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3582330
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Information
Patent Grant
3582330
References
Source
Patent Number
3,582,330
Date Filed
Not available
Date Issued
Tuesday, June 1, 1971
54 years ago
CPC
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/308 - using masks
Y10S148/102 - Mask alignment
Y10S148/106 - Masks, special
Y10S430/152 - Making camera copy
Y10S438/942 - Masking
US Classifications
438 - Semiconductor device manufacturing: process
148 - Metal treatment
430 - Radiation imagery chemistry: process, composition, or product thereof
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