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Micro-structural technology
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MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2201/00
Specific applications of micro-electromechanical systems
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B81B2201/0221
Variable capacitors
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Patents Grants
last 30 patents
Information
Patent Grant
Reduction of ringing and intermodulation distortion in a MEMS device
Patent number
12,187,599
Issue date
Jan 7, 2025
Texas Instruments Incorporated
Adam Joseph Fruehling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Waterproof MEMS button device, input device comprising the MEMS but...
Patent number
12,050,102
Issue date
Jul 30, 2024
STMicroelectronics S.r.l.
Gabriele Gattere
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor package including a substrate with an inductor layer
Patent number
11,912,564
Issue date
Feb 27, 2024
Knowles Electronics, LLC
Adam Ariffin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device and method for monitoring surface condition of contact surfa...
Patent number
11,634,319
Issue date
Apr 25, 2023
NATIONAL TAIWAN UNIVERSITY
Wei-Chang Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive micro structure
Patent number
11,548,779
Issue date
Jan 10, 2023
Teknologian tutkimuskeskus VTT Oy
Hannu Kattelus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS tunable capacitor comprising amplified piezo actuator and a me...
Patent number
11,430,612
Issue date
Aug 30, 2022
Ostendo Techologies, Inc.
Bahram Ghodsian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for assembling conductive particles into conductive pathways...
Patent number
11,371,961
Issue date
Jun 28, 2022
CONDALIGAN AS
Mark Buchanan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor
Patent number
11,205,544
Issue date
Dec 21, 2021
Kabushiki Kaisha Toshiba
Akira Fujimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system cavity packaging
Patent number
11,203,524
Issue date
Dec 21, 2021
Texas Instruments Incorporated
Jose Antonio Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator plate partitioning and control devices and methods
Patent number
11,124,410
Issue date
Sep 21, 2021
Wispry, Inc.
Dana DeReus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Forming an offset in an interdigitated capacitor of a microelectrom...
Patent number
10,843,915
Issue date
Nov 24, 2020
Infineon Dresdon GmbH & Co. KG
Sebastian Pregl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) variable capacitor apparatus...
Patent number
10,840,026
Issue date
Nov 17, 2020
Wispry, Inc.
Arthur S. Morris
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device
Patent number
10,779,101
Issue date
Sep 15, 2020
Infineon Technologies AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Environmental sensor and manufacturing method thereof
Patent number
10,760,929
Issue date
Sep 1, 2020
Weifang Goertek Microelectronics Co., Ltd.
Junkai Zhan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system cavity packaging
Patent number
10,611,631
Issue date
Apr 7, 2020
Texas Instruments Incorporated
Jose Antonio Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device
Patent number
10,602,290
Issue date
Mar 24, 2020
Infineon Technologies AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Continuous-time sensing apparatus
Patent number
10,574,259
Issue date
Feb 25, 2020
Invensense, Inc.
Du Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Controllable integrated capacitive device
Patent number
10,475,713
Issue date
Nov 12, 2019
STMicroelectronics (Rousset) SAS
Pascal Fornara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Selective conductive coating for MEMS sensors
Patent number
10,427,931
Issue date
Oct 1, 2019
Analog Devices, Inc.
Bradley C. Kaanta
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Impact element for a sensor device and a manufacturing method
Patent number
10,384,929
Issue date
Aug 20, 2019
Murata Manufacturing Co., Ltd.
Risto Mutikainen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Antenna having MEMS-tuned RF resonators
Patent number
10,374,324
Issue date
Aug 6, 2019
KYMETA CORPORATION
Ryan Stevenson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) variable capacitor apparatus...
Patent number
10,354,804
Issue date
Jul 16, 2019
Wispry, Inc.
Arthur S. Morris
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
RF MEMS electrodes with limited grain growth
Patent number
10,301,173
Issue date
May 28, 2019
Cavendish Kinetics, Inc.
Mickael Renault
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Forming an offset in an interdigitated capacitor of a microelectrom...
Patent number
10,266,389
Issue date
Apr 23, 2019
Infineon Technologies Dresden GmbH
Sebastian Pregl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor having particle barrier
Patent number
10,267,822
Issue date
Apr 23, 2019
Hewlett-Packard Development Company, L.P.
Jennifer Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device
Patent number
10,171,925
Issue date
Jan 1, 2019
Infineon Technologies AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator plate partitioning and control devices and methods
Patent number
10,125,008
Issue date
Nov 13, 2018
Wispry, Inc.
Dana DeReus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for fabricating electrostatic capacitance-type...
Patent number
10,067,155
Issue date
Sep 4, 2018
Akebono Brake Industry Co., Ltd.
Takahiro Tsunoda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) variable capacitor apparatus...
Patent number
10,062,517
Issue date
Aug 28, 2018
Wispry, Inc.
Arthur S. Morris
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Non-symmetric arrays of MEMS digital variable capacitor with unifor...
Patent number
10,029,909
Issue date
Jul 24, 2018
Cavendish Kinetics, Inc.
Robertus Petrus Van Kampen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE
Publication number
20250091857
Publication date
Mar 20, 2025
TEXAS INSTRUMENTS INCORPORATED
Adam Joseph Fruehling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL SENSOR AND METHOD FOR FORMING THE SAME
Publication number
20240418510
Publication date
Dec 19, 2024
AAC TECHNOLOGIES PTE. LTD
Houming Chong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20240383742
Publication date
Nov 21, 2024
Zhunmao (Hangzhou) Technology Co.
Haitao Ding
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectromechanical Systems Sensor with Frequency Dependent Inpu...
Publication number
20240217810
Publication date
Jul 4, 2024
KNOWLES ELECTRONICS, LLC
Michael Jennings
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DUAL DIAPHRAGM DIELECTRIC SENSOR
Publication number
20230294977
Publication date
Sep 21, 2023
KNOWLES ELECTRONICS, LLC
Peter V. Loeppert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHA...
Publication number
20230242393
Publication date
Aug 3, 2023
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONSTANT CHARGE OR CAPACITANCE FOR CAPACITIVE MICRO-ELECTRICAL-MECH...
Publication number
20230192479
Publication date
Jun 22, 2023
InvenSense, Inc.
Joseph Seeger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACOUSTIC IMAGING PROBE WITH A TRANSDUCER ELEMENT
Publication number
20230161020
Publication date
May 25, 2023
Koninklijke Philips N.V.
Egbertus Reinier JACOBS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...
Publication number
20230107094
Publication date
Apr 6, 2023
STMicroelectronics S.r.l.
Gianluca LONGONI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE
Publication number
20230101598
Publication date
Mar 30, 2023
TEXAS INSTRUMENTS INCORPORATED
Adam Joseph Fruehling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
QUADRATURE BIAS ERROR REDUCTION FOR VIBRATING STRUCTURE GYROSCOPES
Publication number
20220123198
Publication date
Apr 21, 2022
Atlantic Inertial Systems Limited
Kevin TOWNSEND
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR PACKAGE INCLUDING A SUBSTRATE WITH AN INDUCTOR LAYER
Publication number
20220033248
Publication date
Feb 3, 2022
KNOWLES ELECTRONICS, LLC
Adam Ariffin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUS...
Publication number
20210134532
Publication date
May 6, 2021
wiSpry, Inc.
Arthur S. Morris
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR
Publication number
20210065990
Publication date
Mar 4, 2021
Kabushiki Kaisha Toshiba
Akira FUJIMOTO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Tunable Capacitor Comprising Amplified Piezo Actuator and a Me...
Publication number
20200388440
Publication date
Dec 10, 2020
OSTENDO TECHNOLOGIES, INC.
Bahram Ghodsian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device
Publication number
20200236485
Publication date
Jul 23, 2020
INFINEON TECHNOLOGIES AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM CAVITY PACKAGING
Publication number
20200189910
Publication date
Jun 18, 2020
TEXAS INSTRUMENTS INCORPORATED
Jose Antonio Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MICRO STRUCTURE
Publication number
20200180943
Publication date
Jun 11, 2020
Teknologian Tutkimuskeskus VTT Oy
Hannu KATTELUS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUS...
Publication number
20190362899
Publication date
Nov 28, 2019
wiSpry, Inc.
Arthur S. Morris
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FORMING AN OFFSET IN AN INTERDIGITATED CAPACITOR OF A MICROELECTROM...
Publication number
20190233276
Publication date
Aug 1, 2019
Infineon Dresden GmbH & Co. KG
Sebastian PREGL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM CAVITY PACKAGING
Publication number
20190185320
Publication date
Jun 20, 2019
TEXAS INSTRUMENTS INCORPORATED
Jose Antonio Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS
Publication number
20190144263
Publication date
May 16, 2019
wiSpry, Inc.
Dana DeReus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device
Publication number
20190098424
Publication date
Mar 28, 2019
INFINEON TECHNOLOGIES AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FORMING AN OFFSET IN AN INTERDIGITATED CAPACITOR OF A MICROELECTROM...
Publication number
20190031499
Publication date
Jan 31, 2019
INFINEON TECHNOLOGIES DRESDEN GMBH
Sebastian PREGL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
IMPACT ELEMENT FOR A SENSOR DEVICE AND A MANUFACTURING METHOD
Publication number
20190002276
Publication date
Jan 3, 2019
Murata Manufacturing Co., Ltd.
Risto MUTIKAINEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SELECTIVE CONDUCTIVE COATING FOR MEMS SENSORS
Publication number
20170369304
Publication date
Dec 28, 2017
Analog Devices, Inc.
Bradley C. Kaanta
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONTROLLABLE INTEGRATED CAPACITIVE DEVICE
Publication number
20170309532
Publication date
Oct 26, 2017
STMicroelectronics (Rousset) SAS
Pascal Fornara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
RF RESONATORS WITH TUNABLE CAPACITOR AND METHODS FOR FABRICATING TH...
Publication number
20170301475
Publication date
Oct 19, 2017
Kymeta Corporation
Ryan Stevenson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20170271318
Publication date
Sep 21, 2017
Murata Manufacturing Co., Ltd.
TOSHIYUKI NAKAISO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE ELECTRONIC DEVICE
Publication number
20170267517
Publication date
Sep 21, 2017
Kabushiki Kaisha Toshiba
Akira FUJIMOTO
B81 - MICRO-STRUCTURAL TECHNOLOGY