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B81B2203/0163

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/0163Spring holders

Industries

Patents Grantslast 30 patents

Information Patent Grant
Comb-driven MEMS resonant scanner with full-circumferential range a...
- Patent number 12,332,428
- Issue date Jun 17, 2025
- The Regents of the University of Michigan
- Haijun Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vehicle operator awareness system
- Patent number 12,269,494
- Issue date Apr 8, 2025
- AURORA OPERATIONS, INC.
- Richard Brian Donnelly
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Micromirror arrays
- Patent number 12,259,546
- Issue date Mar 25, 2025
- ASML Netherlands B.V.
- Alexandre Halbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method of manufacturing the same
- Patent number 12,209,010
- Issue date Jan 28, 2025
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Shanshan Gu-Stoppel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device built using the BEOL metal layers of a solid state semi...
- Patent number 12,209,009
- Issue date Jan 28, 2025
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Venting device, manufacturing method of venting device, venting met...
- Patent number 12,157,663
- Issue date Dec 3, 2024
- xMEMS Labs, Inc.
- Chun-I Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method of equalizing low frequency roll off for wearable...
- Patent number 12,151,934
- Issue date Nov 26, 2024
- xMEMS Labs, Inc.
- Yanchen Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Drop resistant MEMS actuator-imager assembly package
- Patent number 12,145,839
- Issue date Nov 19, 2024
- Faez Ba-Tis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS comprising a movable structural element, and MEMS array
- Patent number 12,054,384
- Issue date Aug 6, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite spring structure to reinforce mechanical robustness of a...
- Patent number 11,993,510
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual-layer micro-ribbon MEMS light modulator
- Patent number 11,958,738
- Issue date Apr 16, 2024
- Silicon Light Machines Corporation
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device, package structure and manufacturing method of device
- Patent number 11,884,535
- Issue date Jan 30, 2024
- xMEMS Labs, Inc.
- Jemm Yue Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrasonic MEMS acoustic transducer with reduced stress sensitivity...
- Patent number 11,865,581
- Issue date Jan 9, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Robust method for gyroscope drive amplitude measurement
- Patent number 11,867,509
- Issue date Jan 9, 2024
- Invensense, Inc.
- Damiano Milani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 11,863,934
- Issue date Jan 2, 2024
- AAC KAITAI TECHNOLOGIES (WUHAN) CO., LTD
- Bei Tong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and micromechanical sensor
- Patent number 11,860,184
- Issue date Jan 2, 2024
- Robert Bosch GmbH
- Cristian Nagel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical pressure sensor device including a diaphragm system...
- Patent number 11,788,912
- Issue date Oct 17, 2023
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device built using the BEOL metal layers of a solid state semi...
- Patent number 11,780,725
- Issue date Oct 10, 2023
- Nanusens SL
- Josep Montanyà Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration-driven energy harvesting element and vibration-driven ene...
- Patent number 11,716,033
- Issue date Aug 1, 2023
- The University of Tokyo
- Hiroshi Toshiyoshi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal compensation of lens assembly focus using image sensor shift
- Patent number 11,708,263
- Issue date Jul 25, 2023
- Faez Ba-Tis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a tiltable suspended structure controlled by ele...
- Patent number 11,681,141
- Issue date Jun 20, 2023
- STMicroelectronics S.r.l.
- Roberto Carminati
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Active stiction recovery
- Patent number 11,655,139
- Issue date May 23, 2023
- Invensense, Inc.
- Ian Flader
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a substrate having a region mechanically d...
- Patent number 11,608,264
- Issue date Mar 21, 2023
- Robert Bosch GmbH
- Arne Dannenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical diaphragm sensors
- Patent number 11,519,803
- Issue date Dec 6, 2022
- Robert Bosch GmbH
- Arne Dannenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device and method for manufacturing a micromechanic...
- Patent number 11,486,782
- Issue date Nov 1, 2022
- Robert Bosch GmbH
- Friedjof Heuck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MMS, MMS array, MEMS actuator and method for providing an MMS
- Patent number 11,459,229
- Issue date Oct 4, 2022
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor, method for manufacturing inertial sensor, inertial...
- Patent number 11,448,506
- Issue date Sep 20, 2022
- Seiko Epson Corporation
- Koichiro Komizo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro check valve and system with multiple micro check valves and m...
- Patent number 11,428,345
- Issue date Aug 30, 2022
- MICROFAB SERVICE GMBH
- Marco Cordelair
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite spring structure to reinforce mechanical robustness of a...
- Patent number 11,420,866
- Issue date Aug 23, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator and resonance device
- Patent number 11,329,624
- Issue date May 10, 2022
- Murata Manufacturing Co., Ltd.
- Yuichi Goto
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...
- Publication number 20250236506
- Publication date Jul 24, 2025
- Nanusens SL
- Josep Montanyà i Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION SENSOR
- Publication number 20250230034
- Publication date Jul 17, 2025
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Shitao Yan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250206595
- Publication date Jun 26, 2025
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION ELECTRODES
- Publication number 20250197193
- Publication date Jun 19, 2025
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Piezoelectric Motion Limiters for MEMS Autofocus Actuator
- Publication number 20250187903
- Publication date Jun 12, 2025
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew NG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device
- Publication number 20250187902
- Publication date Jun 12, 2025
- SensorTek technology Corp.
- Chao-Lin Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS transducer having a carrier layer and at least two piezoelectr...
- Publication number 20250171295
- Publication date May 29, 2025
- USound GmbH
- Andrea Rusconi Clerici Beltrami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND MET...
- Publication number 20250171296
- Publication date May 29, 2025
- Industry-Academic Cooperation Foundation, Yonsei University
- Jongbaeg KIM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vehicle Operator Awareness System
- Publication number 20250115264
- Publication date Apr 10, 2025
- Aurora Operations, Inc.
- Richard Brian Donnelly
- B60 - VEHICLES IN GENERAL
Information Patent Application
MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS
- Publication number 20250115472
- Publication date Apr 10, 2025
- Rohm Co., Ltd.
- Andrew Scott HOCKING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Controller for sound producing device with dynamic vent function
- Publication number 20250100870
- Publication date Mar 27, 2025
- xMEMS Labs, Inc.
- Ming-Hung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL LOUDSPEAKER WITH A LARGE-AREA FORCE FIELD
- Publication number 20250083948
- Publication date Mar 13, 2025
- ROBERT BOSCH GmbH
- Andreas Winden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE
- Publication number 20250083947
- Publication date Mar 13, 2025
- ROBERT BOSCH GmbH
- Jochen REINMUTH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20250074764
- Publication date Mar 6, 2025
- Beijing BOE Technology Development Co., Ltd.
- Wenbo LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SOUND TRANSDUCER AND METHOD FOR PRODUCING SAME
- Publication number 20250074762
- Publication date Mar 6, 2025
- USound GmbH
- Andrea Rusconi Clerici Beltrami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COUPLING DEVICE FOR COUPLING VIBRATION SYSTEMS
- Publication number 20250066185
- Publication date Feb 27, 2025
- NORTHROP GRUMMAN LITEF GMBH
- Jan Daniel RENDE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR STRUCTURE
- Publication number 20250033951
- Publication date Jan 30, 2025
- Bishnu Prasanna Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250026632
- Publication date Jan 23, 2025
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual-Layer Micro-ribbon MEMS Light Modulator
- Publication number 20250026633
- Publication date Jan 23, 2025
- SILICON LIGHT MACHINES CORPORATION
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER
- Publication number 20250019228
- Publication date Jan 16, 2025
- ROBERT BOSCH GmbH
- Maximilian Sommer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250019225
- Publication date Jan 16, 2025
- Rohm Co., Ltd.
- Daisuke Nishinohara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Suspension for Resonators and MEMS Devices
- Publication number 20250011162
- Publication date Jan 9, 2025
- SiTime Corporation
- Nicholas MILLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20250011157
- Publication date Jan 9, 2025
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank Senger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION SENSOR
- Publication number 20250011159
- Publication date Jan 9, 2025
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES
- Publication number 20250002331
- Publication date Jan 2, 2025
- NXP USA, Inc.
- Mostafa Soliman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL CIRCUIT SWITCH
- Publication number 20240409393
- Publication date Dec 12, 2024
- nEYE Systems, Inc.
- Xiaosheng ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Device and Method for Adapting Measuring Range and Sensitivity of M...
- Publication number 20240400379
- Publication date Dec 5, 2024
- RUHR-UNIVERSITÄT BOCHUM
- Philip SCHMITT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ACTUATING APPARATUS
- Publication number 20240365670
- Publication date Oct 31, 2024
- Coretronic MEMS Corporation
- Hao-Chien Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DIAPHRAGM SYSTEM
- Publication number 20240343557
- Publication date Oct 17, 2024
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR
- Publication number 20240327198
- Publication date Oct 3, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Spring holders

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Comb-driven MEMS resonant scanner with full-circumferential range a...

Vehicle operator awareness system

Micromirror arrays

MEMS and method of manufacturing the same

MEMS device built using the BEOL metal layers of a solid state semi...

Venting device, manufacturing method of venting device, venting met...

Device and method of equalizing low frequency roll off for wearable...

Drop resistant MEMS actuator-imager assembly package

MEMS comprising a movable structural element, and MEMS array

Composite spring structure to reinforce mechanical robustness of a...

Dual-layer micro-ribbon MEMS light modulator

Device, package structure and manufacturing method of device

Ultrasonic MEMS acoustic transducer with reduced stress sensitivity...

Robust method for gyroscope drive amplitude measurement

MEMS microphone

Micromechanical structure and micromechanical sensor

Micromechanical pressure sensor device including a diaphragm system...

MEMS device built using the BEOL metal layers of a solid state semi...

Vibration-driven energy harvesting element and vibration-driven ene...

Thermal compensation of lens assembly focus using image sensor shift

MEMS device having a tiltable suspended structure controlled by ele...

Active stiction recovery

Method for manufacturing a substrate having a region mechanically d...

Method for manufacturing micromechanical diaphragm sensors

Micromechanical device and method for manufacturing a micromechanic...

MMS, MMS array, MEMS actuator and method for providing an MMS

Inertial sensor, method for manufacturing inertial sensor, inertial...

Micro check valve and system with multiple micro check valves and m...

Composite spring structure to reinforce mechanical robustness of a...

Resonator and resonance device

Patents Applicationslast 30 patents

MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...

ACCELERATION SENSOR

MEMS DEVICE

ANTI-STICTION ELECTRODES

Piezoelectric Motion Limiters for MEMS Autofocus Actuator

MEMS Device

MEMS transducer having a carrier layer and at least two piezoelectr...

MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND MET...

Vehicle Operator Awareness System

MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS

Controller for sound producing device with dynamic vent function

MICROELECTROMECHANICAL LOUDSPEAKER WITH A LARGE-AREA FORCE FIELD

MEMS MICROPHONE

MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

MEMS SOUND TRANSDUCER AND METHOD FOR PRODUCING SAME

COUPLING DEVICE FOR COUPLING VIBRATION SYSTEMS

ANCHOR STRUCTURE

MEMS DEVICE

Dual-Layer Micro-ribbon MEMS Light Modulator

MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER

MEMS DEVICE

Suspension for Resonators and MEMS Devices

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

ACCELERATION SENSOR

COMMON MODE REJECTION STRUCTURES FOR MEMS DEVICES

MEMS OPTICAL CIRCUIT SWITCH

Device and Method for Adapting Measuring Range and Sensitivity of M...

PIEZOELECTRIC ACTUATING APPARATUS

MICROMECHANICAL DIAPHRAGM SYSTEM

ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR