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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
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B81C2201/0133
Wet etching
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Patents Grants
last 30 patents
Information
Patent Grant
Bipolar transistor type MEMS pressure sensor and preparation method...
Patent number
11,965,797
Issue date
Apr 23, 2024
Wuxi Sencoch Semiconductor Co., Ltd.
Tongqing Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for ablating or roughening wafer surfaces
Patent number
11,958,739
Issue date
Apr 16, 2024
University of Rhode Island Board of Trustees
Jason Rodger Dwyer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system (MEMS) structure and method of formation
Patent number
11,953,674
Issue date
Apr 9, 2024
Texas Instruments Incorporated
Jose A. Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
Patent number
11,952,268
Issue date
Apr 9, 2024
Lawrence Semiconductor Research Laboratory, Inc.
Chantal Arena
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor transducer device with multilayer diaphragm and metho...
Patent number
11,946,822
Issue date
Apr 2, 2024
Sciosense B.V.
Alessandro Faes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method with stealth dicing process for fabricating MEMS semiconduct...
Patent number
11,939,216
Issue date
Mar 26, 2024
Infineon Technologies AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for scanning MEMS cantilevers
Patent number
11,912,566
Issue date
Feb 27, 2024
Magic Leap, Inc.
Steven Alexander-Boyd Hickman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
Patent number
11,890,643
Issue date
Feb 6, 2024
Vanguard International Semiconductor Corporation
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
Patent number
11,851,320
Issue date
Dec 26, 2023
The Johns Hopkins University
Gi-Dong Sim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of fabricating micro electro-mechanical systems structures
Patent number
11,845,654
Issue date
Dec 19, 2023
The University of British Columbia
Edmond Cretu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Package structure of micro speaker and method for forming the same
Patent number
11,818,563
Issue date
Nov 14, 2023
FORTEMEDIA, INC.
Li-Jen Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of forming MEMS diaphragms including corrugations
Patent number
11,787,688
Issue date
Oct 17, 2023
Knowles Electronics, LLC
Sung Bok Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Patterning method of film, microfluidic device and manufacturing me...
Patent number
11,731,125
Issue date
Aug 22, 2023
BEIJING BOE SENSOR TECHNOLOGY CO., LTD.
Yue Geng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a membrane component and a membrane component
Patent number
11,708,265
Issue date
Jul 25, 2023
X-FAB Global Services GmbH
Steffen Leopold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
Patent number
11,667,517
Issue date
Jun 6, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for fabricating semiconductor device
Patent number
11,667,524
Issue date
Jun 6, 2023
HYUNDAI KEFICO CORPORATION
Jun Hwan Choi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for scanning MEMS cantilevers
Patent number
11,661,335
Issue date
May 30, 2023
Magic Leap, Inc.
Steven Alexander-Boyd Hickman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Extended acid etch for oxide removal
Patent number
11,655,146
Issue date
May 23, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Hong-Ta Kuo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and structure for sensors on glass
Patent number
11,608,265
Issue date
Mar 21, 2023
Infineon Technologies AG
Stephan Pindl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a plurality of resonators
Patent number
11,584,639
Issue date
Feb 21, 2023
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Bruno Fain
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for fabricating silicon MEMS gyroscopes with upper and lowe...
Patent number
11,530,917
Issue date
Dec 20, 2022
The Charles Stark Draper Laboratory, Inc.
Eugene H. Cook
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual back-plate and diaphragm microphone
Patent number
11,533,565
Issue date
Dec 20, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing micromechanical structures in a device wafer
Patent number
11,524,893
Issue date
Dec 13, 2022
Murata Manufacturing Co., Ltd.
Hidetoshi Fujii
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of texturing semiconductor substrate, semiconductor substrat...
Patent number
11,527,673
Issue date
Dec 13, 2022
Korea Institute of Science and Technology
Doh Kwon Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a microelectronic device comprising a memb...
Patent number
11,511,990
Issue date
Nov 29, 2022
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Mathilde Cartier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducer and method of fab...
Patent number
11,498,097
Issue date
Nov 15, 2022
Vanguard International Semiconductor Corporation
Rakesh Kumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical electroacoustic transducer with piezoelectri...
Patent number
11,418,888
Issue date
Aug 16, 2022
STMicroelectronics S.r.l.
Fabrizio Cerini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bonding pad layer system, gas sensor and method for manufacturing a...
Patent number
11,407,635
Issue date
Aug 9, 2022
Robert Bosch GmbH
Andreas Scheurle
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for uniform target erosion magnetic assemblies
Patent number
11,390,520
Issue date
Jul 19, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chen-Fang Chung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing microstructures
Patent number
11,383,972
Issue date
Jul 12, 2022
LPKF Laser & Electronics AG
Roman Ostholt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20240158225
Publication date
May 16, 2024
UNITED MICROELECTRONICS CORP.
