3409529

Information

• Patent Grant
• 3409529

• References
• Source

• Patent Number

  3,409,529

• Date Filed

  Not available

• Date Issued

  Tuesday, November 5, 1968
  56 years ago

• CPC

  • H01J37/3053 - for evaporating or etching
  • C23C14/46 - by ion beam produced by an external ion source
  • H01J27/10 - Duoplasmatrons
  • H01J37/08 - Ion sources Ion guns
  • H01J37/18 - Vacuum locks; Means for obtaining or maintaining the desired pressure within the vessel
  • Y10S422/906 - Plasma or ion generation means

• US Classifications

  • 204 - Chemistry: electrical and wave energy
  • 250 - Radiant energy
  • 313 - Electric lamp and discharge devices
  • 373 - Industrial electric heating furnaces
  • 422 - Chemical apparatus and process disinfecting, deodorizing, preserving, or sterilizing