Treatments for improving the stiffness of a vibrating element

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B81C1/00658

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00658Treatments for improving the stiffness of a vibrating element

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Micro-electromechanical system device using a metallic movable part...
- Patent number 12,122,665
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric actuator provided with a deformable structure having...
- Patent number 11,981,558
- Issue date May 14, 2024
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer having a diaphragm made of polymer and method of pr...
- Patent number 11,924,610
- Issue date Mar 5, 2024
- USOUND GMBH
- Andrea Rusconi Clerici Beltrami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating element
- Patent number 11,921,283
- Issue date Mar 5, 2024
- Funai Electric Co., Ltd.
- Kenichi Fujita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor and method for manufacturing a MEMS sensor including im...
- Patent number 11,828,669
- Issue date Nov 28, 2023
- Robert Bosch GmbH
- Cristian Nagel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system acoustic sensor, micro-electro-mech...
- Patent number 11,665,485
- Issue date May 30, 2023
- UPBEAT TECHNOLOGY CO., LTD
- Hsien-Lung Ho
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a sensor device and manufacturing met...
- Patent number 11,623,861
- Issue date Apr 11, 2023
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for sensors on glass
- Patent number 11,608,265
- Issue date Mar 21, 2023
- Infineon Technologies AG
- Stephan Pindl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS via with enhanced electrical and mechanical integrity
- Patent number 11,511,989
- Issue date Nov 29, 2022
- Texas Instruments Incorporated
- Earl Vedere Atnip
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro check valve and system with multiple micro check valves and m...
- Patent number 11,428,345
- Issue date Aug 30, 2022
- MICROFAB SERVICE GMBH
- Marco Cordelair
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with suspension structure and method of making a MEMS d...
- Patent number 11,300,778
- Issue date Apr 12, 2022
- Infineon Technologies AG
- Stephan Gerhard Albert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor device and manufacturing method thereof
- Patent number 11,206,493
- Issue date Dec 21, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chen Hsiung Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device package and method of manufacturing the same
- Patent number 11,101,189
- Issue date Aug 24, 2021
- Advanced Semiconductor Engineering, Inc.
- Ming Yen Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacturing the same
- Patent number 10,993,041
- Issue date Apr 27, 2021
- DB HITEK CO., LTD.
- Jong Won Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical spring for an inertial sensor
- Patent number 10,752,493
- Issue date Aug 25, 2020
- Robert Bosch GmbH
- Stefano Cardanobile
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method for manufacturing the same
- Patent number 10,721,576
- Issue date Jul 21, 2020
- SEMICONDUCTO MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Jian Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and method for manufacturing the same
- Patent number 10,710,874
- Issue date Jul 14, 2020
- Infineon Technologies AG
- Tobias Frischmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device package and method of manufacturing the same
- Patent number 10,689,248
- Issue date Jun 23, 2020
- Advanced Semiconductor Engineering, Inc.
- Ming Yen Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method for manufacturing the same
- Patent number 10,547,954
- Issue date Jan 28, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Hui Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for the formation of a graphene membrane component, graphen...
- Patent number 10,421,665
- Issue date Sep 24, 2019
- Infineon Technologies AG
- Guenther Ruhl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror array and method for the manufacture thereof
- Patent number 10,175,473
- Issue date Jan 8, 2019
- Robert Bosch GmbH
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for the formation of a graphene membrane component, graphen...
- Patent number 10,150,674
- Issue date Dec 11, 2018
- Infineon Technologies AG
- Guenther Ruhl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor including moving masses and means for detecting relative mov...
- Patent number 9,739,612
- Issue date Aug 22, 2017
- SAFRAN ELECTRONICS & DEFENSE
- Alain Jeanroy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS acoustic sensor comprising a non-perimeter flexible member
- Patent number 9,718,671
- Issue date Aug 1, 2017
- Invensense, Inc.
- Sushil Bharatan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and method for manufacturing the MEMS device
- Patent number 9,641,949
- Issue date May 2, 2017
- Infineon Technologies AG
- Johann Massoner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for a MEMS transducer
- Patent number 9,540,226
- Issue date Jan 10, 2017
- Infineon Technologies AG
- Wolfgang Klein
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Scalable self-supported MEMS structure and related method
- Patent number 9,458,011
- Issue date Oct 4, 2016
- Newport Fab, LLC
- David J. Howard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Robust MEMS structure with via cap and related method
- Patent number 9,346,669
- Issue date May 24, 2016
- Newport Fab, LLC
- David J. Howard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with differential vertical sense electrodes
- Patent number 9,346,670
- Issue date May 24, 2016
- Freescale Semiconductor Inc.
- Aaron A. Geisberger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrating element, optical scanning device, actuator device, video...
- Patent number 9,327,968
- Issue date May 3, 2016
- Canon Denshi Kabushiki Kaisha
- Naruki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...
- Publication number 20240359969
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MEMS TRANSDUCER DEVICE WITH THIN MEMBRAN...
- Publication number 20240327203
- Publication date Oct 3, 2024
- STMicroelectronics International N.V.
- Mark Andrew SHAW
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device and Method for Manufacturing a MEMS Device
- Publication number 20240017986
- Publication date Jan 18, 2024
- INFINEON TECHNOLOGIES AG
- Stefan Barzen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING P...
- Publication number 20240019688
- Publication date Jan 18, 2024
- STMicroelectronics S.r.l
- Massimiliano MERLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION H...
- Publication number 20230324674
- Publication date Oct 12, 2023
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STIFFENING STRUCTURES FOR MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) MI...
- Publication number 20230273424
- Publication date Aug 31, 2023
- Meta Platforms Technologies, LLC
- Kenneth Alexander Diest
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A LOW-NOISE ELECTROACOUSTIC TRANSDUCER
- Publication number 20230247372
- Publication date Aug 3, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Samer DAGHER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230179928
- Publication date Jun 8, 2023
- DB HITEK CO., LTD.
- Min Hyun JUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...
- Publication number 20230066841
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230010887
- Publication date Jan 12, 2023
- DB HITEK CO., LTD.
- Kyu Hyun KWACK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TRANSDUCER HAVING A DIAPHRAGM MADE OF POLYMER AND METHOD OF PR...
- Publication number 20220360908
- Publication date Nov 10, 2022
- USound GmbH
- Andrea Rusconi Clerici Beltrami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM ACOUSTIC SENSOR, MICRO-ELECTRO-MECH...
- Publication number 20220116715
- Publication date Apr 14, 2022
- UPBEAT TECHNOLOGY Co., Ltd
- Hsien-Lung HO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for Sensors on Glass
- Publication number 20220009771
- Publication date Jan 13, 2022
- INFINEON TECHNOLOGIES AG
- Stephan Pindl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE
- Publication number 20210403315
- Publication date Dec 30, 2021
- ROBERT BOSCH GmbH
- Hans ARTMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR AND METHOD FOR MANUFACTURING A MEMS SENSOR
- Publication number 20210396616
- Publication date Dec 23, 2021
- ROBERT BOSCH GmbH
- Cristian Nagel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATING ELEMENT
- Publication number 20210382297
- Publication date Dec 9, 2021
- Funai Electric Co., Ltd.
- KENICHI FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ACTUATOR PROVIDED WITH A DEFORMABLE STRUCTURE HAVING...
- Publication number 20210347634
- Publication date Nov 11, 2021
- STMicroelectronics S.r.l.
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE AND MANUFACTURING MET...
- Publication number 20210246012
- Publication date Aug 12, 2021
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20200283288
- Publication date Sep 10, 2020
- Advanced Semiconductor Engineering, Inc.
- Ming Yen LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS VIA WITH ENHANCED ELECTRICAL AND MECHANICAL INTEGRITY
- Publication number 20200207609
- Publication date Jul 2, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Earl Vedere Atnip
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO CHECK VALVE AND SYSTEM WITH MULTIPLE MICRO CHECK VALVES AND M...
- Publication number 20200166156
- Publication date May 28, 2020
- MICROFAB SERVICE GMBH
- Marco CORDELAIR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH SUSPENSION STRUCTURE AND METHOD OF MAKING A MEMS D...
- Publication number 20190361223
- Publication date Nov 28, 2019
- INFINEON TECHNOLOGIES AG
- Stephan Gerhard ALBERT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20190306633
- Publication date Oct 3, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen Hsiung YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND WAFER FOR FABRICATING TRANSDUCER DEVICES
- Publication number 20190297428
- Publication date Sep 26, 2019
- Cirrus Logic International Semiconductor Ltd.
- Marek Sebastian PIECHOCINSKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR THE FORMATION OF A GRAPHENE MEMBRANE COMPONENT, GRAPHEN...
- Publication number 20190077671
- Publication date Mar 14, 2019
- INFINEON TECHNOLOGIES AG
- Guenther Ruhl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20190052976
- Publication date Feb 14, 2019
- DB HITEK CO., LTD.
- Jong Won SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SPRING FOR AN INERTIAL SENSOR
- Publication number 20190002274
- Publication date Jan 3, 2019
- ROBERT BOSCH GmbH
- Stefano Cardanobile
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20180317033
- Publication date Nov 1, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- JIAN ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20180265347
- Publication date Sep 20, 2018
- Advanced Semiconductor Engineering, Inc.
- Ming Yen LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20180262845
- Publication date Sep 13, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- HUI SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Treatments for improving the stiffness of a vibrating element

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micro-electromechanical system device using a metallic movable part...

Piezoelectric actuator provided with a deformable structure having...

MEMS transducer having a diaphragm made of polymer and method of pr...

Vibrating element

MEMS sensor and method for manufacturing a MEMS sensor including im...

Micro-electro-mechanical system acoustic sensor, micro-electro-mech...

Micromechanical component for a sensor device and manufacturing met...

Method and structure for sensors on glass

MEMS via with enhanced electrical and mechanical integrity

Micro check valve and system with multiple micro check valves and m...

MEMS device with suspension structure and method of making a MEMS d...

Sensor device and manufacturing method thereof

Semiconductor device package and method of manufacturing the same

MEMS microphone and method of manufacturing the same

Micromechanical spring for an inertial sensor

MEMS microphone and method for manufacturing the same

Micromechanical structure and method for manufacturing the same

Semiconductor device package and method of manufacturing the same

MEMS microphone and method for manufacturing the same

Process for the formation of a graphene membrane component, graphen...

Micromirror array and method for the manufacture thereof

Process for the formation of a graphene membrane component, graphen...

Sensor including moving masses and means for detecting relative mov...

MEMS acoustic sensor comprising a non-perimeter flexible member

MEMS device and method for manufacturing the MEMS device

System and method for a MEMS transducer

Scalable self-supported MEMS structure and related method

Robust MEMS structure with via cap and related method

MEMS device with differential vertical sense electrodes

Vibrating element, optical scanning device, actuator device, video...

Patents Applicationslast 30 patents

MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...

METHOD FOR MANUFACTURING A MEMS TRANSDUCER DEVICE WITH THIN MEMBRAN...

MEMS Device and Method for Manufacturing a MEMS Device

MEMS MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING P...

MICROELECTROMECHANICAL MIRROR DEVICE WITH PIEZOELECTRIC ACTUATION H...

STIFFENING STRUCTURES FOR MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) MI...

METHOD FOR MANUFACTURING A LOW-NOISE ELECTROACOUSTIC TRANSDUCER

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

MEMS TRANSDUCER HAVING A DIAPHRAGM MADE OF POLYMER AND METHOD OF PR...

MICRO-ELECTRO-MECHANICAL SYSTEM ACOUSTIC SENSOR, MICRO-ELECTRO-MECH...

Method and Structure for Sensors on Glass

SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE

MEMS SENSOR AND METHOD FOR MANUFACTURING A MEMS SENSOR

VIBRATING ELEMENT

PIEZOELECTRIC ACTUATOR PROVIDED WITH A DEFORMABLE STRUCTURE HAVING...

MICROMECHANICAL COMPONENT FOR A SENSOR DEVICE AND MANUFACTURING MET...

SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THE SAME

MEMS VIA WITH ENHANCED ELECTRICAL AND MECHANICAL INTEGRITY

MICRO CHECK VALVE AND SYSTEM WITH MULTIPLE MICRO CHECK VALVES AND M...

MEMS DEVICE WITH SUSPENSION STRUCTURE AND METHOD OF MAKING A MEMS D...

SENSOR DEVICE AND MANUFACTURING METHOD THEREOF

METHOD AND WAFER FOR FABRICATING TRANSDUCER DEVICES

PROCESS FOR THE FORMATION OF A GRAPHENE MEMBRANE COMPONENT, GRAPHEN...

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

MICROMECHANICAL SPRING FOR AN INERTIAL SENSOR

MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE PACKAGE AND METHOD OF MANUFACTURING THE SAME

MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME