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Micro-structural technology
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MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Specific applications of micro-electromechanical systems
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B81B2201/0221
Variable capacitors
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Patents Grants
last 30 patents
Information
Patent Grant
Waterproof MEMS button device, input device comprising the MEMS but...
Patent number
12,050,102
Issue date
Jul 30, 2024
STMicroelectronics S.r.l.
Gabriele Gattere
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor package including a substrate with an inductor layer
Patent number
11,912,564
Issue date
Feb 27, 2024
Knowles Electronics, LLC
Adam Ariffin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device and method for monitoring surface condition of contact surfa...
Patent number
11,634,319
Issue date
Apr 25, 2023
NATIONAL TAIWAN UNIVERSITY
Wei-Chang Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive micro structure
Patent number
11,548,779
Issue date
Jan 10, 2023
Teknologian tutkimuskeskus VTT Oy
Hannu Kattelus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS tunable capacitor comprising amplified piezo actuator and a me...
Patent number
11,430,612
Issue date
Aug 30, 2022
Ostendo Techologies, Inc.
Bahram Ghodsian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for assembling conductive particles into conductive pathways...
Patent number
11,371,961
Issue date
Jun 28, 2022
CONDALIGAN AS
Mark Buchanan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor
Patent number
11,205,544
Issue date
Dec 21, 2021
Kabushiki Kaisha Toshiba
Akira Fujimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system cavity packaging
Patent number
11,203,524
Issue date
Dec 21, 2021
Texas Instruments Incorporated
Jose Antonio Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator plate partitioning and control devices and methods
Patent number
11,124,410
Issue date
Sep 21, 2021
Wispry, Inc.
Dana DeReus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Forming an offset in an interdigitated capacitor of a microelectrom...
Patent number
10,843,915
Issue date
Nov 24, 2020
Infineon Dresdon GmbH & Co. KG
Sebastian Pregl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) variable capacitor apparatus...
Patent number
10,840,026
Issue date
Nov 17, 2020
Wispry, Inc.
Arthur S. Morris
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device
Patent number
10,779,101
Issue date
Sep 15, 2020
Infineon Technologies AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Environmental sensor and manufacturing method thereof
Patent number
10,760,929
Issue date
Sep 1, 2020
Weifang Goertek Microelectronics Co., Ltd.
Junkai Zhan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system cavity packaging
Patent number
10,611,631
Issue date
Apr 7, 2020
Texas Instruments Incorporated
Jose Antonio Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device
Patent number
10,602,290
Issue date
Mar 24, 2020
Infineon Technologies AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Continuous-time sensing apparatus
Patent number
10,574,259
Issue date
Feb 25, 2020
Invensense, Inc.
Du Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Controllable integrated capacitive device
Patent number
10,475,713
Issue date
Nov 12, 2019
STMicroelectronics (Rousset) SAS
Pascal Fornara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Selective conductive coating for MEMS sensors
Patent number
10,427,931
Issue date
Oct 1, 2019
Analog Devices, Inc.
Bradley C. Kaanta
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Impact element for a sensor device and a manufacturing method
Patent number
10,384,929
Issue date
Aug 20, 2019
Murata Manufacturing Co., Ltd.
Risto Mutikainen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Antenna having MEMS-tuned RF resonators
Patent number
10,374,324
Issue date
Aug 6, 2019
KYMETA CORPORATION
Ryan Stevenson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) variable capacitor apparatus...
Patent number
10,354,804
Issue date
Jul 16, 2019
Wispry, Inc.
Arthur S. Morris
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
RF MEMS electrodes with limited grain growth
Patent number
10,301,173
Issue date
May 28, 2019
Cavendish Kinetics, Inc.
Mickael Renault
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Forming an offset in an interdigitated capacitor of a microelectrom...
Patent number
10,266,389
Issue date
Apr 23, 2019
Infineon Technologies Dresden GmbH
Sebastian Pregl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor having particle barrier
Patent number
10,267,822
Issue date
Apr 23, 2019
Hewlett-Packard Development Company, L.P.
Jennifer Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device
Patent number
10,171,925
Issue date
Jan 1, 2019
Infineon Technologies AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator plate partitioning and control devices and methods
Patent number
10,125,008
Issue date
Nov 13, 2018
Wispry, Inc.
Dana DeReus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for fabricating electrostatic capacitance-type...
Patent number
10,067,155
Issue date
Sep 4, 2018
Akebono Brake Industry Co., Ltd.
Takahiro Tsunoda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) variable capacitor apparatus...
Patent number
10,062,517
Issue date
Aug 28, 2018
Wispry, Inc.
Arthur S. Morris
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Non-symmetric arrays of MEMS digital variable capacitor with unifor...
Patent number
10,029,909
Issue date
Jul 24, 2018
Cavendish Kinetics, Inc.
Robertus Petrus Van Kampen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device
Patent number
9,991,251
Issue date
Jun 5, 2018
MURATA MANUFACTURING CO., LTD.
Toshiyuki Nakaiso
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
INERTIAL SENSOR AND METHOD FOR FORMING THE SAME
Publication number
20240418510
Publication date
Dec 19, 2024
AAC TECHNOLOGIES PTE. LTD
Houming Chong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20240383742
Publication date
Nov 21, 2024
Zhunmao (Hangzhou) Technology Co.
Haitao Ding
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectromechanical Systems Sensor with Frequency Dependent Inpu...
Publication number
20240217810
Publication date
Jul 4, 2024
KNOWLES ELECTRONICS, LLC
Michael Jennings
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DUAL DIAPHRAGM DIELECTRIC SENSOR
Publication number
20230294977
Publication date
Sep 21, 2023
KNOWLES ELECTRONICS, LLC
Peter V. Loeppert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHA...
Publication number
20230242393
Publication date
Aug 3, 2023
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONSTANT CHARGE OR CAPACITANCE FOR CAPACITIVE MICRO-ELECTRICAL-MECH...
Publication number
20230192479
Publication date
Jun 22, 2023
InvenSense, Inc.
Joseph Seeger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACOUSTIC IMAGING PROBE WITH A TRANSDUCER ELEMENT
Publication number
20230161020
Publication date
May 25, 2023
Koninklijke Philips N.V.
Egbertus Reinier JACOBS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...
Publication number
20230107094
Publication date
Apr 6, 2023
STMicroelectronics S.r.l.
Gianluca LONGONI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE
Publication number
20230101598
Publication date
Mar 30, 2023
TEXAS INSTRUMENTS INCORPORATED
Adam Joseph Fruehling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
QUADRATURE BIAS ERROR REDUCTION FOR VIBRATING STRUCTURE GYROSCOPES
Publication number
20220123198
Publication date
Apr 21, 2022
Atlantic Inertial Systems Limited
Kevin TOWNSEND
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR PACKAGE INCLUDING A SUBSTRATE WITH AN INDUCTOR LAYER
Publication number
20220033248
Publication date
Feb 3, 2022
KNOWLES ELECTRONICS, LLC
Adam Ariffin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUS...
Publication number
20210134532
Publication date
May 6, 2021
wiSpry, Inc.
Arthur S. Morris
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR
Publication number
20210065990
Publication date
Mar 4, 2021
Kabushiki Kaisha Toshiba
Akira FUJIMOTO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Tunable Capacitor Comprising Amplified Piezo Actuator and a Me...
Publication number
20200388440
Publication date
Dec 10, 2020
OSTENDO TECHNOLOGIES, INC.
Bahram Ghodsian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device
Publication number
20200236485
Publication date
Jul 23, 2020
INFINEON TECHNOLOGIES AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM CAVITY PACKAGING
Publication number
20200189910
Publication date
Jun 18, 2020
TEXAS INSTRUMENTS INCORPORATED
Jose Antonio Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MICRO STRUCTURE
Publication number
20200180943
Publication date
Jun 11, 2020
Teknologian Tutkimuskeskus VTT Oy
Hannu KATTELUS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUS...
Publication number
20190362899
Publication date
Nov 28, 2019
wiSpry, Inc.
Arthur S. Morris
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FORMING AN OFFSET IN AN INTERDIGITATED CAPACITOR OF A MICROELECTROM...
Publication number
20190233276
Publication date
Aug 1, 2019
Infineon Dresden GmbH & Co. KG
Sebastian PREGL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM CAVITY PACKAGING
Publication number
20190185320
Publication date
Jun 20, 2019
TEXAS INSTRUMENTS INCORPORATED
Jose Antonio Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS
Publication number
20190144263
Publication date
May 16, 2019
wiSpry, Inc.
Dana DeReus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device
Publication number
20190098424
Publication date
Mar 28, 2019
INFINEON TECHNOLOGIES AG
Alfons Dehe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FORMING AN OFFSET IN AN INTERDIGITATED CAPACITOR OF A MICROELECTROM...
Publication number
20190031499
Publication date
Jan 31, 2019
INFINEON TECHNOLOGIES DRESDEN GMBH
Sebastian PREGL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
IMPACT ELEMENT FOR A SENSOR DEVICE AND A MANUFACTURING METHOD
Publication number
20190002276
Publication date
Jan 3, 2019
Murata Manufacturing Co., Ltd.
Risto MUTIKAINEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SELECTIVE CONDUCTIVE COATING FOR MEMS SENSORS
Publication number
20170369304
Publication date
Dec 28, 2017
Analog Devices, Inc.
Bradley C. Kaanta
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONTROLLABLE INTEGRATED CAPACITIVE DEVICE
Publication number
20170309532
Publication date
Oct 26, 2017
STMicroelectronics (Rousset) SAS
Pascal Fornara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
RF RESONATORS WITH TUNABLE CAPACITOR AND METHODS FOR FABRICATING TH...
Publication number
20170301475
Publication date
Oct 19, 2017
Kymeta Corporation
Ryan Stevenson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20170271318
Publication date
Sep 21, 2017
Murata Manufacturing Co., Ltd.
TOSHIYUKI NAKAISO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE ELECTRONIC DEVICE
Publication number
20170267517
Publication date
Sep 21, 2017
Kabushiki Kaisha Toshiba
Akira FUJIMOTO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH A STABILIZED MINIMUM CAPACITANCE
Publication number
20170240417
Publication date
Aug 24, 2017
Kabushiki Kaisha Toshiba
Masaki YAMADA
B81 - MICRO-STRUCTURAL TECHNOLOGY