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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
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Patents Grants
last 30 patents
Information
Patent Grant
Manufacturing method of semiconductor device and semiconductor manu...
Patent number
10,008,390
Issue date
Jun 26, 2018
TOSHIBA MEMORY CORPORATION
Yukiteru Matsui
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electronic device using MEMS technology
Patent number
9,914,637
Issue date
Mar 13, 2018
Kabushiki Kaisha Toshiba
Akira Fujimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for the manufacture of semiconductor devices comprising the...
Patent number
9,416,298
Issue date
Aug 16, 2016
BASF SE
Yuzhuo Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for etched cavity devices
Patent number
8,709,848
Issue date
Apr 29, 2014
FREESCALE SEMICONDUCTOR, INC.
Srivatsa G. Kundalgurki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for the production of planar structures
Patent number
8,003,537
Issue date
Aug 23, 2011
IMEC
Xavier Rottenberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for filling vias
Patent number
7,781,311
Issue date
Aug 24, 2010
Texas Instruments Incorporated
Mark Andrew Franklin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Global planarization method
Patent number
6,884,729
Issue date
Apr 26, 2005
Cabot Microelectronics Corporation
Jui-Kun Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structures using chemo-mechanical polishing and chemically-selectiv...
Patent number
6,545,299
Issue date
Apr 8, 2003
The Regents of the University of California
Jeffrey J. Peterson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabricating structures using chemo-mechanical polishing and chemica...
Patent number
6,465,357
Issue date
Oct 15, 2002
The Regents of the University of California
Jeffrey J. Peterson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DEVICE WITH MEMBRANE AND UPRIGHT NANOSTRUCTURES
Publication number
20240253976
Publication date
Aug 1, 2024
INFINEON TECHNOLOGIES AG
Hutomo Suryo Wasisto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES
Publication number
20240101413
Publication date
Mar 28, 2024
Intel Corporation
Jeremy D. Ecton
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Package and Method for Encapsulating an MEMS Structure
Publication number
20230382722
Publication date
Nov 30, 2023
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Frank SENGER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
Publication number
20180277388
Publication date
Sep 27, 2018
Toshiba Memory Corporation
Yukiteru MATSUI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MANUFACTURING METHOD FOR A MICROMECHANICAL DEVICE INCLUDING AN OBLI...
Publication number
20180257932
Publication date
Sep 13, 2018
ROBERT BOSCH GmbH
Benjamin Steuer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE ELECTRONIC DEVICE
Publication number
20170267517
Publication date
Sep 21, 2017
Kabushiki Kaisha Toshiba
Akira FUJIMOTO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE AND A COMPONEN...
Publication number
20160376145
Publication date
Dec 29, 2016
ROBERT BOSCH GmbH
Uwe Hansen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC MICROPHONE WITH INTEGRATED CMOS
Publication number
20160090300
Publication date
Mar 31, 2016
InvenSense, Inc.
Julius Ming-Lin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR ETCHED CAVITY DEVICES
Publication number
20120264249
Publication date
Oct 18, 2012
FREESCALE SEMICONDUCTOR, INC.
Srivatsa G. Kundalgurki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
System and method for filling vias
Publication number
20080150150
Publication date
Jun 26, 2008
TEXAS INSTRUMENTS INCORPORATED
Mark Andrew Franklin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR THE PRODUCTION OF PLANAR STRUCTURES
Publication number
20080038916
Publication date
Feb 14, 2008
Interuniversitair Microelektronica Centrum (MEC) vzw
Xavier Rottenberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Manufacturing method
Publication number
20060046497
Publication date
Mar 2, 2006
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Nobukazu Teranishi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Global planarization method
Publication number
20030151020
Publication date
Aug 14, 2003
Cabot Microelectronics Corporation
Jui-Kun Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY