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ANTI-STICTION PROCESS FOR MEMS DEVICE
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Publication number 20220242724
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Publication date Aug 4, 2022
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Taiwan Semiconductor Manufacturing Co.,Ltd
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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INKJET PRINTING PROCESS
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Publication number 20210379898
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Publication date Dec 9, 2021
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LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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INTEGRATED MEMS CAVITY SEAL
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Publication date May 20, 2021
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InvenSense, Inc.
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Ian Flader
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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ANTI-STICTION PROCESS FOR MEMS DEVICE
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Publication number 20200123003
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Publication date Apr 23, 2020
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Taiwan Semiconductor Manufacturing Co., LTD
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Jui-Chun Weng
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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SIDEWALL STOPPER FOR MEMS DEVICE
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Publication number 20200102209
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Publication date Apr 2, 2020
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Taiwan Semiconductor Manufacturing Co., LTD
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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METHOD OF FORMING A MICRO-STRUCTURE
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Publication number 20170267520
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Hewlett-Packard Development Company, L.P.
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Peter Mardilovich
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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