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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B3/00
Devices comprising flexible or deformable elements
Current Industry
B81B3/001
Structures having a reduced contact area
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Patents Grants
last 30 patents
Information
Patent Grant
MEMS device having decreased contact resistance
Patent number
12,077,431
Issue date
Sep 3, 2024
Qorvo US, Inc.
Shibajyoti Ghosh Dastider
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Load-lock gauge
Patent number
12,055,452
Issue date
Aug 6, 2024
MKS Instruments, Inc.
Gerardo A. Brucker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for controlling a drive apparatus of a micro-oscillation mir...
Patent number
12,055,705
Issue date
Aug 6, 2024
Valeo Schalter und Sensoren GmbH
Jochen Schenk
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device structure with movable membrane
Patent number
12,043,538
Issue date
Jul 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Chuan Teng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a microelectromechanical systems (MEMS) device
Patent number
12,043,537
Issue date
Jul 23, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Wei Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS inertial sensor with high resilience to the phenomenon of stic...
Patent number
12,038,454
Issue date
Jul 16, 2024
STMicroelectronics S.r.l.
Francesco Rizzini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Image projection device
Patent number
12,038,680
Issue date
Jul 16, 2024
Sony Group Corporation
Yusuke Ogawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical scanning device and method for manufacturing the same
Patent number
12,038,576
Issue date
Jul 16, 2024
Mitsubishi Electric Corporation
Nobuaki Konno
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pattern recognition used to characterize LIDAR window obstruction
Patent number
12,019,186
Issue date
Jun 25, 2024
Innoviz Technologies Ltd.
Nir Osiroff
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Capacitance gap measurement
Patent number
12,017,907
Issue date
Jun 25, 2024
Invensense, Inc.
Edoardo Belloni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Techniques for alternate pressure equalization of a sensor
Patent number
12,013,282
Issue date
Jun 18, 2024
Invensense, Inc.
Jeremy Parker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Binning and non-binning combination
Patent number
12,000,960
Issue date
Jun 4, 2024
Innoviz Technologies Ltd.
Oded Yeruhami
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Distributing LIDAR system components
Patent number
11,994,620
Issue date
May 28, 2024
Innoviz Technologies Ltd.
Amit Steinberg
B60 - VEHICLES IN GENERAL
Information
Patent Grant
MEMS inclinometer having a reduced vibration rectification error
Patent number
11,993,509
Issue date
May 28, 2024
STMicroelectronics S.r.l.
Gabriele Gattere
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Package structure and method for manufacturing the same
Patent number
11,970,388
Issue date
Apr 30, 2024
Winbond Electronics Corp.
Jin-Neng Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro mechanical system device containing a bump stopper an...
Patent number
11,970,387
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company Limited
Chun-wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric body and MEMS device using same
Patent number
11,968,902
Issue date
Apr 23, 2024
National Institute of Advanced Industrial Science and Technology
Masato Uehara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of making piezoelectric microphone with deflection control
Patent number
11,963,452
Issue date
Apr 16, 2024
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
Jia Jie Xia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Modification to rough polysilicon using ion implantation and silicide
Patent number
11,952,267
Issue date
Apr 9, 2024
Invensense, Inc.
Alan Cuthbertson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical sensor device and corresponding manufacturing method
Patent number
11,952,263
Issue date
Apr 9, 2024
Robert Bosch GmbH
Mike Schwarz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component for a capacitive pressure sensor device
Patent number
11,940,345
Issue date
Mar 26, 2024
Robert Bosch GmbH
Thomas Friedrich
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone
Patent number
11,943,584
Issue date
Mar 26, 2024
FORTEMEDIA, INC.
Chih-Yuan Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical structure including a functional element sit...
Patent number
11,939,215
Issue date
Mar 26, 2024
Robert Bosch GmbH
Penny Weir
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sound producing cell and manufacturing method thereof
Patent number
11,943,595
Issue date
Mar 26, 2024
xMEMS Labs, Inc.
Chiung C. Lo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Isolated protrusion/recession features in microelectromechanical sy...
Patent number
11,932,529
Issue date
Mar 19, 2024
Texas Instruments Incorporated
Patrick Ian Oden
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS acoustic sensor
Patent number
11,910,160
Issue date
Feb 20, 2024
SHINSUNG SOUNDMOTION CO., LTD.
Sangwoo Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical device with contact pad
Patent number
11,897,756
Issue date
Feb 13, 2024
Robert Bosch GmbH
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromachined multi-axis gyroscopes with reduced stress sensitivity
Patent number
11,898,845
Issue date
Feb 13, 2024
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Cenk Acar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
Patent number
11,883,845
Issue date
Jan 30, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mems device having a rugged package and fabrication process thereof
Patent number
11,873,215
Issue date
Jan 16, 2024
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MULTI-LEVEL MEMS PROCESS
Publication number
20240351864
Publication date
Oct 24, 2024
InvenSense, Inc.
Roberto Martini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
Publication number
20240343558
Publication date
Oct 17, 2024
Murata Manufacturing Co., Ltd.
Petteri KILPINEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH MOVABLE MEMBRANE
Publication number
20240343551
Publication date
Oct 17, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Chuan TENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LIDAR SYSTEMS AND METHODS
Publication number
20240337732
Publication date
Oct 10, 2024
Innoviz Technologies Ltd.
Amir DAY
B60 - VEHICLES IN GENERAL
Information
Patent Application
Multi-Parametric Machine Olfaction
Publication number
20240255483
Publication date
Aug 1, 2024
Brown University
Jacob K. Rosenstein
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING PACKAGE STRUCTURE
Publication number
20240217808
Publication date
Jul 4, 2024
WINBOND ELECTRONICS CORP.
Jin-Neng WU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS BUMP STOPPER SURFACE FEATURES
Publication number
20240208800
Publication date
Jun 27, 2024
KNOWLES ELECTRONICS, LLC
Ken Deng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ELEMENT AND METHOD OF MANUFACTURING THE SAME
Publication number
20240171918
Publication date
May 23, 2024
Nisshinbo Micro Devices Inc.
Takao FUKUTOME
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE
Publication number
20240140781
Publication date
May 2, 2024
Vanguard International Semiconductor Corporation
JIA JIE XIA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
Publication number
20240100566
Publication date
Mar 28, 2024
BFLY OPERATIONS, INC.
Lingyun Miao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS OPTICAL DEVICE COMPRISING A LENS AND AN ACTUATOR FOR CONTROLLI...
Publication number
20240061236
Publication date
Feb 22, 2024
Polight ASA
Enri DUQI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MOTION LIMITER WITH REDUCED STICTION
Publication number
20240051816
Publication date
Feb 15, 2024
Murata Manufacturing Co., Ltd.
Pekka LEHTINEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device and Method for Manufacturing a MEMS Device
Publication number
20240017986
Publication date
Jan 18, 2024
INFINEON TECHNOLOGIES AG
Stefan Barzen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Load-Lock Gauge
Publication number
20240019332
Publication date
Jan 18, 2024
MKS Instruments, Inc.
Gerardo A. Brucker
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS CAPACITANCE MICROPHONE AND MANUFACTURING METHOD THEREOF
Publication number
20230403514
Publication date
Dec 14, 2023
Qsensing Microelectronics Co., Ltd
Chien-Hsing Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING A MECHANICALLY ROBUST...
Publication number
20230382712
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...
Publication number
20230373780
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Fan Hu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HIGH REGISTRATION PARTICLES-TRANSFERRING SYSTEM
Publication number
20230366093
Publication date
Nov 16, 2023
Xerox Corporation
Yunda Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Structure and Method of Forming Same
Publication number
20230353066
Publication date
Nov 2, 2023
Taiwan Semiconductor Manufacturing Company Co., Ltd.
Yi Heng Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...
Publication number
20230348258
Publication date
Nov 2, 2023
STMicroelectronics S.r.l.
Mikel AZPEITIA URQUIA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20230345185
Publication date
Oct 26, 2023
DB HiTek Co., Ltd.
Seok Young LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC MEMS DEVICE WITH A SUSPENDED MEMBRANE HAVING HIGH MEC...
Publication number
20230320222
Publication date
Oct 5, 2023
STMicroelectronics S.r.l.
Domenico GIUSTI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEMS AND METHODS TO REDUCE STICTION IN MEMS DEVICES
Publication number
20230305291
Publication date
Sep 28, 2023
TEXAS INSTRUMENTS INCORPORATED
Lisa Wesneski
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Ultra-High Frequency MEMS Resonators with First and Second Order Te...
Publication number
20230264946
Publication date
Aug 24, 2023
Stathera IP Holdings Inc.
Anosh Daruwalla
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFLUIDIC VALVE, METHOD FOR ITS MANUFACTURE, AND USES THEREOF
Publication number
20230258164
Publication date
Aug 17, 2023
Consejo Superior de Investigaciones Cientificas (CSIC)
Carlos SÁNCHEZ SOMOLINOS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTI-PARAMETRIC MACHINE OLFACTION
Publication number
20230251238
Publication date
Aug 10, 2023
Brown University
Jacob K. Rosenstein
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHA...
Publication number
20230242393
Publication date
Aug 3, 2023
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICES HAVING A MEMBRANE LAYER WITH SMOOTH STRESS-RE...
Publication number
20230224657
Publication date
Jul 13, 2023
INFINEON TECHNOLOGIES AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Distributed MEMS Switch Array Design with Multiple Input/Output Ports
Publication number
20230202831
Publication date
Jun 29, 2023
Menlo Microsystems, Inc.
Xu Zhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES
Publication number
20230192480
Publication date
Jun 22, 2023
Murata Manufacturing Co., Ltd.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY