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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2201/00
Specific applications of micro-electromechanical systems
Current Industry
B81B2201/12
STM or AFM micro-tips
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Patents Grants
last 30 patents
Information
Patent Grant
Method of providing a MEMS device comprising a pyramidal protrusion...
Patent number
12,013,415
Issue date
Jun 18, 2024
SmartTip B.V.
Edin Sarajlic
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical structure and method for manufacturing the same
Patent number
10,710,874
Issue date
Jul 14, 2020
Infineon Technologies AG
Tobias Frischmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multilayer MEMS cantilevers
Patent number
10,308,500
Issue date
Jun 4, 2019
Ecole Polytechnique Federale de Lausanne (EPFL)
Georg Ernest Fantner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a microelectromechanical interaction syst...
Patent number
10,221,066
Issue date
Mar 5, 2019
STMicroelectronics S.r.l.
Giuseppe Barillaro
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a plurality of through-holes in a layer of...
Patent number
10,207,244
Issue date
Feb 19, 2019
SmartTip B.V.
Edin Sarajlic
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing microcantilever
Patent number
10,202,276
Issue date
Feb 12, 2019
Industry-University Cooperation Foundation Sogang University
Jung Chul Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a microelectromechanical interaction syst...
Patent number
10,196,262
Issue date
Feb 5, 2019
STMicroelectronics S.r.l.
Giuseppe Barillaro
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stress relieved microfabricated cantilever
Patent number
10,087,068
Issue date
Oct 2, 2018
UCL Business plc
Carl Leung Shin Cheung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a plurality of through-holes in a layer of...
Patent number
9,975,761
Issue date
May 22, 2018
SmartTip B.V.
Edin Sarajlic
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Micro-nano tools with changeable tips for micro-NANO manipulation
Patent number
9,649,763
Issue date
May 16, 2017
Yu Sun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating nano-scale structures and nano-scale structur...
Patent number
9,522,821
Issue date
Dec 20, 2016
Bo Cui
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Carbon nanotube based micro-tip structure and method for making the...
Patent number
8,821,675
Issue date
Sep 2, 2014
Tsinghua University
Yang Wei
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Manufacturing of micro-objects such as miniature diamond tool tips
Patent number
7,946,020
Issue date
May 24, 2011
General Nanotechnology L.L.C.
Victor B. Kley
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Forming a cantilever assembly for vertical and lateral movement
Patent number
7,687,297
Issue date
Mar 30, 2010
Intel Corporation
John Heck
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanoelectromechanical bistable cantilever device
Patent number
7,612,424
Issue date
Nov 3, 2009
Northwestern University
Horacio D. Espinosa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semi-sacrificial mold for diamond structures
Patent number
7,598,107
Issue date
Oct 6, 2009
Metadigm LLC
Hongbing Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabrication of silicon micro-mechanical structures
Patent number
7,566,939
Issue date
Jul 28, 2009
International Business Machines Corporation
Michel Despont
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Deformation method of nanometer scale material using particle beam...
Patent number
7,501,618
Issue date
Mar 10, 2009
Korea Research Institute of Standards
Byong-Chon Park
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Liquid-based gravity-driven etching-stop technique for controlling...
Patent number
7,435,355
Issue date
Oct 14, 2008
Industrial Technology Research Institute
Wei-Chin Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabrication of silicon micro mechanical structures
Patent number
6,949,397
Issue date
Sep 27, 2005
International Business Machines Corporation
Michel Despont
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanotweezers and nanomanipulator
Patent number
6,805,390
Issue date
Oct 19, 2004
Yoshikazu Nakayama
Yoshikazu Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanotweezers and nanomanipulator
Patent number
6,802,549
Issue date
Oct 12, 2004
Daiken Chemical Co., Ltd.
Yoshikazu Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanotweezers and nanomanipulator
Patent number
6,669,256
Issue date
Dec 30, 2003
Daiken Chemical Co., Ltd.
Yoshikazu Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Cantilever probe and scanning type probe microscope utilizing the c...
Patent number
5,992,225
Issue date
Nov 30, 1999
Seiko Instruments Inc.
Yoshiharu Shirakawabe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical structure and process of making same
Patent number
5,970,315
Issue date
Oct 19, 1999
Carnegie Mellon University
L. Richard Carley
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing micro-tip and female mold substrate therefo...
Patent number
5,866,021
Issue date
Feb 2, 1999
Canon Kabushiki Kaisha
Takayuki Yagi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical structure and process of making same
Patent number
5,717,631
Issue date
Feb 10, 1998
Carnegie Mellon University
L. Richard Carley
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of making superhard mechanical microstructures
Patent number
5,658,710
Issue date
Aug 19, 1997
Adagio Associates, Inc.
Armand P. Neukermans
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of making superhard tips for micro-probe microscopy and fiel...
Patent number
5,393,647
Issue date
Feb 28, 1995
Neukermans; Armand P.
Armand P. Neukermans
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS PROBE MODULE STRUCTURE
Publication number
20240377434
Publication date
Nov 14, 2024
TAIWAN MASK CORPORATION
SHANG-KUANG WU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FLEXIBLE, INSERTABLE, TRANSPARENT MICROELECTRODE ARRAY FOR DETECTIN...
Publication number
20230172513
Publication date
Jun 8, 2023
The Regents of the University of California
Duygu Kuzum
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A METHOD OF PROVIDING A MEMS DEVICE COMPRISING A PYRAMIDAL PROTRUSI...
Publication number
20220187336
Publication date
Jun 16, 2022
SMARTTIP B.V.
Edin SARAJLIC
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTILAYER MEMS CANTILEVERS
Publication number
20180141801
Publication date
May 24, 2018
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
Georg Ernest FANTNER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20180002167
Publication date
Jan 4, 2018
INFINEON TECHNOLOGIES AG
Tobias Frischmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FABRICATING NANO-SCALE STRUCTURES AND NANO-SCALE STRUCTUR...
Publication number
20160068384
Publication date
Mar 10, 2016
Bo CUI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-NANO TOOLS WITH CHANGEABLE TIPS FOR MICRO-NANO MANIPULATION
Publication number
20140284950
Publication date
Sep 25, 2014
Yu Sun
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
STRESS RELIEVED MICROFABRICATED CANTILEVER
Publication number
20140091674
Publication date
Apr 3, 2014
UCL BUSINESS PLC
Carl Leung Shin Cheung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CARBON NANOTUBE BASED MICRO-TIP STRUCTURE AND METHOD FOR MAKING THE...
Publication number
20130220534
Publication date
Aug 29, 2013
HON HAI Precision Industry CO., LTD.
YANG WEI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Transferable Probe Tips
Publication number
20120279287
Publication date
Nov 8, 2012
International Business Machines Corporation
Paul S. Andry
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microstructure and Process for its Assembly
Publication number
20110048799
Publication date
Mar 3, 2011
Albert-Ludwigs-Universitat Freiburg
Sebastian Kisban
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Forming a cantilever assembly for verticle and lateral movement
Publication number
20090001486
Publication date
Jan 1, 2009
John Heck
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEFORMATION METHOD OF NANOMETER SCALE MATERIAL USING PARTICLE BEAM...
Publication number
20080203295
Publication date
Aug 28, 2008
Korea Research Institute of Standards and Science
Byong-Chon Park
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL INTERACTION SYST...
Publication number
20080164576
Publication date
Jul 10, 2008
STMicroelectronics S.r.l.
Giuseppe Barillaro
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method For Manufacturing A Membrane In A (111) Surface Of A (100) S...
Publication number
20080020579
Publication date
Jan 24, 2008
Technische Universiteit Delft
Warner Jurrien Venstra
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MANUFACTURING OF MICRO-OBJECTS SUCH AS MINIATURE DIAMOND TOOL TIPS
Publication number
20070068995
Publication date
Mar 29, 2007
General Nanotechnology LLC
Victor B. Kley
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Liquid-based gravity-driven etching-stop technique for controlling...
Publication number
20060264058
Publication date
Nov 23, 2006
Wei-Chin Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and micromechanical component
Publication number
20060037932
Publication date
Feb 23, 2006
Gerhard Lammel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Fabrication of silicon micro-mechanical structures
Publication number
20050230839
Publication date
Oct 20, 2005
Michel Despont
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Fabrication of silicon micro mechanical structures
Publication number
20040135219
Publication date
Jul 15, 2004
Michel Despont
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Nanotweezers and nanomanipulator
Publication number
20030189350
Publication date
Oct 9, 2003
YOSHIKAZU NAKAYAMA
Yoshikazu Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Nanotweezers and nanomanipulator
Publication number
20030189351
Publication date
Oct 9, 2003
YOSHIKAZU NAKAYAMA
Yoshikazu Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Nanotweezers and nanomanipulator
Publication number
20020158480
Publication date
Oct 31, 2002
Yoshikazu Nakayama
B81 - MICRO-STRUCTURAL TECHNOLOGY