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Size or form of projection system aperture
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Patents Grants
last 30 patents
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Patent Grant
Controlling light source wavelengths for selectable phase shifts be...
Patent number
11,899,198
Issue date
Feb 13, 2024
Applied Materials, Inc.
Thomas L. Laidig
G02 - OPTICS
Information
Patent Grant
Method and system for nanoscale data recording
Patent number
11,886,123
Issue date
Jan 30, 2024
Franklin Mark Schellenberg
G11 - INFORMATION STORAGE
Information
Patent Grant
Method for measuring a substrate for semiconductor lithography
Patent number
11,880,145
Issue date
Jan 23, 2024
Carl Zeiss SMT GmbH
Sven Martin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multifunctional lithography device
Patent number
11,868,055
Issue date
Jan 9, 2024
The Institute of Optics and Electronics, the Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus for semiconductor lithography having...
Patent number
11,754,934
Issue date
Sep 12, 2023
Carl Zeiss SMT GmbH
Peter Nieland
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus, exposure method, and method for manufacturing s...
Patent number
11,747,737
Issue date
Sep 5, 2023
Canon Kabushiki Kaisha
Kazuhiro Takahashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sub-field control of a lithographic process and associated apparatus
Patent number
11,662,666
Issue date
May 30, 2023
ASML Netherlands B.V.
Rowin Meijerink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure method, exposure apparatus, article manufacturing method,...
Patent number
11,640,119
Issue date
May 2, 2023
Canon Kabushiki Kaisha
Tetsuya Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure and lithographic apparatus
Patent number
11,614,689
Issue date
Mar 28, 2023
ASML Netherlands B.V.
Erik Henricus Egidius Catharina Eummelen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of reducing effects of lens heating and/or cooling in a lith...
Patent number
11,573,496
Issue date
Feb 7, 2023
ASML Netherlands B.V.
Nick Kant
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Determining subset of components of an optical characteristic of pa...
Patent number
11,561,478
Issue date
Jan 24, 2023
ASML Netherlands B.V.
Johannes Jacobus Matheus Baselmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection system and lithographic apparatus comprising said projec...
Patent number
11,550,227
Issue date
Jan 10, 2023
ASML Netherlands B.V.
Marinus Engelbertus Cornelis Mutsaers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
11,543,755
Issue date
Jan 3, 2023
Canon Kabushiki Kaisha
Takehiro Toyoda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element driving mechanism
Patent number
11,520,244
Issue date
Dec 6, 2022
TDK TAIWAN CORP.
Fu-Yuan Wu
G11 - INFORMATION STORAGE
Information
Patent Grant
Lithographic method and lithographic apparatus
Patent number
11,493,851
Issue date
Nov 8, 2022
ASML Netherlands B.V.
Hakki Ergün Cekli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
Patent number
11,467,501
Issue date
Oct 11, 2022
Nikon Corporation
Hideki Komatsuda
G02 - OPTICS
Information
Patent Grant
Method for adusting a first element of a lithography apparatus towa...
Patent number
11,460,780
Issue date
Oct 4, 2022
Carl Zeiss SMT GmbH
Boaz Pnini
G02 - OPTICS
Information
Patent Grant
Dynamic illumination method based on scan exposure machine
Patent number
11,422,474
Issue date
Aug 23, 2022
Shanghai Huali Integrated Circuit Corporation
Yuyang Bian
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Compensation of creep effects in an imaging device
Patent number
11,415,895
Issue date
Aug 16, 2022
Carl Zeiss SMT GmbH
Marwène Nefzi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Support of an optical element
Patent number
11,366,393
Issue date
Jun 21, 2022
Carl Zeiss SMT GmbH
Eugen Anselm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for configuring spatial dimensions of a beam d...
Patent number
11,366,396
Issue date
Jun 21, 2022
ASML Netherlands B.V.
Daan Maurits Slotboom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment apparatus, alignment method, lithography apparatus, and m...
Patent number
11,360,401
Issue date
Jun 14, 2022
Canon Kabushiki Kaisha
Shinichi Egashira
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Actuator device for aligning an element, projection exposure appara...
Patent number
11,320,749
Issue date
May 3, 2022
Carl Zeiss SMT GmbH
Boaz Pnini
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Supporting an optical element
Patent number
11,314,177
Issue date
Apr 26, 2022
Carl Zeiss SMT GmbH
Jens Kugler
G02 - OPTICS
Information
Patent Grant
System and method for sub micron additive manufacturing
Patent number
11,312,067
Issue date
Apr 26, 2022
Lawrence Livermore National Security, LLC
Sourabh Kumar Saha
B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information
Patent Grant
Projection exposure apparatus for semiconductor lithography
Patent number
11,281,114
Issue date
Mar 22, 2022
Carl Zeiss SMT GmbH
Jens Kugler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for nanoscale data recording
Patent number
11,269,258
Issue date
Mar 8, 2022
Franklin Mark Schellenberg
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Image sensor, position sensor device, lithography system, and metho...
Patent number
11,262,660
Issue date
Mar 1, 2022
Carl Zeiss SMT GmbH
Jan Horn
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Adjustable retardance compensator for self-referencing interferomet...
Patent number
11,249,402
Issue date
Feb 15, 2022
ASML Holding N.V.
Ryan Richard Westover
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure and lithographic apparatus
Patent number
11,231,653
Issue date
Jan 25, 2022
ASML Netherlands B.V.
Erik Henricus Egidius Catharina Eummelen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
EXPOSURE APPARATUS AND MEASUREMENT SYSTEM
Publication number
20240142877
Publication date
May 2, 2024
Nikon Corporation
Masaki KATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, CONTROL METHOD, AND DEVICE MANUFACTURING METHOD
Publication number
20240126178
Publication date
Apr 18, 2024
Nikon Corporation
Masaki KATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV LIGHT GENERATION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
Publication number
20240027920
Publication date
Jan 25, 2024
Gigaphoton Inc.
Yusuke HOSHINO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CONTROLLING LIGHT SOURCE WAVELENGTHS FOR SELECTABLE PHASE SHIFTS BE...
Publication number
20230408807
Publication date
Dec 21, 2023
Applied Materials, Inc.
Thomas L. Laidig
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SWAPPING TOOL
Publication number
20230400772
Publication date
Dec 14, 2023
Carl Zeiss SMT GMBH
Eugen Doetzel
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
PROJECTION EXPOSURE DEVICE AND PROJECTION EXPOSURE METHOD
Publication number
20230359126
Publication date
Nov 9, 2023
V TECHNOLOGY CO., LTD.
Yoshiyuki ENOMOTO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEVICE FOR POSITIONING AND HOLDING AT LEAST ONE OPTICAL ELEMENT, ME...
Publication number
20230350311
Publication date
Nov 2, 2023
Carl Zeiss SMT GMBH
Thomas GROEZINGER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FILTER ASSEMBLY, IN PARTICULAR FOR A CONTROL LOOP FOR CONTROLLING T...
Publication number
20230324649
Publication date
Oct 12, 2023
Carl Zeiss SMT GMBH
Thomas Gorius
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Application
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
Publication number
20230288817
Publication date
Sep 14, 2023
ASML NETHERLANDS B.V.
Rowin MEIJERINK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS, ILLUMINATION SWITCHES AN...
Publication number
20230213868
Publication date
Jul 6, 2023
ASML Holding N.V.
Mohamed SWILLAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ACTUATOR UNIT FOR POSITIONING AN OPTICAL ELEMENT
Publication number
20230168587
Publication date
Jun 1, 2023
ASML NETHERLANDS B.V.
Sjoerd Martijn HUIBERTS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR MEASURING A SUBSTRATE FOR SEMICONDUCTOR LITHOGRAPHY
Publication number
20230136478
Publication date
May 4, 2023
Carl Zeiss SMT GMBH
Sven Martin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTIFUNCTIONAL LITHOGRAPHY DEVICE
Publication number
20230129163
Publication date
Apr 27, 2023
The Institute of Optics and Electronics, The Chinese Academy of Sciences
Xiangang Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM WITH AN APERTURE STOP
Publication number
20230123115
Publication date
Apr 20, 2023
Carl Zeiss SMT GMBH
Tanja Mueller
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Correction and compensation method in semiconductor manufacturing p...
Publication number
20230123680
Publication date
Apr 20, 2023
United Semiconductor (Xiamen) Co., Ltd.
XIONGWU HE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF TUNING A MODEL FOR A LITHOGRAPHIC PROCESS AND ASSOCIATED...
Publication number
20230084130
Publication date
Mar 16, 2023
ASML NETHERLANDS B.V.
Mhamed AKHSSAY
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
Publication number
20230051439
Publication date
Feb 16, 2023
Carl Zeiss SMT GMBH
Oliver Herbst
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
Publication number
20230024028
Publication date
Jan 26, 2023
Nikon Corporation
Hideki Komatsuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD, DRIVE DEVICE, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
Publication number
20230028288
Publication date
Jan 26, 2023
Carl Zeiss SMT GMBH
Sönke RHEIN
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
ILLUMINATION OPTICAL SYSTEM FOR EUV PROJECTION LITHOGRAPHY
Publication number
20220342314
Publication date
Oct 27, 2022
Carl Zeiss SMT GMBH
Joachim Kalden
G02 - OPTICS
Information
Patent Application
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
Publication number
20220334499
Publication date
Oct 20, 2022
ASML NETHERLANDS B.V.
Jacob Fredrik Friso KLINKHAMER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
Publication number
20220244649
Publication date
Aug 4, 2022
ASML NETHERLANDS B.V.
Pieter Gerardus Jacobus SMORENBERG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM
Publication number
20220236652
Publication date
Jul 28, 2022
Carl Zeiss SMT GMBH
Rolf Freimann
G02 - OPTICS
Information
Patent Application
METHOD AND SYSTEM FOR NANOSCALE DATA RECORDING
Publication number
20220197150
Publication date
Jun 23, 2022
Franklin Mark Schellenberg
B82 - NANO-TECHNOLOGY
Information
Patent Application
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
Publication number
20220171295
Publication date
Jun 2, 2022
ASML NETHERLANDS B.V.
Rowin MEIJERINK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
Publication number
20220137519
Publication date
May 5, 2022
ASML NETHERLANDS B.V.
Erik Henricus Egidius Catharina EUMMELEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STOP, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
Publication number
20220107567
Publication date
Apr 7, 2022
Carl Zeiss SMT GMBH
Benjahman Julius Modeste
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION SYSTEM AND LITHOGRAPHIC APPARATUS COMPRISING SAID PROJEC...
Publication number
20220082947
Publication date
Mar 17, 2022
ASML NETHERLANDS B.V.
Marinus Engelbertus Cornelis MUTSAERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSING APPARATUS AND METHOD FOR MANUFACTURING ARTICLE
Publication number
20220066324
Publication date
Mar 3, 2022
Canon Kabushiki Kaisha
Masato Homma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR MANUFACTURING S...
Publication number
20220066326
Publication date
Mar 3, 2022
Canon Kabushiki Kaisha
Kazuhiro Takahashi
H01 - BASIC ELECTRIC ELEMENTS