Number | Date | Country | Kind |
---|---|---|---|
2-24549 | Feb 1990 | JPX | |
2-26036 | Feb 1990 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4798989 | Miyazaki et al. | Jan 1989 |
Number | Date | Country |
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223918 | Jun 1987 | EPX |
296871 | Dec 1988 | EPX |
Entry |
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Albrecht et al., Journal of Applied Physics, No. 62 (1987), pp. 2599-2602. |
Heingelmann et al., Journal of Vacuum Sciency Technology, A6 (1988), pp. 275-278. |
Kirk et al., Rev. Sci. Instrum. 59(6), Jun. 1988, pp. 833-835. |