Jung-Hao Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROCHIPS FOR USE IN ELECTRON MICROSCOPES AND RELATED METHODS
Publication number
20240120172
Publication date
Apr 11, 2024
Northwestern University
Vinayak P. Dravid
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Vibration-Driven Energy Harvesting Element and Method for Manufactu...
Publication number
20240106357
Publication date
Mar 28, 2024
Saginomiya Seisakusho, Inc.
Noriko Shimomura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MIRROR DEVICE
Publication number
20240092634
Publication date
Mar 21, 2024
Hamamatsu Photonics K.K.
Daiki SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
Publication number
20240067520
Publication date
Feb 29, 2024
INFINEON TECHNOLOGIES AG
Fabian Streb
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MEMS DEVICE AND MEMS DEVICE
Publication number
20240051819
Publication date
Feb 15, 2024
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
Ping-He Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device and Method for Manufacturing a MEMS Device
Publication number
20240017986
Publication date
Jan 18, 2024
INFINEON TECHNOLOGIES AG
Stefan Barzen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE COMPRISING A DEFORMABLE STRUCTURE AND MANUFACTURING PRO...
Publication number
20240010489
Publication date
Jan 11, 2024
STMicroelectronics S.r.l.
Manuel RIANI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A Method of Manufacturing a MEMS Device
Publication number
20230416080
Publication date
Dec 28, 2023
Cytosurge AG
Edin SARAJLIC
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CLEANING COMPOSITION WITH MOLYBDENUM ETCHING INHIBITOR
Publication number
20230399754
Publication date
Dec 14, 2023
Entegris, Inc.
Daniela White
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A Method of Manufacturing a Micro-Fluid Probe
Publication number
20230391613
Publication date
Dec 7, 2023
CYTOSURGE AG
Edin Sarajlic
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LOW NOISE ELECTROACOUSTIC TRANSDUCER AND METHOD FOR MANUFACTURING T...
Publication number
20230382715
Publication date
Nov 30, 2023
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Samer DAGHER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
Publication number
20230382714
Publication date
Nov 30, 2023
DB HITEK CO., LTD.
Min Hyun JUNG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microp...
Publication number
20230357000
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
Publication number
20230278856
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
EXTENDED ACID ETCH FOR OXIDE REMOVAL
Publication number
20230264949
Publication date
Aug 24, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hong-Ta KUO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A LOW-NOISE ELECTROACOUSTIC TRANSDUCER
Publication number
20230247372
Publication date
Aug 3, 2023
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Samer DAGHER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGE STRUCTURE OF MICRO SPEAKER AND METHOD FOR FORMING THE SAME
Publication number
20230239628
Publication date
Jul 27, 2023
Fortemedia, Inc.
Li-Jen CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A DETECTION DEVICE COMPRISING A PERIPHERAL...
Publication number
20230213389
Publication date
Jul 6, 2023
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Geoffroy DUMONT
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES
Publication number
20230192480
Publication date
Jun 22, 2023
Murata Manufacturing Co., Ltd.
Altti TORKKELI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING IMPLANTABLE ELECTRODES AND ELECTRODES MADE...
Publication number
20230174372
Publication date
Jun 8, 2023
Sangwoo Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF LIQUID-MEDIATED PATTERN TRANSFER AND DEVICE STRUCTURE FOR...
Publication number
20230166965
Publication date
Jun 1, 2023
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
Seok KIM
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Manufacturing a Microfluidic Device
Publication number
20230127645
Publication date
Apr 27, 2023
IMEC vzw
Simone Severi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME
Publication number
20230127991
Publication date
Apr 27, 2023
WEMEMS CO.,LTD.
Jonghyun LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COVER FOR AN INFRARED DETECTOR AND A METHOD OF FABRICATING A COVER...
Publication number
20230084280
Publication date
Mar 16, 2023
Meridian Innovation Pte Ltd
Xintong ZHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS FOR FABRICATING SILICON MEMS GYROSCOPES WITH UPPER AND LOWE...
Publication number
20230076161
Publication date
Mar 9, 2023
The Charles Stark Draper Laboratory, Inc.
Eugene H. Cook
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...
Publication number
20230066841
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company Limited
Tao-Cheng LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING AN INTEGRATED SYSTEM INCLUDING A CAPACITIV...
Publication number
20230061430
Publication date
Mar 2, 2023
STMicroelectronics S.r.l.
Paolo FERRARI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...
Publication number
20230052052
Publication date
Feb 16, 2023
Jagannathan Rajagopalan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROSTATICALLY GATED NANOFLUIDIC MEMBRANES FOR CONTROL OF MOLECU...
Publication number
20230043407
Publication date
Feb 9, 2023
The Methodist Hospital System
Alessandro Grattoni
B81 - MICRO-STRUCTURAL TECHNOLOGY