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CPC
G01Q70/10
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Parent Industries
G
PHYSICS
G01
Measuring instruments
G01Q
SCANNING-PROBE TECHNIQUES OR APPARATUS APPLICATIONS OF SCANNING-PROBE TECHNIQUES
G01Q70/00
General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
Current Industry
G01Q70/10
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