Wet etching

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B81C2201/0133

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0133Wet etching

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor substrate, method for manufa...
- Patent number 12,187,607
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Nao Inoue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system and process of making it
- Patent number 12,180,065
- Issue date Dec 31, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Euan James Boyd
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 12,157,667
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 12,134,555
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system device using a metallic movable part...
- Patent number 12,122,665
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming monocrystalline nickel-titanium films on single c...
- Patent number 12,116,271
- Issue date Oct 15, 2024
- Arizona Board of Regents on behalf of Arizona State University
- Jagannathan Rajagopalan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing implantable electrodes and electrodes made...
- Patent number 12,098,069
- Issue date Sep 24, 2024
- Sangwoo Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon MEMS gyroscopes with upper and lower sense plates
- Patent number 12,092,460
- Issue date Sep 17, 2024
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Precision fabrication of nanosieves
- Patent number 12,042,770
- Issue date Jul 23, 2024
- International Business Machines Corporation
- Joshua T. Smith
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor integrated device with electrical contacts between st...
- Patent number 12,024,422
- Issue date Jul 2, 2024
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and preparation method therefor
- Patent number 12,022,270
- Issue date Jun 25, 2024
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Jiale Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bipolar transistor type MEMS pressure sensor and preparation method...
- Patent number 11,965,797
- Issue date Apr 23, 2024
- Wuxi Sencoch Semiconductor Co., Ltd.
- Tongqing Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for ablating or roughening wafer surfaces
- Patent number 11,958,739
- Issue date Apr 16, 2024
- University of Rhode Island Board of Trustees
- Jason Rodger Dwyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system (MEMS) structure and method of formation
- Patent number 11,953,674
- Issue date Apr 9, 2024
- Texas Instruments Incorporated
- Jose A. Martinez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
- Patent number 11,952,268
- Issue date Apr 9, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor transducer device with multilayer diaphragm and metho...
- Patent number 11,946,822
- Issue date Apr 2, 2024
- Sciosense B.V.
- Alessandro Faes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method with stealth dicing process for fabricating MEMS semiconduct...
- Patent number 11,939,216
- Issue date Mar 26, 2024
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for scanning MEMS cantilevers
- Patent number 11,912,566
- Issue date Feb 27, 2024
- Magic Leap, Inc.
- Steven Alexander-Boyd Hickman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
- Patent number 11,890,643
- Issue date Feb 6, 2024
- Vanguard International Semiconductor Corporation
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
- Patent number 11,851,320
- Issue date Dec 26, 2023
- The Johns Hopkins University
- Gi-Dong Sim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of fabricating micro electro-mechanical systems structures
- Patent number 11,845,654
- Issue date Dec 19, 2023
- The University of British Columbia
- Edmond Cretu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Package structure of micro speaker and method for forming the same
- Patent number 11,818,563
- Issue date Nov 14, 2023
- FORTEMEDIA, INC.
- Li-Jen Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of forming MEMS diaphragms including corrugations
- Patent number 11,787,688
- Issue date Oct 17, 2023
- Knowles Electronics, LLC
- Sung Bok Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Patterning method of film, microfluidic device and manufacturing me...
- Patent number 11,731,125
- Issue date Aug 22, 2023
- BEIJING BOE SENSOR TECHNOLOGY CO., LTD.
- Yue Geng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a membrane component and a membrane component
- Patent number 11,708,265
- Issue date Jul 25, 2023
- X-FAB Global Services GmbH
- Steffen Leopold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 11,667,517
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating semiconductor device
- Patent number 11,667,524
- Issue date Jun 6, 2023
- HYUNDAI KEFICO CORPORATION
- Jun Hwan Choi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for scanning MEMS cantilevers
- Patent number 11,661,335
- Issue date May 30, 2023
- Magic Leap, Inc.
- Steven Alexander-Boyd Hickman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Extended acid etch for oxide removal
- Patent number 11,655,146
- Issue date May 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hong-Ta Kuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for sensors on glass
- Patent number 11,608,265
- Issue date Mar 21, 2023
- Infineon Technologies AG
- Stephan Pindl
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO SYSTEM AND MANUFACTURING METHOD
- Publication number 20250042725
- Publication date Feb 6, 2025
- AUDIO PIXELS LTD.
- Dmitri LURIE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS
- Publication number 20250019224
- Publication date Jan 16, 2025
- BOE TECHNOLOGY GROUP CO., LTD.
- Jianxing LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...
- Publication number 20250019230
- Publication date Jan 16, 2025
- Jagannathan Rajagopalan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT
- Publication number 20240425367
- Publication date Dec 26, 2024
- NXP USA, Inc.
- Chayathorn Saklang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
- Publication number 20240425365
- Publication date Dec 26, 2024
- SENSONICS TRANSDUCERS PRIVATE LIMITED
- Brishbhan Singh PANWAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED PRESSURE DIAPHRAGMS
- Publication number 20240417243
- Publication date Dec 19, 2024
- Edwards Lifesciences Corporation
- Alexander H. Siemons
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...
- Publication number 20240359969
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
- Publication number 20240343558
- Publication date Oct 17, 2024
- Murata Manufacturing Co., Ltd.
- Petteri KILPINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR FABRICATION OF MEMS DEVICE
- Publication number 20240327206
- Publication date Oct 3, 2024
- Omnitron Sensors
- Trent Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SHEAR WAVE MODE PIEZOELECTRIC RESONATOR
- Publication number 20240278285
- Publication date Aug 22, 2024
- BIOMENSIO LTD
- Jyrki KAITILA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF M...
- Publication number 20240246812
- Publication date Jul 25, 2024
- University of Washington
- Bo Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
- Publication number 20240208805
- Publication date Jun 27, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO ELECTRO MECHANICAL SYSTEM PROBE AND MANUFACTURING METHOD THEREOF
- Publication number 20240174512
- Publication date May 30, 2024
- TAIWAN MASK CORPORATION
- SHANG-KUANG WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240158225
- Publication date May 16, 2024
- UNITED MICROELECTRONICS CORP.
- Jung-Hao Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROCHIPS FOR USE IN ELECTRON MICROSCOPES AND RELATED METHODS
- Publication number 20240120172
- Publication date Apr 11, 2024
- Northwestern University
- Vinayak P. Dravid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vibration-Driven Energy Harvesting Element and Method for Manufactu...
- Publication number 20240106357
- Publication date Mar 28, 2024
- Saginomiya Seisakusho, Inc.
- Noriko Shimomura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MIRROR DEVICE
- Publication number 20240092634
- Publication date Mar 21, 2024
- Hamamatsu Photonics K.K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
- Publication number 20240067520
- Publication date Feb 29, 2024
- INFINEON TECHNOLOGIES AG
- Fabian Streb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MEMS DEVICE AND MEMS DEVICE
- Publication number 20240051819
- Publication date Feb 15, 2024
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Ping-He Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device and Method for Manufacturing a MEMS Device
- Publication number 20240017986
- Publication date Jan 18, 2024
- INFINEON TECHNOLOGIES AG
- Stefan Barzen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE COMPRISING A DEFORMABLE STRUCTURE AND MANUFACTURING PRO...
- Publication number 20240010489
- Publication date Jan 11, 2024
- STMicroelectronics S.r.l.
- Manuel RIANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A Method of Manufacturing a MEMS Device
- Publication number 20230416080
- Publication date Dec 28, 2023
- Cytosurge AG
- Edin SARAJLIC
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR
- Publication number 20230399754
- Publication date Dec 14, 2023
- Entegris, Inc.
- Daniela White
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A Method of Manufacturing a Micro-Fluid Probe
- Publication number 20230391613
- Publication date Dec 7, 2023
- CYTOSURGE AG
- Edin Sarajlic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING T...
- Publication number 20230382715
- Publication date Nov 30, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Samer DAGHER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230382714
- Publication date Nov 30, 2023
- DB HITEK CO., LTD.
- Min Hyun JUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microp...
- Publication number 20230357000
- Publication date Nov 9, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
- Publication number 20230278856
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EXTENDED ACID ETCH FOR OXIDE REMOVAL
- Publication number 20230264949
- Publication date Aug 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hong-Ta KUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A LOW-NOISE ELECTROACOUSTIC TRANSDUCER
- Publication number 20230247372
- Publication date Aug 3, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Samer DAGHER
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Wet etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing semiconductor substrate, method for manufa...

