Step and repeat

Industry

CPC
Y10S438/946

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S438/00Semiconductor device manufacturing: process

Current Industry

Y10S438/946Step and repeat

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Single spacer process for multiplying pitch by a factor greater tha...
- Patent number 9,478,497
- Issue date Oct 25, 2016
- Micron Technology, Inc.
- David H Wells
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanowire growth on dissimilar material
- Patent number 9,012,887
- Issue date Apr 21, 2015
- QuNano AB
- Lars Samuelson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Single spacer process for multiplying pitch by a factor greater tha...
- Patent number 8,883,644
- Issue date Nov 11, 2014
- Micron Technology, Inc.
- David H Wells
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods for fabricating integrated circuits with improved semicondu...
- Patent number 8,835,328
- Issue date Sep 16, 2014
- GLOBALFOUNDRIES, INC.
- Wontae Hwang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for adjusting feature size and position
- Patent number 8,703,616
- Issue date Apr 22, 2014
- Round Rock Research, LLC
- David H. Wells
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Single spacer process for multiplying pitch by a factor greater tha...
- Patent number 8,557,704
- Issue date Oct 15, 2013
- Micron Technology, Inc.
- David H Wells
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 8,222,159
- Issue date Jul 17, 2012
- Elpida Memory, Inc.
- Takashi Sugimura
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Growth of III-V compound semiconductor nanowires on silicon substrates
- Patent number 8,084,337
- Issue date Dec 27, 2011
- QuNano AB
- Lars Samuelson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for realizing a multispacer structure, use of said structure...
- Patent number 7,867,402
- Issue date Jan 11, 2011
- STMicroelectronics S.r.l.
- Danilo Mascolo
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Methods of manufacturing semiconductor device
- Patent number 7,749,902
- Issue date Jul 6, 2010
- Samsung Electronics Co., Ltd.
- Hyun-chul Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing semiconductor device
- Patent number 7,670,949
- Issue date Mar 2, 2010
- Seiko Epson Corporation
- Chiharu Iriguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single spacer process for multiplying pitch by a factor greater tha...
- Patent number 7,611,980
- Issue date Nov 3, 2009
- Micron Technology, Inc.
- David H. Wells
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming openings, and methods of forming container capac...
- Patent number 7,538,036
- Issue date May 26, 2009
- Micron Technology, Inc.
- Brett W. Busch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for repairing photoresist layer defects using index matching...
- Patent number 7,461,446
- Issue date Dec 9, 2008
- Hitachi Global Storage Technologies Netherlands B.V.
- Dennis Richard McKean
- G11 - INFORMATION STORAGE
Information Patent Grant
Method and apparatus for adjusting feature size and position
- Patent number 7,396,781
- Issue date Jul 8, 2008
- Micron Technology, Inc.
- David H. Wells
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating a semiconductor integrated circuit that inclu...
- Patent number 7,361,530
- Issue date Apr 22, 2008
- Renesas Technology Corporation
- Tsuneo Terasawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitor structures, and DRAM arrays
- Patent number 7,321,149
- Issue date Jan 22, 2008
- Micron Technology, Inc.
- Brett W. Busch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Controlled dry etch of a film
- Patent number 7,288,476
- Issue date Oct 30, 2007
- Avago Technologies General IP Pte. Ltd.
- Ronnie P. Varghese
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System for controlling metal formation processes using ion implanta...
- Patent number 7,214,614
- Issue date May 8, 2007
- Micron Technology, Inc.
- Dinesh Chopra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating a semiconductor integrated circuit that inclu...
- Patent number 7,205,222
- Issue date Apr 17, 2007
- Renesas Technology Corp.
- Tsuneo Terasawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming a plurality of thin-film devices
- Patent number 7,195,950
- Issue date Mar 27, 2007
- Hewlett-Packard Development Company, L.P.
- Carl Philip Taussig
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming openings, and methods of forming container capac...
- Patent number 7,153,778
- Issue date Dec 26, 2006
- Micron Technology, Inc.
- Brett W. Busch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a semiconductor device having a tapered-mesa...
- Patent number 7,119,014
- Issue date Oct 10, 2006
- Elpida Memory, Inc.
- Yoshihiro Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device with outline of clea...
- Patent number 7,083,994
- Issue date Aug 1, 2006
- Eblana Photonics Limited
- James O'Gorman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming pattern on substrate and method for fabricating...
- Patent number 6,979,604
- Issue date Dec 27, 2005
- Samsung Electronics Co., Ltd.
- Young-Mi Tak
- G02 - OPTICS
Information Patent Grant
Method for exposing a semiconductor wafer
- Patent number 6,887,722
- Issue date May 3, 2005
- Infineon Technologies SC300 GmbH & Co. KG
- Thorsten Schedel
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
METHOD OF FABRICATING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND M...
- Patent number 6,849,540
- Issue date Feb 1, 2005
- Renesas Technology Corp.
- Tsuneo Terasawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor integrated circuit device, an...
- Patent number 6,750,496
- Issue date Jun 15, 2004
- Renesas Technology Corp.
- Katsuya Hayano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling metal formation processes using ion implantat...
- Patent number 6,727,175
- Issue date Apr 27, 2004
- Micron Technology, Inc.
- Dinesh Chopra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for decreasing the spaces between wordlines
- Patent number 6,727,195
- Issue date Apr 27, 2004
- Advanced Micro Devices, Inc.
- Michael K. Templeton
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH IMPROVED SEMICONDU...
- Publication number 20140227879
- Publication date Aug 14, 2014
- GLOBALFOUNDRIES, Inc.
- Wontae Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE SPACER PROCESS FOR MULTIPLYING PITCH BY A FACTOR GREATER THA...
- Publication number 20140038416
- Publication date Feb 6, 2014
- Micron Technology, Inc.
- David H. Wells
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANOWIRE GROWTH ON DISSIMILAR MATERIAL
- Publication number 20120145990
- Publication date Jun 14, 2012
- QuNano AB
- Lars Samuelson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANOWIRE GROWTH ON DISSIMILAR MATERIAL
- Publication number 20100252808
- Publication date Oct 7, 2010
- QuNano AB
- Lars Samuelson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20100048024
- Publication date Feb 25, 2010
- Elpida Memory, Inc.
- TAKASHI SUGIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE SPACER PROCESS FOR MULTIPLYING PITCH BY A FACTOR GREATER THA...
- Publication number 20100029081
- Publication date Feb 4, 2010
- Micron Technology, Inc.
- David H. Wells
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ADJUSTING FEATURE SIZE AND POSITION
- Publication number 20080254627
- Publication date Oct 16, 2008
- Micron Technology, Inc.
- David H. Wells
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of manufacturing semiconductor device
- Publication number 20080194108
- Publication date Aug 14, 2008
- SAMSUNG ELECTRONICS CO., LTD.
- Hyun-chul Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Single spacer process for multiplying pitch by a factor greater tha...
- Publication number 20080057692
- Publication date Mar 6, 2008
- David H. Wells
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20070224835
- Publication date Sep 27, 2007
- SEIKO EPSON CORPORATION
- Chiharu IRIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of fabricating a semiconductor integrated circuit that inclu...
- Publication number 20070155052
- Publication date Jul 5, 2007
- RENESAS TECHNOLOGY CORP.
- Tsuneo Terasawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR REALIZING A MULTISPACER STRUCTURE, USE OF SAID STRUCTURE...
- Publication number 20070148975
- Publication date Jun 28, 2007
- STMicroelectronics S.r.l.
- Danilo Mascolo
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method for repairing photoresist layer defects using index matching...
- Publication number 20070089288
- Publication date Apr 26, 2007
- Dennis Richard McKean
- G11 - INFORMATION STORAGE
Information Patent Application
Method and apparatus for adjusting feature size and position
- Publication number 20060281266
- Publication date Dec 14, 2006
- David H. Wells
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Forming a plurality of thin-film devices
- Publication number 20060019504
- Publication date Jan 26, 2006
- Carl Philip Taussig
- B82 - NANO-TECHNOLOGY
Information Patent Application
Methods of forming openings, and methods of forming container capac...
- Publication number 20060009042
- Publication date Jan 12, 2006
- Brett W. Busch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Capacitor structures, and DRAM arrays
- Publication number 20050269620
- Publication date Dec 8, 2005
- Brett W. Busch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods of Forming Openings, And Methods of Forming Container Capac...
- Publication number 20050186802
- Publication date Aug 25, 2005
- Brett W. Busch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Controlled dry etch of a film
- Publication number 20050130409
- Publication date Jun 16, 2005
- Ronnie P. Varghese
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of producing semiconductor integrated circuit device and met...
- Publication number 20050112504
- Publication date May 26, 2005
- RENESAS TECHNOLOGY CORP.
- Tsuneo Terasawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of manufacturing a semiconductor device
- Publication number 20050032264
- Publication date Feb 10, 2005
- James O'Gorman
- G02 - OPTICS
Information Patent Application
Controlled dry etch of a film
- Publication number 20050023631
- Publication date Feb 3, 2005
- Ronnie P. Varghese
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for forming pattern on substrate and method for fabricating...
- Publication number 20040095518
- Publication date May 20, 2004
- Young-Mi Tak
- G02 - OPTICS
Information Patent Application
Method of controlling metal formation processes using ion implantat...
- Publication number 20040072424
- Publication date Apr 15, 2004
- Micron Technology,Inc.
- Dinesh Chopra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for fabricating a semiconductor device having a tapered-mesa...
- Publication number 20040038508
- Publication date Feb 26, 2004
- Elpida Memory, Inc.
- Yoshihiro Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for exposing a semiconductor wafer
- Publication number 20040029027
- Publication date Feb 12, 2004
- Thorsten Schedel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of controlling metal formation processes using ion implantat...
- Publication number 20040023489
- Publication date Feb 5, 2004
- Dinesh Chopra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for pitch reduction
- Publication number 20030127426
- Publication date Jul 10, 2003
- MACRONIX INTERNATIONAL CO., LTD
- Ching-Yu Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of producing semiconductor integrated circuit device and met...
- Publication number 20030109126
- Publication date Jun 12, 2003
- Tsuneo Terasawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for manufacturing a semiconductor device
- Publication number 20030036293
- Publication date Feb 20, 2003
- Hitachi, Ltd.
- Toshihiko Tanaka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Step and repeat

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Single spacer process for multiplying pitch by a factor greater tha...

Nanowire growth on dissimilar material

Single spacer process for multiplying pitch by a factor greater tha...

Methods for fabricating integrated circuits with improved semicondu...

Method for adjusting feature size and position

Single spacer process for multiplying pitch by a factor greater tha...

Manufacturing method of semiconductor device

Growth of III-V compound semiconductor nanowires on silicon substrates

Method for realizing a multispacer structure, use of said structure...

Methods of manufacturing semiconductor device

Semiconductor device and method of manufacturing semiconductor device

Single spacer process for multiplying pitch by a factor greater tha...

Methods of forming openings, and methods of forming container capac...

Method for repairing photoresist layer defects using index matching...

Method and apparatus for adjusting feature size and position

Method of fabricating a semiconductor integrated circuit that inclu...

Capacitor structures, and DRAM arrays

Controlled dry etch of a film

System for controlling metal formation processes using ion implanta...

Method of fabricating a semiconductor integrated circuit that inclu...

Forming a plurality of thin-film devices

Methods of forming openings, and methods of forming container capac...

Method for fabricating a semiconductor device having a tapered-mesa...

Method of manufacturing a semiconductor device with outline of clea...

Method for forming pattern on substrate and method for fabricating...

Method for exposing a semiconductor wafer

METHOD OF FABRICATING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND M...

Manufacturing method of semiconductor integrated circuit device, an...

Method of controlling metal formation processes using ion implantat...

Method and system for decreasing the spaces between wordlines

Patents Applicationslast 30 patents

METHODS FOR FABRICATING INTEGRATED CIRCUITS WITH IMPROVED SEMICONDU...

SINGLE SPACER PROCESS FOR MULTIPLYING PITCH BY A FACTOR GREATER THA...

NANOWIRE GROWTH ON DISSIMILAR MATERIAL

NANOWIRE GROWTH ON DISSIMILAR MATERIAL

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

SINGLE SPACER PROCESS FOR MULTIPLYING PITCH BY A FACTOR GREATER THA...

METHOD FOR ADJUSTING FEATURE SIZE AND POSITION

Methods of manufacturing semiconductor device

Single spacer process for multiplying pitch by a factor greater tha...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Method of fabricating a semiconductor integrated circuit that inclu...

METHOD FOR REALIZING A MULTISPACER STRUCTURE, USE OF SAID STRUCTURE...

Method for repairing photoresist layer defects using index matching...

Method and apparatus for adjusting feature size and position

Forming a plurality of thin-film devices

Methods of forming openings, and methods of forming container capac...

Capacitor structures, and DRAM arrays

Methods of Forming Openings, And Methods of Forming Container Capac...

Controlled dry etch of a film

Method of producing semiconductor integrated circuit device and met...

Method of manufacturing a semiconductor device

Controlled dry etch of a film

Method for forming pattern on substrate and method for fabricating...

Method of controlling metal formation processes using ion implantat...

Method for fabricating a semiconductor device having a tapered-mesa...

Method for exposing a semiconductor wafer

Method of controlling metal formation processes using ion implantat...

Method for pitch reduction

Method of producing semiconductor integrated circuit device and met...

Method for manufacturing a semiconductor device