TREA

Treatments or methods for avoiding stiction of flexible or moving parts of MEMS

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Industry

  • CPC
  • B81C1/00912
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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00912Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
Industries