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G03F7/7035
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PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F7/00
Photomechanical
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G03F7/7035
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Patents Grants
last 30 patents
Information
Patent Grant
High uniformity telecentric illuminator
Patent number
11,868,049
Issue date
Jan 9, 2024
Innovations In Optics, Inc.
Thomas J. Brukilacchio
G02 - OPTICS
Information
Patent Grant
Fabrication method of holographic security label
Patent number
11,846,888
Issue date
Dec 19, 2023
KAUNAS UNIVERSITY OF TECHNOLOGY
Viktoras Grigaliunas
B42 - BOOKBINDING ALBUMS FILES SPECIAL PRINTED MATTER
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
11,809,087
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Kai-Chieh Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and method of manufacturing article
Patent number
11,762,299
Issue date
Sep 19, 2023
Canon Kabushiki Kaisha
Keiji Emoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate stage, substrate processing system using the same, and me...
Patent number
11,747,741
Issue date
Sep 5, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Huan Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing photo masks
Patent number
11,687,006
Issue date
Jun 27, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chien-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for illuminating image points
Patent number
11,681,228
Issue date
Jun 20, 2023
EV Group E. Thallner GmbH
Bernhard Thallner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method
Patent number
11,644,755
Issue date
May 9, 2023
ASML Netherland B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint lithography
Patent number
11,635,696
Issue date
Apr 25, 2023
ASML Netherlands B.V.
Catharinus De Schiffart
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Control apparatus, exposure apparatus, and method of manufacturing...
Patent number
11,630,398
Issue date
Apr 18, 2023
Canon Kabushiki Kaisha
Takashi Kurihara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method to achieve tilted patterning with a through resist thickness
Patent number
11,586,112
Issue date
Feb 21, 2023
Intel Corporation
Changhua Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Maskless photolithography devices, methods, and systems
Patent number
11,567,411
Issue date
Jan 31, 2023
NANOPATH, INC.
Kevin Donahue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Prism-mask for angled patterning applications
Patent number
11,506,982
Issue date
Nov 22, 2022
Intel Corporation
Vahidreza Parichehreh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic method and lithographic apparatus
Patent number
11,493,851
Issue date
Nov 8, 2022
ASML Netherlands B.V.
Hakki Ergün Cekli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for illumination adjustment
Patent number
11,429,029
Issue date
Aug 30, 2022
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Particle removal device and method
Patent number
11,392,041
Issue date
Jul 19, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Cheng-Hsuan Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device manufacturing method and computer program
Patent number
11,372,339
Issue date
Jun 28, 2022
ASML Netherlands B.V.
Giovanni Luca Gattobigio
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for configuring spatial dimensions of a beam d...
Patent number
11,366,396
Issue date
Jun 21, 2022
ASML Netherlands B.V.
Daan Maurits Slotboom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Control method for a scanning exposure apparatus
Patent number
11,360,395
Issue date
Jun 14, 2022
ASML Netherlands B.V.
Valerio Altini
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Systems and methods for curing an imprinted field
Patent number
11,327,409
Issue date
May 10, 2022
Canon Kabushiki Kaisha
Nilabh K. Roy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing photo masks
Patent number
11,327,405
Issue date
May 10, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Chien-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microlithographic fabrication of structures
Patent number
11,307,493
Issue date
Apr 19, 2022
Molecular Imprints, Inc.
Vikramjit Singh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, an operating method and device manufacturin...
Patent number
11,243,477
Issue date
Feb 8, 2022
ASML Netherlands B.V.
Gudrun Ghilaine Agnes De Gersem
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask
Patent number
11,221,559
Issue date
Jan 11, 2022
Toppan Printing Co., Ltd.
Akihito Okumura
G02 - OPTICS
Information
Patent Grant
Exposure apparatus, and article manufacturing method
Patent number
11,215,930
Issue date
Jan 4, 2022
Canon Kabushiki Kaisha
Michio Kono
G02 - OPTICS
Information
Patent Grant
Performance optimized scanning sequence for eBeam metrology and ins...
Patent number
11,209,737
Issue date
Dec 28, 2021
KLA Corporation
Henning Stoschus
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Exposure method, exposure apparatus, method of manufacturing articl...
Patent number
11,194,257
Issue date
Dec 7, 2021
Canon Kabushiki Kaisha
Masaki Tai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, and article manufacturing method
Patent number
11,187,988
Issue date
Nov 30, 2021
Canon Kabushiki Kaisha
Michio Kono
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Movable body apparatus, moving method, exposure apparatus, exposure...
Patent number
11,187,999
Issue date
Nov 30, 2021
Nikon Corporation
Yasuo Aoki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Foreign substance inspection apparatus, processing apparatus, and a...
Patent number
11,175,239
Issue date
Nov 16, 2021
Canon Kabushiki Kaisha
Akira Yabuki
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
SPATIAL LIGHT MODULATION UNIT AND EXPOSURE APPARATUS
Publication number
20240126176
Publication date
Apr 18, 2024
Nikon Corporation
Yasuhito KUBOTA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, ST...
Publication number
20240069444
Publication date
Feb 29, 2024
Canon Kabushiki Kaisha
YOSHIHIRO OMAMEUDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD AND ARTICLE MANUFACTURING METHOD
Publication number
20240053686
Publication date
Feb 15, 2024
Canon Kabushiki Kaisha
MASAKI IMAI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ADVANCED-PACKAGING HIGH-VOLUME-MODE DIGITAL-LITHOGRAPHY-TOOL
Publication number
20240027896
Publication date
Jan 25, 2024
Applied Materials, Inc.
Shih-Hao Kuo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20230393486
Publication date
Dec 7, 2023
Canon Kabushiki Kaisha
Keiji Emoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20230384688
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Kai-Chieh CHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE STAGE AND SUBSTRATE PROCESSING SYSTEM USING THE SAME
Publication number
20230359133
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Huan CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION EXPOSURE DEVICE AND PROJECTION EXPOSURE METHOD
Publication number
20230359126
Publication date
Nov 9, 2023
V TECHNOLOGY CO., LTD.
Yoshiyuki ENOMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PRINT ELEMENT SUBSTRATE AND METHOD FOR MANUFACTURING PRINT ELEMENT...
Publication number
20230341762
Publication date
Oct 26, 2023
Canon Kabushiki Kaisha
KEIJI MATSUMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND DEVICE FOR DETERMINING THE HEATING STATE OF AN OPTICAL E...
Publication number
20230288260
Publication date
Sep 14, 2023
Carl Zeiss SMT GMBH
Johannes Schurer
G01 - MEASURING TESTING
Information
Patent Application
IMPRINT LITHOGRAPHY
Publication number
20230221651
Publication date
Jul 13, 2023
ASML NETHERLANDS B.V.
Catharinus DE SCHIFFART
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASKLESS PHOTOLITHOGRAPHY DEVICES, METHODS, AND SYSTEMS
Publication number
20230168588
Publication date
Jun 1, 2023
NanoPath, Inc.
Kevin Donahue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Pellicle Frame, Pellicle, Exposure Original Plate with Pellicle, Ex...
Publication number
20230061797
Publication date
Mar 2, 2023
Shin-Etsu Chemical Co., Ltd.
Akinori Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
Publication number
20230013155
Publication date
Jan 19, 2023
Canon Kabushiki Kaisha
Keiji Emoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reduced Spatial/Temporal Overlaps to Increase Temporal Overlaps to...
Publication number
20230011739
Publication date
Jan 12, 2023
Nigel D Browning
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES USING A PHOTOMASK
Publication number
20220382168
Publication date
Dec 1, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Chung-Hao CHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20220350259
Publication date
Nov 3, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Kai-Chieh CHANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PARTICLE REMOVAL DEVICE AND METHOD
Publication number
20220334496
Publication date
Oct 20, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Hsuan Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR CLEANING AN EUV MASK WITHIN A SCANNER
Publication number
20220299882
Publication date
Sep 22, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Yuru Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE STAGE, SUBSTRATE PROCESSING SYSTEM USING THE SAME, AND ME...
Publication number
20220283517
Publication date
Sep 8, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Huan CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE MANUFACTURING METHOD AND COMPUTER PROGRAM
Publication number
20220187717
Publication date
Jun 16, 2022
ASML NETHERLANDS B.V.
Giovanni Luca GATTOBIGIO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PARTICLE REMOVAL DEVICE AND METHOD
Publication number
20220100100
Publication date
Mar 31, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Cheng-Hsuan Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC PATTERNING METHOD AND SYSTEM THEREFORE
Publication number
20220057720
Publication date
Feb 24, 2022
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO
Diederik Jan MAAS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SCANNING LIGHT MEASURING APPARATUS
Publication number
20220011568
Publication date
Jan 13, 2022
TOSHIBA TEC KABUSHIKI KAISHA
Miki Ito
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC METHOD AND LITHOGRAPHIC APPARATUS
Publication number
20220011681
Publication date
Jan 13, 2022
ASML NETHERLANDS B.V.
Hakki Ergün CEKLI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Performance Optimized Scanning Sequence for eBeam Metrology and Ins...
Publication number
20210405540
Publication date
Dec 30, 2021
KLA Corporation
Henning Stoschus
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
Publication number
20210397099
Publication date
Dec 23, 2021
Carl Zeiss SMT GMBH
Johannes Ruoff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC METHOD
Publication number
20210389676
Publication date
Dec 16, 2021
ASML NETHERLANDS B.V.
Bearrach MOEST
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FABRICATION METHOD OF HOLOGRAPHIC SECURITY LABEL
Publication number
20210318621
Publication date
Oct 14, 2021
Kaunas University of Technology
Viktoras Grigaliunas
B42 - BOOKBINDING ALBUMS FILES SPECIAL PRINTED MATTER
Information
Patent Application
METHOD AND APPARATUS FOR CONFIGURING SPATIAL DIMENSIONS OF A BEAM D...
Publication number
20210302843
Publication date
Sep 30, 2021
ASML NETHERLANDS B.V.
Daan Maurits SLOTBOOM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY