Releasing structures at the end of the manufacturing process

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B81C2201/056

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/056Releasing structures at the end of the manufacturing process

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electrically functional polymer microneedle array
- Patent number 12,070,307
- Issue date Aug 27, 2024
- International Business Machines Corporation
- Neil Ebejer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
- Patent number 12,012,326
- Issue date Jun 18, 2024
- TDK ELECTRONICS AG
- Pirmin Hermann Otto Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
- Patent number 11,746,001
- Issue date Sep 5, 2023
- TDK ELECTRONICS AG
- Pirmin Hermann Otto Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor removing apparatus and operation method thereof
- Patent number 11,505,457
- Issue date Nov 22, 2022
- Xintec Inc.
- Yu-Tang Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device, microphone and methods for forming a semicond...
- Patent number 11,352,253
- Issue date Jun 7, 2022
- Infineon Technologies AG
- Markus Kahn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,870,574
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device, microphone and methods for forming a semicond...
- Patent number 10,858,246
- Issue date Dec 8, 2020
- Infineon Technologies AG
- Markus Kahn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing thin MEMS wafers
- Patent number 10,793,430
- Issue date Oct 6, 2020
- Robert Bosch GmbH
- Sebastien Loiseau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for wafer-scale fabrication of free standing mech...
- Patent number 10,727,072
- Issue date Jul 28, 2020
- President and Fellows of Harvard College
- Haig Avedis Atikian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible disposable MEMS pressure sensor
- Patent number 10,479,677
- Issue date Nov 19, 2019
- Robert Bosch GmbH
- Seow Yuen Yee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structure for device with integrated microelectromechanical systems
- Patent number 10,343,902
- Issue date Jul 9, 2019
- Soitec
- Bruno Ghyselen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of encapsulating a microelectronic component
- Patent number 10,280,075
- Issue date May 7, 2019
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Patrice Rey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,273,143
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of strain gauge fabrication using a transfer substrate
- Patent number 10,183,862
- Issue date Jan 22, 2019
- GM Global Technology Operations LLC
- Stephen A. Berggren
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and structures for thin-film encapsulation and co-integrati...
- Patent number 10,173,893
- Issue date Jan 8, 2019
- Semiconductor Manufacturing International (Shanghai) Corporation
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Simplified MEMS device fabrication process
- Patent number 10,160,641
- Issue date Dec 25, 2018
- MEMS DRIVE, INC.
- Roman Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Membrane transducer structures and methods of manufacturing same us...
- Patent number 10,118,820
- Issue date Nov 6, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Trapped sacrificial structures and methods of manufacturing same us...
- Patent number 9,988,265
- Issue date Jun 5, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for encapsulating a microelectronic device with a release ho...
- Patent number 9,896,331
- Issue date Feb 20, 2018
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Jean-Louis Pornin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Magnet placement for integrated sensor packages
- Patent number 9,791,470
- Issue date Oct 17, 2017
- Intel Corporation
- Feras Eid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated MEMS device
- Patent number 9,676,609
- Issue date Jun 13, 2017
- Asia Pacific Microsystems, Inc.
- Jerwei Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure and manufacturing method thereof
- Patent number 9,630,837
- Issue date Apr 25, 2017
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integration of electromechanical and CMOS devices in front-end-of-l...
- Patent number 9,505,611
- Issue date Nov 29, 2016
- Global Foundries Inc.
- Fei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integration of pressure sensors into integrated circuit fabrication...
- Patent number 9,501,068
- Issue date Nov 22, 2016
- Intel Corporation
- Kyu Oh Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a semiconductor integrated circuit device h...
- Patent number 9,199,836
- Issue date Dec 1, 2015
- Renesas Electronics Corporation
- Koichi Arai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Oxide retainer method for MEMS devices
- Patent number 8,993,362
- Issue date Mar 31, 2015
- MCube Inc.
- Anthony F. Flannery
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a semiconductor integrated circuit device h...
- Patent number 8,835,207
- Issue date Sep 16, 2014
- Renesas Electronics Corporation
- Koichi Arai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing multi-level, silicon, micromechanical parts...
- Patent number 8,501,584
- Issue date Aug 6, 2013
- Eta Sa Manufacture Horlogère Suisse
- Philippe Marmy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device
- Patent number 8,497,149
- Issue date Jul 30, 2013
- Wolfson Microelectronics plc
- Richard Ian Laming
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for releasing the suspended structure of a NEMS and/or NEMS...
- Patent number 8,211,729
- Issue date Jul 3, 2012
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Cecilia Dupre
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DOUBLE NOTCH ETCH TO REDUCE UNDER CUT OF MICRO ELECTRO-MECHANICAL S...
- Publication number 20240375942
- Publication date Nov 14, 2024
- Calient Technologies, Inc.
- Paul WALDROP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TOP NOTCH SLIT PROFILE FOR MEMS DEVICE
- Publication number 20240381034
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DIAPHRAGM SYSTEM
- Publication number 20240343557
- Publication date Oct 17, 2024
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...
- Publication number 20230356998
- Publication date Nov 9, 2023
- TDK Corporation
- Pirmin Hermann Otto Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE MANUFACTURING METHOD
- Publication number 20230348262
- Publication date Nov 2, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Audrey Berthelot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TOP NOTCH SLIT PROFILE FOR MEMS DEVICE
- Publication number 20230232159
- Publication date Jul 20, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR REMOVING APPARATUS AND OPERATION METHOD THEREOF
- Publication number 20220332571
- Publication date Oct 20, 2022
- XINTEC INC.
- Yu-Tang SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...
- Publication number 20210347635
- Publication date Nov 11, 2021
- TDK Electronics AG
- Pirmin Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Device, Microphone and Methods for Forming a Semicond...
- Publication number 20210002132
- Publication date Jan 7, 2021
- INFINEON TECHNOLOGIES AG
- Markus Kahn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...
- Publication number 20190241425
- Publication date Aug 8, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING THIN MEMS WAFERS
- Publication number 20190092631
- Publication date Mar 28, 2019
- ROBERT BOSCH GmbH
- Sebastien Loiseau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE, MICROPHONE AND METHODS FOR FORMING A SEMICOND...
- Publication number 20180237292
- Publication date Aug 23, 2018
- INFINEON TECHNOLOGIES AG
- Markus Kahn
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System and Method for Wafer-Scale Fabrication of Free Standing Mech...
- Publication number 20180138047
- Publication date May 17, 2018
- President and Fellows of Harvard College
- Haig Avedis Atikian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM OF STRAIN GAUGE FABRICATION
- Publication number 20180072569
- Publication date Mar 15, 2018
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Stephen A. Berggren
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Flexible Diposable MEMS Pressure Sensor
- Publication number 20170362083
- Publication date Dec 21, 2017
- ROBERT BOSCH GmbH
- Seow Yuen Yee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURE FOR DEVICE WITH INTEGRATED MICROELECTROMECHANICAL SYSTEMS
- Publication number 20170253478
- Publication date Sep 7, 2017
- SOITEC
- Bruno Ghyselen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIMPLIFIED MEMS DEVICE FABRICATION PROCESS
- Publication number 20170197825
- Publication date Jul 13, 2017
- MEMS DRIVE, INC.
- ROMAN GUTIERREZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR ENCAPSULATING A MICROELECTRONIC DEVICE WITH A RELEASE HO...
- Publication number 20170152137
- Publication date Jun 1, 2017
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Jean-Louis PORNIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND STRUCTURES FOR THIN-FILM ENCAPSULATION AND CO-INTEGRATI...
- Publication number 20160362295
- Publication date Dec 15, 2016
- Semiconductor Manufacturing International Corporation
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATION OF PRESSURE SENSORS INTO INTEGRATED CIRCUIT FABRICATION...
- Publication number 20160161957
- Publication date Jun 9, 2016
- Intel Corporation
- KYU OH LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods And Structures For Thin-Film Encapsulation And Co-Integrati...
- Publication number 20160023888
- Publication date Jan 28, 2016
- Silicon Laboratories Inc.
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Membrane Transducer Structures And Methods Of Manufacturing Same Us...
- Publication number 20160023889
- Publication date Jan 28, 2016
- Silicon Laboratories Inc.
- Emmanuel P. Quevy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of Manufacturing A Semiconductor Integrated Circuit Device H...
- Publication number 20140339659
- Publication date Nov 20, 2014
- RENESAS ELECTRONICS CORPORATION
- Koichi ARAI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20140016798
- Publication date Jan 16, 2014
- Richard Ian Laming
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE H...
- Publication number 20130193536
- Publication date Aug 1, 2013
- RENESAS ELECTRONICS CORPORATION
- Koichi ARAI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR RELEASING THE SUSPENDED STRUCTURE OF A NEMS AND/OR NEMS...
- Publication number 20100317137
- Publication date Dec 16, 2010
- COMMISSAR. A L'ENERG. ATOM. ET AUX ENERG. ALTERN.
- Cécilia DUPRE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method Of Fabricating An Integrated CMOS-MEMS Device
- Publication number 20100273286
- Publication date Oct 28, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chih Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING MULTI-LEVEL, SILICON, MICROMECHANICAL PARTS...
- Publication number 20100054092
- Publication date Mar 4, 2010
- ETA SA Manufacture Horlogere Suisse
- Philippe Marmy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR XENON FLUORIDE ETCHING WITH ENHANCED EFFICIENCY
- Publication number 20090218312
- Publication date Sep 3, 2009
- IDC, LLC
- Philip D. Floyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrochemical Fabrication Methods Incorporating Dielectric Materi...
- Publication number 20090165295
- Publication date Jul 2, 2009
- University of Southern California
- Adam L. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Releasing structures at the end of the manufacturing process

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electrically functional polymer microneedle array

Microelectromechanical microphone with membrane trench reinforcemen...

Microelectromechanical microphone with membrane trench reinforcemen...

Semiconductor removing apparatus and operation method thereof

Semiconductor device, microphone and methods for forming a semicond...

Method and apparatus for reducing in-process and in-use stiction fo...

Semiconductor device, microphone and methods for forming a semicond...

Method for producing thin MEMS wafers

System and method for wafer-scale fabrication of free standing mech...

Flexible disposable MEMS pressure sensor

Structure for device with integrated microelectromechanical systems

Method of encapsulating a microelectronic component

Method and apparatus for reducing in-process and in-use stiction fo...

Method of strain gauge fabrication using a transfer substrate

Methods and structures for thin-film encapsulation and co-integrati...

Simplified MEMS device fabrication process

Membrane transducer structures and methods of manufacturing same us...

Trapped sacrificial structures and methods of manufacturing same us...

Method for encapsulating a microelectronic device with a release ho...

Magnet placement for integrated sensor packages

Integrated MEMS device

MEMS structure and manufacturing method thereof

Integration of electromechanical and CMOS devices in front-end-of-l...

Integration of pressure sensors into integrated circuit fabrication...

Method of manufacturing a semiconductor integrated circuit device h...

Oxide retainer method for MEMS devices

Method of manufacturing a semiconductor integrated circuit device h...

Method of manufacturing multi-level, silicon, micromechanical parts...

MEMS device

Method for releasing the suspended structure of a NEMS and/or NEMS...

Patents Applicationslast 30 patents

DOUBLE NOTCH ETCH TO REDUCE UNDER CUT OF MICRO ELECTRO-MECHANICAL S...

TOP NOTCH SLIT PROFILE FOR MEMS DEVICE

MICROMECHANICAL DIAPHRAGM SYSTEM

MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...

MEMS DEVICE MANUFACTURING METHOD

TOP NOTCH SLIT PROFILE FOR MEMS DEVICE

SEMICONDUCTOR REMOVING APPARATUS AND OPERATION METHOD THEREOF

MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...

Semiconductor Device, Microphone and Methods for Forming a Semicond...

METHOD AND APPARATUS FOR REDUCING IN-PROCESS AND IN-USE STICTION FO...

METHOD FOR PRODUCING THIN MEMS WAFERS

SEMICONDUCTOR DEVICE, MICROPHONE AND METHODS FOR FORMING A SEMICOND...

System and Method for Wafer-Scale Fabrication of Free Standing Mech...

METHOD AND SYSTEM OF STRAIN GAUGE FABRICATION

Flexible Diposable MEMS Pressure Sensor

STRUCTURE FOR DEVICE WITH INTEGRATED MICROELECTROMECHANICAL SYSTEMS

SIMPLIFIED MEMS DEVICE FABRICATION PROCESS

METHOD FOR ENCAPSULATING A MICROELECTRONIC DEVICE WITH A RELEASE HO...

METHODS AND STRUCTURES FOR THIN-FILM ENCAPSULATION AND CO-INTEGRATI...

INTEGRATION OF PRESSURE SENSORS INTO INTEGRATED CIRCUIT FABRICATION...

Methods And Structures For Thin-Film Encapsulation And Co-Integrati...

Membrane Transducer Structures And Methods Of Manufacturing Same Us...

Method of Manufacturing A Semiconductor Integrated Circuit Device H...

MEMS DEVICE

METHOD OF MANUFACTURING A SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE H...

METHOD FOR RELEASING THE SUSPENDED STRUCTURE OF A NEMS AND/OR NEMS...

Method Of Fabricating An Integrated CMOS-MEMS Device

METHOD OF MANUFACTURING MULTI-LEVEL, SILICON, MICROMECHANICAL PARTS...

METHOD AND SYSTEM FOR XENON FLUORIDE ETCHING WITH ENHANCED EFFICIENCY

Electrochemical Fabrication Methods Incorporating Dielectric Materi...