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B81C1/00174
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
Current Industry
B81C1/00174
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Patents Grants
last 30 patents
Information
Patent Grant
Microfabrication of omni-view peripheral scanning system
Patent number
11,926,523
Issue date
Mar 12, 2024
BEIJING VOYAGER TECHNOLOGY CO., LTD.
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical sensor and method for producing a micromechanical s...
Patent number
10,294,095
Issue date
May 21, 2019
Robert Bosch GmbH
Benny Pekka Herzogenrath
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated circuit provided with a device for detecting its spatial...
Patent number
9,670,058
Issue date
Jun 6, 2017
STMicroelectronics (Rousset) SAS
Antonio Di-Giacomo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planarity of pixel mirrors
Patent number
8,203,776
Issue date
Jun 19, 2012
Texas Instruments Incorporated
Rosemary Urmese Anthraper
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-structure fabrication method
Patent number
8,082,651
Issue date
Dec 27, 2011
Canon Kabushiki Kaisha
Yoshitaka Zaitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing monocrystalline silicon micromirrors
Patent number
7,981,303
Issue date
Jul 19, 2011
Micronic Mydata AB
Martin Bring
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of fabricating interferometric modulators by selectively re...
Patent number
7,429,334
Issue date
Sep 30, 2008
IDC, LLC
Ming-Hau Tung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of fabricating interferometric modulators by selectively re...
Patent number
7,420,728
Issue date
Sep 2, 2008
IDC, LLC
Ming-Hau Tung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Staggered vertical comb drive fabrication method
Patent number
7,357,874
Issue date
Apr 15, 2008
JDS Uniphase Corporation
Steven H. Moffat
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Co-planar surface and torsion device mirror structure and method of...
Patent number
7,298,539
Issue date
Nov 20, 2007
Miradia Inc.
Xiao Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device and method of forming MEMS device
Patent number
7,079,301
Issue date
Jul 18, 2006
Hewlett-Packard Development Company, L.P.
Michael G. Monroe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device and method of forming MEMS device
Patent number
6,914,709
Issue date
Jul 5, 2005
Hewlett-Packard Development Company, L.P.
Michael G. Monroe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS mirror and method of fabrication
Patent number
6,735,008
Issue date
May 11, 2004
Corning Incorporated
Christopher P. Brophy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for the manufacture of a thin film actuated mirror array
Patent number
6,203,715
Issue date
Mar 20, 2001
Daewoo Electronics Co., Ltd.
You-Kwang Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Array of thin film actuated mirrors and method for the manufacture...
Patent number
5,606,452
Issue date
Feb 25, 1997
Daewoo Electronics Co., Ltd.
Yong-Ki Min
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICROFABRICATION OF OMNI-VIEW PERIPHERAL SCANNING SYSTEM
Publication number
20230072948
Publication date
Mar 9, 2023
Beijing Voyager Technology Co., Ltd.
Youmin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MIRROR DEVICE MANUFACTURING METHOD AND MIRROR UNIT MANUFACTURING ME...
Publication number
20220363535
Publication date
Nov 17, 2022
Hamamatsu Photonics K.K.
Daiki SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NANO-ENGINEERED SURFACES FOR ACTIVELY REVERSIBLE AND REUSABLE DRY A...
Publication number
20180290884
Publication date
Oct 11, 2018
Metis Design Corporation
Seth S. Kessler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micromechanical Sensor and Method for Producing a Micromechanical S...
Publication number
20170341927
Publication date
Nov 30, 2017
ROBERT BOSCH GmbH
Benny Pekka Herzogenrath
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROMAGNETIC MEMS DEVICE
Publication number
20160124214
Publication date
May 5, 2016
Intel Corporation
Barak Freedman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Integrated Circuit Provided with a Device for Detecting its Spatial...
Publication number
20150014794
Publication date
Jan 15, 2015
STMicroelectronics (Rousset) SAS
Antonio Di-Giacomo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH SLOPED SUPPORT
Publication number
20140192397
Publication date
Jul 10, 2014
TEXAS INSTRUMENTS INCORPORATED
Earl V. Atnip
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FABRICATING MICRO-MIRROR ASSEMBLY
Publication number
20100149623
Publication date
Jun 17, 2010
SILVERBROOK RESEARCH PTY LTD
Gregory John McAvoy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANARITY OF PIXEL MIRRORS
Publication number
20100128338
Publication date
May 27, 2010
TEXAS INSTRUMENTS INCORPORATED
Rosemary Urmese Anthraper
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NOVEL MONOCRYSTALLINE SILICON MICROMIRRORS FOR MASKLESS LITHOGRAPHY
Publication number
20090080097
Publication date
Mar 26, 2009
Martin Bring
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRUCTURE FABRICATION METHOD
Publication number
20090031548
Publication date
Feb 5, 2009
Canon Kabushiki Kaisha
Yoshitaka Zaitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SIMPLIFIED MANUFACTURING PROCESS FOR MICRO MIRRORS
Publication number
20080123206
Publication date
May 29, 2008
SPATIAL PHOTONICS, INC.
Shaoher X. Pan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Staggered Vertical Comb Drive Fabrication Method
Publication number
20070241076
Publication date
Oct 18, 2007
Steven H. Moffat
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Co-planar surface and torsion device mirror structure and method of...
Publication number
20060274397
Publication date
Dec 7, 2006
Miradia Inc.
Xiao Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Methods of fabricating interferometric modulators by selectively re...
Publication number
20060077502
Publication date
Apr 13, 2006
Ming-Hau Tung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Methods of fabricating interferometric modulators by selectively re...
Publication number
20060076311
Publication date
Apr 13, 2006
Ming-Hau Tung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS device and method of forming MEMS device
Publication number
20050176212
Publication date
Aug 11, 2005
Michael G. Monroe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS device and method of forming MEMS device
Publication number
20050073735
Publication date
Apr 7, 2005
Michael G. Monroe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of producing an integrated type microswitch
Publication number
20020140533
Publication date
Oct 3, 2002
Masaru Miyazaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS mirror and method of fabrication
Publication number
20020075554
Publication date
Jun 20, 2002
Christopher P. Brophy
B81 - MICRO-STRUCTURAL TECHNOLOGY