Microelectromechanical system and process of making it

Anti-stiction process for MEMS device

Method and structure for CMOS-MEMS thin film encapsulation

Micro-electromechanical system device using a metallic movable part...

Method of forming monocrystalline nickel-titanium films on single c...

Method for manufacturing implantable electrodes and electrodes made...

Silicon MEMS gyroscopes with upper and lower sense plates

Precision fabrication of nanosieves

Semiconductor integrated device with electrical contacts between st...

MEMS microphone and preparation method therefor

Bipolar transistor type MEMS pressure sensor and preparation method...

Method for ablating or roughening wafer surfaces

Microelectromechanical system (MEMS) structure and method of formation

Engineered substrates, free-standing semiconductor microstructures,...

Semiconductor transducer device with multilayer diaphragm and metho...

Method with stealth dicing process for fabricating MEMS semiconduct...

Method and system for scanning MEMS cantilevers

Piezoelectric micromachined ultrasonic transducer and method of fab...

Method of depositing nanotwinned nickel-molybdenum-tungsten alloys

Methods of fabricating micro electro-mechanical systems structures

Package structure of micro speaker and method for forming the same

Methods of forming MEMS diaphragms including corrugations

Patterning method of film, microfluidic device and manufacturing me...

Method for manufacturing a membrane component and a membrane component

Method and structure for CMOS-MEMS thin film encapsulation

Method for fabricating semiconductor device

Method and system for scanning MEMS cantilevers

Extended acid etch for oxide removal

Method and structure for sensors on glass

Patents Applicationslast 30 patents

MICRO SYSTEM AND MANUFACTURING METHOD

MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS

MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...

DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...

INTEGRATED PRESSURE DIAPHRAGMS

MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...

DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE

METHODS FOR FABRICATION OF MEMS DEVICE

SHEAR WAVE MODE PIEZOELECTRIC RESONATOR

ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF M...

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...

MICRO ELECTRO MECHANICAL SYSTEM PROBE AND MANUFACTURING METHOD THEREOF

MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME

MICROCHIPS FOR USE IN ELECTRON MICROSCOPES AND RELATED METHODS

Vibration-Driven Energy Harvesting Element and Method for Manufactu...

METHOD FOR MANUFACTURING MIRROR DEVICE

ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE

METHOD FOR MANUFACTURING MEMS DEVICE AND MEMS DEVICE

MEMS Device and Method for Manufacturing a MEMS Device

MEMS DEVICE COMPRISING A DEFORMABLE STRUCTURE AND MANUFACTURING PRO...

A Method of Manufacturing a MEMS Device

CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR

A Method of Manufacturing a Micro-Fluid Probe

LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING T...

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microp...

Method and Structure for CMOS-MEMS Thin Film Encapsulation

EXTENDED ACID ETCH FOR OXIDE REMOVAL

METHOD FOR MANUFACTURING A LOW-NOISE ELECTROACOUSTIC TRANSDUCER