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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/02Sensors

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Acceleration sensor and method of making the same
- Patent number 12,366,587
- Issue date Jul 22, 2025
- Chongqing University
- Xiaoping Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonance device with substrate having oxide film containing throug...
- Patent number 12,365,583
- Issue date Jul 22, 2025
- Murata Manufacturing Co., Ltd.
- Masakazu Fukumitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system membrane
- Patent number 12,368,997
- Issue date Jul 22, 2025
- AAC Technologies Pte. Ltd.
- Yannick Pierre Kervran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator integrated cicruit fabrication
- Patent number 12,365,582
- Issue date Jul 22, 2025
- SiTime Corporation
- Pavan Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor and sensor system
- Patent number 12,366,488
- Issue date Jul 22, 2025
- Kabushiki Kaisha Toshiba
- Yoshihiko Kurui
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Compact enhanced sensitivity temperature sensor using an encapsulat...
- Patent number 12,365,580
- Issue date Jul 22, 2025
- King Fahd University of Petroleum & Minerals
- Xuecui Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a sensor or microphone device
- Patent number 12,365,581
- Issue date Jul 22, 2025
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing an integrated circuit pointed element comprisi...
- Patent number 12,360,135
- Issue date Jul 15, 2025
- STMicroelectronics (Rousset) SAS
- Abderrezak Marzaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric microelectromechanical system microphone sensitivity...
- Patent number 12,358,782
- Issue date Jul 15, 2025
- Skyworks Solutions, Inc.
- Guofeng Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer and method of manufa...
- Patent number 12,350,710
- Issue date Jul 8, 2025
- Vermon S.A.
- Dominique Gross
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of MEMS structures from fused silica for inertial sensors
- Patent number 12,351,451
- Issue date Jul 8, 2025
- Atlantic Inertial Systems Limited
- Christopher Paul Fell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual membrane piezoelectric microelectromechanical system microphone
- Patent number 12,351,450
- Issue date Jul 8, 2025
- Skyworks Solutions, Inc.
- Siarhei Dmitrievich Barsukou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical infrared sensing device and fabrication meth...
- Patent number 12,345,571
- Issue date Jul 1, 2025
- Industrial Technology Research Institute
- Chin-Jou Kuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor structure, pressure sensor device, and method of ma...
- Patent number 12,345,593
- Issue date Jul 1, 2025
- Murata Manufacturing Co., Ltd.
- Kaoru Kishigui
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Externally grounded printed circuit board
- Patent number 12,349,266
- Issue date Jul 1, 2025
- Knowles Electronics, LLC
- Joshua Watson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual-operating accelerometer
- Patent number 12,345,732
- Issue date Jul 1, 2025
- STMicroelectronics S.r.l.
- Francesco Rizzini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor including a pressure sensor chip to detect a differ...
- Patent number 12,339,183
- Issue date Jun 24, 2025
- Murata Manufacturing Co., Ltd.
- Daiki Tsuji
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual-output microelectromechanical resonator and method of manufact...
- Patent number 12,338,119
- Issue date Jun 24, 2025
- STATHERA IP HOLDINGS INC.
- George Xereas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 12,330,931
- Issue date Jun 17, 2025
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhuanzhuan Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 12,330,932
- Issue date Jun 17, 2025
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhuanzhuan Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Interconnection for monolithically integrated stacked devices and m...
- Patent number 12,330,189
- Issue date Jun 17, 2025
- GLOBALFOUNDRIES SINGAPOREPTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive microelectromechanical device and method for forming a c...
- Patent number 12,332,271
- Issue date Jun 17, 2025
- Infineon Technologies AG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating-type gyroscope element and angular velocity sensor includ...
- Patent number 12,332,056
- Issue date Jun 17, 2025
- Sumitomo Precision Products Co., LTD
- Ryohei Uchino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Embedded permeable polysilicon layer in MEMS device for multiple ca...
- Patent number 12,330,934
- Issue date Jun 17, 2025
- STMICROELECTRONICS INTERNATIONAL N.V.
- Federico Vercesi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acoustic devices with improved sensitivity
- Patent number 12,328,559
- Issue date Jun 10, 2025
- Skyworks Solutions, Inc.
- Guofeng Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric sensor with increased sensitivity and devices having...
- Patent number 12,329,033
- Issue date Jun 10, 2025
- Skyworks Solutions, Inc.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated MEMS electrostatic micro-speaker device and method
- Patent number 12,325,625
- Issue date Jun 10, 2025
- Vibrant Microsystems Inc.
- Steven Nasiri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Coil module for electromagnetic microspeaker, coil module array and...
- Patent number 12,319,561
- Issue date Jun 3, 2025
- OTOWAHR TECHNOLOGY INC.
- Yu Min Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for providing getters in microelectromechanical...
- Patent number 12,319,562
- Issue date Jun 3, 2025
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor package with metal column mold barrier
- Patent number 12,319,563
- Issue date Jun 3, 2025
- Texas Instruments Incorporated
- Rafael Jose Lizares Guevara
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...
- Publication number 20250236506
- Publication date Jul 24, 2025
- Nanusens SL
- Josep Montanyà i Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR C...
- Publication number 20250236507
- Publication date Jul 24, 2025
- XI'AN JIAOTONG UNIVERSITY
- Xudong FANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertial Sensor And Electronic Component
- Publication number 20250236511
- Publication date Jul 24, 2025
- SEIKO EPSON CORPORATION
- Tomonaga KOBAYASHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS cavity with non-contaminating seal
- Publication number 20250236513
- Publication date Jul 24, 2025
- SiTime Corporation
- Michael Julian Daneman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-Q MICROMECHANICAL TORSION RESONATOR BASED ON SUSPENDING A TEST...
- Publication number 20250236508
- Publication date Jul 24, 2025
- GOVERNMENT OF THE UNITED STATES OF AMERICA, as represented by THE SECRETARY O...
- Jon Robert Pratt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250230037
- Publication date Jul 17, 2025
- Vanguard International Semiconductor Corporation
- ROHIT PULIKKAL KIZHAKKEYIL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250230038
- Publication date Jul 17, 2025
- Vanguard International Semiconductor Corporation
- ROHIT PULIKKAL KIZHAKKEYIL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION SENSOR
- Publication number 20250230034
- Publication date Jul 17, 2025
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Shitao Yan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROPHONE STRUCTURE, PACKAGING STRUCTURE, AND ELECTRONIC APPARATUS
- Publication number 20250230035
- Publication date Jul 17, 2025
- MEMSENSING MICROSYSTEMS (SUZHOU, CHINA) CO., LTD.
- Hao LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS
- Publication number 20250223152
- Publication date Jul 10, 2025
- STMicroelectronics International N.V.
- Francesco RIZZINI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DETECTION APPARATUS, TRAINING METHOD AND APPARATUS, AND COMPUTER-RE...
- Publication number 20250224292
- Publication date Jul 10, 2025
- BEIJING BOE SENSOR TECHNOLOGY CO., LTD.
- Jie SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONSTANT CHARGE OR CAPACITANCE FOR CAPACITIVE MICRO-ELECTRICAL-MECH...
- Publication number 20250223156
- Publication date Jul 10, 2025
- InvenSense, Inc.
- Joseph Seeger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTISENSOR MEMS INERTIAL SENSOR GUIDANCE FOR AUTOMATIC VEHICLES
- Publication number 20250224729
- Publication date Jul 10, 2025
- MEI Micro, Inc.
- Robert Mark Boysel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM
- Publication number 20250223154
- Publication date Jul 10, 2025
- AAC TECHNOLOGIES PTE. LTD
- Scott Lyall Cargill
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND ELECTRONIC DEVICE
- Publication number 20250220353
- Publication date Jul 3, 2025
- Goertek Microelectronics Inc.
- Quanbo Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
USE OF MEMS PACKAGES AS ANTENNA SUBSTRATE
- Publication number 20250214832
- Publication date Jul 3, 2025
- Hahn-Schickard-Gesellschaft für angewandte Forschung e.V.
- Achim Bittner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE HAVING MICROELECTROMECHANICAL SYSTEMS DEVICES...
- Publication number 20250214108
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- I-Hsuan Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR FAST MODE CHANGE OF A DIGITAL MICROPHONE USIN...
- Publication number 20250214831
- Publication date Jul 3, 2025
- INFINEON TECHNOLOGIES AG
- Dietmar Straeussnigg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACOUSTIC SENSOR DEVICES WITH MULTIPLE SENSING ELEMENTS
- Publication number 20250206600
- Publication date Jun 26, 2025
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIFFERENTIAL MICROPHONE ASSEMBLY
- Publication number 20250206601
- Publication date Jun 26, 2025
- Soundskrit Inc.
- Carly Stalder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING PROCESS FOR MICROELECTROMECHANICAL DEVICES HAVING IMP...
- Publication number 20250197198
- Publication date Jun 19, 2025
- STMicroelectronics International N.V.
- Giorgio ALLEGATO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE SENSOR AND METHOD FOR OPERATING A CAPACITIVE SENSOR
- Publication number 20250199041
- Publication date Jun 19, 2025
- ROBERT BOSCH GmbH
- David Slogsnat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING MICROELECTROMECHANICAL DEVICES WITH CHAMB...
- Publication number 20250197199
- Publication date Jun 19, 2025
- STMicroelectronics International N.V.
- Federico VERCESI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION ELECTRODES
- Publication number 20250197193
- Publication date Jun 19, 2025
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PATTERNING WITHIN MEMS LAYER
- Publication number 20250197192
- Publication date Jun 19, 2025
- InvenSense, Inc.
- Sarah Nitzan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SHELL MODULE FOR PACKAGING ELECTRONIC DEVICE AND ELECTRONIC DEVICE
- Publication number 20250187906
- Publication date Jun 12, 2025
- AAC Microtech (Changzhou) Co., Ltd.
- Dexing Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR MICRO-ELECTRO-MECHANICAL MICROPHONE
- Publication number 20250187908
- Publication date Jun 12, 2025
- AAC MICROTECH (CHANGZHOU) CO., LTD.
- Yuwei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) HAVING VERTICAL STOPS AND A...
- Publication number 20250187901
- Publication date Jun 12, 2025
- Lawrence Semiconductor Research Laboratory, Inc.
- Bishnu Prasanna Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device
- Publication number 20250187902
- Publication date Jun 12, 2025
- SensorTek technology Corp.
- Chao-Lin Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION SENSOR, ELECTRONIC DEVICE AND VIBRATION DETECTION METHOD
- Publication number 20250194002
- Publication date Jun 12, 2025
- GOERTEK MICROELECTRONICS INC.
- Tangliu Yan
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Acceleration sensor and method of making the same

Resonance device with substrate having oxide film containing throug...

Microelectromechanical system membrane

MEMS resonator integrated cicruit fabrication

Sensor and sensor system

Compact enhanced sensitivity temperature sensor using an encapsulat...

Micromechanical component for a sensor or microphone device

Method for producing an integrated circuit pointed element comprisi...

Piezoelectric microelectromechanical system microphone sensitivity...

Capacitive micromachined ultrasonic transducer and method of manufa...

Fabrication of MEMS structures from fused silica for inertial sensors

Dual membrane piezoelectric microelectromechanical system microphone

Microelectromechanical infrared sensing device and fabrication meth...

Pressure sensor structure, pressure sensor device, and method of ma...

Externally grounded printed circuit board

Dual-operating accelerometer

Pressure sensor including a pressure sensor chip to detect a differ...

Dual-output microelectromechanical resonator and method of manufact...

MEMS microphone

MEMS microphone

Interconnection for monolithically integrated stacked devices and m...

Capacitive microelectromechanical device and method for forming a c...

Vibrating-type gyroscope element and angular velocity sensor includ...

Embedded permeable polysilicon layer in MEMS device for multiple ca...

Acoustic devices with improved sensitivity

Piezoelectric sensor with increased sensitivity and devices having...

Integrated MEMS electrostatic micro-speaker device and method

Coil module for electromagnetic microspeaker, coil module array and...

Systems and methods for providing getters in microelectromechanical...

Semiconductor package with metal column mold barrier

Patents Applicationslast 30 patents

MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...

ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR C...

Inertial Sensor And Electronic Component

MEMS cavity with non-contaminating seal

HIGH-Q MICROMECHANICAL TORSION RESONATOR BASED ON SUSPENDING A TEST...

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

ACCELERATION SENSOR

MICROPHONE STRUCTURE, PACKAGING STRUCTURE, AND ELECTRONIC APPARATUS

MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS

DETECTION APPARATUS, TRAINING METHOD AND APPARATUS, AND COMPUTER-RE...

CONSTANT CHARGE OR CAPACITANCE FOR CAPACITIVE MICRO-ELECTRICAL-MECH...

MULTISENSOR MEMS INERTIAL SENSOR GUIDANCE FOR AUTOMATIC VEHICLES

MICROELECTROMECHANICAL SYSTEM

MEMS MICROPHONE AND ELECTRONIC DEVICE

USE OF MEMS PACKAGES AS ANTENNA SUBSTRATE

SEMICONDUCTOR DEVICE HAVING MICROELECTROMECHANICAL SYSTEMS DEVICES...

SYSTEM AND METHOD FOR FAST MODE CHANGE OF A DIGITAL MICROPHONE USIN...

ACOUSTIC SENSOR DEVICES WITH MULTIPLE SENSING ELEMENTS

DIFFERENTIAL MICROPHONE ASSEMBLY

MANUFACTURING PROCESS FOR MICROELECTROMECHANICAL DEVICES HAVING IMP...

CAPACITIVE SENSOR AND METHOD FOR OPERATING A CAPACITIVE SENSOR

PROCESS FOR MANUFACTURING MICROELECTROMECHANICAL DEVICES WITH CHAMB...

ANTI-STICTION ELECTRODES

ANTI-STICTION PATTERNING WITHIN MEMS LAYER

SHELL MODULE FOR PACKAGING ELECTRONIC DEVICE AND ELECTRONIC DEVICE

MANUFACTURING METHOD FOR MICRO-ELECTRO-MECHANICAL MICROPHONE

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) HAVING VERTICAL STOPS AND A...

MEMS Device

VIBRATION SENSOR, ELECTRONIC DEVICE AND VIBRATION DETECTION METHOD