Sacrificial layer

Industry

CPC
B81C2201/0105

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0105Sacrificial layer

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Micromechanical sensor device and corresponding production method
- Patent number 12,077,429
- Issue date Sep 3, 2024
- Robert Bosch GmbH
- Lars Tebje
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing monolithic integration of piezoelectric microm...
- Patent number 12,037,239
- Issue date Jul 16, 2024
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and preparation method therefor
- Patent number 12,022,270
- Issue date Jun 25, 2024
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Jiale Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and NEMS structures
- Patent number 12,006,209
- Issue date Jun 11, 2024
- OBSIDIAN SENSORS, INC.
- John Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-device structures with etch holes
- Patent number 11,952,266
- Issue date Apr 9, 2024
- X-CELEPRINT LIMITED
- Pierluigi Rubino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, manufacturing method of the same, and integrated MEMS...
- Patent number 11,939,212
- Issue date Mar 26, 2024
- Industrial Technology Research Institute
- Heng-chung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
- Patent number 11,932,531
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrasonic transducer, manufacturing method thereof, and ultrasonic...
- Patent number 11,904,356
- Issue date Feb 20, 2024
- Hitachi, Ltd.
- Taiichi Takezaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric microelectromechanical resonator device and correspon...
- Patent number 11,855,604
- Issue date Dec 26, 2023
- STMicroelectronics S.r.l.
- Federico Vercesi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of fabricating micro electro-mechanical systems structures
- Patent number 11,845,654
- Issue date Dec 19, 2023
- The University of British Columbia
- Edmond Cretu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated piezoelectric microelectromechanical ultrasound transduc...
- Patent number 11,847,851
- Issue date Dec 19, 2023
- Invensense, Inc.
- Julius Ming-Lin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) thermal sensor
- Patent number 11,796,396
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical pressure sensor device including a diaphragm system...
- Patent number 11,788,912
- Issue date Oct 17, 2023
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and methods of forming thereof
- Patent number 11,767,217
- Issue date Sep 26, 2023
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- Ranganathan Nagarajan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,708,262
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor package device and method for manufacturing the same
- Patent number 11,575,995
- Issue date Feb 7, 2023
- Advanced Semiconductor Engineering, Inc.
- Chang-Lin Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro check valve and system with multiple micro check valves and m...
- Patent number 11,428,345
- Issue date Aug 30, 2022
- MICROFAB SERVICE GMBH
- Marco Cordelair
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive microelectromechanical device and method for forming a c...
- Patent number 11,422,151
- Issue date Aug 23, 2022
- Infineon Technologies AG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved micromachined ultrasonic transducer membranes
- Patent number 11,383,269
- Issue date Jul 12, 2022
- BFLY OPERATIONS, INC.
- Gerard Schmid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and methods of forming thereof
- Patent number 11,267,696
- Issue date Mar 8, 2022
- VANGUARD INIERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- Ranganathan Nagarajan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,267,693
- Issue date Mar 8, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated piezoelectric microelectromechanical ultrasound transduc...
- Patent number 11,263,424
- Issue date Mar 1, 2022
- Invensense, Inc.
- Julius Ming-Lin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and processes
- Patent number 11,197,103
- Issue date Dec 7, 2021
- Cirrus Logic, Inc.
- Marek Sebastian Piechocinski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for forming a MEMS device layer on an active device layer a...
- Patent number 11,180,366
- Issue date Nov 23, 2021
- General Electric Company
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor
- Patent number 11,150,092
- Issue date Oct 19, 2021
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Takashi Imanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric acoustic MEMS transducer and fabrication method thereof
- Patent number 11,051,113
- Issue date Jun 29, 2021
- STMicroelectronics S.r.l.
- Fabrizio Cerini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic integration of piezoelectric micromachined ultrasonic tr...
- Patent number 10,988,376
- Issue date Apr 27, 2021
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) thermal sensor
- Patent number 10,962,424
- Issue date Mar 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacturing the same
- Patent number 10,841,711
- Issue date Nov 17, 2020
- DB HITEK CO., LTD.
- Jong Won Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas sensor, sensor array, and manufacturing method thereof
- Patent number 10,801,981
- Issue date Oct 13, 2020
- HEFEI MICRO NANO SENSING TECHNOLOGY CO., LTD.
- Lei Xu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
System And Method For Generating Fluid Flow
- Publication number 20240409399
- Publication date Dec 12, 2024
- Sonicedge Ltd.
- Mordehai Margalit
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE
- Publication number 20240400377
- Publication date Dec 5, 2024
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Packaging of microelectromechanical system devices
- Publication number 20240391762
- Publication date Nov 28, 2024
- Teknologian Tutkimuskeskus VTT Oy
- Jae-Wung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS
- Publication number 20240391760
- Publication date Nov 28, 2024
- STMicroelectronics International N.V.
- Silvia NICOLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Switch, Preparation Method thereof, and Electronic Apparatus
- Publication number 20240359973
- Publication date Oct 31, 2024
- Beijing BOE Technology Development Co., Ltd.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DIAPHRAGM SYSTEM
- Publication number 20240343557
- Publication date Oct 17, 2024
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240336474
- Publication date Oct 10, 2024
- AAC TECHNOLOGIES PTE. LTD
- Houming Chong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-DEVICE STRUCTURES WITH ETCH HOLES
- Publication number 20240199413
- Publication date Jun 20, 2024
- X-Celprint Limited
- Pierluigi Rubino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
- Publication number 20240182292
- Publication date Jun 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRA...
- Publication number 20240182291
- Publication date Jun 6, 2024
- Hitachi, Ltd
- Shun Kumano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPON...
- Publication number 20240154599
- Publication date May 9, 2024
- STMicroelectronics S.r.l.
- Federico VERCESI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MEMS DEVICE AND MEMS DEVICE
- Publication number 20240051819
- Publication date Feb 15, 2024
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Ping-He Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF SEPARATING GOOD PROBE STRUCTURES FROM DEFECTIVE PROBE ST...
- Publication number 20240017990
- Publication date Jan 18, 2024
- Microfabrica Inc.
- Duy P. Le
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-Electro-Mechanical System (Mems) Thermal Sensor
- Publication number 20230375416
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR DEVI...
- Publication number 20230357001
- Publication date Nov 9, 2023
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHA...
- Publication number 20230242393
- Publication date Aug 3, 2023
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE WITH AN ANCHOR
- Publication number 20230234837
- Publication date Jul 27, 2023
- SKYWORKS GLOBAL PTE. LTD.
- Guofeng Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MAKING MEMS MICROPHONE WITH AN ANCHOR
- Publication number 20230239641
- Publication date Jul 27, 2023
- Skyworks Solutions, Inc.
- Guofeng Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
- Publication number 20230219806
- Publication date Jul 13, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL INFRARED SENSING DEVICE AND FABRICATION METH...
- Publication number 20230045432
- Publication date Feb 9, 2023
- Industrial Technology Research Institute
- Chin-Jou KUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND PREPARATION METHOD THEREFOR
- Publication number 20220386052
- Publication date Dec 1, 2022
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Jiale SU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR PACKAGE DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20220353619
- Publication date Nov 3, 2022
- Advanced Semiconductor Engineering, Inc.
- Chang-Lin YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A C...
- Publication number 20220326275
- Publication date Oct 13, 2022
- INFINEON TECHNOLOGIES AG
- Thoralf KAUTZSCH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION ENHANCEMENT OF RUTHENIUM CONTACT
- Publication number 20220289566
- Publication date Sep 15, 2022
- Qorvo US, Inc.
- James D. HUFFMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
- Publication number 20220185656
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-HSIEN CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED PIEZOELECTRIC MICROELECTROMECHANICAL ULTRASOUND TRANSDUC...
- Publication number 20220172506
- Publication date Jun 2, 2022
- InvenSense, Inc.
- Julius Ming-Lin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES AND METHODS OF FORMING THEREOF
- Publication number 20220144625
- Publication date May 12, 2022
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- Ranganathan NAGARAJAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-DEVICE STRUCTURES WITH ETCH HOLES
- Publication number 20220112078
- Publication date Apr 14, 2022
- X-CELEPRINT LIMITED
- Pierluigi Rubino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING PRODUCTION METHOD
- Publication number 20220063990
- Publication date Mar 3, 2022
- ROBERT BOSCH GmbH
- Lars Tebje
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE
- Publication number 20210403315
- Publication date Dec 30, 2021
- ROBERT BOSCH GmbH
- Hans ARTMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Sacrificial layer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micromechanical sensor device and corresponding production method

Method for producing monolithic integration of piezoelectric microm...

MEMS microphone and preparation method therefor

MEMS and NEMS structures

Micro-device structures with etch holes

MEMS device, manufacturing method of the same, and integrated MEMS...

Curved cantilever design to reduce stress in MEMS actuator

Ultrasonic transducer, manufacturing method thereof, and ultrasonic...

Piezoelectric microelectromechanical resonator device and correspon...

Methods of fabricating micro electro-mechanical systems structures

Integrated piezoelectric microelectromechanical ultrasound transduc...

Micro-electro-mechanical system (MEMS) thermal sensor

Micromechanical pressure sensor device including a diaphragm system...

MEMS devices and methods of forming thereof

Manufacturing method of semiconductor structure

Semiconductor package device and method for manufacturing the same

Micro check valve and system with multiple micro check valves and m...

Capacitive microelectromechanical device and method for forming a c...

Curved micromachined ultrasonic transducer membranes

MEMS devices and methods of forming thereof

Manufacturing method of semiconductor structure

Integrated piezoelectric microelectromechanical ultrasound transduc...

MEMS devices and processes

Methods for forming a MEMS device layer on an active device layer a...

Sensor

Piezoelectric acoustic MEMS transducer and fabrication method thereof

Monolithic integration of piezoelectric micromachined ultrasonic tr...

Micro-electro-mechanical system (MEMS) thermal sensor

MEMS microphone and method of manufacturing the same

Gas sensor, sensor array, and manufacturing method thereof

Patents Applicationslast 30 patents

System And Method For Generating Fluid Flow

MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE

Packaging of microelectromechanical system devices

CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS

MEMS Switch, Preparation Method thereof, and Electronic Apparatus

MICROMECHANICAL DIAPHRAGM SYSTEM

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

MICRO-DEVICE STRUCTURES WITH ETCH HOLES

CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR

FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRA...

PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPON...

METHOD FOR MANUFACTURING MEMS DEVICE AND MEMS DEVICE

METHODS OF SEPARATING GOOD PROBE STRUCTURES FROM DEFECTIVE PROBE ST...

Micro-Electro-Mechanical System (Mems) Thermal Sensor

PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR DEVI...

MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHA...

MEMS MICROPHONE WITH AN ANCHOR

METHOD OF MAKING MEMS MICROPHONE WITH AN ANCHOR

CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR

MICROELECTROMECHANICAL INFRARED SENSING DEVICE AND FABRICATION METH...

MEMS MICROPHONE AND PREPARATION METHOD THEREFOR

SEMICONDUCTOR PACKAGE DEVICE AND METHOD FOR MANUFACTURING THE SAME

CAPACITIVE MICROELECTROMECHANICAL DEVICE AND METHOD FOR FORMING A C...

ANTI-STICTION ENHANCEMENT OF RUTHENIUM CONTACT

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE

INTEGRATED PIEZOELECTRIC MICROELECTROMECHANICAL ULTRASOUND TRANSDUC...

MEMS DEVICES AND METHODS OF FORMING THEREOF

MICRO-DEVICE STRUCTURES WITH ETCH HOLES

MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING PRODUCTION METHOD

SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE