TREA

Treatments or methods for avoiding stiction of flexible or moving parts of MEMS

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  • CPC
  • B81C1/00912
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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00912Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    ANTI-STICTION PROCESS FOR MEMS DEVICE
    • Publication number 20220242724
    • Publication date Aug 4, 2022
    • Taiwan Semiconductor Manufacturing Co.,Ltd
    • Jui-Chun WENG
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    ANTI-STICTION PROCESS FOR MEMS DEVICE
    • Publication number 20200123003
    • Publication date Apr 23, 2020
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Jui-Chun Weng
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    Methods And Apparatus For MEMS Structure Release
    • Publication number 20140252512
    • Publication date Sep 11, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Tai-I Yang
    • B81 - MICRO-STRUCTURAL TECHNOLOGY