Thermal treatment for structural rearrangement of substrate atoms

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B81C2201/0116

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0116Thermal treatment for structural rearrangement of substrate atoms

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS microphone and preparation method therefor
- Patent number 12,022,270
- Issue date Jun 25, 2024
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Jiale Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) thermal sensor
- Patent number 11,796,396
- Issue date Oct 24, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated micro-electromechanical device of semiconductor material...
- Patent number 11,724,932
- Issue date Aug 15, 2023
- STMicroelectronics S.r.l.
- Alberto Pagani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical electroacoustic transducer with piezoelectri...
- Patent number 11,418,888
- Issue date Aug 16, 2022
- STMicroelectronics S.r.l.
- Fabrizio Cerini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for transferring a useful layer into a supporting substrate
- Patent number 11,401,162
- Issue date Aug 2, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Lamine Benaissa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a MEMS micromirror device, and associated...
- Patent number 11,294,168
- Issue date Apr 5, 2022
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system (MEMS) thermal sensor
- Patent number 10,962,424
- Issue date Mar 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a reflection-reducing layer system
- Patent number 10,782,451
- Issue date Sep 22, 2020
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Ulrike Schulz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a MEMS micromirror device, and associated...
- Patent number 10,768,408
- Issue date Sep 8, 2020
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device and manufacturing process thereof
- Patent number 10,626,008
- Issue date Apr 21, 2020
- STMicroelectronics S.r.l.
- Lorenzo Baldo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Forming a microelectromechanical systems (MEMS) device using silico...
- Patent number 10,604,405
- Issue date Mar 31, 2020
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-device manufacturing method, MEMS device, and MEMS module
- Patent number 10,597,288
- Issue date Mar 24, 2020
- Rohm Co., Ltd.
- Masahiro Sakuragi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a MEMS pressure sensor, and corresponding...
- Patent number 10,578,505
- Issue date Mar 3, 2020
- STMicroelectronics S.r.l.
- Lorenzo Baldo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for fabricating a micromechanical structure made of silicon...
- Patent number 10,472,230
- Issue date Nov 12, 2019
- Centre National de la Recherche Scientifique (Cnrs)
- Daniel Alquier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated micro-electromechanical device of semiconductor material...
- Patent number 10,364,143
- Issue date Jul 30, 2019
- STMicroelectronics S.r.l.
- Alberto Pagani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon on nothing devices and methods of formation thereof
- Patent number 10,354,911
- Issue date Jul 16, 2019
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device and manufacturing process thereof
- Patent number 10,150,666
- Issue date Dec 11, 2018
- STMicroelectronics S.r.l.
- Lorenzo Baldo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Combined laser drilling and the plasma etch method for the producti...
- Patent number 10,017,380
- Issue date Jul 10, 2018
- Robert Bosch GmbH
- Jan-Peter Stadler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon on nothing devices and methods of formation thereof
- Patent number 9,711,393
- Issue date Jul 18, 2017
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon on nothing devices and methods of formation thereof
- Patent number 9,136,328
- Issue date Sep 15, 2015
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor manufacturing and semiconductor device with semicondu...
- Patent number 8,921,974
- Issue date Dec 30, 2014
- Infineon Technologies AG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deposition-free sealing for micro- and nano-fabrication
- Patent number 8,735,286
- Issue date May 27, 2014
- The Board of Trustees of the Leland Stanford Junior University
- Rishi Kant
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Oxide microchannel with controllable diameter
- Patent number 8,716,050
- Issue date May 6, 2014
- The Hong Kong University of Science and Technology
- Man Wong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor manufacturing and semiconductor device with semicondu...
- Patent number 8,481,400
- Issue date Jul 9, 2013
- Infineon Technologies AG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of a gas sensor integrated on a semiconductor...
- Patent number 8,101,448
- Issue date Jan 24, 2012
- STMicroelectronics S.r.l.
- Crocifisso Marco Antonio Renna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical semiconductor sensor
- Patent number 7,843,025
- Issue date Nov 30, 2010
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for a semiconductor substrate comprising at le...
- Patent number 7,585,743
- Issue date Sep 8, 2009
- STMicroelectronics S.r.l.
- Crocifisso Marco Antonio Renna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical sensor element
- Patent number 7,572,661
- Issue date Aug 11, 2009
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a membrane sensor
- Patent number 7,494,839
- Issue date Feb 24, 2009
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for a semiconductor substrate comprising at le...
- Patent number 7,193,256
- Issue date Mar 20, 2007
- STMicroelectronics S.r.l.
- Crocifisso Marco Antonio Renna
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT
- Publication number 20240182298
- Publication date Jun 6, 2024
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-Electro-Mechanical System (Mems) Thermal Sensor
- Publication number 20230375416
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND PREPARATION METHOD THEREFOR
- Publication number 20220386052
- Publication date Dec 1, 2022
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Jiale SU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYTEM (MEMS) THERMAL SENSOR
- Publication number 20210215550
- Publication date Jul 15, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANNEALING DEVICES INCLUDING THERMAL HEATERS
- Publication number 20210193488
- Publication date Jun 24, 2021
- Hewlett-Packard Development Company, L.P.
- Robert IONESCU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MEMS MICROMIRROR DEVICE, AND ASSOCIATED...
- Publication number 20200363629
- Publication date Nov 19, 2020
- STMicroelectronics S.r.l
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL ELECTROACOUSTIC TRANSDUCER WITH PIEZOELECTRI...
- Publication number 20200236470
- Publication date Jul 23, 2020
- STMicroelectronics S.r.l
- Fabrizio CERINI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) THERMAL SENSOR
- Publication number 20200103290
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE AND MANUFACTURING PROCESS THEREOF
- Publication number 20200024132
- Publication date Jan 23, 2020
- STMicroelectronics S.r.l.
- Lorenzo Baldo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated Micro-Electromechanical Device of Semiconductor Material...
- Publication number 20190292045
- Publication date Sep 26, 2019
- STMicroelectronics S.r.l.
- Alberto Pagani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE
- Publication number 20190233280
- Publication date Aug 1, 2019
- Shenyang Silicon Technology Co., Ltd.
- Xiang LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR TRANSFERRING A USEFUL LAYER INTO A SUPPORTING SUBSTRATE
- Publication number 20190202688
- Publication date Jul 4, 2019
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Lamine BENAISSA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FABRICATING A MICROMECHANICAL STRUCTURE MADE OF SILICON...
- Publication number 20190152772
- Publication date May 23, 2019
- Centre National de la Recherche Scientifique (CNRS)
- Daniel ALQUIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS-DEVICE MANUFACTURING METHOD, MEMS DEVICE, AND MEMS MODULE
- Publication number 20180346322
- Publication date Dec 6, 2018
- Rohm Co., Ltd.
- Masahiro SAKURAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MEMS PRESSURE SENSOR, AND CORRESPONDING...
- Publication number 20180299337
- Publication date Oct 18, 2018
- STMicroelectronics S.r.l.
- Lorenzo BALDO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR A MICROMECHANICAL DEVICE INCLUDING AN INCL...
- Publication number 20180065845
- Publication date Mar 8, 2018
- ROBERT BOSCH GmbH
- Benjamin Steuer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Silicon on Nothing Devices and Methods of Formation Thereof
- Publication number 20170287772
- Publication date Oct 5, 2017
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING RESISTIVE ELEMENT, METHOD FOR MANUFACTURIN...
- Publication number 20160347604
- Publication date Dec 1, 2016
- SEIKO EPSON CORPORATION
- Hiroyuki SHIMADA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Silicon on Nothing Devices and Methods of Formation Thereof
- Publication number 20140097521
- Publication date Apr 10, 2014
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Manufacturing and Semiconductor Device with semicondu...
- Publication number 20130328143
- Publication date Dec 12, 2013
- Infeon Technologies AG
- Thoralf KAUTZSCH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OXIDE MICROCHANNEL WITH CONTROLLABLE DIAMETER
- Publication number 20130221495
- Publication date Aug 29, 2013
- THE HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Man WONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Deposition-free sealing for Micro- and Nano-fabrication
- Publication number 20120104589
- Publication date May 3, 2012
- The Board of Trustees of the Leland Stanford Junior University
- Rishi Kant
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Manufacturing and Semiconductor Device with semicondu...
- Publication number 20120068277
- Publication date Mar 22, 2012
- Thoralf KAUTZSCH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUSPENDED MONO-CRYSTALLINE STRUCTURE AND METHOD OF FABRICATION FROM...
- Publication number 20100187572
- Publication date Jul 29, 2010
- Hans S. Cho
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF A GAS SENSOR INTEGRATED ON A SEMICONDUCTOR...
- Publication number 20090243003
- Publication date Oct 1, 2009
- STMicroelectronics S.r.l.
- Crocifisso Marco Antonio Renna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT, AS WELL AS A SE...
- Publication number 20090127640
- Publication date May 21, 2009
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Manufacturing method for a semiconductor substrate comprising at le...
- Publication number 20070181920
- Publication date Aug 9, 2007
- STMicroelectronics, S.r.l.
- Crocifisso Marco Antonio Renna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical sensor element
- Publication number 20060063293
- Publication date Mar 23, 2006
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a semiconductor component, as well as a se...
- Publication number 20050181529
- Publication date Aug 18, 2005
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Manufacturing method for a semiconductor substrate comprising at le...
- Publication number 20040248349
- Publication date Dec 9, 2004
- STMicroelectronics S.r.l.
- Crocifisso Marco Antonio Renna
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Thermal treatment for structural rearrangement of substrate atoms

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS microphone and preparation method therefor

Micro-electro-mechanical system (MEMS) thermal sensor

Integrated micro-electromechanical device of semiconductor material...

