Translation according to an axis parallel to the substrate

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/051Translation according to an axis parallel to the substrate

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Patents Grantslast 30 patents

Information Patent Grant
Optoelectronic component comprising, on a single substrate, an opti...
- Patent number 12,219,878
- Issue date Feb 4, 2025
- Thales
- François Duport
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure, micromechanical system and method of pro...
- Patent number 12,151,935
- Issue date Nov 26, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiaxial strain engineering of defect doped materials
- Patent number 12,077,428
- Issue date Sep 3, 2024
- Massachusetts Institute of Technology
- Subra Suresh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and method of providing the same
- Patent number 12,071,338
- Issue date Aug 27, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual-layer micro-ribbon MEMS light modulator
- Patent number 11,958,738
- Issue date Apr 16, 2024
- Silicon Light Machines Corporation
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system package having movable platform
- Patent number 11,643,325
- Issue date May 9, 2023
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Switchable displays with movable pixel units
- Patent number 11,475,805
- Issue date Oct 18, 2022
- Hewlett-Packard Development Company, L.P.
- Kuan-Ting Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package having a movable sensor
- Patent number 11,465,901
- Issue date Oct 11, 2022
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexure guidance system
- Patent number 11,454,992
- Issue date Sep 27, 2022
- Meta Platforms Technologies, LLC
- Clinton Smith
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor device and method of fabrication
- Patent number 11,383,973
- Issue date Jul 12, 2022
- NXP USA, INC.
- Peng Shao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanical connection for a MEMS and NEMS device for measuring a va...
- Patent number 11,337,016
- Issue date May 17, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Loïc Joet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microdevice comprising at least two movable elements
- Patent number 11,312,618
- Issue date Apr 26, 2022
- COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES SAFRAN
- Audrey Berthelot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method of manufacturing the same
- Patent number 11,186,478
- Issue date Nov 30, 2021
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Sergiu Langa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device, method for manufacturing a microelec...
- Patent number 11,078,072
- Issue date Aug 3, 2021
- Infineon Technologies Dresden GmbH & Co. KG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical and/or nanoelectromechanical device offering...
- Patent number 11,008,213
- Issue date May 18, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Helene Lhermet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package having a movable sensor
- Patent number 10,858,238
- Issue date Dec 8, 2020
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for transmitting a movement and a force between two zones th...
- Patent number 10,807,858
- Issue date Oct 20, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Loic Joet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical displacement structure and method for contro...
- Patent number 10,752,492
- Issue date Aug 25, 2020
- Agiltron, Inc.
- Luzhong Yin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical displacement structure and method for contro...
- Patent number 10,730,740
- Issue date Aug 4, 2020
- Agiltron, Inc.
- Luzhong Yin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor assembly and arrangement and method for manufacturing a sens...
- Patent number 10,723,615
- Issue date Jul 28, 2020
- Sciosense B.V.
- Harald Etschmaier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor
- Patent number 10,710,869
- Issue date Jul 14, 2020
- Robert Bosch GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device, method for manufacturing a microelec...
- Patent number 10,683,203
- Issue date Jun 16, 2020
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, electronic device, and mobile body
- Patent number 10,656,174
- Issue date May 19, 2020
- Seiko Epson Corporation
- Shota Kigure
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure for an acceleration sensor
- Patent number 10,656,173
- Issue date May 19, 2020
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication process for a symmetrical MEMS accelerometer
- Patent number 10,647,570
- Issue date May 12, 2020
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-axis accelerometers with reduced cross-axis sensitivity
- Patent number 10,634,696
- Issue date Apr 28, 2020
- Khalifa University of Science and Technology
- Zakriya Mohammed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package having a movable sensor
- Patent number 10,589,982
- Issue date Mar 17, 2020
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Miniature kinetic energy harvester for generating electrical energy...
- Patent number 10,581,344
- Issue date Mar 3, 2020
- Chambre de Commerce et D'Industrie de Region Paris Ile de France
- Francesco Cottone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuation systems and methods
- Patent number 10,523,135
- Issue date Dec 31, 2019
- MEMS DRIVE, INC.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer for interacting with a volume flow of a fluid and m...
- Patent number 10,457,544
- Issue date Oct 29, 2019
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Harald Schenk
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
COUPLING DEVICE FOR COUPLING VIBRATION SYSTEMS
- Publication number 20250066185
- Publication date Feb 27, 2025
- NORTHROP GRUMMAN LITEF GMBH
- Jan Daniel RENDE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS
- Publication number 20250042718
- Publication date Feb 6, 2025
- STMicroelectronics International N.V.
- Manuel RIANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual-Layer Micro-ribbon MEMS Light Modulator
- Publication number 20250026633
- Publication date Jan 23, 2025
- SILICON LIGHT MACHINES CORPORATION
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION
- Publication number 20240400380
- Publication date Dec 5, 2024
- STMicroelectronics International N.V.
- Patrick FEDELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR
- Publication number 20240327198
- Publication date Oct 3, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
- Publication number 20240300805
- Publication date Sep 12, 2024
- Murata Manufacturing Co., Ltd.
- Ville-Pekka RYTKÖNEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE
- Publication number 20230339742
- Publication date Oct 26, 2023
- Fortemedia, Inc.
- Jien-Ming CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, NEARFIELD LOUDSPEAKER, HEARABLE, MEMS PUMP, LOUDSPEAKE...
- Publication number 20230212002
- Publication date Jul 6, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Anton MELNIKOV
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Dual-Layer Micro-ribbon MEMS Light Modulator
- Publication number 20230022807
- Publication date Jan 26, 2023
- SILICON LIGHT MACHINES CORPORATION
- Olav Solgaard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE
- Publication number 20230016038
- Publication date Jan 19, 2023
- Rohm Co., Ltd.
- Toru HIGUCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTOELECTRONIC COMPONENT COMPRISING, ON A SINGLE SUBSTRATE, AN OPTI...
- Publication number 20230019436
- Publication date Jan 19, 2023
- THALES
- François DUPORT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PACKAGE HAVING MOVABLE PLATFORM
- Publication number 20230002214
- Publication date Jan 5, 2023
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTIAXIAL STRAIN ENGINEERING OF DEFECT DOPED MATERIALS
- Publication number 20220063986
- Publication date Mar 3, 2022
- Massachusetts Institute of Technology
- Subra Suresh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS HAVING A LARGE FLUIDICALLY EFFECTIVE SURFACE
- Publication number 20220002143
- Publication date Jan 6, 2022
- Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Sergiu LANGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL STRUCTURE, MICROMECHANICAL SYSTEM AND METHOD OF PRO...
- Publication number 20210380401
- Publication date Dec 9, 2021
- Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
- Christian DRABE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR DEVICE AND METHOD OF FABRICATION
- Publication number 20210221677
- Publication date Jul 22, 2021
- NXP USA, Inc.
- Peng Shao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SWITCHABLE DISPLAYS WITH MOVABLE PIXEL UNITS
- Publication number 20210217331
- Publication date Jul 15, 2021
- Hewlett-Packard Development Company, L.P.
- Kuan-Ting Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LINEAR ACTUATOR
- Publication number 20210139314
- Publication date May 13, 2021
- Innovative Interface Laboratory Corp.
- Yu-Wen Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRODEVICE COMPRISING AT LEAST TWO MOVABLE ELEMENTS
- Publication number 20210130158
- Publication date May 6, 2021
- SAFRAN
- Audrey Berthelot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR PACKAGE HAVING A MOVABLE SENSOR
- Publication number 20210053817
- Publication date Feb 25, 2021
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE, METHOD FOR MANUFACTURING A MICROELE...
- Publication number 20200290867
- Publication date Sep 17, 2020
- Infineon Technologies Dresden GmbH & Co. KG
- Thoralf KAUTZSCH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR PACKAGE HAVING A MOVABLE SENSOR
- Publication number 20200172391
- Publication date Jun 4, 2020
- PIXART IMAGING Inc.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS AND METHOD OF MANUFACTURING THE SAME
- Publication number 20190382257
- Publication date Dec 19, 2019
- Sergiu LANGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR PACKAGE HAVING A MOVABLE SENSOR
- Publication number 20190308872
- Publication date Oct 10, 2019
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR TRANSMITTING A MOVEMENT AND A FORCE BETWEEN TWO ZONES TH...
- Publication number 20190308873
- Publication date Oct 10, 2019
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Loic JOET
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OR SENSOR PACKAGE
- Publication number 20190241426
- Publication date Aug 8, 2019
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR ASSEMBLY AND ARRANGEMENT AND METHOD FOR MANUFACTURING A SENS...
- Publication number 20190161340
- Publication date May 30, 2019
- ams AG
- Harald Etschmaier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SENSOR
- Publication number 20180334379
- Publication date Nov 22, 2018
- ROBERT BOSCH GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL STRUCTURE FOR AN ACCELERATION SENSOR
- Publication number 20180328959
- Publication date Nov 15, 2018
- ROBERT BOSCH GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID AND M...
- Publication number 20180179048
- Publication date Jun 28, 2018
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Harald SCHENK
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Translation according to an axis parallel to the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Optoelectronic component comprising, on a single substrate, an opti...

Micromechanical structure, micromechanical system and method of pro...

Multiaxial strain engineering of defect doped materials

Micromechanical structure and method of providing the same

Dual-layer micro-ribbon MEMS light modulator

Micro-electromechanical system package having movable platform

Switchable displays with movable pixel units

Sensor package having a movable sensor

Flexure guidance system

Sensor device and method of fabrication

Mechanical connection for a MEMS and NEMS device for measuring a va...

Microdevice comprising at least two movable elements

MEMS and method of manufacturing the same

Microelectromechanical device, method for manufacturing a microelec...

Microelectromechanical and/or nanoelectromechanical device offering...

Sensor package having a movable sensor

Device for transmitting a movement and a force between two zones th...

Microelectromechanical displacement structure and method for contro...

Microelectromechanical displacement structure and method for contro...

Sensor assembly and arrangement and method for manufacturing a sens...

Micromechanical sensor

Microelectromechanical device, method for manufacturing a microelec...

Physical quantity sensor, electronic device, and mobile body

Micromechanical structure for an acceleration sensor

Fabrication process for a symmetrical MEMS accelerometer

Multi-axis accelerometers with reduced cross-axis sensitivity

Sensor package having a movable sensor

Miniature kinetic energy harvester for generating electrical energy...

MEMS actuation systems and methods

MEMS transducer for interacting with a volume flow of a fluid and m...

Patents Applicationslast 30 patents

COUPLING DEVICE FOR COUPLING VIBRATION SYSTEMS

MICROELECTROMECHANICAL DEVICE WITH RECOVERY FROM STICTION CONDITIONS

Dual-Layer Micro-ribbon MEMS Light Modulator

MICROELECTROMECHANICAL GYROSCOPE WITH IMPROVED VIBRATION REJECTION

ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR

IN-PLANE AND OUT-OF-PLANE ACCELEROMETER

MEMS STRUCTURE

MEMS DEVICE, NEARFIELD LOUDSPEAKER, HEARABLE, MEMS PUMP, LOUDSPEAKE...

Dual-Layer Micro-ribbon MEMS Light Modulator

MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE

OPTOELECTRONIC COMPONENT COMPRISING, ON A SINGLE SUBSTRATE, AN OPTI...

MICRO-ELECTROMECHANICAL SYSTEM PACKAGE HAVING MOVABLE PLATFORM

MULTIAXIAL STRAIN ENGINEERING OF DEFECT DOPED MATERIALS

MEMS HAVING A LARGE FLUIDICALLY EFFECTIVE SURFACE

MICROMECHANICAL STRUCTURE, MICROMECHANICAL SYSTEM AND METHOD OF PRO...

SENSOR DEVICE AND METHOD OF FABRICATION

SWITCHABLE DISPLAYS WITH MOVABLE PIXEL UNITS

LINEAR ACTUATOR

MICRODEVICE COMPRISING AT LEAST TWO MOVABLE ELEMENTS

SENSOR PACKAGE HAVING A MOVABLE SENSOR

MICROELECTROMECHANICAL DEVICE, METHOD FOR MANUFACTURING A MICROELE...

SENSOR PACKAGE HAVING A MOVABLE SENSOR

MEMS AND METHOD OF MANUFACTURING THE SAME

SENSOR PACKAGE HAVING A MOVABLE SENSOR

DEVICE FOR TRANSMITTING A MOVEMENT AND A FORCE BETWEEN TWO ZONES TH...

MANUFACTURING METHOD OR SENSOR PACKAGE

SENSOR ASSEMBLY AND ARRANGEMENT AND METHOD FOR MANUFACTURING A SENS...

MICROMECHANICAL SENSOR

MICROMECHANICAL STRUCTURE FOR AN ACCELERATION SENSOR

MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID AND M...