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CPC
B81C1/00023
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Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
Current Industry
B81C1/00023
without movable or flexible elements
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Patents Grants
last 30 patents
Information
Patent Grant
Micro fluid actuator
Patent number
11,085,554
Issue date
Aug 10, 2021
Microjet Technology Co., Ltd.
Hao-Jan Mou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS capacitive pressure sensors
Patent number
9,738,508
Issue date
Aug 22, 2017
Semiconductor Manufacturing International (Shanghai) Corporation
Zhongshan Hong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS capacitive pressure sensors and fabrication method thereof
Patent number
9,206,030
Issue date
Dec 8, 2015
Semiconductor Manufacturing International (Shanghai) Corporation
Zhongshan Hong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical sensor for measuring a force, and correspond...
Patent number
9,021,898
Issue date
May 5, 2015
Robert Bosch GmbH
Tino Fuchs
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
PROGRESSIVE METALLIC SURFACE MICRO-NANO MODIFICATION METHOD
Publication number
20220063992
Publication date
Mar 3, 2022
NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS
Hongyu WEI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO FLUID ACTUATOR
Publication number
20200224791
Publication date
Jul 16, 2020
Microjet Technology Co., Ltd.
Hao-Jan Mou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SENSOR FOR MEASURING A FORCE, AND CORRESPOND...
Publication number
20130319138
Publication date
Dec 5, 2013
ROBERT BOSCH GmbH
Tino Fuchs
B81 - MICRO-STRUCTURAL TECHNOLOGY