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Scanning probe microscope
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Patent number 9,689,893
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Issue date Jun 27, 2017
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Hitachi High-Tech Science Corporation
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Kazunori Ando
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G01 - MEASURING TESTING
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Scanning tunneling microscope
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Patent number 5,038,034
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Issue date Aug 6, 1991
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Mitsubishi Denki Kabushiki Kaisha
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Shigeto Fujita
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G01 - MEASURING TESTING
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Scanning tunneling microscope
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Patent number 4,939,363
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Issue date Jul 3, 1990
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Director General of Agency of Industrial Science and Technology
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Hiroshi Bando
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B82 - NANO-TECHNOLOGY
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Scanning tunneling microscope
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Patent number 4,343,993
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Issue date Aug 10, 1982
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International Business Machines Corporation
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Gerd Binnig
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B82 - NANO-TECHNOLOGY