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C30B25/08
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C30
Crystal growth
C30B
SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D...
C30B25/00
Single-crystal growth by chemical reaction of reactive gases
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C30B25/08
Reaction chambers Selection of material therefor
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last 30 patents
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Patent Grant
Apparatus for growing a semiconductor wafer and associated manufact...
Patent number
11,946,158
Issue date
Apr 2, 2024
STMicroelectronics S.r.l.
Ruggero Anzalone
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Gallium nitride vapor phase epitaxy apparatus used in vapor phase e...
Patent number
11,869,767
Issue date
Jan 9, 2024
NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
Shugo Nitta
C30 - CRYSTAL GROWTH
Information
Patent Grant
Modular reactor for microwave plasma-assisted deposition
Patent number
11,859,279
Issue date
Jan 2, 2024
DIAM CONCEPT
Alix Gicquel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Apparatus and methods for alignment of a susceptor
Patent number
11,859,307
Issue date
Jan 2, 2024
Applied Materials, Inc.
Edric Tong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Gas-phase reactor system-with a reaction chamber, a solid precursor...
Patent number
11,814,747
Issue date
Nov 14, 2023
ASM IP Holding B.V.
John Tolle
C30 - CRYSTAL GROWTH
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Patent Grant
Reaction chamber
Patent number
11,773,505
Issue date
Oct 3, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Gang Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Group III nitride crystal substrate having a diameter of 4 inches o...
Patent number
11,718,927
Issue date
Aug 8, 2023
Sumitomo Chemical Company, Limited
Takehiro Yoshida
C30 - CRYSTAL GROWTH
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Patent Grant
Apparatus for growing a semiconductor wafer and associated manufact...
Patent number
11,692,283
Issue date
Jul 4, 2023
STMicroelectronics S.r.l.
Ruggero Anzalone
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Linear lamp array for improved thermal uniformity and profile control
Patent number
11,680,338
Issue date
Jun 20, 2023
Applied Materials, Inc.
Brian Burrows
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
HVPE apparatus and methods for growing indium nitride and indium ni...
Patent number
11,661,673
Issue date
May 30, 2023
Ostendo Technologies, Inc.
Alexander L. Syrkin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of utilizing a degassing chamber to reduce arsenic outgassin...
Patent number
11,649,559
Issue date
May 16, 2023
Applied Materials, Inc.
Xinyu Bao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method for making transition metal dichalcogenide crystal
Patent number
11,608,267
Issue date
Mar 21, 2023
Tsinghua University
Hao Li
C01 - INORGANIC CHEMISTRY
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Patent Grant
Substrate lift mechanism and reactor including same
Patent number
11,587,821
Issue date
Feb 21, 2023
ASM IP Holding B.V.
Eric Hill
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Tantalum carbide coated carbon material, manufacturing method there...
Patent number
11,555,255
Issue date
Jan 17, 2023
Shin-Etsu Chemical Co., Ltd.
Chikara Mori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Vapor-liquid reaction device, reaction tube, film forming apparatus
Patent number
11,499,247
Issue date
Nov 15, 2022
National University Corporation Tokyo University of Agriculture and Technology
Akinori Koukitu
C01 - INORGANIC CHEMISTRY
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Patent Grant
Vapor phase growth method
Patent number
11,482,416
Issue date
Oct 25, 2022
NUFLARE TECHNOLOGY, INC.
Yoshiaki Daigo
C30 - CRYSTAL GROWTH
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Patent Grant
System for horizontal growth of high-quality semiconductor single c...
Patent number
11,479,875
Issue date
Oct 25, 2022
SICRYSTAL GMBH
Erwin Schmitt
C30 - CRYSTAL GROWTH
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Patent Grant
Heat-insulating shield member and single crystal manufacturing appa...
Patent number
11,453,958
Issue date
Sep 27, 2022
Showa Denko K.K.
Yohei Fujikawa
C30 - CRYSTAL GROWTH
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Patent Grant
Crystal growth apparatus
Patent number
11,447,890
Issue date
Sep 20, 2022
Showa Denko K.K.
Shunsuke Noguchi
C30 - CRYSTAL GROWTH
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Patent Grant
Chamber components for epitaxial growth apparatus
Patent number
11,441,236
Issue date
Sep 13, 2022
Applied Materials, Inc.
Shinichi Oki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Lower side wall for epitaxtail growth apparatus
Patent number
11,427,928
Issue date
Aug 30, 2022
Applied Materials, Inc.
Akira Okabe
C30 - CRYSTAL GROWTH
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Patent Grant
Group-III nitride substrate containing carbon at a surface region t...
Patent number
11,396,716
Issue date
Jul 26, 2022
Osaka University
Yusuke Mori
C30 - CRYSTAL GROWTH
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Patent Grant
Epitaxial deposition reactor with reflector external to the reactio...
Patent number
11,377,754
Issue date
Jul 5, 2022
LPE S.P.A.
Silvio Preti
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vapor phase epitaxy method
Patent number
11,280,025
Issue date
Mar 22, 2022
Azur Space Solar Power GmbH
Clemens Waechter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Large aluminum nitride crystals with reduced defects and methods of...
Patent number
11,225,731
Issue date
Jan 18, 2022
Crystal IS, Inc.
Robert Bondokov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Epitaxial growth device, production method for epitaxial wafer, and...
Patent number
11,208,718
Issue date
Dec 28, 2021
Sumco Corporation
Masaya Sakurai
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Purged viewport for quartz dome in epitaxy reactor
Patent number
11,189,508
Issue date
Nov 30, 2021
Applied Materials, Inc.
Ji-Dih Hu
G01 - MEASURING TESTING
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Patent Grant
Process chamber with resistive heating
Patent number
11,111,600
Issue date
Sep 7, 2021
Svagos Technik, Inc.
Tirunelveli S. Ravi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Coated flat component in a CVD reactor
Patent number
11,053,586
Issue date
Jul 6, 2021
Aixtron SE
Marcel Kollberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Liner for processing chamber
Patent number
11,021,790
Issue date
Jun 1, 2021
Applied Materials, Inc.
Zhepeng Cong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD OF PRODUCING EPITAXIAL LAYER WAFERS IN A CHAMBER OF A DEPOSI...
Publication number
20240150932
Publication date
May 9, 2024
Siltronic AG
Hannes Hecht
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GROUP III-V SEMICONDUCTOR DEVICE AND METHOD OF FABRICATION OF SAME...
Publication number
20240105450
Publication date
Mar 28, 2024
TEXAS INSTRUMENTS INCORPORATED
Yoganand Saripalli
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL VAPOR DEPOSITION REACTOR IN POLYSILICON PRODUCTION PROCESS
Publication number
20240084480
Publication date
Mar 14, 2024
Advanced Material Solutions
Chad Fero
C30 - CRYSTAL GROWTH
Information
Patent Application
Method and Device for Producing a SiC Solid Material
Publication number
20240060211
Publication date
Feb 22, 2024
Zadient Technologies SAS
Ivo Crössmann
C30 - CRYSTAL GROWTH
Information
Patent Application
Method and Device for Producing a SiC Solid Material
Publication number
20240026566
Publication date
Jan 25, 2024
Zadient Technologies SAS
Ivo Crössmann
C30 - CRYSTAL GROWTH
Information
Patent Application
FLOW GUIDE STRUCTURES AND HEAT SHIELD STRUCTURES, AND RELATED METHO...
Publication number
20240018658
Publication date
Jan 18, 2024
Applied Materials, Inc.
Zuoming ZHU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS-PHASE REACTOR SYSTEM-WITH A REACTION CHAMBER, A SOLID PRECURSOR...
Publication number
20240011189
Publication date
Jan 11, 2024
ASM IP HOLDING B.V.
John Tolle
C30 - CRYSTAL GROWTH
Information
Patent Application
METHOD FOR CVD DEPOSITION OF N-TYPE DOPED SILICON CARBIDE AND EPITA...
Publication number
20230313410
Publication date
Oct 5, 2023
LPE S.P.A.
Silvio Preti
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD
Publication number
20230313411
Publication date
Oct 5, 2023
NuFlare Technology, Inc.
Yoshiaki DAIGO
C30 - CRYSTAL GROWTH
Information
Patent Application
APPARATUS AND METHOD FOR DEPOSITING A LAYER OF SEMICONDUCTOR MATERI...
Publication number
20230287569
Publication date
Sep 14, 2023
Siltronic AG
Hannes HECHT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
APPARATUS AND METHOD FOR MANUFACTURING HEXAGONAL CRYSTALS
Publication number
20230272549
Publication date
Aug 31, 2023
LNBS Co, Ltd.
Hyung Soo AHN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
APPARATUS FOR HEATING MULTIPLE CRUCIBLES
Publication number
20230203713
Publication date
Jun 29, 2023
EBNER INDUSTRIEOFENBAU GMBH
Robert EBNER
C30 - CRYSTAL GROWTH
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Patent Application
WAFER EDGE TEMPERATURE CORRECTION IN BATCH THERMAL PROCESS CHAMBER
Publication number
20230167581
Publication date
Jun 1, 2023
Applied Materials, Inc.
Kartik Bhupendra SHAH
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE LIFT MECHANISM AND REACTOR INCLUDING SAME
Publication number
20230163019
Publication date
May 25, 2023
ASM IP HOLDING B.V.
Eric Hill
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GALLIUM NITRIDE VAPOR PHASE EPITAXY APPARATUS AND MANUFACTURING MET...
Publication number
20230073332
Publication date
Mar 9, 2023
NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
Shugo NITTA
C30 - CRYSTAL GROWTH
Information
Patent Application
REACTION CHAMBER
Publication number
20230028116
Publication date
Jan 26, 2023
Beijing NAURA Microelectronics Equipment Co., Ltd.
Gang XU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
SUBSTRATE SUPPORT DEVICE FOR A REACTION CHAMBER OF AN EPITAXIAL REA...
Publication number
20220411961
Publication date
Dec 29, 2022
LPE S.P.A.
Silvio Preti
C30 - CRYSTAL GROWTH
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Patent Application
CHAMBER ARCHITECTURE FOR EPITAXIAL DEPOSITION AND ADVANCED EPITAXIA...
Publication number
20220364261
Publication date
Nov 17, 2022
Applied Materials, Inc.
Tetsuya ISHIKAWA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
EPITAXIAL DEVICE AND GAS INTAKE STRUCTURE FOR EPITAXIAL DEVICE
Publication number
20220356600
Publication date
Nov 10, 2022
Beijing NAURA Microelectronics Equipment Co., Ltd.
Zhenjun XIA
C30 - CRYSTAL GROWTH
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Patent Application
GROWTH OF A-B CRYSTALS WITHOUT CRYSTAL LATTICE CURVATURE
Publication number
20220325435
Publication date
Oct 13, 2022
FREIBERGER COMPOUND MATERIALS GMBH
Berndt WEINERT
C30 - CRYSTAL GROWTH
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Patent Application
EPITAXIAL GROWTH APPARATUS AND METHOD OF PRODUCING EPITAXIAL WAFER
Publication number
20220251726
Publication date
Aug 11, 2022
SUMCO CORPORATION
Haku KOMORI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
MULTI-LAYER EPI CHAMBER BODY
Publication number
20220195617
Publication date
Jun 23, 2022
Applied Materials, Inc.
Shu-Kwan LAU
C30 - CRYSTAL GROWTH
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Patent Application
CVD REACTOR CHAMBER WITH RESISTIVE HEATING FOR SILICON CARBIDE DEPO...
Publication number
20220064819
Publication date
Mar 3, 2022
Svagos Technik, Inc.
Tirunelveli S. Ravi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
METHOD FOR MAKING TRANSITION METAL DICHALCOGENIDE CRYSTAL
Publication number
20220033261
Publication date
Feb 3, 2022
TSINGHUA UNIVERSITY
HAO LI
C30 - CRYSTAL GROWTH
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Patent Application
WAFER, EPITAXIAL WAFER, METHOD FOR MANUFACTURING A WAFER AND METHOD...
Publication number
20210272793
Publication date
Sep 2, 2021
SKC CO., LTD.
Jong Hwi PARK
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHODS FOR FORMING LARGE AREA DIAMOND SUBSTRATES
Publication number
20210214856
Publication date
Jul 15, 2021
Board of Trustees of Michigan State University
Timothy A. Grotjohn
C30 - CRYSTAL GROWTH
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Patent Application
GROUP III NITRIDE SEMICONDUCTOR SUBSTRATE AND MANUFACTURING METHOD...
Publication number
20210210340
Publication date
Jul 8, 2021
SUMCO CORPORATION
Koji MATSUMOTO
C30 - CRYSTAL GROWTH
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Patent Application
VAPOR PHASE EPITAXY METHOD
Publication number
20210189592
Publication date
Jun 24, 2021
AZUR SPACE SOLAR POWER GMBH
Clemens WAECHTER
C30 - CRYSTAL GROWTH
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Patent Application
LINEAR LAMP ARRAY FOR IMPROVED THERMAL UNIFORMITY AND PROFILE CONTROL
Publication number
20210189593
Publication date
Jun 24, 2021
Applied Materials, Inc.
Brian BURROWS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
TANTALUM CARBIDE COATED CARBON MATERIAL, MANUFACTURING METHOD THERE...
Publication number
20210140067
Publication date
May 13, 2021
Shin-Etsu Chemical Co., Ltd.
Chikara MORI
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES