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B81C1/00174

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

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B81C1/00174See-saws

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Microfabrication of omni-view peripheral scanning system
- Patent number 11,926,523
- Issue date Mar 12, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor and method for producing a micromechanical s...
- Patent number 10,294,095
- Issue date May 21, 2019
- Robert Bosch GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated circuit provided with a device for detecting its spatial...
- Patent number 9,670,058
- Issue date Jun 6, 2017
- STMicroelectronics (Rousset) SAS
- Antonio Di-Giacomo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planarity of pixel mirrors
- Patent number 8,203,776
- Issue date Jun 19, 2012
- Texas Instruments Incorporated
- Rosemary Urmese Anthraper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-structure fabrication method
- Patent number 8,082,651
- Issue date Dec 27, 2011
- Canon Kabushiki Kaisha
- Yoshitaka Zaitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing monocrystalline silicon micromirrors
- Patent number 7,981,303
- Issue date Jul 19, 2011
- Micronic Mydata AB
- Martin Bring
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of fabricating interferometric modulators by selectively re...
- Patent number 7,429,334
- Issue date Sep 30, 2008
- IDC, LLC
- Ming-Hau Tung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of fabricating interferometric modulators by selectively re...
- Patent number 7,420,728
- Issue date Sep 2, 2008
- IDC, LLC
- Ming-Hau Tung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Staggered vertical comb drive fabrication method
- Patent number 7,357,874
- Issue date Apr 15, 2008
- JDS Uniphase Corporation
- Steven H. Moffat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Co-planar surface and torsion device mirror structure and method of...
- Patent number 7,298,539
- Issue date Nov 20, 2007
- Miradia Inc.
- Xiao Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and method of forming MEMS device
- Patent number 7,079,301
- Issue date Jul 18, 2006
- Hewlett-Packard Development Company, L.P.
- Michael G. Monroe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and method of forming MEMS device
- Patent number 6,914,709
- Issue date Jul 5, 2005
- Hewlett-Packard Development Company, L.P.
- Michael G. Monroe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS mirror and method of fabrication
- Patent number 6,735,008
- Issue date May 11, 2004
- Corning Incorporated
- Christopher P. Brophy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for the manufacture of a thin film actuated mirror array
- Patent number 6,203,715
- Issue date Mar 20, 2001
- Daewoo Electronics Co., Ltd.
- You-Kwang Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Array of thin film actuated mirrors and method for the manufacture...
- Patent number 5,606,452
- Issue date Feb 25, 1997
- Daewoo Electronics Co., Ltd.
- Yong-Ki Min
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS Array Structures for Gyroscopes with High Resonant Frequencies
- Publication number 20250026629
- Publication date Jan 23, 2025
- NXP USA, Inc.
- Jun Tang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATION OF OMNI-VIEW PERIPHERAL SCANNING SYSTEM
- Publication number 20230072948
- Publication date Mar 9, 2023
- Beijing Voyager Technology Co., Ltd.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MIRROR DEVICE MANUFACTURING METHOD AND MIRROR UNIT MANUFACTURING ME...
- Publication number 20220363535
- Publication date Nov 17, 2022
- Hamamatsu Photonics K.K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANO-ENGINEERED SURFACES FOR ACTIVELY REVERSIBLE AND REUSABLE DRY A...
- Publication number 20180290884
- Publication date Oct 11, 2018
- Metis Design Corporation
- Seth S. Kessler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical Sensor and Method for Producing a Micromechanical S...
- Publication number 20170341927
- Publication date Nov 30, 2017
- ROBERT BOSCH GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMAGNETIC MEMS DEVICE
- Publication number 20160124214
- Publication date May 5, 2016
- Intel Corporation
- Barak Freedman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated Circuit Provided with a Device for Detecting its Spatial...
- Publication number 20150014794
- Publication date Jan 15, 2015
- STMicroelectronics (Rousset) SAS
- Antonio Di-Giacomo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH SLOPED SUPPORT
- Publication number 20140192397
- Publication date Jul 10, 2014
- TEXAS INSTRUMENTS INCORPORATED
- Earl V. Atnip
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING MICRO-MIRROR ASSEMBLY
- Publication number 20100149623
- Publication date Jun 17, 2010
- SILVERBROOK RESEARCH PTY LTD
- Gregory John McAvoy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANARITY OF PIXEL MIRRORS
- Publication number 20100128338
- Publication date May 27, 2010
- TEXAS INSTRUMENTS INCORPORATED
- Rosemary Urmese Anthraper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NOVEL MONOCRYSTALLINE SILICON MICROMIRRORS FOR MASKLESS LITHOGRAPHY
- Publication number 20090080097
- Publication date Mar 26, 2009
- Martin Bring
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRUCTURE FABRICATION METHOD
- Publication number 20090031548
- Publication date Feb 5, 2009
- Canon Kabushiki Kaisha
- Yoshitaka Zaitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIMPLIFIED MANUFACTURING PROCESS FOR MICRO MIRRORS
- Publication number 20080123206
- Publication date May 29, 2008
- SPATIAL PHOTONICS, INC.
- Shaoher X. Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Staggered Vertical Comb Drive Fabrication Method
- Publication number 20070241076
- Publication date Oct 18, 2007
- Steven H. Moffat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Co-planar surface and torsion device mirror structure and method of...
- Publication number 20060274397
- Publication date Dec 7, 2006
- Miradia Inc.
- Xiao Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods of fabricating interferometric modulators by selectively re...
- Publication number 20060077502
- Publication date Apr 13, 2006
- Ming-Hau Tung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods of fabricating interferometric modulators by selectively re...
- Publication number 20060076311
- Publication date Apr 13, 2006
- Ming-Hau Tung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS device and method of forming MEMS device
- Publication number 20050176212
- Publication date Aug 11, 2005
- Michael G. Monroe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS device and method of forming MEMS device
- Publication number 20050073735
- Publication date Apr 7, 2005
- Michael G. Monroe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of producing an integrated type microswitch
- Publication number 20020140533
- Publication date Oct 3, 2002
- Masaru Miyazaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS mirror and method of fabrication
- Publication number 20020075554
- Publication date Jun 20, 2002
- Christopher P. Brophy
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microfabrication of omni-view peripheral scanning system

Micromechanical sensor and method for producing a micromechanical s...

Integrated circuit provided with a device for detecting its spatial...

Planarity of pixel mirrors

Micro-structure fabrication method

Method of manufacturing monocrystalline silicon micromirrors

Methods of fabricating interferometric modulators by selectively re...

Methods of fabricating interferometric modulators by selectively re...

Staggered vertical comb drive fabrication method

Co-planar surface and torsion device mirror structure and method of...

MEMS device and method of forming MEMS device

MEMS device and method of forming MEMS device

MEMS mirror and method of fabrication

Method for the manufacture of a thin film actuated mirror array

Array of thin film actuated mirrors and method for the manufacture...

Patents Applicationslast 30 patents

MEMS Array Structures for Gyroscopes with High Resonant Frequencies

MICROFABRICATION OF OMNI-VIEW PERIPHERAL SCANNING SYSTEM

MIRROR DEVICE MANUFACTURING METHOD AND MIRROR UNIT MANUFACTURING ME...

NANO-ENGINEERED SURFACES FOR ACTIVELY REVERSIBLE AND REUSABLE DRY A...

Micromechanical Sensor and Method for Producing a Micromechanical S...

ELECTROMAGNETIC MEMS DEVICE

Integrated Circuit Provided with a Device for Detecting its Spatial...

MEMS DEVICE WITH SLOPED SUPPORT

METHOD OF FABRICATING MICRO-MIRROR ASSEMBLY

PLANARITY OF PIXEL MIRRORS

NOVEL MONOCRYSTALLINE SILICON MICROMIRRORS FOR MASKLESS LITHOGRAPHY

STRUCTURE FABRICATION METHOD

SIMPLIFIED MANUFACTURING PROCESS FOR MICRO MIRRORS

Staggered Vertical Comb Drive Fabrication Method

Co-planar surface and torsion device mirror structure and method of...

Methods of fabricating interferometric modulators by selectively re...

Methods of fabricating interferometric modulators by selectively re...

MEMS device and method of forming MEMS device

MEMS device and method of forming MEMS device

Method of producing an integrated type microswitch

MEMS mirror and method of fabrication