Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108

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B81C2201/0109

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0109Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Micromechanical component for a sensor device or microphone device
- Patent number 12,151,936
- Issue date Nov 26, 2024
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically driven comb structure of MEMS, micro-mirror using...
- Patent number 12,054,387
- Issue date Aug 6, 2024
- Tao Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Precision fabrication of nanosieves
- Patent number 12,042,770
- Issue date Jul 23, 2024
- International Business Machines Corporation
- Joshua T. Smith
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
- Patent number 11,952,268
- Issue date Apr 9, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor transducer device with multilayer diaphragm and metho...
- Patent number 11,946,822
- Issue date Apr 2, 2024
- Sciosense B.V.
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 11,883,845
- Issue date Jan 30, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated piezoelectric microelectromechanical ultrasound transduc...
- Patent number 11,847,851
- Issue date Dec 19, 2023
- Invensense, Inc.
- Julius Ming-Lin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dielectric comb for MEMS device
- Patent number 11,825,266
- Issue date Nov 21, 2023
- Knowles Electronics, LLC
- Mohsin Nawaz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
- Patent number 11,759,823
- Issue date Sep 19, 2023
- Vanguard International Semiconductor Corporation
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,708,262
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 11,571,711
- Issue date Feb 7, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMs membrane structure and method of fabricating same
- Patent number 11,530,129
- Issue date Dec 20, 2022
- Korea Advanced Institute of Science and Technology
- Boung Ju Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS via with enhanced electrical and mechanical integrity
- Patent number 11,511,989
- Issue date Nov 29, 2022
- Texas Instruments Incorporated
- Earl Vedere Atnip
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated structure of mems microphone and air pressure sensor and...
- Patent number 11,516,595
- Issue date Nov 29, 2022
- Weifang Goertek Microelectronics Co., Ltd.
- Dexin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
- Patent number 11,498,097
- Issue date Nov 15, 2022
- Vanguard International Semiconductor Corporation
- Rakesh Kumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Freezing a sacrificial material in forming a semiconductor
- Patent number 11,482,409
- Issue date Oct 25, 2022
- Micron Technology, Inc.
- Matthew S. Thorum
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device having a membrane and method of manufacture
- Patent number 11,365,119
- Issue date Jun 21, 2022
- TDK Corporation
- Kurt Rasmussen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,267,693
- Issue date Mar 8, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated piezoelectric microelectromechanical ultrasound transduc...
- Patent number 11,263,424
- Issue date Mar 1, 2022
- Invensense, Inc.
- Julius Ming-Lin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacturing the same
- Patent number 11,259,105
- Issue date Feb 22, 2022
- DB HITEK CO., LTD.
- Jong Won Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structure of micro-electro-mechanical-system microphone
- Patent number 11,206,495
- Issue date Dec 21, 2021
- Solid State System Co., Ltd.
- Tsung-Min Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone with acoustic relief channels
- Patent number 11,197,088
- Issue date Dec 7, 2021
- Knowles Electronics, LLC
- Vahid Naderyan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Precision fabrication of nanosieves
- Patent number 11,186,480
- Issue date Nov 30, 2021
- International Business Machines Corporation
- Joshua T. Smith
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for forming a MEMS device layer on an active device layer a...
- Patent number 11,180,366
- Issue date Nov 23, 2021
- General Electric Company
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical component and method for producing same
- Patent number 11,148,940
- Issue date Oct 19, 2021
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Dirk Rudloff
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to create multilayer microfluidic chips using spin-on carbon...
- Patent number 11,084,032
- Issue date Aug 10, 2021
- International Business Machines Corporation
- Chi-Chun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS acoustic pressure sensor device and method for making same
- Patent number 11,053,116
- Issue date Jul 6, 2021
- Pixart Imaging Incorporation
- Chuan-Wei Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS component and production method for a MEMS component
- Patent number 11,053,117
- Issue date Jul 6, 2021
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-device having a metal-semiconductor compound layer protected...
- Patent number 11,027,969
- Issue date Jun 8, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Stephanus Louwers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,027,970
- Issue date Jun 8, 2021
- Kokusai Electric Corporation
- Naofumi Ohashi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROMECHANICAL COMPONENT
- Publication number 20240383745
- Publication date Nov 21, 2024
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MEMS PROCESS
- Publication number 20240351864
- Publication date Oct 24, 2024
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
- Publication number 20240343558
- Publication date Oct 17, 2024
- Murata Manufacturing Co., Ltd.
- Petteri KILPINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...
- Publication number 20240270568
- Publication date Aug 15, 2024
- XI'AN CHISHINE OPTOELECTRONICS TECHNOLOGY CO., LTD
- Tao YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DE...
- Publication number 20240262678
- Publication date Aug 8, 2024
- Beijing BOE Technology Development Co., Ltd.
- Jingwen GUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURE...
- Publication number 20240253977
- Publication date Aug 1, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
- Publication number 20240208805
- Publication date Jun 27, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...
- Publication number 20240199415
- Publication date Jun 20, 2024
- STMicroelectronics International N.V.
- Federico VERCESI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240171918
- Publication date May 23, 2024
- Nisshinbo Micro Devices Inc.
- Takao FUKUTOME
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20240100566
- Publication date Mar 28, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...
- Publication number 20240067519
- Publication date Feb 29, 2024
- TEXAS INSTRUMENTS INCORPORATED
- John Wesley Hamlin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE COMPRISING A DEFORMABLE STRUCTURE AND MANUFACTURING PRO...
- Publication number 20240010489
- Publication date Jan 11, 2024
- STMicroelectronics S.r.l.
- Manuel RIANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS CAPACITANCE MICROPHONE AND MANUFACTURING METHOD THEREOF
- Publication number 20230403514
- Publication date Dec 14, 2023
- Qsensing Microelectronics Co., Ltd
- Chien-Hsing Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR AND MEMS SENSOR MANUFACTURING METHOD
- Publication number 20230382717
- Publication date Nov 30, 2023
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20230345185
- Publication date Oct 26, 2023
- DB HiTek Co., Ltd.
- Seok Young LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A LOW-NOISE ELECTROACOUSTIC TRANSDUCER
- Publication number 20230247372
- Publication date Aug 3, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Samer DAGHER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A DETECTION DEVICE COMPRISING A PERIPHERAL...
- Publication number 20230213389
- Publication date Jul 6, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Geoffroy DUMONT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20230149976
- Publication date May 18, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...
- Publication number 20230107094
- Publication date Apr 6, 2023
- STMicroelectronics S.r.l.
- Gianluca LONGONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING AN INTEGRATED SYSTEM INCLUDING A CAPACITIV...
- Publication number 20230061430
- Publication date Mar 2, 2023
- STMicroelectronics S.r.l.
- Paolo FERRARI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE
- Publication number 20220396477
- Publication date Dec 15, 2022
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
- Publication number 20220396476
- Publication date Dec 15, 2022
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF
- Publication number 20220324699
- Publication date Oct 13, 2022
- Huawei Technologies Co., Ltd
- Fengpei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
- Publication number 20220185656
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-HSIEN CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED PIEZOELECTRIC MICROELECTROMECHANICAL ULTRASOUND TRANSDUC...
- Publication number 20220172506
- Publication date Jun 2, 2022
- InvenSense, Inc.
- Julius Ming-Lin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRECISION FABRICATION OF NANOSIEVES
- Publication number 20220055893
- Publication date Feb 24, 2022
- International Business Machines Corporation
- Joshua T. Smith
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FAB...
- Publication number 20220023915
- Publication date Jan 27, 2022
- Vanguard International Semiconductor Corporation
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FAB...
- Publication number 20210362189
- Publication date Nov 25, 2021
- Vanguard International Semiconductor Corporation
- RAKESH KUMAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Transducer Device with Multilayer Diaphragm and Metho...
- Publication number 20210356342
- Publication date Nov 18, 2021
- Sciosense B.V.
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A DEVICE FOR DETECTING ELECTROMAGNETIC RA...
- Publication number 20210347636
- Publication date Nov 11, 2021
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Sébastien BECKER
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micromechanical component for a sensor device or microphone device

Electrostatically driven comb structure of MEMS, micro-mirror using...

Precision fabrication of nanosieves

Engineered substrates, free-standing semiconductor microstructures,...

Semiconductor transducer device with multilayer diaphragm and metho...

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

Integrated piezoelectric microelectromechanical ultrasound transduc...

Dielectric comb for MEMS device

Piezoelectric micromachined ultrasonic transducer and method of fab...

Manufacturing method of semiconductor structure

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

MEMs membrane structure and method of fabricating same

MEMS via with enhanced electrical and mechanical integrity

Integrated structure of mems microphone and air pressure sensor and...

Piezoelectric micromachined ultrasonic transducer and method of fab...

Freezing a sacrificial material in forming a semiconductor

Device having a membrane and method of manufacture

Manufacturing method of semiconductor structure

Integrated piezoelectric microelectromechanical ultrasound transduc...

MEMS microphone and method of manufacturing the same

Structure of micro-electro-mechanical-system microphone

MEMS microphone with acoustic relief channels

Precision fabrication of nanosieves

Methods for forming a MEMS device layer on an active device layer a...

Microelectromechanical component and method for producing same

Method to create multilayer microfluidic chips using spin-on carbon...

MEMS acoustic pressure sensor device and method for making same

MEMS component and production method for a MEMS component

Micro-device having a metal-semiconductor compound layer protected...

Method of manufacturing semiconductor device

Patents Applicationslast 30 patents

MICROMECHANICAL COMPONENT

MULTI-LEVEL MEMS PROCESS

DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE

ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...

MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DE...

MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURE...

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...

EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...

MEMS ELEMENT AND METHOD OF MANUFACTURING THE SAME

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...

MEMS DEVICE COMPRISING A DEFORMABLE STRUCTURE AND MANUFACTURING PRO...

MEMS CAPACITANCE MICROPHONE AND MANUFACTURING METHOD THEREOF

MEMS SENSOR AND MEMS SENSOR MANUFACTURING METHOD

MEMS MICROPHONE STRUCTURE AND MANUFACTURING METHOD THEREOF

METHOD FOR MANUFACTURING A LOW-NOISE ELECTROACOUSTIC TRANSDUCER

METHOD FOR MANUFACTURING A DETECTION DEVICE COMPRISING A PERIPHERAL...

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...

METHOD FOR MANUFACTURING AN INTEGRATED SYSTEM INCLUDING A CAPACITIV...

MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE OR MICROPHONE DEVICE

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...

MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE

INTEGRATED PIEZOELECTRIC MICROELECTROMECHANICAL ULTRASOUND TRANSDUC...

PRECISION FABRICATION OF NANOSIEVES

PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FAB...

PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FAB...

Semiconductor Transducer Device with Multilayer Diaphragm and Metho...

PROCESS FOR MANUFACTURING A DEVICE FOR DETECTING ELECTROMAGNETIC RA...