Thermal properties

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B81C1/0069

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/0069Thermal properties

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Micromechanical component for a sensor device
- Patent number 12,252,394
- Issue date Mar 18, 2025
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system and process of making it
- Patent number 12,180,065
- Issue date Dec 31, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Euan James Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with compensation of residual voltage
- Patent number 12,174,215
- Issue date Dec 24, 2024
- Invensense, Inc.
- Giacomo Gafforelli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator with colocated temperature sensor
- Patent number 12,095,447
- Issue date Sep 17, 2024
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically driven comb structure of MEMS, micro-mirror using...
- Patent number 12,054,387
- Issue date Aug 6, 2024
- Tao Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and NEMS structures
- Patent number 12,006,209
- Issue date Jun 11, 2024
- OBSIDIAN SENSORS, INC.
- John Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,975,965
- Issue date May 7, 2024
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Packaging structure and method of MEMS pressure sensor
- Patent number 11,953,392
- Issue date Apr 9, 2024
- Wuxi Sencoch Semiconductor Co., Ltd.
- Tongqing Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer and method of fabric...
- Patent number 11,944,998
- Issue date Apr 2, 2024
- Korea Institute of Science and Technology
- Byung Chul Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical structure including a functional element sit...
- Patent number 11,939,215
- Issue date Mar 26, 2024
- Robert Bosch GmbH
- Penny Weir
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive microphone sensor design and fabrication method for achi...
- Patent number 11,902,741
- Issue date Feb 13, 2024
- Kathirgamasundaram Sooriakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro mechanical system and manufacturing method thereof
- Patent number 11,851,321
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Li Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing an optical microelectromechanical device...
- Patent number 11,787,685
- Issue date Oct 17, 2023
- STMicroelectronics S.r.l.
- Luca Seghizzi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and methods of forming thereof
- Patent number 11,767,217
- Issue date Sep 26, 2023
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- Ranganathan Nagarajan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator with co-located temperature sensor
- Patent number 11,770,112
- Issue date Sep 26, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,724,934
- Issue date Aug 15, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal compensation of lens assembly focus using image sensor shift
- Patent number 11,708,263
- Issue date Jul 25, 2023
- Faez Ba-Tis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite spring for robust piezoelectric sensing
- Patent number 11,634,317
- Issue date Apr 25, 2023
- Kionix, Inc.
- Andrew Hocking
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,584,642
- Issue date Feb 21, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity detection device, manufacturing method for physic...
- Patent number 11,555,702
- Issue date Jan 17, 2023
- Seiko Epson Corporation
- Ryuta Nishizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micro structure
- Patent number 11,548,779
- Issue date Jan 10, 2023
- Teknologian tutkimuskeskus VTT Oy
- Hannu Kattelus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMs membrane structure and method of fabricating same
- Patent number 11,530,129
- Issue date Dec 20, 2022
- Korea Advanced Institute of Science and Technology
- Boung Ju Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive microphone sensor design and fabrication method for achi...
- Patent number 11,523,224
- Issue date Dec 6, 2022
- Kathirgamasundaram Sooriakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices and methods of forming thereof
- Patent number 11,267,696
- Issue date Mar 8, 2022
- VANGUARD INIERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- Ranganathan Nagarajan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device
- Patent number 11,267,695
- Issue date Mar 8, 2022
- Cirrus Logic, Inc.
- James Thomas Deas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced switching voltage
- Patent number 10,941,036
- Issue date Mar 9, 2021
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Temperature-compensated micro-electromechanical device, and method...
- Patent number 10,894,713
- Issue date Jan 19, 2021
- STMicroelectronics S.r.l.
- Ernesto Lasalandra
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with compensation of residual voltage
- Patent number 10,877,063
- Issue date Dec 29, 2020
- Invensense, Inc.
- Giacomo Gafforelli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducers (CMUTs) and related...
- Patent number 10,850,306
- Issue date Dec 1, 2020
- Butterfly Network, Inc.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced switching voltage
- Patent number 10,836,632
- Issue date Nov 17, 2020
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS RESONATOR
- Publication number 20250128937
- Publication date Apr 24, 2025
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20250074764
- Publication date Mar 6, 2025
- Beijing BOE Technology Development Co., Ltd.
- Wenbo LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS AND NEMS STRUCTURES
- Publication number 20250042727
- Publication date Feb 6, 2025
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE
- Publication number 20250026631
- Publication date Jan 23, 2025
- Murata Manufacturing Co., Ltd.
- Hiroshi MATSUBARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME
- Publication number 20240425360
- Publication date Dec 26, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
- Publication number 20240425365
- Publication date Dec 26, 2024
- SENSONICS TRANSDUCERS PRIVATE LIMITED
- Brishbhan Singh PANWAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical Devices For Higher Order Passive Temperature...
- Publication number 20240294372
- Publication date Sep 5, 2024
- Stathera IP Holdings Inc.
- Anosh Daruwalla
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...
- Publication number 20240270568
- Publication date Aug 15, 2024
- XI'AN CHISHINE OPTOELECTRONICS TECHNOLOGY CO., LTD
- Tao YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...
- Publication number 20240137711
- Publication date Apr 25, 2024
- Innogrity Pte Ltd
- KATHIRGAMASUNDARAM SOORIAKUMAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Packaging Structure and Method of MEMS Pressure Sensor
- Publication number 20240094079
- Publication date Mar 21, 2024
- Wuxi Sencoch Semiconductor Co., Ltd.
- Tongqing Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20240083742
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Li YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant
- Publication number 20240056054
- Publication date Feb 15, 2024
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING AN OPTICAL MICROELECTROMECHANICAL DEVICE...
- Publication number 20240043263
- Publication date Feb 8, 2024
- STMicroelectronics S.r.l
- Luca SEGHIZZI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR
- Publication number 20230416081
- Publication date Dec 28, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHA...
- Publication number 20230242393
- Publication date Aug 3, 2023
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR
- Publication number 20230183060
- Publication date Jun 15, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...
- Publication number 20230054811
- Publication date Feb 23, 2023
- Innogrity Pte Ltd
- KATHIRGAMASUNDARAM SOORIAKUMAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM AND PROCESS OF MAKING IT
- Publication number 20220306455
- Publication date Sep 29, 2022
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Euan James Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20220274827
- Publication date Sep 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ting-Li YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE
- Publication number 20220250901
- Publication date Aug 11, 2022
- ROBERT BOSCH GmbH
- Jochen REINMUTH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES AND METHODS OF FORMING THEREOF
- Publication number 20220144625
- Publication date May 12, 2022
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- Ranganathan NAGARAJAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THERMAL COMPENSATION OF LENS ASSEMBLY FOCUS USING IMAGE SENSOR SHIFT
- Publication number 20210354979
- Publication date Nov 18, 2021
- Sheba Microsystems Inc.
- Faez BA-TIS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...
- Publication number 20210266679
- Publication date Aug 26, 2021
- INNOGRITY PTE LTD
- KATHIRGAMASUNDARAM SOORIAKUMAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL STRUCTURE INCLUDING A FUNCTIONAL ELEMENT SIT...
- Publication number 20210229986
- Publication date Jul 29, 2021
- ROBERT BOSCH GmbH
- Penny Weir
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING AN OPTICAL MICROELECTROMECHANICAL DEVICE...
- Publication number 20210188620
- Publication date Jun 24, 2021
- STMicroelectronics S.r.l
- Luca SEGHIZZI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES AND METHODS OF FORMING THEREOF
- Publication number 20210130162
- Publication date May 6, 2021
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- Ranganathan NAGARAJAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Mems sensor with compensation of residual voltage
- Publication number 20210102970
- Publication date Apr 8, 2021
- InvenSense, Inc.
- Giacomo Gafforelli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS AND NEMS STRUCTURES
- Publication number 20200407219
- Publication date Dec 31, 2020
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRIC...
- Publication number 20200298275
- Publication date Sep 24, 2020
- Korea Institute of Science and Technology
- Byung Chul LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICRO STRUCTURE
- Publication number 20200180943
- Publication date Jun 11, 2020
- Teknologian Tutkimuskeskus VTT Oy
- Hannu KATTELUS
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Thermal properties

