Surface micromachining

Industry

CPC
B81C2201/0102

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0102Surface micromachining

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Micro-nano incremental mechanical surface treatment method
- Patent number 12,168,604
- Issue date Dec 17, 2024
- Nanjing University of Aeronautics and Astronautics
- Hongyu Wei
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for inflating micro-channels
- Patent number 11,858,809
- Issue date Jan 2, 2024
- Taiyuan University of Technology
- Jingwei Zhao
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for preparing micro-cavity array surface product with inclin...
- Patent number 11,655,144
- Issue date May 23, 2023
- JIANGSU UNIVERSITY
- Jian Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Atomic-scale e-beam sculptor
- Patent number 11,518,674
- Issue date Dec 6, 2022
- UT-Battelle, LLC
- Sergei V. Kalinin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-volume millimeter scale manufacturing
- Patent number 11,325,828
- Issue date May 10, 2022
- Vibrant Composites Inc.
- Pratheev S. Sreetharan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for forming a MEMS device layer on an active device layer a...
- Patent number 11,180,366
- Issue date Nov 23, 2021
- General Electric Company
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device
- Patent number 10,513,430
- Issue date Dec 24, 2019
- Sumitomo Precision Products Co., LTD
- Ryohei Uchino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma assisted method of accurate alignment and pre-bonding for mi...
- Patent number 9,842,749
- Issue date Dec 12, 2017
- Beijing University of Technology
- Guangsheng Guo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing electronic component
- Patent number 9,611,142
- Issue date Apr 4, 2017
- Sumitomo Precision Products Co., LTD
- Yasuyuki Hirata
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING...
- Publication number 20230271825
- Publication date Aug 31, 2023
- RESEARCH INSTITUTE OF TSINGHUA UNIVERSITY IN SHENZHEN
- Quanshui ZHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING MICRO CHANNELS IN MOLDED COMPONENTS AND AN ASSOC...
- Publication number 20220306459
- Publication date Sep 29, 2022
- Tessy Plastics Corporation
- Robert Benson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...
- Publication number 20220267144
- Publication date Aug 25, 2022
- JIANGSU UNIVERSITY
- Jian LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROGRESSIVE METALLIC SURFACE MICRO-NANO MODIFICATION METHOD
- Publication number 20220063992
- Publication date Mar 3, 2022
- NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS
- Hongyu WEI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR FORMING A MEMS DEVICE LAYER ON AN ACTIVE DEVICE LAYER A...
- Publication number 20210292161
- Publication date Sep 23, 2021
- GENERAL ELECTRIC COMPANY
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for inflating micro-channels
- Publication number 20210292159
- Publication date Sep 23, 2021
- Taiyuan University of Technology
- Jingwei Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATOMIC-SCALE E-BEAM SCULPTOR
- Publication number 20200247667
- Publication date Aug 6, 2020
- UT-Battelle, LLC
- Sergei V. Kalinin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Plasma assisted method of accurate alignment and pre-bonding for mi...
- Publication number 20170301564
- Publication date Oct 19, 2017
- BEIJING UNIVERSITY OF TECHNOLOGY
- Guangsheng Guo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION...
- Publication number 20170044010
- Publication date Feb 16, 2017
- MITSUBISHI ELECTRIC CORPORATION
- Tomoya HIRATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Chip Package and a Method of Producing the Same
- Publication number 20160311679
- Publication date Oct 27, 2016
- INFINEON TECHNOLOGIES AG
- Dominic Maier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING ELECTRONIC COMPONENT
- Publication number 20160200569
- Publication date Jul 14, 2016
- SUMITOMO PRECISION PRODUCTS CO., LTD.
- Yasuyuki HIRATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Surface micromachining

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micro-nano incremental mechanical surface treatment method

Method for inflating micro-channels

Method for preparing micro-cavity array surface product with inclin...

Atomic-scale e-beam sculptor

High-volume millimeter scale manufacturing

Methods for forming a MEMS device layer on an active device layer a...

Semiconductor device

Plasma assisted method of accurate alignment and pre-bonding for mi...

Method for manufacturing electronic component

Patents Applicationslast 30 patents

ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING...

METHOD FOR FORMING MICRO CHANNELS IN MOLDED COMPONENTS AND AN ASSOC...

METHOD FOR PREPARING MICRO-CAVITY ARRAY SURFACE WITH INCLINED SMOOT...

PROGRESSIVE METALLIC SURFACE MICRO-NANO MODIFICATION METHOD

METHODS FOR FORMING A MEMS DEVICE LAYER ON AN ACTIVE DEVICE LAYER A...

Method for inflating micro-channels

ATOMIC-SCALE E-BEAM SCULPTOR

Plasma assisted method of accurate alignment and pre-bonding for mi...

SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION...

Chip Package and a Method of Producing the Same

METHOD FOR MANUFACTURING ELECTRONIC COMPONENT