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Thermal treatment for structural rearrangement of substrate atoms
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B81C2201/0116
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Micro-structural technology
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PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Manufacture or treatment of micro-structural devices or systems
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B81C2201/0116
Thermal treatment for structural rearrangement of substrate atoms
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Micro-electro-mechanical system (MEMS) thermal sensor
Patent number
11,796,396
Issue date
Oct 24, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Tsai-Hao Hung
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Integrated micro-electromechanical device of semiconductor material...
Patent number
11,724,932
Issue date
Aug 15, 2023
STMicroelectronics S.r.l.
Alberto Pagani
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Microelectromechanical electroacoustic transducer with piezoelectri...
Patent number
11,418,888
Issue date
Aug 16, 2022
STMicroelectronics S.r.l.
Fabrizio Cerini
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Method for transferring a useful layer into a supporting substrate
Patent number
11,401,162
Issue date
Aug 2, 2022
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Lamine Benaissa
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Process for manufacturing a MEMS micromirror device, and associated...
Patent number
11,294,168
Issue date
Apr 5, 2022
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Micro-electro-mechanical system (MEMS) thermal sensor
Patent number
10,962,424
Issue date
Mar 30, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsai-Hao Hung
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Method for producing a reflection-reducing layer system
Patent number
10,782,451
Issue date
Sep 22, 2020
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
Ulrike Schulz
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Process for manufacturing a MEMS micromirror device, and associated...
Patent number
10,768,408
Issue date
Sep 8, 2020
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Micro-electro-mechanical device and manufacturing process thereof
Patent number
10,626,008
Issue date
Apr 21, 2020
STMicroelectronics S.r.l.
Lorenzo Baldo
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Forming a microelectromechanical systems (MEMS) device using silico...
Patent number
10,604,405
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Mar 31, 2020
Infineon Technologies Dresden GmbH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS-device manufacturing method, MEMS device, and MEMS module
Patent number
10,597,288
Issue date
Mar 24, 2020
Rohm Co., Ltd.
Masahiro Sakuragi
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Process for manufacturing a MEMS pressure sensor, and corresponding...
Patent number
10,578,505
Issue date
Mar 3, 2020
STMicroelectronics S.r.l.
Lorenzo Baldo
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Process for fabricating a micromechanical structure made of silicon...
Patent number
10,472,230
Issue date
Nov 12, 2019
Centre National de la Recherche Scientifique (Cnrs)
Daniel Alquier
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Integrated micro-electromechanical device of semiconductor material...
Patent number
10,364,143
Issue date
Jul 30, 2019
STMicroelectronics S.r.l.
Alberto Pagani
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Silicon on nothing devices and methods of formation thereof
Patent number
10,354,911
Issue date
Jul 16, 2019
Infineon Technologies Dresden GmbH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Micro-electro-mechanical device and manufacturing process thereof
Patent number
10,150,666
Issue date
Dec 11, 2018
STMicroelectronics S.r.l.
Lorenzo Baldo
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Combined laser drilling and the plasma etch method for the producti...
Patent number
10,017,380
Issue date
Jul 10, 2018
Robert Bosch GmbH
Jan-Peter Stadler
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Silicon on nothing devices and methods of formation thereof
Patent number
9,711,393
Issue date
Jul 18, 2017
Infineon Technologies Dresden GmbH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Silicon on nothing devices and methods of formation thereof
Patent number
9,136,328
Issue date
Sep 15, 2015
Infineon Technologies Dresden GmbH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Semiconductor manufacturing and semiconductor device with semicondu...
Patent number
8,921,974
Issue date
Dec 30, 2014
Infineon Technologies AG
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Deposition-free sealing for micro- and nano-fabrication
Patent number
8,735,286
Issue date
May 27, 2014
The Board of Trustees of the Leland Stanford Junior University
Rishi Kant
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Oxide microchannel with controllable diameter
Patent number
8,716,050
Issue date
May 6, 2014
The Hong Kong University of Science and Technology
Man Wong
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Semiconductor manufacturing and semiconductor device with semicondu...
Patent number
8,481,400
Issue date
Jul 9, 2013
Infineon Technologies AG
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Manufacturing method of a gas sensor integrated on a semiconductor...
Patent number
8,101,448
Issue date
Jan 24, 2012
STMicroelectronics S.r.l.
Crocifisso Marco Antonio Renna
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Micromechanical semiconductor sensor
Patent number
7,843,025
Issue date
Nov 30, 2010
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Manufacturing method for a semiconductor substrate comprising at le...
Patent number
7,585,743
Issue date
Sep 8, 2009
STMicroelectronics S.r.l.
Crocifisso Marco Antonio Renna
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Method for manufacturing a micromechanical sensor element
Patent number
7,572,661
Issue date
Aug 11, 2009
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Method for manufacturing a membrane sensor
Patent number
7,494,839
Issue date
Feb 24, 2009
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Manufacturing method for a semiconductor substrate comprising at le...
Patent number
7,193,256
Issue date
Mar 20, 2007
STMicroelectronics S.r.l.
Crocifisso Marco Antonio Renna
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Method for producing micromechanic sensors and sensors produced by...
Patent number
7,045,382
Issue date
May 16, 2006
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Micro-Electro-Mechanical System (Mems) Thermal Sensor
Publication number
20230375416
Publication date
Nov 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsai-Hao HUNG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND PREPARATION METHOD THEREFOR
Publication number
20220386052
Publication date
Dec 1, 2022
CSMC TECHNOLOGIES FAB2 CO., LTD.
