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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/28562
Selective deposition
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Patents Grants
last 30 patents
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Patent Grant
Selective tungsten deposition at low temperatures
Patent number
11,967,525
Issue date
Apr 23, 2024
Applied Materials, Inc.
Yi Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
11,967,500
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Arito Ogawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective cobalt deposition on copper surfaces
Patent number
11,959,167
Issue date
Apr 16, 2024
Applied Materials, Inc.
Sang-Ho Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Techniques and device structure based upon directional seeding and...
Patent number
11,956,978
Issue date
Apr 9, 2024
Applied Materials, Inc.
M. Arif Zeeshan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal adhesion layer to promote metal plug adhesion
Patent number
11,955,379
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Pei-Wen Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure having alternating selective metal and diel...
Patent number
11,942,426
Issue date
Mar 26, 2024
International Business Machines Corporation
Son Nguyen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of etching metal-containing layers
Patent number
11,942,332
Issue date
Mar 26, 2024
Applied Materials, Inc.
Akhil Mehrotra
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-region diffusion barrier containing titanium, silicon and nit...
Patent number
11,942,365
Issue date
Mar 26, 2024
Eugenus, Inc.
Vinayak Veer Vats
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming via structure having low interface resistance
Patent number
11,929,321
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Li-Zhen Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device, method of processing...
Patent number
11,923,191
Issue date
Mar 5, 2024
Kokusai Electric Corporation
Shoma Miyata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
11,915,981
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Peng-Soon Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electronic device having an oxygen free platinum group metal film
Patent number
11,894,233
Issue date
Feb 6, 2024
Applied Materials, Inc.
Yixiong Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Enhanced spatial ALD of metals through controlled precursor mixing
Patent number
11,887,856
Issue date
Jan 30, 2024
Applied Materials, Inc.
Kelvin Chan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
Patent number
11,887,855
Issue date
Jan 30, 2024
Applied Materials, Inc.
Xinyu Fu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Self-aligned contacts
Patent number
11,887,891
Issue date
Jan 30, 2024
Intel Corporation
Mark T. Bohr
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contacts having a geometry to reduce resistance
Patent number
11,875,987
Issue date
Jan 16, 2024
International Business Machines Corporation
Lawrence A. Clevenger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Layer deposition method and layer deposition apparatus
Patent number
11,840,760
Issue date
Dec 12, 2023
Samsung Electronics Co., Ltd.
Shin-Jae Kang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fluorine-containing conductive films
Patent number
11,823,976
Issue date
Nov 21, 2023
ASM IP Holding, B.V.
Tom E. Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective processing with etch residue-based inhibitors
Patent number
11,823,909
Issue date
Nov 21, 2023
Lam Research Corporation
Kashish Sharma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor devices with dissimlar materials and methods
Patent number
11,810,954
Issue date
Nov 7, 2023
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Gordon M. Grivna
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming a transition metal niobium nitride film on a su...
Patent number
11,810,788
Issue date
Nov 7, 2023
ASM IP Holding B.V.
Jerry Peijun Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for mitigating lateral film growth in area selective deposition
Patent number
11,804,376
Issue date
Oct 31, 2023
Tokyo Electron Limited
Kandabara N. Tapily
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming a rhenium-containing film on a substrate by a c...
Patent number
11,769,670
Issue date
Sep 26, 2023
ASM IP Holding B.V.
Varun Sharma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cluster processing system for forming a transition metal material
Patent number
11,756,828
Issue date
Sep 12, 2023
Applied Materials, Inc.
Keith Tatseun Wong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact plugs for semiconductor device
Patent number
11,756,864
Issue date
Sep 12, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Mrunal A Khaderbad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas introduction structure, thermal processing apparatus and gas su...
Patent number
11,725,281
Issue date
Aug 15, 2023
Tokyo Electron Limited
Shingo Hishiya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Area selective organic material removal
Patent number
11,694,903
Issue date
Jul 4, 2023
ASM IP Holding B.V.
Mikko Ritala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for fabricating the same
Patent number
11,676,820
Issue date
Jun 13, 2023
SK Hynix Inc.
Oh-Hyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective deposition on silicon containing surfaces
Patent number
11,670,512
Issue date
Jun 6, 2023
VERSUM MATERIALS US, LLC
Michael A. Todd
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-aligned contacts
Patent number
11,600,524
Issue date
Mar 7, 2023
Intel Corporation
Mark T. Bohr
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND MET...
Publication number
20240120213
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Woo Rim LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE PROCESSING WITH ETCH RESIDUE-BASED INHIBITORS
Publication number
20240038539
Publication date
Feb 1, 2024
LAM RESEARCH CORPORATION
Kashish Sharma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICES WITH DISSIMLAR MATERIALS AND METHODS
Publication number
20240030293
Publication date
Jan 25, 2024
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Gordon M. Grivna
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING A TRANSITION METAL NIOBIUM NITRIDE FILM ON A SU...
Publication number
20240030035
Publication date
Jan 25, 2024
ASM IP HOLDING B.V.