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micromechanical component for a sensor device

Microelectromechanical system and process of making it

MEMS sensor with compensation of residual voltage

MEMS resonator with colocated temperature sensor

Electrostatically driven comb structure of MEMS, micro-mirror using...

MEMS and NEMS structures

MEMS resonator

Packaging structure and method of MEMS pressure sensor

Capacitive micromachined ultrasonic transducer and method of fabric...

Microelectromechanical structure including a functional element sit...

Capacitive microphone sensor design and fabrication method for achi...

Micro-electro mechanical system and manufacturing method thereof

Process for manufacturing an optical microelectromechanical device...

MEMS devices and methods of forming thereof

MEMS resonator with co-located temperature sensor

MEMS resonator

Thermal compensation of lens assembly focus using image sensor shift

Composite spring for robust piezoelectric sensing

MEMS resonator

Physical quantity detection device, manufacturing method for physic...

Capacitive micro structure

MEMs membrane structure and method of fabricating same

Capacitive microphone sensor design and fabrication method for achi...

MEMS devices and methods of forming thereof

MEMS device

Method of manufacturing MEMS switches with reduced switching voltage

Temperature-compensated micro-electromechanical device, and method...

MEMS sensor with compensation of residual voltage

Capacitive micromachined ultrasonic transducers (CMUTs) and related...

Method of manufacturing MEMS switches with reduced switching voltage

Patents Applicationslast 30 patents

MEMS RESONATOR

MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

MEMS AND NEMS STRUCTURES

MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE

MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...

Microelectromechanical Devices For Higher Order Passive Temperature...

ELECTROSTATICALLY DRIVEN COMB STRUCTURE OF MEMS, MICRO-MIRROR USING...

CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...

Packaging Structure and Method of MEMS Pressure Sensor

MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant

PROCESS FOR MANUFACTURING AN OPTICAL MICROELECTROMECHANICAL DEVICE...

MEMS RESONATOR

MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHA...

MEMS RESONATOR

CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...

MICROELECTROMECHANICAL SYSTEM AND PROCESS OF MAKING IT

MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE

MEMS DEVICES AND METHODS OF FORMING THEREOF

THERMAL COMPENSATION OF LENS ASSEMBLY FOCUS USING IMAGE SENSOR SHIFT

CAPACITIVE MICROPHONE SENSOR DESIGN AND FABRICATION METHOD FOR ACHI...

MICROELECTROMECHANICAL STRUCTURE INCLUDING A FUNCTIONAL ELEMENT SIT...

PROCESS FOR MANUFACTURING AN OPTICAL MICROELECTROMECHANICAL DEVICE...

MEMS DEVICES AND METHODS OF FORMING THEREOF

Mems sensor with compensation of residual voltage

MEMS AND NEMS STRUCTURES

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRIC...

CAPACITIVE MICRO STRUCTURE