Jiale SU
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MICRO-ELECTRO-MECHANICAL SYTEM (MEMS) THERMAL SENSOR
Publication number
20210215550
Publication date
Jul 15, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsai-Hao HUNG
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
ANNEALING DEVICES INCLUDING THERMAL HEATERS
Publication number
20210193488
Publication date
Jun 24, 2021
Hewlett-Packard Development Company, L.P.
Robert IONESCU
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
PROCESS FOR MANUFACTURING A MEMS MICROMIRROR DEVICE, AND ASSOCIATED...
Publication number
20200363629
Publication date
Nov 19, 2020
STMicroelectronics S.r.l
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MICROELECTROMECHANICAL ELECTROACOUSTIC TRANSDUCER WITH PIEZOELECTRI...
Publication number
20200236470
Publication date
Jul 23, 2020
STMicroelectronics S.r.l
Fabrizio CERINI
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) THERMAL SENSOR
Publication number
20200103290
Publication date
Apr 2, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsai-Hao HUNG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE AND MANUFACTURING PROCESS THEREOF
Publication number
20200024132
Publication date
Jan 23, 2020
STMicroelectronics S.r.l.
Lorenzo Baldo
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
Integrated Micro-Electromechanical Device of Semiconductor Material...
Publication number
20190292045
Publication date
Sep 26, 2019
STMicroelectronics S.r.l.
Alberto Pagani
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE
Publication number
20190233280
Publication date
Aug 1, 2019
Shenyang Silicon Technology Co., Ltd.
Xiang LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
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METHOD FOR TRANSFERRING A USEFUL LAYER INTO A SUPPORTING SUBSTRATE
Publication number
20190202688
Publication date
Jul 4, 2019
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Lamine BENAISSA
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
PROCESS FOR FABRICATING A MICROMECHANICAL STRUCTURE MADE OF SILICON...
Publication number
20190152772
Publication date
May 23, 2019
Centre National de la Recherche Scientifique (CNRS)
Daniel ALQUIER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS-DEVICE MANUFACTURING METHOD, MEMS DEVICE, AND MEMS MODULE
Publication number
20180346322
Publication date
Dec 6, 2018
Rohm Co., Ltd.
Masahiro SAKURAGI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A MEMS PRESSURE SENSOR, AND CORRESPONDING...
Publication number
20180299337
Publication date
Oct 18, 2018
STMicroelectronics S.r.l.
Lorenzo BALDO
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MANUFACTURING METHOD FOR A MICROMECHANICAL DEVICE INCLUDING AN INCL...
Publication number
20180065845
Publication date
Mar 8, 2018
ROBERT BOSCH GmbH
Benjamin Steuer
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
Silicon on Nothing Devices and Methods of Formation Thereof
Publication number
20170287772
Publication date
Oct 5, 2017
INFINEON TECHNOLOGIES DRESDEN GMBH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
METHOD FOR MANUFACTURING RESISTIVE ELEMENT, METHOD FOR MANUFACTURIN...
Publication number
20160347604
Publication date
Dec 1, 2016
SEIKO EPSON CORPORATION
Hiroyuki SHIMADA
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
Silicon on Nothing Devices and Methods of Formation Thereof
Publication number
20140097521
Publication date
Apr 10, 2014
INFINEON TECHNOLOGIES DRESDEN GMBH
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor Manufacturing and Semiconductor Device with semicondu...
Publication number
20130328143
Publication date
Dec 12, 2013
Infeon Technologies AG
Thoralf KAUTZSCH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OXIDE MICROCHANNEL WITH CONTROLLABLE DIAMETER
Publication number
20130221495
Publication date
Aug 29, 2013
THE HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
Man WONG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Deposition-free sealing for Micro- and Nano-fabrication
Publication number
20120104589
Publication date
May 3, 2012
The Board of Trustees of the Leland Stanford Junior University
Rishi Kant
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor Manufacturing and Semiconductor Device with semicondu...
Publication number
20120068277
Publication date
Mar 22, 2012
Thoralf KAUTZSCH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SUSPENDED MONO-CRYSTALLINE STRUCTURE AND METHOD OF FABRICATION FROM...
Publication number
20100187572
Publication date
Jul 29, 2010
Hans S. Cho
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
MANUFACTURING METHOD OF A GAS SENSOR INTEGRATED ON A SEMICONDUCTOR...
Publication number
20090243003
Publication date
Oct 1, 2009
STMicroelectronics S.r.l.
Crocifisso Marco Antonio Renna
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR COMPONENT, AS WELL AS A SE...
Publication number
20090127640
Publication date
May 21, 2009
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Application
Manufacturing method for a semiconductor substrate comprising at le...
Publication number
20070181920
Publication date
Aug 9, 2007
STMicroelectronics, S.r.l.
Crocifisso Marco Antonio Renna
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micromechanical sensor element
Publication number
20060063293
Publication date
Mar 23, 2006
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for manufacturing a semiconductor component, as well as a se...
Publication number
20050181529
Publication date
Aug 18, 2005
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Manufacturing method for a semiconductor substrate comprising at le...
Publication number
20040248349
Publication date
Dec 9, 2004
STMicroelectronics S.r.l.
Crocifisso Marco Antonio Renna
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for producing micromechanic sensors and sensors produced by...
Publication number
20040152228
Publication date
Aug 5, 2004
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY