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C23C16/345
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CHEMISTRY METALLURGY
C23
Surface treatment
C23C
COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
C23C16/00
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating
Current Industry
C23C16/345
Silicon nitride
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last 30 patents
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Patent Grant
Film forming method and film forming apparatus
Patent number
11,970,768
Issue date
Apr 30, 2024
Tokyo Electron Limited
Hideomi Hane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Film forming method and film forming apparatus
Patent number
11,970,767
Issue date
Apr 30, 2024
Tokyo Electron Limited
Taichi Monden
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition of low-k films
Patent number
11,970,777
Issue date
Apr 30, 2024
Applied Materials, Inc.
Shuaidi Zhang
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Mechanically pre-biased shadow mask and method of formation
Patent number
11,968,881
Issue date
Apr 23, 2024
Emagin Corporation
James A. Walker
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cleaning method, method of manufacturing semiconductor device, and...
Patent number
11,965,240
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Keigo Nishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Immersion exposure tool
Patent number
11,966,165
Issue date
Apr 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yung-Yao Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
11,967,500
Issue date
Apr 23, 2024
Kokusai Electric Corporation
Arito Ogawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Large radius probe
Patent number
11,953,517
Issue date
Apr 9, 2024
Bruker Nano, Inc.
Jeffrey Wong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing method, method for manufacturing semiconducor...
Patent number
11,955,316
Issue date
Apr 9, 2024
Tokyo Electron Limited
Takayuki Katsunuma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition method
Patent number
11,952,661
Issue date
Apr 9, 2024
Tokyo Electron Limited
Hitoshi Kato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Display device of reducing the occurrence of optical afterimages an...
Patent number
11,943,994
Issue date
Mar 26, 2024
Samsung Display Co., Ltd.
Chul Min Bae
G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
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Patent Grant
Method of manufacturing semiconductor structure
Patent number
11,942,320
Issue date
Mar 26, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Kun Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-region diffusion barrier containing titanium, silicon and nit...
Patent number
11,942,365
Issue date
Mar 26, 2024
Eugenus, Inc.
Vinayak Veer Vats
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microwave plasma source, microwave plasma processing apparatus and...
Patent number
11,942,308
Issue date
Mar 26, 2024
Tokyo Electron Limited
Yasuaki Taniike
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coated product and production method
Patent number
11,932,937
Issue date
Mar 19, 2024
Schunk Kohlenstofftechnik GmbH
Karl Brennfleck
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silyl pseudohalides for silicon containing films
Patent number
11,932,940
Issue date
Mar 19, 2024
Applied Materials, Inc.
Keenan N. Woods
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, substrate processing method and non...
Patent number
11,926,893
Issue date
Mar 12, 2024
Kokusai Electric Corporation
Naofumi Ohashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processes for depositing silicon-containing films using halidosilan...
Patent number
11,913,112
Issue date
Feb 27, 2024
VERSUM MATERIALS US, LLC
Xinjian Lei
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
Patent number
11,915,927
Issue date
Feb 27, 2024
Kokusai Electric Corporation
Kazuyuki Okuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Silicon precursor compound, preparation method therefor, and silico...
Patent number
11,905,305
Issue date
Feb 20, 2024
UP Chemical Co., Ltd.
Jin Sik Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for selective deposition of silicon nitride layer and struct...
Patent number
11,901,175
Issue date
Feb 13, 2024
ASM IP Holding B.V.
Eric James Shero
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Barrier film, organic EL device, flexible substrate, and method for...
Patent number
11,903,241
Issue date
Feb 13, 2024
Samsung Display Co., Ltd.
Yuka Isaji
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus
Patent number
11,891,697
Issue date
Feb 6, 2024
Kokusai Electric Corporation
Naofumi Ohashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Low-capacitance nanopore sensors on insulating substrates
Patent number
11,891,689
Issue date
Feb 6, 2024
Arizona Board of Regents on behalf of Arizona State University
Chao Wang
G01 - MEASURING TESTING
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Patent Grant
Methods and systems to modulate film stress
Patent number
11,887,818
Issue date
Jan 30, 2024
Applied Materials, Inc.
Tsutomu Tanaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for depositing fluorine/carbon-free conformal tungsten
Patent number
11,887,855
Issue date
Jan 30, 2024
Applied Materials, Inc.
Xinyu Fu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for coating fibers in a fluidized bed
Patent number
11,866,373
Issue date
Jan 9, 2024
Centre National de la Recherche Scientifique
Arnaud Delehouze
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of processing a CMC airfoil
Patent number
11,866,820
Issue date
Jan 9, 2024
RTX Corporation
Christian X. Campbell
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
Patent number
11,859,280
Issue date
Jan 2, 2024
Kokusai Electric Corporation
Hidetoshi Mimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for depositing a coating on a yarn in a microwave field
Patent number
11,858,859
Issue date
Jan 2, 2024
SAFRAN CERAMICS
Arnaud Delehouze
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SEED SUBSTRATE FOR EPITAXIAL GROWTH USE AND METHOD FOR MANUFACTURIN...
