.
Brian I. Troy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for implementation of a switching function in a microscale...
Patent number
8,420,427
Issue date
Apr 16, 2013
Wispry, Inc.
Shawn Jay Cunningham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having electrothermal actuation and release and method...
Patent number
8,264,054
Issue date
Sep 11, 2012
Wispry, Inc.
Shawn Jay Cunningham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
High voltage switch and method of making
Patent number
8,054,147
Issue date
Nov 8, 2011
General Electric Company
David Cecil Hays
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
MEMS piezoelectric switch
Patent number
7,786,653
Issue date
Aug 31, 2010
Northrop Grumman Systems Corporation
Carl B. Freidhoff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating a microelectromechanical system (MEMS) switch
Patent number
7,657,995
Issue date
Feb 9, 2010
International Business Machines Corporation
Louis Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Micro electromechanical switch and method of manufacturing the same
Patent number
7,463,126
Issue date
Dec 9, 2008
Omron Corporation
Takahiro Masuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High-reliability micro-electro-mechanical system (MEMS) switch appa...
Patent number
7,414,500
Issue date
Aug 19, 2008
Hector J. De Los Santos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure and method of fabricating a hinge type MEMS switch
Patent number
7,348,870
Issue date
Mar 25, 2008
International Business Machines Corporation
Louis C. Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
MEM switching device
Patent number
7,317,232
Issue date
Jan 8, 2008
Cabot Microelectronics Corporation
Heinz H. Busta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Trilayered beam MEMS device and related methods
Patent number
6,917,086
Issue date
Jul 12, 2005
Turnstone Systems, Inc.
Shawn Jay Cunningham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrothermal self-latching MEMS switch and method
Patent number
6,882,264
Issue date
Apr 19, 2005
Wispry, Inc.
Shawn Jay Cunningham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having a trilayered beam and related methods
Patent number
6,876,047
Issue date
Apr 5, 2005
Turnstone Systems, Inc.
Shawn Jay Cunningham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having contact and standoff bumps and related methods
Patent number
6,876,482
Issue date
Apr 5, 2005
Turnstone Systems, Inc.
Dana Richard DeReus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-scale interconnect device with internal heat spreader and met...
Patent number
6,847,114
Issue date
Jan 25, 2005
Turnstone Systems, Inc.
Subham Sett
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electromechanical switch having a conductive compressible ele...
Patent number
6,836,029
Issue date
Dec 28, 2004
International Business Machines Corporation
David R. Greenberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having flexures with non-linear restoring force
Patent number
6,806,545
Issue date
Oct 19, 2004
Samsung Electronics Co., Ltd.
Dong-ha Shim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microswitch and method of manufacturing the same
Patent number
6,753,488
Issue date
Jun 22, 2004
Kabushiki Kaisha Toshiba
Tomio Ono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Trilayered beam MEMS device and related methods
Patent number
6,746,891
Issue date
Jun 8, 2004
Turnstone Systems, Inc.
Shawn Jay Cunningham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-switching device actuated by low voltage
Patent number
6,700,465
Issue date
Mar 2, 2004
Samsung Electronics Co., Ltd.
Jin-woo Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device adapted to pull a cantilever away from a contact structure
Patent number
6,646,215
Issue date
Nov 11, 2003
Teravicin Technologies, Inc.
Richard D. Nelson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical RF switch
Patent number
6,639,494
Issue date
Oct 28, 2003
Northrop Grumman Corporation
Nathan Bluzer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic microrelay
Patent number
6,486,425
Issue date
Nov 26, 2002
Omron Corporation
Tomonori Seki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Micro-electromechanical switch
Patent number
6,307,169
Issue date
Oct 23, 2001
Motorola Inc.
Xi-Qing Sun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for making micromechanical switch
Patent number
5,262,000
Issue date
Nov 16, 1993
British Telecommunications public limited company
Anthony D. Welbourn
G02 - OPTICS
Information
Patent Grant
Thin film orthogonal microsensor for air flow and method
Patent number
4,914,742
Issue date
Apr 3, 1990
Honeywell Inc.
Robert E. Higashi
G01 - MEASURING TESTING
Information
Patent Grant
Method for making thin film orthogonal microsensor for air flow
Patent number
4,895,616
Issue date
Jan 23, 1990
Honeywell Inc.
Robert E. Higashi
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
VARIABLE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCH
Publication number
20220199333
Publication date
Jun 23, 2022
Universite De Limoges
Romain Stefanini
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VARIABLE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCH
Publication number
20200321166
Publication date
Oct 8, 2020
Universite De Limoges
Romain Stefanini
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS DUAL SUBSTRATE SWITCH WITH MAGNETIC ACTUATION
Publication number
20190066937
Publication date
Feb 28, 2019
Innovative Micro Technology
Christopher S. GUDEMAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROELECTROMECHANICAL SWITCH WITH METAMATERIAL CONTACTS
Publication number
20180261415
Publication date
Sep 13, 2018
Synergy Microwave Corporation
Shiban K. Koul
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELIMINATION OF SILICON RESIDUES FROM MEMS CAVITY FLOOR
Publication number
20130032453
Publication date
Feb 7, 2013
CAVENDISH KINETICS INC.
Brian I. Troy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HIGH VOLTAGE SWITCH AND METHOD OF MAKING
Publication number
20100252403
Publication date
Oct 7, 2010
GENERAL ELECTRIC COMPANY
David Cecil Hays
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS PIEZOELECTRIC SWITCH
Publication number
20090009030
Publication date
Jan 8, 2009
NORTHROP GRUMMAN SYSTEMS CORPORATION
Carl B. Freidhoff
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEM switching device and method for making same
Publication number
20080093691
Publication date
Apr 24, 2008
Cabot Microelectronics Corporation
Heinz H. Busta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE AND METHOD OF FABRICATING A HINGE TYPE MEMS SWITCH
Publication number
20080014663
Publication date
Jan 17, 2008
International Business Machines Corporation
Louis Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for implementation of a switching function in a microscale...
Publication number
20070158775
Publication date
Jul 12, 2007
Wispry, Inc.
Shawn Jay Cunningham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micro electromechanical switch and method of manufacturing the same
Publication number
20060208837
Publication date
Sep 21, 2006
Omron Corporation
Takahiro Masuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE AND METHOD OF FABRICATING A HINGE TYPE MEMS SWITCH
Publication number
20060145792
Publication date
Jul 6, 2006
International Business Machines Corporation
Louis C. Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High-reliability micro-electro-mechanical system (MEMS) switch appa...
Publication number
20050178646
Publication date
Aug 18, 2005
Hector J. De Los Santos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEM switching device and method for making same
Publication number
20050040484
Publication date
Feb 24, 2005
Heinz H. Busta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Micro-scale interconnect device with internal heat spreader and met...
Publication number
20040197960
Publication date
Oct 7, 2004
Subham Sett
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Trilayered beam MEMS device and related methods
Publication number
20040188785
Publication date
Sep 30, 2004
Shawn Jay Cunningham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROSWITCH AND METHOD OF MANUFACTURING THE SAME
Publication number
20040075514
Publication date
Apr 22, 2004
Tomio Ono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS device having electrothermal actuation and release and method...
Publication number
20040012298
Publication date
Jan 22, 2004
Coventor, Inc.
Shawn Jay Cunningham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electrothermal self-latching MEMS switch and method
Publication number
20030117257
Publication date
Jun 26, 2003
Coventor, Inc.
Shawn Jay Cunningham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS device having contact and standoff bumps and related methods
Publication number
20030116417
Publication date
Jun 26, 2003
Coventor, Inc.
Dana Richard DeReus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Trilayered beam MEMS device and related methods
Publication number
20030119221
Publication date
Jun 26, 2003
Coventor, Inc.
Shawn Jay Cunningham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micro-scale interconnect device with internal heat spreader and met...
Publication number
20030116851
Publication date
Jun 26, 2003
Coventor, Inc.
Subham Sett
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS device having a trilayered beam and related methods
Publication number
20030116848
Publication date
Jun 26, 2003
Coventor, Inc.
Shawn Jay Cunningham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micro-electromechanical switch having a conductive compressible ele...
Publication number
20030098618
Publication date
May 29, 2003
International Business Machines Corporation
David R. Greenberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micro-switching device actuated by low voltage
Publication number
20030099081
Publication date
May 29, 2003
SAMSUNG ELECTRONICS CO., LTD.
Jin-Woo Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS device having flexures with non-linear restoring force
Publication number
20020149071
Publication date
Oct 17, 2002
SAMSUNG ELECTRONICS CO., LTD.
Dong-Ha Shim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Radio device and measuring device utilizing electrostatic microrela...
Publication number
20020005341
Publication date
Jan 17, 2002
Tomonori Seki
H01 - BASIC ELECTRIC ELEMENTS