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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2201/00
Specific applications of micro-electromechanical systems
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B81B2201/12
STM or AFM micro-tips
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Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing a micro-fluid probe
Patent number
12,286,344
Issue date
Apr 29, 2025
CYTOSURGE AG
Edin Sarajlic
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of providing a MEMS device comprising a pyramidal protrusion...
Patent number
12,013,415
Issue date
Jun 18, 2024
SmartTip B.V.
Edin Sarajlic
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical structure and method for manufacturing the same
Patent number
10,710,874
Issue date
Jul 14, 2020
Infineon Technologies AG
Tobias Frischmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multilayer MEMS cantilevers
Patent number
10,308,500
Issue date
Jun 4, 2019
Ecole Polytechnique Federale de Lausanne (EPFL)
Georg Ernest Fantner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a microelectromechanical interaction syst...
Patent number
10,221,066
Issue date
Mar 5, 2019
STMicroelectronics S.r.l.
Giuseppe Barillaro
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a plurality of through-holes in a layer of...
Patent number
10,207,244
Issue date
Feb 19, 2019
SmartTip B.V.
Edin Sarajlic
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing microcantilever
Patent number
10,202,276
Issue date
Feb 12, 2019
Industry-University Cooperation Foundation Sogang University
Jung Chul Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a microelectromechanical interaction syst...
Patent number
10,196,262
Issue date
Feb 5, 2019
STMicroelectronics S.r.l.
Giuseppe Barillaro
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stress relieved microfabricated cantilever
Patent number
10,087,068
Issue date
Oct 2, 2018
UCL Business plc
Carl Leung Shin Cheung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a plurality of through-holes in a layer of...
Patent number
9,975,761
Issue date
May 22, 2018
SmartTip B.V.
Edin Sarajlic
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Micro-nano tools with changeable tips for micro-NANO manipulation
Patent number
9,649,763
Issue date
May 16, 2017
Yu Sun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating nano-scale structures and nano-scale structur...
Patent number
9,522,821
Issue date
Dec 20, 2016
Bo Cui
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Carbon nanotube based micro-tip structure and method for making the...
Patent number
8,821,675
Issue date
Sep 2, 2014
Tsinghua University
Yang Wei
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Manufacturing of micro-objects such as miniature diamond tool tips
Patent number
7,946,020
Issue date
May 24, 2011
General Nanotechnology L.L.C.
Victor B. Kley
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Forming a cantilever assembly for vertical and lateral movement
Patent number
7,687,297
Issue date
Mar 30, 2010
Intel Corporation
John Heck
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanoelectromechanical bistable cantilever device
Patent number
7,612,424
Issue date
Nov 3, 2009
Northwestern University
Horacio D. Espinosa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semi-sacrificial mold for diamond structures
Patent number
7,598,107
Issue date
Oct 6, 2009
Metadigm LLC
Hongbing Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabrication of silicon micro-mechanical structures
Patent number
7,566,939
Issue date
Jul 28, 2009
International Business Machines Corporation
Michel Despont
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Deformation method of nanometer scale material using particle beam...
Patent number
7,501,618
Issue date
Mar 10, 2009
Korea Research Institute of Standards
Byong-Chon Park
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Liquid-based gravity-driven etching-stop technique for controlling...
Patent number
7,435,355
Issue date
Oct 14, 2008
Industrial Technology Research Institute
Wei-Chin Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabrication of silicon micro mechanical structures
Patent number
6,949,397
Issue date
Sep 27, 2005
International Business Machines Corporation
Michel Despont
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanotweezers and nanomanipulator
Patent number
6,805,390
Issue date
Oct 19, 2004
Yoshikazu Nakayama
Yoshikazu Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanotweezers and nanomanipulator
Patent number
6,802,549
Issue date
Oct 12, 2004
Daiken Chemical Co., Ltd.
Yoshikazu Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanotweezers and nanomanipulator
Patent number
6,669,256
Issue date
Dec 30, 2003
Daiken Chemical Co., Ltd.
Yoshikazu Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Cantilever probe and scanning type probe microscope utilizing the c...
Patent number
5,992,225
Issue date
Nov 30, 1999
Seiko Instruments Inc.
Yoshiharu Shirakawabe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical structure and process of making same
Patent number
5,970,315
Issue date
Oct 19, 1999
Carnegie Mellon University
L. Richard Carley
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing micro-tip and female mold substrate therefo...
Patent number
5,866,021
Issue date
Feb 2, 1999
Canon Kabushiki Kaisha
Takayuki Yagi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical structure and process of making same
Patent number
5,717,631
Issue date
Feb 10, 1998
Carnegie Mellon University
L. Richard Carley
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of making superhard mechanical microstructures
Patent number
5,658,710
Issue date
Aug 19, 1997
Adagio Associates, Inc.
