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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

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G03F7/704Scanned exposure beam

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Patents Grantslast 30 patents

Information Patent Grant
Storage for extreme ultraviolet light lithography
- Patent number 12,169,369
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Guancyun Li
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for coloring circuit layout and system for performing the same
- Patent number 12,159,092
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Ping Chiang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for aligned stitching
- Patent number 12,154,862
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Chia Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-component kernels for vector optical image simulation
- Patent number 12,153,349
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kenneth Lik Kin Ho
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for direct writing photoetching by parallel in...
- Patent number 12,130,554
- Issue date Oct 29, 2024
- ZHEJIANG LAB
- Cuifang Kuang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for printing a periodic pattern with a varying...
- Patent number 12,124,170
- Issue date Oct 22, 2024
- Eulitha A.G.
- Francis Clube
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase plate and fabrication method for color-separated laser backli...
- Patent number 12,124,070
- Issue date Oct 22, 2024
- Meta Platforms Technologies, LLC
- Jian Xu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to manufacture nano ridges in hard ceramic coatings
- Patent number 12,111,581
- Issue date Oct 8, 2024
- ASML Holding N.V.
- Mehmet Ali Akbas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrangement apparatus and arrangement method
- Patent number 12,112,962
- Issue date Oct 8, 2024
- Shinkawa Ltd.
- Kohei Seyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for controlling a lithographic system
- Patent number 12,099,306
- Issue date Sep 24, 2024
- ASML Netherlands B.V.
- Oscar Franciscus Jozephus Noordman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and computing device for manufacturing semiconductor device
- Patent number 12,093,630
- Issue date Sep 17, 2024
- Samsung Electronics Co., Ltd.
- Sooyong Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mask topology optimization method and system for surface plasmon ne...
- Patent number 12,092,960
- Issue date Sep 17, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Interferometric lithography grating-mask-based wafer-scale large-ar...
- Patent number 12,092,959
- Issue date Sep 17, 2024
- UNM Rainforest Innovations
- Steven R. J. Brueck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor device manufacturing method and extreme ultraviolet m...
- Patent number 12,092,961
- Issue date Sep 17, 2024
- Samsung Electronics Co., Ltd.
- Sang Chul Yeo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for inverse optical proximity correction of super-resolution...
- Patent number 12,085,846
- Issue date Sep 10, 2024
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Xiangang Luo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Layout correction method
- Patent number 12,078,924
- Issue date Sep 3, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Tingting Xu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
IC device layout method
- Patent number 12,079,559
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Wei Peng
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for fabricating mask, method for fabricating semiconductor d...
- Patent number 12,068,327
- Issue date Aug 20, 2024
- Samsung Electronics Co., Ltd.
- Myoung-Ho Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection tool for an extreme ultraviolet radiation source to obse...
- Patent number 12,066,761
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chiao-Hua Cheng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
3-side buttable stitched image sensor
- Patent number 12,061,420
- Issue date Aug 13, 2024
- IMASENIC ADVANCED IMAGING S.L.
- Renato Turchetta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for correcting semiconductor mask pattern and semiconductor...
- Patent number 12,055,849
- Issue date Aug 6, 2024
- United Microelectronics Corp.
- Sheng-Lun Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for pattern generation
- Patent number 12,055,858
- Issue date Aug 6, 2024
- Mycronic AB
- Martin Glimtoft
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography contamination control
- Patent number 12,055,867
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chieh Hsieh
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for controlling a lithographic apparatus and associated appa...
- Patent number 12,050,406
- Issue date Jul 30, 2024
- ASML Netherlands B.V.
- Frank Staals
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask, exposure method and touch panel
- Patent number 12,050,397
- Issue date Jul 30, 2024
- Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Jie Lei
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multiple-mask multiple-exposure lithography and masks
- Patent number 12,044,977
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Peter Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Beam position image optimization
- Patent number 12,044,978
- Issue date Jul 23, 2024
- Mycronic AB
- Anders Svensson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing photo masks
- Patent number 12,038,693
- Issue date Jul 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chien-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EUV wafer defect improvement and method of collecting nonconductive...
- Patent number 12,032,303
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tao-Hsin Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Picometer optical comb, and device and method for generating the same
- Patent number 12,025,819
- Issue date Jul 2, 2024
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Changhe Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL PROXIMITY CORRECTION METHOD AND METHOD OF FABRICATING SEMIC...
- Publication number 20240419084
- Publication date Dec 19, 2024
- Samsung Electronics Co., Ltd.
- HEUNGSUK OH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI HEAD SCANNING LITHOGRAPHIC LASER WRITER
- Publication number 20240411231
- Publication date Dec 12, 2024
- Mycronic AB
- Andrzej Karawajczyk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND DEVICE FOR A LITHOGRAPHY-BASED GENERATIVE MANUFACTURE OF...
- Publication number 20240408822
- Publication date Dec 12, 2024
- UPNANO GMBH
- Peter GRUBER
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
METHOD FOR NON-INVASIVE PRODUCTION OF DEFINED STRUCTURES INSIDE COM...
- Publication number 20240402608
- Publication date Dec 5, 2024
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften e.V.
- Kerstin GÖPFRICH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
UVC LED LIGHT FINISHER FOR DETACKING FLEXOGRAPHIC PRINTING PLATES
- Publication number 20240402607
- Publication date Dec 5, 2024
- ESKO-GRAPHICS IMAGING GMBH
- Thomas Klein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF FORMING BIOACTIVE PATTERNS USING BEAM PEN LITHOGRAPY-CON...
- Publication number 20240385528
- Publication date Nov 21, 2024
- Northwestern University
- Chad A. Mirkin
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Application
Material for Enhancing the Effects of Exercise
- Publication number 20240385529
- Publication date Nov 21, 2024
- Michael Rudan
- A41 - WEARING APPAREL
Information Patent Application
EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, EXPOSURE DEVICE, AND...
- Publication number 20240377754
- Publication date Nov 14, 2024
- Nikon Corporation
- Yoji WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTIPLE-MASK MULTIPLE-EXPOSURE LITHOGRAPHY AND MASKS
- Publication number 20240377755
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Peter Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LOCAL SHADOW MASKING FOR MULTI-COLOR EXPOSURES
- Publication number 20240377744
- Publication date Nov 14, 2024
- Geminatio, Inc.
- Brennan Peterson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
- Publication number 20240369947
- Publication date Nov 7, 2024
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING MASK, METHOD FOR FABRICATING SEMICONDUCTOR D...
- Publication number 20240371886
- Publication date Nov 7, 2024
- Samsung Electronics Co., Ltd.
- Myoung-Ho KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND COMPUTER PROGRAMS FOR DATA MAPPING FOR LOW DIMENSIONAL...
- Publication number 20240369943
- Publication date Nov 7, 2024
- ASML NETHERLANDS B.V.
- Kedir Mohammed ADAL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IC DEVICE
- Publication number 20240370628
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Wei PENG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN SELECTION FOR SOURCE MASK OPTIMIZATION AND TARGET OPTIMIZATION
- Publication number 20240369940
- Publication date Nov 7, 2024
- ASML NETHERLANDS B.V.
- Duan-Fu Stephen HSU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY CONTAMINATION CONTROL
- Publication number 20240361708
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chieh HSIEH
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
NOVEL DESIGN OF AN INSPECTION TOOL FOR AN EXTREME ULTRAVIOLET RADIA...
- Publication number 20240361701
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chiao-Hua CHENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD AND DEVICE
- Publication number 20240361705
- Publication date Oct 31, 2024
- ASML NETHERLANDS B.V.
- Sergey TARABRIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PRODUCING FLEXIBLE PRINTED WIRING BOARD
- Publication number 20240365469
- Publication date Oct 31, 2024
- FUJIKURA PRINTED CIRCUITS LTD.
- Daisuke Arai
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
DISSECTION METHOD FOR OPTICAL PROXIMITY CORRECTION AND PATTERNING M...
- Publication number 20240353747
- Publication date Oct 24, 2024
- United Microelectronics Corp.
- Pin Han Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR GENERATING OPTICAL PROXIMITY CORRECTION MODEL AND METHOD...
- Publication number 20240353748
- Publication date Oct 24, 2024
- Samsung Electronics Co., Ltd.
- Sang Chul YEO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHOD
- Publication number 20240353761
- Publication date Oct 24, 2024
- ASML NETHERLANDS B.V.
- Sebastianus Adrianus GOORDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK, EXPOSURE METHOD AND TOUCH PANEL
- Publication number 20240345470
- Publication date Oct 17, 2024
- HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Jie LEI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF EVALUATING SELECTED SET OF PATTERNS
- Publication number 20240345487
- Publication date Oct 17, 2024
- Rencheng SUN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MANUFACTURING PHOTO MASKS
- Publication number 20240337951
- Publication date Oct 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Cheng CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for laser interference structuring of substrat...
- Publication number 20240337950
- Publication date Oct 10, 2024
- FUSION BIONIC GMBH
- Tim KUNZE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENHANCED RULE-BASED SHIFTING OF INTEGRATED CIRCUIT VIAS LAYOUTS TO...
- Publication number 20240334611
- Publication date Oct 3, 2024
- Intel Corporation
- Sunita Thulasi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CYCLIC EXPOSURE SCANNING SYSTEM HAVING DISTRIBUTED MULTI-LENS AND M...
- Publication number 20240329541
- Publication date Oct 3, 2024
- National Cheng Kung University
- YUNG-CHUN LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...
- Publication number 20240319619
- Publication date Sep 26, 2024
- TSINGHUA UNIVERSITY
- Yu ZHU
- G01 - MEASURING TESTING
Information Patent Application
GEOMETRIC MASK RULE CHECK WITH FAVORABLE AND UNFAVORABLE ZONES
- Publication number 20240311545
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Ming Chang
- G06 - COMPUTING CALCULATING COUNTING

Scanned exposure beam

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Storage for extreme ultraviolet light lithography

Method for coloring circuit layout and system for performing the same

System and method for aligned stitching

Multi-component kernels for vector optical image simulation

Method and apparatus for direct writing photoetching by parallel in...

Method and apparatus for printing a periodic pattern with a varying...

Phase plate and fabrication method for color-separated laser backli...

Method to manufacture nano ridges in hard ceramic coatings

Arrangement apparatus and arrangement method

Method for controlling a lithographic system

Method and computing device for manufacturing semiconductor device

Mask topology optimization method and system for surface plasmon ne...

Interferometric lithography grating-mask-based wafer-scale large-ar...

Semiconductor device manufacturing method and extreme ultraviolet m...

Method for inverse optical proximity correction of super-resolution...

Layout correction method

IC device layout method

Method for fabricating mask, method for fabricating semiconductor d...

Inspection tool for an extreme ultraviolet radiation source to obse...

3-side buttable stitched image sensor

Method for correcting semiconductor mask pattern and semiconductor...

Method and device for pattern generation

Lithography contamination control

Method for controlling a lithographic apparatus and associated appa...

Mask, exposure method and touch panel

Multiple-mask multiple-exposure lithography and masks

Beam position image optimization

Method of manufacturing photo masks

EUV wafer defect improvement and method of collecting nonconductive...

Picometer optical comb, and device and method for generating the same

Patents Applicationslast 30 patents

OPTICAL PROXIMITY CORRECTION METHOD AND METHOD OF FABRICATING SEMIC...

MULTI HEAD SCANNING LITHOGRAPHIC LASER WRITER

METHOD AND DEVICE FOR A LITHOGRAPHY-BASED GENERATIVE MANUFACTURE OF...

METHOD FOR NON-INVASIVE PRODUCTION OF DEFINED STRUCTURES INSIDE COM...

UVC LED LIGHT FINISHER FOR DETACKING FLEXOGRAPHIC PRINTING PLATES

METHODS OF FORMING BIOACTIVE PATTERNS USING BEAM PEN LITHOGRAPY-CON...

Material for Enhancing the Effects of Exercise

EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, EXPOSURE DEVICE, AND...

MULTIPLE-MASK MULTIPLE-EXPOSURE LITHOGRAPHY AND MASKS

LOCAL SHADOW MASKING FOR MULTI-COLOR EXPOSURES

METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS

METHOD FOR FABRICATING MASK, METHOD FOR FABRICATING SEMICONDUCTOR D...

METHODS AND COMPUTER PROGRAMS FOR DATA MAPPING FOR LOW DIMENSIONAL...

IC DEVICE

PATTERN SELECTION FOR SOURCE MASK OPTIMIZATION AND TARGET OPTIMIZATION

LITHOGRAPHY CONTAMINATION CONTROL

NOVEL DESIGN OF AN INSPECTION TOOL FOR AN EXTREME ULTRAVIOLET RADIA...

METROLOGY METHOD AND DEVICE

METHOD FOR PRODUCING FLEXIBLE PRINTED WIRING BOARD

DISSECTION METHOD FOR OPTICAL PROXIMITY CORRECTION AND PATTERNING M...

METHOD FOR GENERATING OPTICAL PROXIMITY CORRECTION MODEL AND METHOD...

METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHOD

MASK, EXPOSURE METHOD AND TOUCH PANEL

METHOD OF EVALUATING SELECTED SET OF PATTERNS

METHOD OF MANUFACTURING PHOTO MASKS

Apparatus and method for laser interference structuring of substrat...

ENHANCED RULE-BASED SHIFTING OF INTEGRATED CIRCUIT VIAS LAYOUTS TO...

CYCLIC EXPOSURE SCANNING SYSTEM HAVING DISTRIBUTED MULTI-LENS AND M...

PHASE MEASUREMENT DEVICE FOR LASER INTERFERENCE PHOTOLITHOGRAPHY SY...

GEOMETRIC MASK RULE CHECK WITH FAVORABLE AND UNFAVORABLE ZONES