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C23C16/402
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C
CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
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C23C16/402
Silicon dioxide
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last 30 patents
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Patent Grant
Selective deposition of metals, metal oxides, and dielectrics
Patent number
11,975,357
Issue date
May 7, 2024
ASM IP Holding B.V.
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cyclical deposition methods
Patent number
11,970,769
Issue date
Apr 30, 2024
ASM IP Holding B.V.
Trigagema Gama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition method and deposition apparatus
Patent number
11,965,246
Issue date
Apr 23, 2024
Tokyo Electron Limited
Naonori Fujiwara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma chemical vapor deposition apparatus
Patent number
11,956,884
Issue date
Apr 9, 2024
Draka Comteq B.V.
Igor Milicevic
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,952,664
Issue date
Apr 9, 2024
Kokusai Electric Corporation
Hidenari Yoshida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Ash rate recovery method in plasma strip chamber
Patent number
11,955,318
Issue date
Apr 9, 2024
Applied Materials, Inc.
Yongkwan Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High voltage, low pressure plasma enhanced atomic layer deposition
Patent number
11,935,759
Issue date
Mar 19, 2024
Lotus Applied Technology, LLC
Eric R. Dickey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Minimizing radical recombination using ALD silicon oxide surface co...
Patent number
11,920,239
Issue date
Mar 5, 2024
Lam Research Corporation
Bhadri N. Varadarajan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Organoamino-functionalized cyclic oligosiloxanes for deposition of...
Patent number
11,912,730
Issue date
Feb 27, 2024
VERSUM MATERIALS US, LLC
Matthew R. MacDonald
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective deposition of silicon oxide on dielectric surfaces relati...
Patent number
11,898,240
Issue date
Feb 13, 2024
ASM IP Holding B.V.
Andrea Illiberi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film deposition apparatus for fine pattern forming
Patent number
11,881,379
Issue date
Jan 23, 2024
Tokyo Electron Limited
Kazuhide Hasebe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor manufacturing apparatus and manufacturing method of s...
Patent number
11,859,286
Issue date
Jan 2, 2024
Kioxia Corporation
Yuya Matsubara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Particle coating method
Patent number
11,846,020
Issue date
Dec 19, 2023
Momoko Wakabayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Preparation method for bifacial perc solar cell
Patent number
11,848,395
Issue date
Dec 19, 2023
GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY CO., LTD.
Jiebin Fang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device, recording medium, and...
Patent number
11,848,201
Issue date
Dec 19, 2023
Kokusai Electric Corporation
Tsukasa Kamakura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method of deposition and method of fabricating electronic device us...
Patent number
11,834,742
Issue date
Dec 5, 2023
SK Hynix Inc.
Woo-Hee Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing a coating utilizing a coating apparatus
Patent number
11,820,700
Issue date
Nov 21, 2023
Pilkington Group Limited
Michael Martin Radtke
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Si-containing film forming precursors and methods of using the same
Patent number
11,820,654
Issue date
Nov 21, 2023
L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
Jean-Marc Girard
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Plasma generation apparatus, deposition apparatus using the same, a...
Patent number
11,823,865
Issue date
Nov 21, 2023
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming precoat film and method for forming silicon-cont...
Patent number
11,821,078
Issue date
Nov 21, 2023
ASM IP Holding B.V.
Takeru Kuwano
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wire grid polarizer with multi-layer silane conformal coating
Patent number
11,822,182
Issue date
Nov 21, 2023
Moxtek, Inc.
Anubhav Diwan
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Patent Grant
CVD based oxide-metal multi structure for 3D NAND memory devices
Patent number
11,817,320
Issue date
Nov 14, 2023
Applied Materials, Inc.
Susmit Singha Roy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
ALD preparation method for eliminating camera module dot defects an...
Patent number
11,804,501
Issue date
Oct 31, 2023
HANGZHOU MDK OPTO ELECTRONICS CO., LTD
Wenzhi Ge
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Organometallic compound and method
Patent number
11,802,134
Issue date
Oct 31, 2023
SEASTAR CHEMICALS ULC
Rajesh Odedra
C07 - ORGANIC CHEMISTRY
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Patent Grant
Transient sensor using molybdenum disulfide and method of manufactu...
Patent number
11,781,217
Issue date
Oct 10, 2023
Industry-Academic Cooperation Foundation, Yonsei University
Jong Hyun Ahn
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma enhanced deposition processes for controlled formation of ox...
Patent number
11,776,807
Issue date
Oct 3, 2023
ASM IP Holding, B.V.
Lingyun Jia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
SiO2 thin film produced by atomic layer deposition at room temperature
Patent number
11,753,718
Issue date
Sep 12, 2023
LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
Didier Arl
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Stability of refractory materials in high temperature steam
Patent number
11,753,717
Issue date
Sep 12, 2023
The Regents of the University of Colorado
Alan W. Weimer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
PECVD apparatus for in-situ deposition of film stacks
Patent number
11,746,420
Issue date
Sep 5, 2023
Novellus Systems, Inc.
Pramod Subramonium
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical vapor deposition of thick inorganic coating on a polarizer
Patent number
11,746,418
Issue date
Sep 5, 2023
Moxtek, Inc.
Matthew R. Linford
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SEED SUBSTRATE FOR EPITAXIAL GROWTH USE AND METHOD FOR MANUFACTURIN...
Publication number
20240141552
Publication date
May 2, 2024
Shin-Etsu Chemical Co., Ltd.
Yoshihiro KUBOTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF APPLYING A DIELECTRIC COATING ON A COMPONENT OF AN ELECTR...
Publication number
20240141503
Publication date
May 2, 2024
Quantinuum LLC
Christopher Todd Ertsgaard
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240145236
Publication date
May 2, 2024
ASM IP HOLDING B.V.
Hyunchul Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
QUANTUM DOT COMPOSITE STRUCTURE AND A FORMING METHOD THEREOF
Publication number
20240124350
Publication date
Apr 18, 2024
Lextar Electronics Corporation
Ching LIU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MICRO DEVICE WITH SHEAR PAD
Publication number
20240112858
Publication date
Apr 4, 2024
TEXAS INSTRUMENTS INCORPORATED
Jeffrey A West
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
Publication number
20240096595
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Kazuhide HASEBE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MONOALKOXYSILANES AND DIALKOXYSILANES AND DENSE ORGANOSILICA FILMS...
Publication number
20240052490
Publication date
Feb 15, 2024
VERSUM MATERIALS US, LLC
MANCHAO XIAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
STABILITY OF REFRACTORY MATERIALS IN HIGH TEMPERATURE STEAM
Publication number
20240043996
Publication date
Feb 8, 2024
The Regents of the University of Colorado, a Body Corporate
Alan W. Weimer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240047194
Publication date
Feb 8, 2024
Tokyo Electron Limited
Kenichi KOTE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240026532
Publication date
Jan 25, 2024
ASM IP HOLDING B.V.
YeaHyun Gu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR PRODUCING X-RAY PHASE GRATINGS AND X-RAY GRATINGS PRODUC...
Publication number
20240018650
Publication date
Jan 18, 2024
Houxun Miao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMATION OF CONFORMAL ALD SIO2 FILMS
Publication number
20230416909
Publication date
Dec 28, 2023
Applied Materials, Inc.
Geetika BAJAJ
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR DOPING METHOD AND AN INTERMEDIATE SEMICONDUCTOR DEVICE
Publication number
20230411153
Publication date
Dec 21, 2023
BENEQ OY
Katja VÄYRYNEN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
DEVICE INCLUDING TRANSPARENT POLYMER WITH HYDROPHILIC COATING, AND...
Publication number
20230399744
Publication date
Dec 14, 2023
Agilent Technologies, Inc.
Elizabeth CARR
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...
Publication number
20230377874
Publication date
Nov 23, 2023
VERSUM MATERIALS US, LLC
Haripin Chandra
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230377953
Publication date
Nov 23, 2023
Tokyo Electron Limited
Hiroki MURAKAMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS
Publication number
20230366094
Publication date
Nov 16, 2023
Novellus Systems, Inc.
Jason Dirk Haverkamp
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF...
Publication number
20230365601
Publication date
Nov 16, 2023
VERSUM MATERIALS US, LLC
Matthew R. MacDonald
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NANO ROBOTIC SYSTEM FOR HIGH THROUGHPUT SINGLE CELL DNA SEQUENCING
Publication number
20230358782
Publication date
Nov 9, 2023
Versitech Limited
Ning Xi
C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
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Patent Application
Method of Filling Gaps with Carbon and Nitrogen Doped Film
Publication number
20230360907
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Wan-Yi Kao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
Smoothing Surface Roughness Using Atomic Layer Deposition
Publication number
20230349042
Publication date
Nov 2, 2023
Eagle Technology, LLC
James THROCKMORTON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
METHOD OF POST-DEPOSITION TREATMENT FOR SILICON OXIDE FILM
Publication number
20230343587
Publication date
Oct 26, 2023
ASM IP HOLDING B.V.
Toshiya Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INHERENT AREA SELECTIVE DEPOSITION OF MIXED OXIDE DIELECTRIC FILM
Publication number
20230343581
Publication date
Oct 26, 2023
Gelest, Inc.
Chad Michael BRICK
C01 - INORGANIC CHEMISTRY
Information
Patent Application
SUBSTRATE FOR GROUP-III NITRIDE EPITAXIAL GROWTH AND METHOD FOR PRO...
Publication number
20230340694
Publication date
Oct 26, 2023
Shin-Etsu Chemical Co., Ltd.
Yoshihiro KUBOTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPOSITIONS ND METHODS USING SAME FOR GERMANIUM SEED LAYER
Publication number
20230287562
Publication date
Sep 14, 2023
VERSUM MATERIALS US, LLC
MATTHEW R. MACDONALD
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTILAYER COATING FOR CORROSION RESISTANCE
Publication number
20230290615
Publication date
Sep 14, 2023
Applied Materials, Inc.
Amir H. Tavakoli
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
1,1,1-TRIS(ORGANOAMINO)DISILANE COMPOUNDS AND METHOD OF PREPARING SAME
Publication number
20230287015
Publication date
Sep 14, 2023
Jiangsu Nata Opto-Electronic Materials Co. Ltd.
Byung K. HWANG
C01 - INORGANIC CHEMISTRY
Information
Patent Application
1,1,1-TRIS(ORGANOAMINO)DISILANE COMPOUNDS AND METHOD OF PREPARING SAME
Publication number
20230279028
Publication date
Sep 7, 2023
Jiangsu Nata Opto-Electronic Materials Co. Ltd.
Byung K. HWANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
Publication number
20230268163
Publication date
Aug 24, 2023
KIOXIA Corporation
Makoto KUBO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LARGE-DIAMETER SUBSTRATE FOR GROUP-III NITRIDE EPITAXIAL GROWTH AND...
Publication number
20230257905
Publication date
Aug 17, 2023
Shin-Etsu Chemical Co., Ltd.
Yoshihiro KUBOTA
H01 - BASIC ELECTRIC ELEMENTS