Armand P. Neukermans
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of making superhard tips for micro-probe microscopy and fiel...
Patent number
5,393,647
Issue date
Feb 28, 1995
Neukermans; Armand P.
Armand P. Neukermans
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR...
Publication number
20250093212
Publication date
Mar 20, 2025
Centre National de la Recherche Scientifique
Olivier BOURGEOIS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROSTATICALLY-EXCITED HERMETIC MULTI-CELL MICROELECTROMECHANICA...
Publication number
20250019223
Publication date
Jan 16, 2025
Kaunas University of Technology
Darius VIRZONIS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PROBE MODULE STRUCTURE
Publication number
20240377434
Publication date
Nov 14, 2024
TAIWAN MASK CORPORATION
SHANG-KUANG WU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FLEXIBLE, INSERTABLE, TRANSPARENT MICROELECTRODE ARRAY FOR DETECTIN...
Publication number
20230172513
Publication date
Jun 8, 2023
The Regents of the University of California
Duygu Kuzum
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A METHOD OF PROVIDING A MEMS DEVICE COMPRISING A PYRAMIDAL PROTRUSI...
Publication number
20220187336
Publication date
Jun 16, 2022
SMARTTIP B.V.
Edin SARAJLIC
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTILAYER MEMS CANTILEVERS
Publication number
20180141801
Publication date
May 24, 2018
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
Georg Ernest FANTNER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20180002167
Publication date
Jan 4, 2018
INFINEON TECHNOLOGIES AG
Tobias Frischmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FABRICATING NANO-SCALE STRUCTURES AND NANO-SCALE STRUCTUR...
Publication number
20160068384
Publication date
Mar 10, 2016
Bo CUI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-NANO TOOLS WITH CHANGEABLE TIPS FOR MICRO-NANO MANIPULATION
Publication number
20140284950
Publication date
Sep 25, 2014
Yu Sun
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
STRESS RELIEVED MICROFABRICATED CANTILEVER
Publication number
20140091674
Publication date
Apr 3, 2014
UCL BUSINESS PLC
Carl Leung Shin Cheung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CARBON NANOTUBE BASED MICRO-TIP STRUCTURE AND METHOD FOR MAKING THE...
Publication number
20130220534
Publication date
Aug 29, 2013
HON HAI Precision Industry CO., LTD.
YANG WEI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Transferable Probe Tips
Publication number
20120279287
Publication date
Nov 8, 2012
International Business Machines Corporation
Paul S. Andry
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microstructure and Process for its Assembly
Publication number
20110048799
Publication date
Mar 3, 2011
Albert-Ludwigs-Universitat Freiburg
Sebastian Kisban
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Forming a cantilever assembly for verticle and lateral movement
Publication number
20090001486
Publication date
Jan 1, 2009
John Heck
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEFORMATION METHOD OF NANOMETER SCALE MATERIAL USING PARTICLE BEAM...
Publication number
20080203295
Publication date
Aug 28, 2008
Korea Research Institute of Standards and Science
Byong-Chon Park
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL INTERACTION SYST...
Publication number
20080164576
Publication date
Jul 10, 2008
STMicroelectronics S.r.l.
Giuseppe Barillaro
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method For Manufacturing A Membrane In A (111) Surface Of A (100) S...
Publication number
20080020579
Publication date
Jan 24, 2008
Technische Universiteit Delft
Warner Jurrien Venstra
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MANUFACTURING OF MICRO-OBJECTS SUCH AS MINIATURE DIAMOND TOOL TIPS
Publication number
20070068995
Publication date
Mar 29, 2007
General Nanotechnology LLC
Victor B. Kley
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Liquid-based gravity-driven etching-stop technique for controlling...
Publication number
20060264058
Publication date
Nov 23, 2006
Wei-Chin Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and micromechanical component
Publication number
20060037932
Publication date
Feb 23, 2006
Gerhard Lammel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Fabrication of silicon micro-mechanical structures
Publication number
20050230839
Publication date
Oct 20, 2005
Michel Despont
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Fabrication of silicon micro mechanical structures
Publication number
20040135219
Publication date
Jul 15, 2004
Michel Despont
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Nanotweezers and nanomanipulator
Publication number
20030189350
Publication date
Oct 9, 2003
YOSHIKAZU NAKAYAMA
Yoshikazu Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Nanotweezers and nanomanipulator
Publication number
20030189351
Publication date
Oct 9, 2003
YOSHIKAZU NAKAYAMA
Yoshikazu Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Nanotweezers and nanomanipulator
Publication number
20020158480
Publication date
Oct 31, 2002
Yoshikazu Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY