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B81B2203/0163

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/0163Spring holders

Industries

Patents Grantslast 30 patents

Information Patent Grant
MEMS and method of manufacturing the same
- Patent number 12,209,010
- Issue date Jan 28, 2025
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Shanshan Gu-Stoppel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device built using the BEOL metal layers of a solid state semi...
- Patent number 12,209,009
- Issue date Jan 28, 2025
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Venting device, manufacturing method of venting device, venting met...
- Patent number 12,157,663
- Issue date Dec 3, 2024
- xMEMS Labs, Inc.
- Chun-I Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method of equalizing low frequency roll off for wearable...
- Patent number 12,151,934
- Issue date Nov 26, 2024
- xMEMS Labs, Inc.
- Yanchen Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Drop resistant MEMS actuator-imager assembly package
- Patent number 12,145,839
- Issue date Nov 19, 2024
- Faez Ba-Tis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS comprising a movable structural element, and MEMS array
- Patent number 12,054,384
- Issue date Aug 6, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite spring structure to reinforce mechanical robustness of a...
- Patent number 11,993,510
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual-layer micro-ribbon MEMS light modulator
- Patent number 11,958,738
- Issue date Apr 16, 2024
- Silicon Light Machines Corporation
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device, package structure and manufacturing method of device
- Patent number 11,884,535
- Issue date Jan 30, 2024
- xMEMS Labs, Inc.
- Jemm Yue Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrasonic MEMS acoustic transducer with reduced stress sensitivity...
- Patent number 11,865,581
- Issue date Jan 9, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Robust method for gyroscope drive amplitude measurement
- Patent number 11,867,509
- Issue date Jan 9, 2024
- Invensense, Inc.
- Damiano Milani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 11,863,934
- Issue date Jan 2, 2024
- AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD
- Bei Tong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and micromechanical sensor
- Patent number 11,860,184
- Issue date Jan 2, 2024
- Robert Bosch GmbH
- Cristian Nagel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical pressure sensor device including a diaphragm system...
- Patent number 11,788,912
- Issue date Oct 17, 2023
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device built using the BEOL metal layers of a solid state semi...
- Patent number 11,780,725
- Issue date Oct 10, 2023
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration-driven energy harvesting element and vibration-driven ene...
- Patent number 11,716,033
- Issue date Aug 1, 2023
- The University of Tokyo
- Hiroshi Toshiyoshi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal compensation of lens assembly focus using image sensor shift
- Patent number 11,708,263
- Issue date Jul 25, 2023
- Faez Ba-Tis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a tiltable suspended structure controlled by ele...
- Patent number 11,681,141
- Issue date Jun 20, 2023
- STMicroelectronics S.r.l.
- Roberto Carminati
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Active stiction recovery
- Patent number 11,655,139
- Issue date May 23, 2023
- Invensense, Inc.
- Ian Flader
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a substrate having a region mechanically d...
- Patent number 11,608,264
- Issue date Mar 21, 2023
- Robert Bosch GmbH
- Arne Dannenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical diaphragm sensors
- Patent number 11,519,803
- Issue date Dec 6, 2022
- Robert Bosch GmbH
- Arne Dannenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device and method for manufacturing a micromechanic...
- Patent number 11,486,782
- Issue date Nov 1, 2022
- Robert Bosch GmbH
- Friedjof Heuck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MMS, MMS array, MEMS actuator and method for providing an MMS
- Patent number 11,459,229
- Issue date Oct 4, 2022
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor, method for manufacturing inertial sensor, inertial...
- Patent number 11,448,506
- Issue date Sep 20, 2022
- Seiko Epson Corporation
- Koichiro Komizo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro check valve and system with multiple micro check valves and m...
- Patent number 11,428,345
- Issue date Aug 30, 2022
- MICROFAB SERVICE GMBH
- Marco Cordelair
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite spring structure to reinforce mechanical robustness of a...
- Patent number 11,420,866
- Issue date Aug 23, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator and resonance device
- Patent number 11,329,624
- Issue date May 10, 2022
- Murata Manufacturing Co., Ltd.
- Yuichi Goto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mems device built using the BEOL metal layers of a solid state semi...
- Patent number 11,312,617
- Issue date Apr 26, 2022
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microdevice comprising at least two movable elements
- Patent number 11,312,618
- Issue date Apr 26, 2022
- COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES SAFRAN
- Audrey Berthelot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical micromirror array and corresponding operating method
- Patent number 11,307,404
- Issue date Apr 19, 2022
- Robert Bosch GmbH
- Helmut Grutzeck
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ANCHOR STRUCTURE
- Publication number 20250033951
- Publication date Jan 30, 2025
- Bishnu Prasanna Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250026632
- Publication date Jan 23, 2025
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual-Layer Micro-ribbon MEMS Light Modulator
- Publication number 20250026633
- Publication date Jan 23, 2025
- SILICON LIGHT MACHINES CORPORATION
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER
- Publication number 20250019228
- Publication date Jan 16, 2025
- ROBERT BOSCH GmbH
- Maximilian Sommer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250019225
- Publication date Jan 16, 2025
- Rohm Co., Ltd.
- Daisuke Nishinohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Suspension for Resonators and MEMS Devices
- Publication number 20250011162
- Publication date Jan 9, 2025
- SiTime Corporation
- Nicholas MILLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20250011157
- Publication date Jan 9, 2025
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank Senger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION SENSOR
- Publication number 20250011159
- Publication date Jan 9, 2025
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES
- Publication number 20250002331
- Publication date Jan 2, 2025
- NXP USA, Inc.
- Mostafa Soliman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL CIRCUIT SWITCH
- Publication number 20240409393
- Publication date Dec 12, 2024
- nEYE Systems, Inc.
- Xiaosheng ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Device and Method for Adapting Measuring Range and Sensitivity of M...
- Publication number 20240400379
- Publication date Dec 5, 2024
- RUHR-UNIVERSITÄT BOCHUM
- Philip SCHMITT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ACTUATING APPARATUS
- Publication number 20240365670
- Publication date Oct 31, 2024
- Coretronic MEMS Corporation
- Hao-Chien Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DIAPHRAGM SYSTEM
- Publication number 20240343557
- Publication date Oct 17, 2024
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR
- Publication number 20240327198
- Publication date Oct 3, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD FOR MEMS DEVICE
- Publication number 20240308841
- Publication date Sep 19, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION
- Publication number 20240288683
- Publication date Aug 29, 2024
- OQMENTED GMBH
- Ulrich HOFMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...
- Publication number 20240270565
- Publication date Aug 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VENTING DEVICE, MANUFACTURING METHOD OF VENTING DEVICE, VENTING MET...
- Publication number 20240262679
- Publication date Aug 8, 2024
- xMEMS Labs, Inc.
- Chun-I Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Device and Method of Equalizing Low Frequency Roll Off for Wearable...
- Publication number 20240174508
- Publication date May 30, 2024
- xMEMS Labs, Inc.
- Yanchen Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE WITH A STRESS DECOUPLING STRUCTURE
- Publication number 20240166495
- Publication date May 23, 2024
- INFINEON TECHNOLOGIES AG
- Mohammadamir Ghaderi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Spring Supported and Sealed MEMS Diaphragm Assembly
- Publication number 20240109770
- Publication date Apr 4, 2024
- KNOWLES ELECTRONICS, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vibration-Driven Energy Harvesting Element and Method for Manufactu...
- Publication number 20240106357
- Publication date Mar 28, 2024
- Saginomiya Seisakusho, Inc.
- Noriko Shimomura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ACOUSTIC RESONATOR SPRINGY ANCHOR BASED ON OFFSET ACOUSTIC RE...
- Publication number 20240002216
- Publication date Jan 4, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Hakhamanesh MANSOORZARE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...
- Publication number 20230406693
- Publication date Dec 21, 2023
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Package and Method for Encapsulating an MEMS Structure
- Publication number 20230382722
- Publication date Nov 30, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank SENGER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPACT MICROELECTROMECHANICAL ANGULAR RATE SENSOR
- Publication number 20230322548
- Publication date Oct 12, 2023
- STMicroelectronics S.r.l.
- Luca Giuseppe FALORNI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A SCANNING MEMS MIRROR DEVICE
- Publication number 20230257255
- Publication date Aug 17, 2023
- Hendrikus Wilhelmus Leonardus Antonius Maria VAN LIEROP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TORSION SPRING ELEMENT
- Publication number 20230219805
- Publication date Jul 13, 2023
- NORTHROP GRUMMAN LITEF GMBH
- Jan Daniel Rende
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, NEARFIELD LOUDSPEAKER, HEARABLE, MEMS PUMP, LOUDSPEAKE...
- Publication number 20230212002
- Publication date Jul 6, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Anton MELNIKOV
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Microphone
- Publication number 20230217191
- Publication date Jul 6, 2023
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Bei Tong
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Spring holders

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS and method of manufacturing the same

MEMS device built using the BEOL metal layers of a solid state semi...

Venting device, manufacturing method of venting device, venting met...

Device and method of equalizing low frequency roll off for wearable...

Drop resistant MEMS actuator-imager assembly package

MEMS comprising a movable structural element, and MEMS array

Composite spring structure to reinforce mechanical robustness of a...

Dual-layer micro-ribbon MEMS light modulator

Device, package structure and manufacturing method of device

Ultrasonic MEMS acoustic transducer with reduced stress sensitivity...

Robust method for gyroscope drive amplitude measurement

MEMS microphone

Micromechanical structure and micromechanical sensor

Micromechanical pressure sensor device including a diaphragm system...

MEMS device built using the BEOL metal layers of a solid state semi...

Vibration-driven energy harvesting element and vibration-driven ene...

Thermal compensation of lens assembly focus using image sensor shift

MEMS device having a tiltable suspended structure controlled by ele...

Active stiction recovery

Method for manufacturing a substrate having a region mechanically d...

Method for manufacturing micromechanical diaphragm sensors

Micromechanical device and method for manufacturing a micromechanic...

MMS, MMS array, MEMS actuator and method for providing an MMS

Inertial sensor, method for manufacturing inertial sensor, inertial...

Micro check valve and system with multiple micro check valves and m...

Composite spring structure to reinforce mechanical robustness of a...

Resonator and resonance device

Mems device built using the BEOL metal layers of a solid state semi...

Microdevice comprising at least two movable elements

Micromechanical micromirror array and corresponding operating method

Patents Applicationslast 30 patents

ANCHOR STRUCTURE

MEMS DEVICE

Dual-Layer Micro-ribbon MEMS Light Modulator

MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER

MEMS DEVICE

Suspension for Resonators and MEMS Devices

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

ACCELERATION SENSOR

COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES

MEMS OPTICAL CIRCUIT SWITCH

Device and Method for Adapting Measuring Range and Sensitivity of M...

PIEZOELECTRIC ACTUATING APPARATUS

MICROMECHANICAL DIAPHRAGM SYSTEM

ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR

MEMS DEVICE AND MANUFACTURING METHOD FOR MEMS DEVICE

MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION

COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...

VENTING DEVICE, MANUFACTURING METHOD OF VENTING DEVICE, VENTING MET...

Device and Method of Equalizing Low Frequency Roll Off for Wearable...

DEVICE WITH A STRESS DECOUPLING STRUCTURE

Spring Supported and Sealed MEMS Diaphragm Assembly

Vibration-Driven Energy Harvesting Element and Method for Manufactu...

MICRO-ACOUSTIC RESONATOR SPRINGY ANCHOR BASED ON OFFSET ACOUSTIC RE...

MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...

MEMS Package and Method for Encapsulating an MEMS Structure

COMPACT MICROELECTROMECHANICAL ANGULAR RATE SENSOR

A SCANNING MEMS MIRROR DEVICE

TORSION SPRING ELEMENT

MEMS DEVICE, NEARFIELD LOUDSPEAKER, HEARABLE, MEMS PUMP, LOUDSPEAKE...

MEMS Microphone