Publication number
20240141552
Publication date
May 2, 2024
Shin-Etsu Chemical Co., Ltd.
Yoshihiro KUBOTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240141490
Publication date
May 2, 2024
Kokusai Electric Corporation
Mika Urushihara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CYCLOHEXASILANE FOR ELECTRODES
Publication number
20240128439
Publication date
Apr 18, 2024
THE CORETEC GROUP INC.
Ramez Ahmed Elgammal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INNOVATIVE NANOPORE SEQUENCING TECHNOLOGY
Publication number
20240118260
Publication date
Apr 11, 2024
UNM Rainforest Innovations
Steven R.J. BRUECK
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
NOVEL COATING METHOD OF COMPLEX 3D STRUCTURES USING LOW PRESSURE CH...
Publication number
20240102167
Publication date
Mar 28, 2024
California Institute of Technology
Matthew R. Dickie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FLUORINE-DOPED SILICON-CONTAINING MATERIALS
Publication number
20240087882
Publication date
Mar 14, 2024
Applied Materials, Inc.
Siyu Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
Publication number
20240084448
Publication date
Mar 14, 2024
Kokusai Electric Corporation
Hidetoshi Mimura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING SILICON NITRIDE FILM AND FILM FORMING APPARATUS
Publication number
20240087885
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Munehito KAGAYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240071749
Publication date
Feb 29, 2024
ASM IP HOLDING B.V.
SangHeon Yong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20240063053
Publication date
Feb 22, 2024
ASM IP HOLDING B.V.
SangHeon Yong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20240055252
Publication date
Feb 15, 2024
Kokusai Electric Corporation
Kimihiko NAKATANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING LAYER ON DIFFERENT-DENSITY PATTERN REGIONS
Publication number
20240043990
Publication date
Feb 8, 2024
ASM IP HOLDING B.V.
Yoshio Susa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240047194
Publication date
Feb 8, 2024
Tokyo Electron Limited
Kenichi KOTE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR DEPOSITING GAP FILLING FLUIDS AND RELATED SYSTEMS AND D...
Publication number
20240030064
Publication date
Jan 25, 2024
ASM IP HOLDING B.V.
Timothee Blanquart
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF DEPOSITING CONDENSABLE MATERIAL ONTO A SURFACE OF A SUBST...
Publication number
20240014033
Publication date
Jan 11, 2024
ASM IP HOLDING B.V.
Hiroshi Kou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM DEPOSITION METHOD AND FILM DEPOSITION APPARATUS
Publication number
20240014031
Publication date
Jan 11, 2024
TOKYO ELECTRON LIMITED
Shota CHIDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
Publication number
20240014032
Publication date
Jan 11, 2024
Kokusai Electric Corporation
Kazuhiro HARADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230416920
Publication date
Dec 28, 2023
TOKYO ELECTRON LIMITED
Tatsuya YAMAGUCHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRI...
Publication number
20230420232
Publication date
Dec 28, 2023
Applied Materials, Inc.
Tomohiko Kitajima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TRANSIENT SENSOR USING MOLYBDENUM DISULFIDE AND METHOD OF MANUFACTU...
Publication number
20230416910
Publication date
Dec 28, 2023
Industry-Academic Cooperation Foundation, Yonsei University
Jong Hyun AHN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTILAYER SYSTEM, COMPONENT, AND METHOD FOR PRODUCING SUCH A MULTI...
Publication number
20230407464
Publication date
Dec 21, 2023
SCHAEFFLER TECHNOLOGIES AG & CO. KG
Ricardo Henrique BRUGNARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
OPTICAL DIFFUSER AND ITS METHOD OF MANUFACTURE
Publication number
20230408738
Publication date
Dec 21, 2023
STMicroelectronics (Crolles 2) SAS
Vincent FARYS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20230411149
Publication date
Dec 21, 2023
Kokusai Electric Corporation
Takeo HANASHIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
Publication number
20230407472
Publication date
Dec 21, 2023
Kokusai Electric Corporation
Hiroki HATTA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230402256
Publication date
Dec 14, 2023
TOKYO ELECTRON LIMITED
Takashi CHIBA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, PR...
Publication number
20230402281
Publication date
Dec 14, 2023
Kokusai Electric Corporation
Yasunobu Koshi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
MANUFACTURING METHOD OF DISPLAY DEVICE AND CVD DEVICE
Publication number
20230389355
Publication date
Nov 30, 2023
Japan Display Inc.
Noriyuki HIRATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...
Publication number
20230377874
Publication date
Nov 23, 2023
VERSUM MATERIALS US, LLC
Haripin Chandra
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230377953
Publication date
Nov 23, 2023
Tokyo Electron Limited
Hiroki MURAKAMI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRI...
Publication number
20230369031
Publication date
Nov 16, 2023
Applied Materials, Inc.
Tomohiko Kitajima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...