Jerry Peijun Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELF-ALIGNED CONTACTS
Publication number
20240030067
Publication date
Jan 25, 2024
Intel Corporation
Mark T. BOHR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTACT PLUGS FOR SEMICONDUCTOR DEVICE AND METHOD OF FORMING SAME
Publication number
20240021501
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Mrunal A. Khaderbad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW RESISTANCE PULSED CVD TUNGSTEN
Publication number
20240006180
Publication date
Jan 4, 2024
LAM RESEARCH CORPORATION
Yu PAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION USING NOVEL OXYGEN-CONTAINING PRECURSORS
Publication number
20230416915
Publication date
Dec 28, 2023
Applied Materials, Inc.
Geetika Bajaj
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CLUSTER PROCESSING SYSTEM FOR FORMING A METAL CONTAINING MATERIAL
Publication number
20230377958
Publication date
Nov 23, 2023
Applied Materials, Inc.
Keith Tatseun WONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF FIELD-SUPPRESSION CVD TUNGSTEN (W) FILL ON PVD W LINER
Publication number
20230326791
Publication date
Oct 12, 2023
Applied Materials, Inc.
Zhimin QI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
AREA SELECTIVE ORGANIC MATERIAL REMOVAL
Publication number
20230307247
Publication date
Sep 28, 2023
ASM IP HOLDING B.V.
Mikko Ritala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF SELECTIVELY FORMING COBALT METAL LAYER BY USING COBALT CO...
Publication number
20230257409
Publication date
Aug 17, 2023
Samsung Electronics Co., Ltd.
Soyoung LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-ALIGNED CONTACTS
Publication number
20230154793
Publication date
May 18, 2023
Intel Corporation
Mark T. BOHR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATERIAL LAYER DEPOSITION METHODS, SEMICONDUCTOR PROCESSING SYSTEMS...
Publication number
20230125884
Publication date
Apr 27, 2023
ASM IP HOLDING, B.V.
Gregory Deye
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REACTANT GAS PULSE DELIVERY
Publication number
20230130557
Publication date
Apr 27, 2023
LAM RESEARCH CORPORATION
Krishna BIRRU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DEVICES WITH DISSIMLAR MATERIALS AND METHODS
Publication number
20230095014
Publication date
Mar 30, 2023
Semiconductor Components Industries, LLC
Gordon M. Grivna
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND STRUCTURE FOR DETERMINING BLOCKING ABILITY OF COPPER DIF...
Publication number
20230100023
Publication date
Mar 30, 2023
Shenzhen china Star Optoelectronics Semiconductor Display Technology Co., Ltd.
Xiaobo HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLUORINE-CONTAINING CONDUCTIVE FILMS
Publication number
20230085443
Publication date
Mar 16, 2023
ASM IP HOLDING B.V.
Tom E. Blomberg
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Via Structure And Methods Of Forming The Same
Publication number
20230059026
Publication date
Feb 23, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Wei-Chieh Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Oxygen Free Deposition Of Platinum Group Metal Films
Publication number
20230025937
Publication date
Jan 26, 2023
Applied Materials, Inc.
Yixiong Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING NANOCRYSTALLINE GRAPHENE
Publication number
20230017244
Publication date
Jan 19, 2023
Samsung Electronics Co., Ltd.
Keunwook SHIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION OF ORGANIC FILMS
Publication number
20230011277
Publication date
Jan 12, 2023
ASM IP HOLDING B.V.
Eva E. Tois
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
METHOD FOR FORMING ELECTRODE
Publication number
20220392769
Publication date
Dec 8, 2022
Jusung Engineering Co., Ltd.
Won Tae CHO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS OF ETCHING METAL-CONTAINING LAYERS
Publication number
20220392774
Publication date
Dec 8, 2022
Applied Materials, Inc.
Akhil MEHROTRA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING A METALLIC FILM ON A SUBSTRATE BY CYCLICAL DEPO...
Publication number
20220367195
Publication date
Nov 17, 2022
ASM IP HOLDING B.V.
Katja Väyrynen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELECTIVE TUNGSTEN DEPOSITION AT LOW TEMPERATURES
Publication number
20220367264
Publication date
Nov 17, 2022
Applied Materials, Inc.
Yi Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Source/Drain Via Having Reduced Resistance
Publication number
20220359675
Publication date
Nov 10, 2022
Taiwan Semiconductor Manufacturing Co., LTD
Po-Yu Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW RESISTANCE INTERCONNECT STRUCTURE FOR SEMICONDUCTOR DEVICE
Publication number
20220359372
Publication date
Nov 10, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Jason Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNGSTEN FEATURE FILL WITH NUCLEATION INHIBITION
Publication number
20220359280
Publication date
Nov 10, 2022
Novellus Systems, Inc.
Tsung-Han YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DOPED SELECTIVE METAL CAPS TO IMPROVE COPPER ELECTROMIGRATION WITH...
Publication number
20220336271
Publication date
Oct 20, 2022
Applied Materials, Inc.
Mehul B. NAIK
H01 - BASIC ELECTRIC ELEMENTS