Vibration sensors

Industry

CPC
B81B2201/0285

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/0285Vibration sensors

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Sensing module and manufacturing method thereof
- Patent number 11,894,473
- Issue date Feb 6, 2024
- Ruei Chi Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bone-conduction sensor assembly
- Patent number 11,697,587
- Issue date Jul 11, 2023
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Tingting Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system (MEMS) vibration sensor having a segm...
- Patent number 11,691,871
- Issue date Jul 4, 2023
- Infineon Technologies AG
- Somu Goswami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Computation devices and artificial neurons based on nanoelectromech...
- Patent number 11,681,897
- Issue date Jun 20, 2023
- Cornell University
- Amit Lal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Overload recovery optimization in microelectromechanical system app...
- Patent number 11,661,334
- Issue date May 30, 2023
- Apple Inc.
- Eddie L. Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS vibrator and MEMS oscillator
- Patent number 11,655,145
- Issue date May 23, 2023
- Kaneka Corporation
- Junji Sone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing damper structures on a micromechanical wafer
- Patent number 11,472,698
- Issue date Oct 18, 2022
- Robert Bosch GmbH
- Michael Stumber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Seismic acquisition system and sensor based on MEMS sensor with low...
- Patent number 11,472,696
- Issue date Oct 18, 2022
- INSTITUTE OF GEOLOGY AND GEOPHYSICS, CHINESE ACADEMY OF SCIENCES
- Zongwei Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acoustic transducer assembly
- Patent number 11,365,118
- Issue date Jun 21, 2022
- Knowles Electronics, LLC
- Joshua Watson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor structure comprising mechanically preloaded suspension...
- Patent number 11,267,694
- Issue date Mar 8, 2022
- Stichting VU-VUMC
- Eric Hennes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Overload recovery optimization in microelectromechanical system app...
- Patent number 11,235,970
- Issue date Feb 1, 2022
- Apple Inc.
- Eddie L. Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration sensor with monitoring function and vibration signal moni...
- Patent number 11,193,819
- Issue date Dec 7, 2021
- Industrial Technology Research Institute
- Yu-Wen Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Computation devices and artificial neurons based on nanoelectromech...
- Patent number 10,860,916
- Issue date Dec 8, 2020
- Cornell University
- Amit Lal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration energy harvester
- Patent number 10,840,827
- Issue date Nov 17, 2020
- The University of Tokyo
- Hiroshi Toshiyoshi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure and method of fabricating the same
- Patent number 10,773,953
- Issue date Sep 15, 2020
- United Microelectronics Corp.
- Meng-Jia Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor structure comprising mechanically preloaded suspension...
- Patent number 10,710,870
- Issue date Jul 14, 2020
- Stichting VU-VUMC
- Eric Hennes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity detection device, electronic apparatus, and movin...
- Patent number 10,370,241
- Issue date Aug 6, 2019
- Seiko Epson Corporation
- Shinya Aoki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Segmented electrode structure for quadrature reduction in an integr...
- Patent number 10,330,475
- Issue date Jun 25, 2019
- NXP USA, INC.
- Thierry Cassagnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Computation devices and artificial neurons based on nanoelectromech...
- Patent number 10,217,045
- Issue date Feb 26, 2019
- Cornell University
- Amit Lal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical transducer and method for manufacturing the same...
- Patent number 10,207,918
- Issue date Feb 19, 2019
- Canon Kabushiki Kaisha
- Chienliu Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure and method of fabricating the same
- Patent number 9,790,088
- Issue date Oct 17, 2017
- United Microelectronics Corp.
- Meng-Jia Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated semiconductor devices with single crystalline beam, meth...
- Patent number 9,758,365
- Issue date Sep 12, 2017
- GLOBALFOUNDRIES INC.
- David L. Harame
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microphone element and device for detecting acoustic and ultrasound...
- Patent number 9,571,938
- Issue date Feb 14, 2017
- Robert Bosch GmbH
- Christoph Schelling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Functional element, electronic apparatus, and moving object
- Patent number 9,446,939
- Issue date Sep 20, 2016
- Seiko Epson Corporation
- Satoru Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor and method of making the same
- Patent number 9,366,534
- Issue date Jun 14, 2016
- Denso Corporation
- Tameharu Ohta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical transducer and method for manufacturing the same...
- Patent number 9,282,415
- Issue date Mar 8, 2016
- Canon Kabushiki Kaisha
- Chienliu Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonant transducer, manufacturing method therefor, and multi-layer...
- Patent number 9,139,419
- Issue date Sep 22, 2015
- Yokogawa Electric Corporation
- Takashi Yoshida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic device, method of manufacturing the same, and oscillator
- Patent number 9,089,055
- Issue date Jul 21, 2015
- Seiko Epson Corporation
- Yoji Kitano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibration transducer and its manufacturing method
- Patent number 9,063,023
- Issue date Jun 23, 2015
- Yokogawa Electric Corporation
- Takashi Yoshida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromechanical transducer and method for manufacturing the same...
- Patent number 8,760,031
- Issue date Jun 24, 2014
- Canon Kabushiki Kaisha
- Chienliu Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ACOUSTIC DETECTION SYSTEM AND METHOD AND ASSOCIATED KINETIC ENERGY...
- Publication number 20240421728
- Publication date Dec 19, 2024
- The Boeing Company
- James Y. Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICA...
- Publication number 20240208801
- Publication date Jun 27, 2024
- UPBEAT TECHNOLOGY Co., Ltd
- Hsi-Wen TUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micro-Electromechanical System
- Publication number 20240182293
- Publication date Jun 6, 2024
- TECHNISCHE UNIVERSITAT WIEN
- Daniel PLATZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED DEVICE PACKAGE
- Publication number 20240118131
- Publication date Apr 11, 2024
- Analog Devices International Unlimited Company
- Johnny Solana Gealon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Device
- Publication number 20230416078
- Publication date Dec 28, 2023
- INFINEON TECHNOLOGIES AG
- Andreas Bogner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Device
- Publication number 20230294976
- Publication date Sep 21, 2023
- INFINEON TECHNOLOGIES AG
- Abhiraj Basavanna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DIE AND MEMS-BASED VIBRATION SENSOR
- Publication number 20230192475
- Publication date Jun 22, 2023
- KNOWLES ELECTRONICS, LLC
- Ken Deng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC SINGLE-CRYSTAL ELEMENT, MEMS DEVICE USING SAME, AND M...
- Publication number 20230120240
- Publication date Apr 20, 2023
- IBULE PHOTONICS
- Sang Goo LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSING MODULE AND MANUFACTURING METHOD THEREOF
- Publication number 20230076715
- Publication date Mar 9, 2023
- CHIP POSITION SYSTEM CO., LTD.
- RUEI CHI CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Bone-conduction Sensor Assembly
- Publication number 20220402753
- Publication date Dec 22, 2022
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Tingting Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical System (MEMS) Vibration Sensor Having a Segm...
- Publication number 20220402752
- Publication date Dec 22, 2022
- INFINEON TECHNOLOGIES AG
- Somu Goswami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE, METHOD AND COMPUTER-READABLE RECORDING MEDIUM FOR DETECTING...
- Publication number 20220380204
- Publication date Dec 1, 2022
- KOREA METEOROLOGICAL ADMINISTRATION
- Jae-Kwang AHN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION SENSOR
- Publication number 20220212918
- Publication date Jul 7, 2022
- The Regents of the University of Michigan
- Alison HAKE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OVERLOAD RECOVERY OPTIMIZATION IN MICROELECTROMECHANICAL SYSTEM APP...
- Publication number 20220177297
- Publication date Jun 9, 2022
- Apple Inc.
- Eddie L. Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACOUSTIC TRANSDUCER ASSEMBLY
- Publication number 20220177299
- Publication date Jun 9, 2022
- KNOWLES ELECTRONICS, LLC
- Joshua Watson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PIEZOELECTRIC TRANSDUCER HAVING OPTIMIZED CAPACITOR SHAPE
- Publication number 20210367135
- Publication date Nov 25, 2021
- RDA MICROELECTRONICS (SHANGHAI) CO., LTD.
- Duan Feng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING DAMPER STRUCTURES ON A MICROMECHANICAL WAFER
- Publication number 20210323810
- Publication date Oct 21, 2021
- ROBERT BOSCH GmbH
- Michael Stumber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPUTATION DEVICES AND ARTIFICIAL NEURONS BASED ON NANOELECTROMECH...
- Publication number 20210117756
- Publication date Apr 22, 2021
- Cornell University
- Amit Lal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS VIBRATOR AND MEMS OSCILLATOR
- Publication number 20200399120
- Publication date Dec 24, 2020
- Kaneka Corporation
- Junji Sone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR STRUCTURE COMPRISING MECHANICALLY PRELOADED SUSPENSION...
- Publication number 20200369513
- Publication date Nov 26, 2020
- Eric Hennes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION SENSOR WITH MONITORING FUNCTION AND VIBRATION SIGNAL MONI...
- Publication number 20200200593
- Publication date Jun 25, 2020
- Industrial Technology Research Institute
- YU-WEN HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPUTATION DEVICES AND ARTIFICIAL NEURONS BASED ON NANOELECTROMECH...
- Publication number 20180174021
- Publication date Jun 21, 2018
- Cornell University
- Amit Lal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPUTATION DEVICES AND ARTIFICIAL NEURONS BASED ON NANOELECTROMECH...
- Publication number 20180164432
- Publication date Jun 14, 2018
- Cornell University
- Amit Lal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATION SCHEME FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE...
- Publication number 20180029882
- Publication date Feb 1, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEGMENTED ELECTRODE STRUCTURE FOR QUADRATURE REDUCTION IN AN INTEGR...
- Publication number 20180017387
- Publication date Jan 18, 2018
- NXP USA, Inc.
- Thierry Cassagnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR SENSOR DEVICE
- Publication number 20180002164
- Publication date Jan 4, 2018
- Hitachi Automotive Systems, Ltd.
- Munenori DEGAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE AND METHOD OF FABRICATING THE SAME
- Publication number 20170362081
- Publication date Dec 21, 2017
- UNITED MICROELECTRONICS CORP.
- Meng-Jia Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE AND METHOD OF FABRICATING THE SAME
- Publication number 20170166441
- Publication date Jun 15, 2017
- UNITED MICROELECTRONICS CORP.
- Meng-Jia Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VERY LOW POWER MICROELECTROMECHANICAL DEVICES FOR THE INTERNET OF E...
- Publication number 20170148592
- Publication date May 25, 2017
- University of Utah Research Foundation
- Massood Tabib-Azir
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED SEMICONDUCTOR DEVICES WITH SINGLE CRYSTALLINE BEAM, METH...
- Publication number 20150344293
- Publication date Dec 3, 2015
- GLOBALFOUNDRIES Inc.
- David L. HARAME
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Vibration sensors

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Sensing module and manufacturing method thereof

Bone-conduction sensor assembly

Microelectromechanical system (MEMS) vibration sensor having a segm...

Computation devices and artificial neurons based on nanoelectromech...

Overload recovery optimization in microelectromechanical system app...

MEMS vibrator and MEMS oscillator

Method for producing damper structures on a micromechanical wafer

Seismic acquisition system and sensor based on MEMS sensor with low...

Acoustic transducer assembly

MEMS sensor structure comprising mechanically preloaded suspension...

Overload recovery optimization in microelectromechanical system app...

Vibration sensor with monitoring function and vibration signal moni...

Computation devices and artificial neurons based on nanoelectromech...

Vibration energy harvester

MEMS structure and method of fabricating the same

MEMS sensor structure comprising mechanically preloaded suspension...

Physical quantity detection device, electronic apparatus, and movin...

Segmented electrode structure for quadrature reduction in an integr...

Computation devices and artificial neurons based on nanoelectromech...

Electromechanical transducer and method for manufacturing the same...

MEMS structure and method of fabricating the same

Integrated semiconductor devices with single crystalline beam, meth...

Microphone element and device for detecting acoustic and ultrasound...

Functional element, electronic apparatus, and moving object

Physical quantity sensor and method of making the same

Electromechanical transducer and method for manufacturing the same...

Resonant transducer, manufacturing method therefor, and multi-layer...

Electronic device, method of manufacturing the same, and oscillator

Vibration transducer and its manufacturing method

Electromechanical transducer and method for manufacturing the same...

Patents Applicationslast 30 patents

ACOUSTIC DETECTION SYSTEM AND METHOD AND ASSOCIATED KINETIC ENERGY...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICA...

Micro-Electromechanical System

INTEGRATED DEVICE PACKAGE

Semiconductor Device

Semiconductor Device

MEMS DIE AND MEMS-BASED VIBRATION SENSOR

PIEZOELECTRIC SINGLE-CRYSTAL ELEMENT, MEMS DEVICE USING SAME, AND M...

SENSING MODULE AND MANUFACTURING METHOD THEREOF

Bone-conduction Sensor Assembly

Microelectromechanical System (MEMS) Vibration Sensor Having a Segm...

DEVICE, METHOD AND COMPUTER-READABLE RECORDING MEDIUM FOR DETECTING...

VIBRATION SENSOR

OVERLOAD RECOVERY OPTIMIZATION IN MICROELECTROMECHANICAL SYSTEM APP...

ACOUSTIC TRANSDUCER ASSEMBLY

MEMS PIEZOELECTRIC TRANSDUCER HAVING OPTIMIZED CAPACITOR SHAPE

METHOD FOR PRODUCING DAMPER STRUCTURES ON A MICROMECHANICAL WAFER

COMPUTATION DEVICES AND ARTIFICIAL NEURONS BASED ON NANOELECTROMECH...

MEMS VIBRATOR AND MEMS OSCILLATOR

MEMS SENSOR STRUCTURE COMPRISING MECHANICALLY PRELOADED SUSPENSION...

VIBRATION SENSOR WITH MONITORING FUNCTION AND VIBRATION SIGNAL MONI...

COMPUTATION DEVICES AND ARTIFICIAL NEURONS BASED ON NANOELECTROMECH...

COMPUTATION DEVICES AND ARTIFICIAL NEURONS BASED ON NANOELECTROMECH...

INTEGRATION SCHEME FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE...

SEGMENTED ELECTRODE STRUCTURE FOR QUADRATURE REDUCTION IN AN INTEGR...

SEMICONDUCTOR SENSOR DEVICE

MEMS STRUCTURE AND METHOD OF FABRICATING THE SAME

MEMS STRUCTURE AND METHOD OF FABRICATING THE SAME

VERY LOW POWER MICROELECTROMECHANICAL DEVICES FOR THE INTERNET OF E...

INTEGRATED SEMICONDUCTOR DEVICES WITH SINGLE CRYSTALLINE BEAM, METH...