Microelectromechanical electroacoustic transducer with piezoelectri...

Method for transferring a useful layer into a supporting substrate

Process for manufacturing a MEMS micromirror device, and associated...

Micro-electro-mechanical system (MEMS) thermal sensor

Method for producing a reflection-reducing layer system

Process for manufacturing a MEMS micromirror device, and associated...

Micro-electro-mechanical device and manufacturing process thereof

Forming a microelectromechanical systems (MEMS) device using silico...

MEMS-device manufacturing method, MEMS device, and MEMS module

Process for manufacturing a MEMS pressure sensor, and corresponding...

Process for fabricating a micromechanical structure made of silicon...

Integrated micro-electromechanical device of semiconductor material...

Silicon on nothing devices and methods of formation thereof

Micro-electro-mechanical device and manufacturing process thereof

Combined laser drilling and the plasma etch method for the producti...

Silicon on nothing devices and methods of formation thereof

Silicon on nothing devices and methods of formation thereof

Semiconductor manufacturing and semiconductor device with semicondu...

Deposition-free sealing for micro- and nano-fabrication

Oxide microchannel with controllable diameter

Semiconductor manufacturing and semiconductor device with semicondu...

Manufacturing method of a gas sensor integrated on a semiconductor...

Micromechanical semiconductor sensor

Manufacturing method for a semiconductor substrate comprising at le...

Method for manufacturing a micromechanical sensor element

Method for manufacturing a membrane sensor

Manufacturing method for a semiconductor substrate comprising at le...

Patents Applicationslast 30 patents

METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT

Micro-Electro-Mechanical System (Mems) Thermal Sensor

MEMS MICROPHONE AND PREPARATION METHOD THEREFOR

MICRO-ELECTRO-MECHANICAL SYTEM (MEMS) THERMAL SENSOR

ANNEALING DEVICES INCLUDING THERMAL HEATERS

PROCESS FOR MANUFACTURING A MEMS MICROMIRROR DEVICE, AND ASSOCIATED...

MICROELECTROMECHANICAL ELECTROACOUSTIC TRANSDUCER WITH PIEZOELECTRI...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) THERMAL SENSOR

MICRO-ELECTRO-MECHANICAL DEVICE AND MANUFACTURING PROCESS THEREOF

Integrated Micro-Electromechanical Device of Semiconductor Material...

METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE

METHOD FOR TRANSFERRING A USEFUL LAYER INTO A SUPPORTING SUBSTRATE

PROCESS FOR FABRICATING A MICROMECHANICAL STRUCTURE MADE OF SILICON...

MEMS-DEVICE MANUFACTURING METHOD, MEMS DEVICE, AND MEMS MODULE

PROCESS FOR MANUFACTURING A MEMS PRESSURE SENSOR, AND CORRESPONDING...

MANUFACTURING METHOD FOR A MICROMECHANICAL DEVICE INCLUDING AN INCL...

Silicon on Nothing Devices and Methods of Formation Thereof

METHOD FOR MANUFACTURING RESISTIVE ELEMENT, METHOD FOR MANUFACTURIN...

Silicon on Nothing Devices and Methods of Formation Thereof

Semiconductor Manufacturing and Semiconductor Device with semicondu...

OXIDE MICROCHANNEL WITH CONTROLLABLE DIAMETER

Deposition-free sealing for Micro- and Nano-fabrication

Semiconductor Manufacturing and Semiconductor Device with semicondu...

SUSPENDED MONO-CRYSTALLINE STRUCTURE AND METHOD OF FABRICATION FROM...

MANUFACTURING METHOD OF A GAS SENSOR INTEGRATED ON A SEMICONDUCTOR...

METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT, AS WELL AS A SE...

Manufacturing method for a semiconductor substrate comprising at le...

Micromechanical sensor element

Method for manufacturing a semiconductor component, as well as a se...

Manufacturing method for a semiconductor substrate comprising at le...