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Micro-structural technology
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MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Specific applications of micro-electromechanical systems
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Patents Grants
last 30 patents
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Patent Grant
Multiaxial strain engineering of defect doped materials
Patent number
12,077,428
Issue date
Sep 3, 2024
Massachusetts Institute of Technology
Subra Suresh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Thermal metamaterial for low power MEMS thermal control
Patent number
12,055,927
Issue date
Aug 6, 2024
Honeywell International Inc.
Robert Compton
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS bridge devices and methods of manufacture thereof
Patent number
11,834,327
Issue date
Dec 5, 2023
SOFANT TECHNOLOGIES LTD
Nakul Haridas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS element and electrical circuit
Patent number
11,837,425
Issue date
Dec 5, 2023
Kabushiki Kaisha Toshiba
Hiroaki Yamazaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Waterproof MEMS button device, package housing the button device, a...
Patent number
11,810,732
Issue date
Nov 7, 2023
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Computation devices and artificial neurons based on nanoelectromech...
Patent number
11,681,897
Issue date
Jun 20, 2023
Cornell University
Amit Lal
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Zero power plasmonic microelectromechanical device
Patent number
11,557,449
Issue date
Jan 17, 2023
Northeastern University
Matteo Rinaldi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing an integrated circuit pointed element comprisi...
Patent number
11,536,872
Issue date
Dec 27, 2022
STMicroelectronics (Rousset) SAS
Abderrezak Marzaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS heater or emitter structure for fast heating and cooling cycles
Patent number
11,245,064
Issue date
Feb 8, 2022
Infineon Technologies AG
Christoph Glacer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Full symmetric multi-throw switch using conformal pinched through via
Patent number
11,148,935
Issue date
Oct 19, 2021
Menlo Microsystems, Inc.
Xu Zhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor structures provided within a cavity and related desig...
Patent number
10,882,736
Issue date
Jan 5, 2021
International Business Machines Corporation
Jeffrey C. Maling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Computation devices and artificial neurons based on nanoelectromech...
Patent number
10,860,916
Issue date
Dec 8, 2020
Cornell University
Amit Lal
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive RF MEMS intended for high-power applications
Patent number
10,770,640
Issue date
Sep 8, 2020
Thales
Afshin Ziaei
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electromechanical relay device
Patent number
10,727,016
Issue date
Jul 28, 2020
The University of Bristol
Sunil Rana
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Zero power plasmonic microelectromechanical device
Patent number
10,643,810
Issue date
May 5, 2020
Northeastern University
Matteo Rinaldi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrically controllable integrated switch
Patent number
10,510,503
Issue date
Dec 17, 2019
STMicroelectronics (Rousset) SAS
Christian Rivero
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrostatic actuator and switch
Patent number
10,457,543
Issue date
Oct 29, 2019
Sony Corporation
Shinya Morita
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Contact material for MEMS devices
Patent number
10,388,468
Issue date
Aug 20, 2019
Innovative Micro Technology
Suresh Sampath
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing an integrated circuit pointed element comprisi...
Patent number
10,379,254
Issue date
Aug 13, 2019
STMicroelectronics (Rousset) SAS
Abderrezak Marzaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS heater or emitter structure for fast heating and cooling cycles
Patent number
10,347,814
Issue date
Jul 9, 2019
Infineon Technologies AG
Christoph Glacer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator, shutter device, fluid control device, switch, and two-dim...
Patent number
10,340,818
Issue date
Jul 2, 2019
National University Corporation Shizuoka University
Masato Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Contact point structure, electronic device, and electronic apparatus
Patent number
10,301,172
Issue date
May 28, 2019
Sony Corporation
Mitsuo Hashimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vanishing via for hardware IP protection from reverse engineering
Patent number
10,283,459
Issue date
May 7, 2019
University of Florida Research Foundation, Incorporated
Swarup Bhunia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor structures provided within a cavity and related desig...
Patent number
10,227,230
Issue date
Mar 12, 2019
International Business Machines Corporation
Jeffrey C. Maling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Merged legs and semi-flexible anchoring having cantilevers for MEMS...
Patent number
10,224,164
Issue date
Mar 5, 2019
Cavendish Kinetics, Inc.
Robertus Petrus Van Kampen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Computation devices and artificial neurons based on nanoelectromech...
Patent number
10,217,045
Issue date
Feb 26, 2019
Cornell University
Amit Lal
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor structures provided within a cavity and related desig...
Patent number
10,081,534
Issue date
Sep 25, 2018
International Business Machines Corporation
Jeffrey C. Maling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electric equipment having movable portion, and its manufacture
Patent number
9,767,966
Issue date
Sep 19, 2017
Fujitsu Limited
Hiroaki Inoue
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrostatically driven MEMS device
Patent number
9,670,056
Issue date
Jun 6, 2017
STMicroelectronics S.r.l.
Roberto Carminati
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Variable capacitor and switch structures in single crystal piezoele...
Patent number
9,466,430
Issue date
Oct 11, 2016
Qorvo US, Inc.
Kushal Bhattacharjee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS SWITCH UTILIZING CONDUCTIVE BARRIER LAYER
Publication number
20240409397
Publication date
Dec 12, 2024
Menlo Microsystems, Inc.
Christopher F. Keimel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRAIN SENSOR SWITCH FOR TIMING BASED SENSING
Publication number
20240400375
Publication date
Dec 5, 2024
Carnegie Mellon University
Regan Kubicek
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SWITCH DEVICE AND ELECTRONIC APPARATUS
Publication number
20240279050
Publication date
Aug 22, 2024
BOE TECHNOLOGY GROUP CO., LTD.
Zibo CAO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
RADIO FREQUENCY MICRO-ELECTRO-MECHANICAL SWITCH AND RADIO FREQUENCY...
Publication number
20240186095
Publication date
Jun 6, 2024
Beijing BOE Technology Development Co., Ltd.
Yingli SHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SWITCH AND MANUFACTURE METHOD
Publication number
20240166496
Publication date
May 23, 2024
Beijing BOE Technology Development Co., Ltd.
Yingli SHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Distributed MEMS Switch Array Design with Multiple Input/Output Ports
Publication number
20230202831
Publication date
Jun 29, 2023
Menlo Microsystems, Inc.
Xu Zhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEMS (MEMS) SWITCH AND RELATED METHODS
Publication number
20220371882
Publication date
Nov 24, 2022
Analog Devices International Unlimited Company
Padraig Fitzgerald
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WATERPROOF MEMS BUTTON DEVICE, PACKAGE HOUSING THE BUTTON DEVICE, A...
Publication number
20220301789
Publication date
Sep 22, 2022
STMicroelectronics S.r.l.
Enri DUQI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THERMAL METAMATERIAL FOR LOW POWER MEMS THERMAL CONTROL
Publication number
20220276615
Publication date
Sep 1, 2022
Honeywell International Inc.
Robert Compton
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ELEMENT AND ELECTRICAL CIRCUIT
Publication number
20220238290
Publication date
Jul 28, 2022
Kabushiki Kaisha Toshiba
Hiroaki YAMAZAKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTIAXIAL STRAIN ENGINEERING OF DEFECT DOPED MATERIALS
Publication number
20220063986
Publication date
Mar 3, 2022
Massachusetts Institute of Technology
Subra Suresh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Full Symmetric Multi-Throw Switch Using Conformal Pinched Through Via
Publication number
20210403317
Publication date
Dec 30, 2021
Xu Zhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPUTATION DEVICES AND ARTIFICIAL NEURONS BASED ON NANOELECTROMECH...
Publication number
20210117756
Publication date
Apr 22, 2021
Cornell University
Amit Lal
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Full Symmetric Multi-Throw Switch Using Conformal Pinched Through Via
Publication number
20200270120
Publication date
Aug 27, 2020
Xu Zhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICES AND CIRCUITS INCLUDING SAME
Publication number
20200102213
Publication date
Apr 2, 2020
SOFANT TECHNOLOGIES LTD.
Nakul HARIDAS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Producing an Integrated Circuit Pointed Element Comprisi...
Publication number
20190310389
Publication date
Oct 10, 2019
STMicroelectronics (Rousset) SAS
Abderrezak Marzaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Heater or Emitter Structure for Fast Heating and Cooling Cycles
Publication number
20190237654
Publication date
Aug 1, 2019
INFINEON TECHNOLOGIES AG
Christoph Glacer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURES PROVIDED WITHIN A CAVITY AND RELATED DESIG...
Publication number
20190152768
Publication date
May 23, 2019
wiSpry, Inc.
Jeffrey C. Maling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROMECHANICAL RELAY DEVICE
Publication number
20190074152
Publication date
Mar 7, 2019
The University of Bristol
Sunil Rana
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURES PROVIDED WITHIN A CAVITY AND RELATED DESIG...
Publication number
20180319653
Publication date
Nov 8, 2018
wiSpry, Inc.
Jeffrey C. Maling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPUTATION DEVICES AND ARTIFICIAL NEURONS BASED ON NANOELECTROMECH...
Publication number
20180174021
Publication date
Jun 21, 2018
Cornell University
Amit Lal
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPUTATION DEVICES AND ARTIFICIAL NEURONS BASED ON NANOELECTROMECH...
Publication number
20180164432
Publication date
Jun 14, 2018
Cornell University
Amit Lal
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROSTATIC ACTUATOR AND SWITCH
Publication number
20170369303
Publication date
Dec 28, 2017
SONY CORPORATION
SHINYA MORITA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROMECHANICAL POWER SWITCH INTEGRATED CIRCUITS AND DEVICES AND...
Publication number
20170053764
Publication date
Feb 23, 2017
INOSO, LLC
Kiyoshi Mori
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Actuator, Shutter Device, Fluid Control Device, Switch, and Two-Dim...
Publication number
20160204716
Publication date
Jul 14, 2016
NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY
Masato SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS STRUCTURE WITH THICK MOVABLE MEMBRANE
Publication number
20160181041
Publication date
Jun 23, 2016
DELFMEMS SAS
Anne-Sophie Rollier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS STRUCTURE WITH MULTILAYER MEMBRANE
Publication number
20160181040
Publication date
Jun 23, 2016
DELFMEMS SAS
Renaud Robin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPUTATION DEVICES AND ARTIFICIAL NEURONS BASED ON NANOELECTROMECH...
Publication number
20140355381
Publication date
Dec 4, 2014
Cornell University
Amit Lal
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACTITIVE SWITCH, APPARATUS FOR TRANSCEIVING SIGNAL, AND MANUFACT...
Publication number
20140285252
Publication date
Sep 25, 2014
HUAWEI DEVICE CO., LTD.
Xiong Yang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MERGED LEGS AND SEMI-FLEXIBLE ANCHORING FOR MEMS DEVICE
Publication number
20140238828
Publication date
Aug 28, 2014
CAVENDISH KINETICS, INC.
Robertus Petrus Van Kampen
B81 - MICRO-STRUCTURAL TECHNOLOGY